Name: preparation of silicon nanowire field-effect transistor for chemical and biosensing applications
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This research was financially supported by Ministry of Science and Technology, Taiwan (104-2514-S-009 -001, 104-2627-M-009-001 and 102-2311-B-009-004-MY3). We thank the National Nano Device Laboratories (NDL) for its valuable assistance during device fabrication and analysis.

1. Realizzazione e conservazione dei dispositivi pSNWFET <ol><li> fabbricazione di dispositivi Nota: Il pSNWFET è stato fabbricato utilizzando una tecnica parete laterale distanziale come precedentemente riportato 23,24. <ol><li> Preparare lo strato dielettrico di gate. <ol><li> Cap un ossido 100 nm di spessore termica (SiO 2) strato su un substrato di Si tramite (gas di processo O 2 e H 2 a 980 ° C per 4 ore) bagnato processo di ossidazione 25...

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Commercializzazione del top-down e bottom-up fabbricazione approcci per sSNWFETs è considerato difficile a causa del suo costo 32,33, SNW controllo di posizione 34,35, e la sua bassa produzione di scala 36. Al contrario, la fabbricazione pSNWFETs è semplice e di basso costo 37. Attraverso l&#39;approccio top-down e la combinazione con la tecnica di formazione laterale distanziale (figura 1), la dimensione del SNW può essere controllata regolando la durata d...

transistor ad effetto di campo Silicon nanowire (SNWFETs) presentano i vantaggi di ultra-elevata sensibilità e risposte elettriche scalo a variazione tassa ambientale. In tipo n SNWFETs per esempio, quando una molecola negativo (o positivo) addebitato avvicina alla nanowire silicio (SNW), i vettori nel SNW sono esauriti (o accumulano). Di conseguenza, la conduttività della SNWFET diminuisce (o aumenta) 1. Pertanto, qualsiasi molecola carica vicino alla superficie SNW del dispositivo SNWFET può essere rilevato. biomolecole vitali tra cui enzimi, proteine, nucleotidi, e molte molecole sulla superficie cellulare sono portatori di carica e possono essere monitorati utilizzando SNWFETs. Con opportune modifiche, in particolare immobilizzanti una sonda biomolecolare sul SNW, un SNWFET può essere sviluppato in un biosensore senza etichetta. Sorveglianza utilizzando biomarcatori è fondamentale per la diagnosi delle malattie. Come mostrato nella Tabella 1, diversi studi hanno utilizzato NWFEBiosensori T-based per label-free, ultra-alta sensibilità, e la rilevazione in tempo reale dei vari bersagli biologici, tra cui un singolo virus 2, adenosina trifosfato e chinasi vincolante 3, i segnali neuronali 4, ioni metallici 5,6, tossine batteriche 7, 8 della dopamina, DNA 9-11, RNA 12,13, enzimi e biomarcatori tumorali 14-19, ormoni umani 20, e citochine 21,22. Questi studi hanno dimostrato che biosensori basati NWFET rappresentano una piattaforma di rilevazione potente per una vasta gamma di specie chimiche e biologiche in una soluzione. In biosensori basati SNWFET, la sonda immobilizzata sulla superficie SNW del dispositivo riconosce una biotarget specifico. Immobilizzare un Bioprobe solito comporta una serie di passaggi, ed è fondamentale che ogni passo viene eseguito correttamente per garantire il corretto funzionamento del biosensore. Varie tecniche sono state sviluppate per analizzare le sComposizione urface, compresi raggi X spettroscopia fotoelettronica (XPS), ellissometria, misura dell&#39;angolo di contatto, microscopia a forza atomica (AFM) e microscopia elettronica a scansione (SEM). Metodi come AFM e SEM forniscono prove dirette di Bioprobe immobilizzazione sul dispositivo nanofilo, mentre i metodi, come XPS, ellissometria, e la misurazione dell&#39;angolo di contatto dipendono esperimenti paralleli condotti su altri materiali simili. In questo rapporto, descriviamo la conferma di ogni fase di modifica utilizzando due metodi indipendenti. XPS viene usato per esaminare le concentrazioni di atomi specifici su wafer di silicio policristallino, e variazioni nelle proprietà elettriche del dispositivo sono misurate direttamente per confermare la variazione di carica sulla superficie SNW. Impieghiamo biosensing DNA utilizzando SNWFETs policristallini (pSNWFETs) come un esempio per illustrare questo protocollo. Immobilizzare una sonda di DNA sulla superficie SNW comporta tre fasi: ammina modifica gruppo ossidrile sulla superficie nativa del SNW, almodifica gruppo deide, e 5&#39;-aminomodified immobilizzazione della sonda di DNA. Ad ogni fase di modifica, il dispositivo può rilevare direttamente la variazione della carica del gruppo funzionale immobilizzato sulla superficie SNW, perché le cariche superficiali causano variazioni potenziali interfacciali locali oltre il dielettrico di gate che alterano la corrente del canale e conduttanza 1. Spese che circondano la superficie SNW può modulare elettricamente le proprietà elettriche del dispositivo pSNWFET; Pertanto, le proprietà superficiali del SNW giocano un ruolo cruciale nel determinare le caratteristiche elettriche dei dispositivi pSNWFET. Nelle procedure riportate, l&#39;immobilizzazione di un Bioprobe sulla superficie SNW può essere determinata direttamente e confermata attraverso la misurazione elettrica, e il dispositivo è predisposto per applicazioni biosensori.

