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DOI :
10.3791/53861-v
•
10:14 min
March 6th, 2016
Chapters
0:05
Title
0:57
Photolithography
2:13
Deep Reactive Ion Etching
2:55
Piranha Cleaning
3:46
Anodic Bonding
5:41
Finalizing the Acoustofluidic Device
6:44
Operating the Acoustofluidic Device
8:01
Results: Acoustofluidic Devices Support Bulk Acoustic Standing Waves
9:03
Conclusion
Acoustofluidicデバイスは、操作に集中懸濁マイクロ・ナノスケールのエンティティを分離するためにマイクロ流体チャネル内に超音波を使用します。このプロトコルは、シース流体の助けを借りずに中央流線中の粒子を集中するバルク音響定在波をサポートするようなデバイスの製造および動作について説明します。
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