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DOI :
10.3791/53683-v
April 13th, 2016
Chapters
0:05
Title
1:28
Steps for Performing Tomography Scans at Beamline 8.3.2 (ALS, LBNL)
4:02
Setting up the Scan Parameters Using the Data Acquisition Computer
4:54
Results: Multi-scale Features Imaged in an Entire Micro-electronic Package Using Synchrotron Radiation Microtomography
6:11
Conclusion
この研究放射光マイクロトモグラフィー、非破壊3次元撮像技術のために、16×16mmの断面積全体マイクロエレクトロニクスパッケージを調べるために使用されます。シンクロトロンの高フラックスと明るさに起因してサンプルが8.7μmの空間分解能でわずか3分で画像化しました。
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