Name: preparation of silicon nanowire field-effect transistor for chemical and biosensing applications
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This research was financially supported by Ministry of Science and Technology, Taiwan (104-2514-S-009 -001, 104-2627-M-009-001 and 102-2311-B-009-004-MY3). We thank the National Nano Device Laboratories (NDL) for its valuable assistance during device fabrication and analysis.

1. La fabricación y conservación de los dispositivos pSNWFET <ol><li> la fabricación de dispositivos Nota: El pSNWFET se fabricó usando una técnica de pared lateral espaciador como se informó anteriormente 23,24. <ol><li> Preparar la capa de dieléctrico de la compuerta. <ol><li> Coronar un óxido de 100 nm de espesor térmico (SiO2) capa sobre un sustrato de Si mediante el uso de la (gas de proceso O2 y H2 a 980 ° C durante 4 h) proceso de oxi...

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La comercialización de la de arriba hacia abajo y de abajo hacia arriba fabricación enfoques para sSNWFETs se considera difícil debido a su coste de 32,33, 34,35 SNW control de posición, y su baja escala de producción 36. Por el contrario, la fabricación de pSNWFETs es simple y de bajo costo 37. A través de la aproximación de arriba hacia abajo y la combinación con la técnica de formación de pared lateral espaciador (Figura 1), el tamaño de la SNW ...

Silicio de nanocables transistores de efecto de campo (SNWFETs) tienen las ventajas de ultra-alta sensibilidad y respuestas eléctricas directos a la variación de carga del medio ambiente. En SNWFETs de tipo n, por ejemplo, cuando una molécula negativamente (o positivamente) cargado se acerca al nanocable de silicio (SNW), los portadores en el SNW se agotan (o se acumulan). En consecuencia, la conductividad de la SNWFET disminuye (o aumenta) 1. Por lo tanto, cualquier molécula cargada cerca de la superficie del dispositivo de SNW SNWFET puede ser detectado. biomoléculas vitales incluyendo enzimas, proteínas, nucleótidos, y muchas moléculas en la superficie celular son los portadores de carga y pueden ser monitorizados utilizando SNWFETs. Con las modificaciones adecuadas, en particular la inmovilización de una sonda biomolecular en la PN, un SNWFET puede ser convertido en un biosensor libre de etiquetas. Vigilancia a través de biomarcadores es fundamental para el diagnóstico de enfermedades. Como se muestra en la Tabla 1, varios estudios han utilizado NWFEBiosensores basados-T para etiqueta libre, ultra-alta sensibilidad, y la detección en tiempo real de diversos objetivos biológicos, incluyendo un solo virus 2, trifosfato de adenosina y quinasa de unión 3, señales neuronales 4, iones metálicos 5,6, toxinas bacterianas 7, 8 de la dopamina, 9-11 de ADN, ARN 12,13, enzimas y biomarcadores de cáncer de 14-19, hormonas humanas, 20 y citoquinas 21,22. Estos estudios han demostrado que los biosensores basados ​​en NWFET representan una potente plataforma de detección para una amplia gama de especies biológicas y químicas en una solución. En los biosensores basados ​​en SNWFET, la sonda inmovilizada sobre la superficie SNW del dispositivo reconoce un biotarget específico. Inmovilizar un biosonda por lo general implica una serie de pasos, y es fundamental que cada paso se lleva a cabo adecuadamente para garantizar el correcto funcionamiento del biosensor. Varias técnicas se han desarrollado para el análisis de los scomposición urface, incluyendo espectroscopía de rayos X de fotoelectrones (XPS), elipsometría, la medición del ángulo de contacto, microscopía de fuerza atómica (AFM), y microscopía electrónica de barrido (SEM). Métodos tales como AFM y SEM proporcionan una evidencia directa de inmovilización biosonda en el dispositivo de nanocables, mientras que los métodos tales como XPS, elipsometría, y la medición del ángulo de contacto dependen de experimentos paralelos realizados en otros materiales similares. En este informe, se describe la confirmación de cada etapa de modificación mediante el uso de dos métodos independientes. XPS se utiliza para examinar las concentraciones de átomos específicos sobre obleas de polisilicio, y las variaciones en las propiedades eléctricas del dispositivo se mide directamente para confirmar la variación de carga en la superficie SNW. Empleamos los biosensores de ADN mediante el uso de SNWFETs policristalinas (pSNWFETs) como un ejemplo para ilustrar este protocolo. La inmovilización de una sonda de ADN en la superficie SNW consta de tres pasos: modificación del grupo amino en la superficie hidroxilo nativo de la PN, colmodificación del grupo dehído, y 5&#39;-aminomodified inmovilización de la sonda de ADN. En cada etapa de modificación, el dispositivo puede detectar directamente la variación de la carga del grupo funcional inmovilizado en la superficie SNW, debido a que las cargas de superficie provocan cambios potenciales interfaciales locales sobre el dieléctrico de la compuerta que alteran la corriente de canal y la conductancia 1. Cargos que rodea la superficie SNW puede modular eléctricamente las propiedades eléctricas del dispositivo pSNWFET; Por lo tanto, las propiedades superficiales de la SNW juegan un papel crucial en la determinación de las características eléctricas de los dispositivos pSNWFET. En los procedimientos descritos, la inmovilización de un biosonda en la superficie SNW se puede determinar directamente y se confirmó mediante la medición eléctrica, y el dispositivo se prepara para aplicaciones de biosensores.

