Name: fabrication and characterization of superconducting resonators
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作者承认从美国国家航空和航天局（NASA）的玫瑰和APRA计划资金支持。 GC也承认大学空间研究协会在美国航空航天局管理他的任命。

1.微带线谐振器制造14（图3） <ol><li>清洁上硅绝缘体（SOI）晶片，其具有0.45微米厚的硅器件层，用新混合的 H 2 SO 4 :H 2 O 2（3：1）10分钟。然后冲洗用去离子水在晶片10分钟，并干燥用氮气枪。紧接其后的处理，浸在晶片的H 2○：HF（10：1），持续10秒和在去离子水中漂洗5分钟。 </li><li>制造剥离掩模，其由锗（Ge）/阳性光致抗蚀剂如S-1811 <...

<ol>
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单翻盖制造方法提供了在薄0.45微米的单晶Si衬底的两侧实现超导谐振器的装置。一个可以被激励以使用单晶硅电介质，因为它具有比大小小于沉积电介质（例如Si 3 N 4）与4.0-6.5 GHz的范围&lt;1×10的损耗角正切低损失的顺序多- 5 23-24图案的能力，双方拥有的该基板允许一个采用微带谐振器的设计，它提供了优秀的抗杂散光和低谐振到谐振器的串扰。所述的剥离技术能?...

在天体物理学仪器的进步已经最近推出超导微波谐振器，用于检测红外光的1 - 4所述的超导谐振器将向能量E的红外辐射响应= HV&gt;2Δ（其中，h是普朗克常数，v是辐射频率和Δ为超导隙能量）。当谐振器冷却到远低于超导临界温度的温度，这一事件打破辐射在谐振器体积库柏对并生成准粒子激发。在准粒子激发的密度的增加改变了动能电感，并且因此超导体的复杂表面阻抗。该光学响应被观察为在谐振频率向低频的偏移和在谐振器的品质因数的降低。在用于微波显象管的规范读出方案抽动电感检测器（MKID），所述谐振器被耦合到微波馈线和一个监视通过该馈线在共振单个微波频率音调的复传输。这里，光反应被观察为在振幅和变速器5（ 图1）的相两者的变化。频域复用方案是能够读出成千上万的谐振器的阵列。6-7 成功地设计和实现基于超导谐振器仪表，需要准确而有效地进行表征这些共振结构的属性。例如，噪声特性的精确测量，质量因子Q，共振频率（包括其温度依赖性）和超导谐振器的光学响应特性期望在MKID器件物理，8量子计算，9的上下文中和低的测定TE温度的材料特性。10 在所有这些情况下，电路的复杂的传输散射参数的测量是需要的。这个工作集中在谐振器的复杂的传输系数的确定，S 21，其幅度和相位可以与矢量网络分析仪（VNA）测定。理想的是，VNA基准面（或测试端口）将直接连接到被测器件（DUT），但低温环境通常需要使用额外的传输线结构来实现RT之间（〜300K）的热断裂和寒冷的阶段（〜0.3 K的这项工作; 见图 URE 2）。可能需要额外的微波元件，如定向耦合器，循环器，隔离器，放大器，衰减器，和相关的相互连接的电缆，以适当地制备，激发，读出并偏压感兴趣的设备。该相速度和这些部件的尺寸从室温到低温的冷却时发生变化，因此，它们会影响在装置校准平面所观察到的响应。仪器和设备的校准平面影响复数增益和之间的这些中间组件需要适当地占所测量的响应的解释。11 在理论上，需要一种方案，设置测量参考平面中，相同的校准过程中所用的，在DUT。为了达到这个目标，我们可以测量在多个冷却起伏校准标准;然而，这造成对VNA的稳定性和低温仪器的重复性的限制，这是很难达到的。为了减轻这些问题，人们可以放置在冷却的测试环境的必要标准，并在它们之间切换。这是，例如，类似的是，在微波探针台发现，其中样品和校准标准是由一个连续的液体氦流量或封闭循环制冷系统冷却到4K的12这种方法是在子开尔文的温度证实，但需要在低功率，高性能的微波开关测试感兴趣的乐队。13 因此原位校准过程所需的占VNA的参考平面和设备校准平面（ 图 URE 2）和一种克服上述方法的局限性之间的器乐透射响应。这种低温校准方法，提出并在Cataldo的等 11中详细讨论的，允许一个宽比谐振线宽度和谐振器之间的间距为约1％的精度在一个频率范围的特征的多个谐振器。本文将重点放在样品制作和准备的细节aration流程，试验测试设置和测量程序用于与平面线的几何形状来表征超导微波谐振器。11

