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DOI :
10.3791/53683-v
April 13th, 2016
Chapters
0:05
Title
1:28
Steps for Performing Tomography Scans at Beamline 8.3.2 (ALS, LBNL)
4:02
Setting up the Scan Parameters Using the Data Acquisition Computer
4:54
Results: Multi-scale Features Imaged in an Entire Micro-electronic Package Using Synchrotron Radiation Microtomography
6:11
Conclusion
본 연구 방사광 마이크로 단층 비파괴 입체 영상 법의 경우, 16 × 16 mm의 단면적 전체 마이크로 전자 패키지를 조사하기 위해 사용된다. 때문에 싱크로트론의 높은 플럭스 및 밝기에 샘플은 8.7 μm의 공간 해상도로 불과 3 분에서 몇 군데 있었다.
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