<table border="0" cellpadding="0" cellspacing="0" width="862">
	<tbody>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Acetone</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">AH-3102</td>
			<td style="width:167px;"></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">(3-Amonopropyl)triethoxysilane (APTES), &#8805;98%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">A3648</td>
			<td>Danger</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ethanol, anhydrous, 99.5%</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">484000203108A-72EC</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Glutaraldehyde solution (GA), 50%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">G7651</td>
			<td>Avoid light</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Sodium cyanoborohydride, &#8805;95.0%&#160;</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">71435</td>
			<td>Danger and deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Sodium phosphate tribasic dodecahydrate, &#8805;98%</td>
			<td style="width:191px;">Sigma</td>
			<td style="width:179px;">04277</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Phosphoric acid, &#8805;99.0%</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">79622</td>
			<td>Deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;">Photoresist (iP3650)</td>
			<td style="width:191px;">Tokyo Ohka Kogyo Co., LTD</td>
			<td style="width:179px;">THMR-iP3650 HP</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Synthetic oligonucleotides, HPLC purified</td>
			<td style="width:191px;">Protech Technology</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Tris(hydroxymethyl)aminomethane (Tris), &#8805;99.8%</td>
			<td style="width:191px;">USB</td>
			<td style="width:179px;">75825</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Keithley 2636 System SourceMeter</td>
			<td style="width:191px;">Keithley</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR830 DSP Lock-In Amplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR570 Low-noise Current Preamplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ni PXI Express</td>
			<td style="width:191px;">National Instruments</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
	</tbody>
</table>

preparation of silicon nanowire field-effect transistor for chemical and biosensing applications

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we describe the preparation of polycrystalline silicon nanowire field-effect transistors (pSNWFETs) that serve as biosensing devices for biomarker detection. A protocol for chemical and biomolecular sensing by using pSNWFETs is presented. The pSNWFET device was demonstrated to be a promising transducer for real-time, label-free, and ultra-high-sensitivity biosensing applications. The source/drain channel conductivity of a pSNWFET is sensitive to changes in the environment around its silicon nanowire (SNW) surface. Thus, by immobilizing probes on the SNW surface, the pSNWFET can be used to detect various biotargets ranging from small molecules (dopamine) to macromolecules (DNA and proteins). Immobilizing a bioprobe on the SNW surface, which is a multistep procedure, is vital for determining the specificity of the biosensor. It is essential that every step of the immobilization procedure is correctly performed. We verified surface modifications by directly observing the shift in the electric properties of the pSNWFET following each modification step. Additionally, X-ray photoelectron spectroscopy was used to examine the surface composition following each modification. Finally, we demonstrated DNA sensing on the pSNWFET. This protocol provides step-by-step procedures for verifying bioprobe immobilization and subsequent DNA biosensing application.