<table border="0" cellpadding="0" cellspacing="0" width="862">
	<tbody>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Acetone</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">AH-3102</td>
			<td style="width:167px;"></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">(3-Amonopropyl)triethoxysilane (APTES), &#8805;98%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">A3648</td>
			<td>Danger</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ethanol, anhydrous, 99.5%</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">484000203108A-72EC</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Glutaraldehyde solution (GA), 50%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">G7651</td>
			<td>Avoid light</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Sodium cyanoborohydride, &#8805;95.0%&#160;</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">71435</td>
			<td>Danger and deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Sodium phosphate tribasic dodecahydrate, &#8805;98%</td>
			<td style="width:191px;">Sigma</td>
			<td style="width:179px;">04277</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Phosphoric acid, &#8805;99.0%</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">79622</td>
			<td>Deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;">Photoresist (iP3650)</td>
			<td style="width:191px;">Tokyo Ohka Kogyo Co., LTD</td>
			<td style="width:179px;">THMR-iP3650 HP</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Synthetic oligonucleotides, HPLC purified</td>
			<td style="width:191px;">Protech Technology</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Tris(hydroxymethyl)aminomethane (Tris), &#8805;99.8%</td>
			<td style="width:191px;">USB</td>
			<td style="width:179px;">75825</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Keithley 2636 System SourceMeter</td>
			<td style="width:191px;">Keithley</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR830 DSP Lock-In Amplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR570 Low-noise Current Preamplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ni PXI Express</td>
			<td style="width:191px;">National Instruments</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
	</tbody>
</table>

preparation of silicon nanowire field-effect transistor for chemical and biosensing applications

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we describe the preparation of polycrystalline silicon nanowire field-effect transistors (pSNWFETs) that serve as biosensing devices for biomarker detection. A protocol for chemical and biomolecular sensing by using pSNWFETs is presented. The pSNWFET device was demonstrated to be a promising transducer for real-time, label-free, and ultra-high-sensitivity biosensing applications. The source/drain channel conductivity of a pSNWFET is sensitive to changes in the environment around its silicon nanowire (SNW) surface. Thus, by immobilizing probes on the SNW surface, the pSNWFET can be used to detect various biotargets ranging from small molecules (dopamine) to macromolecules (DNA and proteins). Immobilizing a bioprobe on the SNW surface, which is a multistep procedure, is vital for determining the specificity of the biosensor. It is essential that every step of the immobilization procedure is correctly performed. We verified surface modifications by directly observing the shift in the electric properties of the pSNWFET following each modification step. Additionally, X-ray photoelectron spectroscopy was used to examine the surface composition following each modification. Finally, we demonstrated DNA sensing on the pSNWFET. This protocol provides step-by-step procedures for verifying bioprobe immobilization and subsequent DNA biosensing application.

Vari SNWFETs sono stati segnalati per servire come trasduttori di biosensori (Tabella 1). SNWFETs Single-cristallini (sSNWFETs) e pSNWFETs mostrano proprietà elettriche comparabili come trasduttori in soluzione acquosa, ed entrambi sono stati segnalati per avere molte applicazioni biosensori. Una caratteristica vantaggiosa del dispositivo pSNWFET utilizzato in questo studio è la sua procedura semplice e di fabbricazione a basso costo. Figura 1a mostra ...

Watch this Scientific Journal Video about Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications at JoVE.com

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications

We describe key steps for biosensing by using polysilicon nanowire field-effect transistors, including the preparation of the device and the immobilization and confirmation of a DNA molecular probe on the nanowire surface, as well as conditions for DNA sensing.

Preparazione della Silicon Nanowire effetto di campo transistor per l&#39;industria chimica e biosensing Applicazioni

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we ...