Varios SNWFETs se han reportado para servir como transductores de biosensores (Tabla 1). SNWFETs Single-cristalinos (sSNWFETs) y pSNWFETs muestran propiedades eléctricas comparables como transductores en soluciones acuosas, y ambos se han notificado a tener muchas aplicaciones de biosensores. Una característica ventajosa del dispositivo pSNWFET utilizado en este estudio es su sencilla fabricación y bajo costo procedimiento. La Figura 1a muestra los pa...

Watch this Scientific Journal Video about Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications at JoVE.com

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications

We describe key steps for biosensing by using polysilicon nanowire field-effect transistors, including the preparation of the device and the immobilization and confirmation of a DNA molecular probe on the nanowire surface, as well as conditions for DNA sensing.

Preparación de silicio de nanocables de transistor de efecto de campo de químicos y biosensores Aplicaciones

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we ...

The overall goal of this protocol is to verify bioprobe immobilization and subsequent DNA biosensing on polysilicon nanowire field-effect transistors. This method can help answer important questions in the bioelectric sensing field, such as bioprobe immobilization and nucleic acid detection. Our biosensing device is a promising transistor for real-time, labor-free, and also high-sensitivity biosensing application.The implications of these biosensors extend toward clinical diagnosis of emerging infectious disease, because it can readily, sensitively, and accurately detect the specific bio-target. Though this method can provide insight into nucleic acid detection, it can also be applied to detection of other molecules, such as cytokines, hormones, proteins, and viruses. Generally, individuals new to this method will struggle because it requires interdisciplinary collaboration between biology and the electrical engineering fields.The preparation of the polycrystalline silicon nanowire field-effect transistor is covered by the text protocol. The device is formed from a six-inch wafer. The silicon nanowires on the device are about 100 nanometers wide and 1.6 microns long.To pre-treat the device, first remove it from storage in an electronically dry cabinet and open the sealed vacuum bag that contains it. Clean the biosensor in a Sonicator loaded with pure acetone for 10 minutes. Then, change the bath to pure ethanol and repeat the sonication for another five minutes.After this second bath, use a stream of nitrogen gas to dry the device. Next, treat the device with oxygen plasma at 18 watts for 30 seconds. Now take AC conductance measurements and measure the drain current electric properties on the device, as explained in the next section.Then, proceed with immobilizing DNA on the device surface while taking additional measurements, both AC conductance and drain current, after each modification. First, prepare for the pH profiling. Make 10 millimolar sodium phosphate tribasic dodecahydrate in deionized water, which has a pH of 11.6.Then, make a 10 millimolar phosphoric acid solution in deionized water, which has a pH of 2.35. Now make seven 10 millimolar buffer solutions with pH values ranging from three to nine by mixing the two stock solutions. With the test solutions and microfluidic channel prepared, measure real-time conductance using a lock-in technique.Place two needle probes on each of the source and drain pads. Convert the AC current signal into an AC voltage signal using a low-noise current preamplifier. Then set the optimal liquid gate voltage and proceed with delivering each buffer solution while measuring conductance at a drain voltage of 10 millivolts.Next, measure the drain current with neutral buffer. Flow pH 7 buffer onto the device from a syringe pump at five milliliters per hour. Then, using commercial semiconductor analysis software, measure the drain current in N MOSFET mode.Set the bias voltage to 0.5 volts and sweep the gate potential from negative one to three volts at 0.2-volt intervals. Now run the test and obtain the data. Begin with immersing the biosensor in 2%APTES in ethanol for 30 minutes to covalently link the nanowire surface.Then wash the biosensor three times for 30 seconds with ethanol, and then clean it in a Sonicator loaded with ethanol. Now, to create amine groups on the silicon nanowires, place the biosensor on a 120-degree Celsius surface for 10 minutes. Following the heating step, take measurements on the device as described in the previous section.Next, to create aldehyde groups on the silicon nanowires, immerse the device in 12.5%glutaraldehyde in 10 millimolar sodium phosphate pH 7 for one hour at room temperature. Limit any light exposure during this step. After the glutaraldehyde treatment, wash the device with 10 millimolar sodium phosphate buffer three times for 30 seconds per wash.Then blowdry the biosensor under pure nitrogen gas and take measurements to confirm the surface modification. The next step is to incubate the biosensor in one micromolar of probe solution overnight to thus apply the DNA probe. The following day, block the unreacted aldehyde groups by immersing the device in 10 millimolar Tris with four millimolar sodium cyanoborohydride for half an hour.Then wash the device off with 10 millimolar sodium phosphate buffer at pH 7 three times, followed by blowdrying the device under nitrogen gas, as before. Then take a final set of measurements to confirm the surface modification before proceeding to use it as a biosensor. Begin with taking a baseline measurement.Flow pH neutral sodium phosphate buffer into the device for 10 minutes. During this procedure, the solution flow rate is always five milliliters per hour. Then wait 30 minutes, flow pH neutral buffer over the biosensor for 10 minutes again, and measure the current of the device.Next, load 10 picomoles of DNA, complementary to the probe, onto the silicon nanowire surface by flowing the solution over the device for 10 minutes. Then incubate the biosensor for 30 minutes. As a negative control, apply 100 picomoles of non-complementary DNA to the device.After the incubation, flow pH neutral buffer over the biosensor for 10 minutes to wash off unbound target DNA. Following this step, measure the current of the device as before. Next, load one nanomolar of recovery DNA onto the DNA probe immobilized silicon nanowire surface for 10 minutes.Then incubate the biosensor for 30 minutes, as before. Finally, flow pH neutral buffer over the device for another 10 minutes, and then take current measurements once again. A DNA probe was immobilized on the silicon oxide surface and each modification step was confirmed using X-ray photoelectron spectroscopy.For the unmodified pSNWFET containing the native oxide layer on the SNW surface, the hydroxyl groups were ionized to form charged groups with increasing pH values. Conductance likely varied at different pHs. The shift in the electric properties of the device after different modifications confirms the change in the wire surface.In such experiments, the current voltage curve of the unmodified device was used as the baseline. After the device was immersed in APTES, the current voltage curve of the device shifted to the left because of the positive charge on the wire surface. After conjugating glutaraldehyde to the APTES modified device, the current voltage curve shifted back to the right because of neutrally-charged MI bond formation.Finally, a five prime amine-modified DNA probe was introduced to bind to the APTES glutaraldehyde-modified device. The backbone of the DNA caused the current voltage curve to shift to the far right. After watching this video, you should have a good understanding of how to confirm the bioprobe immobilization and DNA sensing application on polysilicon nanowire field-effect transistors.Once mastered, this technique of the preparation for nucleic acid detection can be done within one hour, if it is performed properly, which can be performed in advance. The final biosensing takes less than 10 minutes. While attempting this procedure, it's important to remember to analyze the electric properties of the device at each step of the bioprobe modification.This technique paved the way for researchers in the field of semiconductor-based sensors to its broader application of biosensing. Following these procedures, other methods like immobilizing cancer biomarker probe, can be performed in order to answer additional questions in fields such as clinical cancer diagnosis.