The overall goal of this protocol is to verify bioprobe immobilization and subsequent DNA biosensing on polysilicon nanowire field-effect transistors. This method can help answer important questions in the bioelectric sensing field, such as bioprobe immobilization and nucleic acid detection. Our biosensing device is a promising transistor for real-time, labor-free, and also high-sensitivity biosensing application.The implications of these biosensors extend toward clinical diagnosis of emerging infectious disease, because it can readily, sensitively, and accurately detect the specific bio-target. Though this method can provide insight into nucleic acid detection, it can also be applied to detection of other molecules, such as cytokines, hormones, proteins, and viruses. Generally, individuals new to this method will struggle because it requires interdisciplinary collaboration between biology and the electrical engineering fields.The preparation of the polycrystalline silicon nanowire field-effect transistor is covered by the text protocol. The device is formed from a six-inch wafer. The silicon nanowires on the device are about 100 nanometers wide and 1.6 microns long.To pre-treat the device, first remove it from storage in an electronically dry cabinet and open the sealed vacuum bag that contains it. Clean the biosensor in a Sonicator loaded with pure acetone for 10 minutes. Then, change the bath to pure ethanol and repeat the sonication for another five minutes.After this second bath, use a stream of nitrogen gas to dry the device. Next, treat the device with oxygen plasma at 18 watts for 30 seconds. Now take AC conductance measurements and measure the drain current electric properties on the device, as explained in the next section.Then, proceed with immobilizing DNA on the device surface while taking additional measurements, both AC conductance and drain current, after each modification. First, prepare for the pH profiling. Make 10 millimolar sodium phosphate tribasic dodecahydrate in deionized water, which has a pH of 11.6.Then, make a 10 millimolar phosphoric acid solution in deionized water, which has a pH of 2.35. Now make seven 10 millimolar buffer solutions with pH values ranging from three to nine by mixing the two stock solutions. With the test solutions and microfluidic channel prepared, measure real-time conductance using a lock-in technique.Place two needle probes on each of the source and drain pads. Convert the AC current signal into an AC voltage signal using a low-noise current preamplifier. Then set the optimal liquid gate voltage and proceed with delivering each buffer solution while measuring conductance at a drain voltage of 10 millivolts.Next, measure the drain current with neutral buffer. Flow pH 7 buffer onto the device from a syringe pump at five milliliters per hour. Then, using commercial semiconductor analysis software, measure the drain current in N MOSFET mode.Set the bias voltage to 0.5 volts and sweep the gate potential from negative one to three volts at 0.2-volt intervals. Now run the test and obtain the data. Begin with immersing the biosensor in 2%APTES in ethanol for 30 minutes to covalently link the nanowire surface.Then wash the biosensor three times for 30 seconds with ethanol, and then clean it in a Sonicator loaded with ethanol. Now, to create amine groups on the silicon nanowires, place the biosensor on a 120-degree Celsius surface for 10 minutes. Following the heating step, take measurements on the device as described in the previous section.Next, to create aldehyde groups on the silicon nanowires, immerse the device in 12.5%glutaraldehyde in 10 millimolar sodium phosphate pH 7 for one hour at room temperature. Limit any light exposure during this step. After the glutaraldehyde treatment, wash the device with 10 millimolar sodium phosphate buffer three times for 30 seconds per wash.Then blowdry the biosensor under pure nitrogen gas and take measurements to confirm the surface modification. The next step is to incubate the biosensor in one micromolar of probe solution overnight to thus apply the DNA probe. The following day, block the unreacted aldehyde groups by immersing the device in 10 millimolar Tris with four millimolar sodium cyanoborohydride for half an hour.Then wash the device off with 10 millimolar sodium phosphate buffer at pH 7 three times, followed by blowdrying the device under nitrogen gas, as before. Then take a final set of measurements to confirm the surface modification before proceeding to use it as a biosensor. Begin with taking a baseline measurement.Flow pH neutral sodium phosphate buffer into the device for 10 minutes. During this procedure, the solution flow rate is always five milliliters per hour. Then wait 30 minutes, flow pH neutral buffer over the biosensor for 10 minutes again, and measure the current of the device.Next, load 10 picomoles of DNA, complementary to the probe, onto the silicon nanowire surface by flowing the solution over the device for 10 minutes. Then incubate the biosensor for 30 minutes. As a negative control, apply 100 picomoles of non-complementary DNA to the device.After the incubation, flow pH neutral buffer over the biosensor for 10 minutes to wash off unbound target DNA. Following this step, measure the current of the device as before. Next, load one nanomolar of recovery DNA onto the DNA probe immobilized silicon nanowire surface for 10 minutes.Then incubate the biosensor for 30 minutes, as before. Finally, flow pH neutral buffer over the device for another 10 minutes, and then take current measurements once again. A DNA probe was immobilized on the silicon oxide surface and each modification step was confirmed using X-ray photoelectron spectroscopy.For the unmodified pSNWFET containing the native oxide layer on the SNW surface, the hydroxyl groups were ionized to form charged groups with increasing pH values. Conductance likely varied at different pHs. The shift in the electric properties of the device after different modifications confirms the change in the wire surface.In such experiments, the current voltage curve of the unmodified device was used as the baseline. After the device was immersed in APTES, the current voltage curve of the device shifted to the left because of the positive charge on the wire surface. After conjugating glutaraldehyde to the APTES modified device, the current voltage curve shifted back to the right because of neutrally-charged MI bond formation.Finally, a five prime amine-modified DNA probe was introduced to bind to the APTES glutaraldehyde-modified device. The backbone of the DNA caused the current voltage curve to shift to the far right. After watching this video, you should have a good understanding of how to confirm the bioprobe immobilization and DNA sensing application on polysilicon nanowire field-effect transistors.Once mastered, this technique of the preparation for nucleic acid detection can be done within one hour, if it is performed properly, which can be performed in advance. The final biosensing takes less than 10 minutes. While attempting this procedure, it's important to remember to analyze the electric properties of the device at each step of the bioprobe modification.This technique paved the way for researchers in the field of semiconductor-based sensors to its broader application of biosensing. Following these procedures, other methods like immobilizing cancer biomarker probe, can be performed in order to answer additional questions in fields such as clinical cancer diagnosis.

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