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Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

Funcionalización suaves litográfica y Patrones libre de óxido de silicio y el germanio

The development of hybrid electronic devices relies in large part on the integration of (bio)organic materials and inorganic semiconductors through a ...

Investigación

Bioingeniería

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The use of polymers as biomaterials has provided significant advantages in therapeutic applications. In particular, the possibility to modify and ...

Light-mediated Formation and Patterning of Hydrogels for Cell Culture Applications

Formación luz mediada y el patrón de hidrogeles para aplicaciones de cultivo celular

Click chemistries have been investigated for use in numerous biomaterials applications, including drug delivery, tissue engineering, and cell culture. In ...

Extraction of Plant-based Capsules for Microencapsulation Applications

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Microcapsules derived from plant-based spores or pollen provide a robust platform for a diverse range of microencapsulation applications. Sporopollenin ...

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Hydroxyapatite (HA) has been widely used as a medical ceramic due to its good biocompatibility and osteoconductivity. Recently there has been interest ...

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Microfluidic devices allow for the manipulation of fluids, particles, cells, micro-sized organs or organisms in channels ranging from the nano to ...

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Over the past decade, fluorescent gold nanoclusters (AuNCs) have witnessed growing popularity in biological applications and enormous efforts have been ...

Simultaneous Quantification of Selected Kynurenines Analyzed by Liquid Chromatography-Mass Spectrometry in Medium Collected from Cancer Cell Cultures

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The kynurenine pathway and the tryptophan catabolites called kynurenines have received increased attention for their involvement in immune regulation and ...