<table border="0" cellpadding="0" cellspacing="0" width="715">
	<tbody>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Microposit S-1811 Photoresist</td>
			<td style="width:111px;">Shipley</td>
			<td style="width:187px;"></td>
			<td style="width:201px;"></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">BCB</td>
			<td style="width:111px;">Dow</td>
			<td style="width:187px;"></td>
			<td style="width:201px;">3022-35</td>
		</tr>
		<tr height="45">
			<td height="45" style="height:45px;width:216px;">SOI wafers</td>
			<td style="width:111px;">SOITec</td>
			<td style="width:187px;"></td>
			<td style="width:201px;">Fabricated with SmartCutTM process</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Mo</td>
			<td style="width:111px;">Kamis</td>
			<td style="width:187px;"></td>
			<td style="width:201px;">99.99%</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Nb</td>
			<td style="width:111px;">Kamis</td>
			<td style="width:187px;"></td>
			<td style="width:201px;">99.95% (excludes Ta)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">E-6 metal etch w/AES</td>
			<td style="width:111px;">Fujifilm</td>
			<td style="width:187px;"></td>
			<td style="width:201px;">CPG Grade</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Acetone</td>
			<td style="width:111px;">JT Baker</td>
			<td style="width:187px;">9005-05</td>
			<td style="width:201px;">CMOS Grade</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">HF dip (1:10)</td>
			<td style="width:111px;">JT Baker</td>
			<td style="width:187px;">5397-03</td>
			<td style="width:201px;"></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">PMMA</td>
			<td style="width:111px;">Microchem</td>
			<td style="width:187px;"></td>
			<td style="width:201px;">950 PMMA A2</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">GE 7031</td>
			<td style="width:111px;">General Electric</td>
			<td style="width:187px;"></td>
			<td style="width:201px;">Low-temperature adhesive</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Cryogenic Microwave Amplifier</td>
			<td style="width:111px;">MITEQ</td>
			<td>AF S3-02000400-08-CR-4</td>
			<td style="width:201px;">2-4 GHz, gain ~30dB</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">NbTi Semi-rigid SMA cables</td>
			<td style="width:111px;">Coax. Co.</td>
			<td style="width:187px;">SC-086/50-NbTi-NbTi</td>
			<td style="width:201px;"></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">Circulator</td>
			<td>PamTech</td>
			<td>CTD1229K</td>
			<td style="width:201px;">return loss &#62; -20 dB from 2-4 GHz</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">RF attenuator</td>
			<td>Weinschel</td>
			<td>Model-4M</td>
			<td style="width:201px;">7 dB attenuation</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Flexible SMA cables</td>
			<td style="width:111px;">Teledyne-Storm</td>
			<td>R94-240</td>
			<td style="width:201px;">ACCU-TEST</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Vector Network Analyzer</td>
			<td style="width:111px;">Agilent</td>
			<td>N5242A PNA-X</td>
			<td style="width:201px;"></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Liquid He-4 cryogen</td>
			<td>Praxair&#160;</td>
			<td style="width:187px;"></td>
			<td style="width:201px;"></td>
		</tr>
		<tr height="25">
			<td height="25" style="height:25px;width:216px;">Liquid N2 cryogen</td>
			<td style="width:111px;">Praxair&#160;</td>
			<td style="width:187px;"></td>
			<td style="width:201px;"></td>
		</tr>
	</tbody>
</table>

fabrication and characterization of superconducting resonators

超导微波谐振器是感兴趣于广泛的应用，包括它们作为微波动力学电感检测器（MKIDs）检测微弱天体物理签名的使用，以及用于量子计算的应用和材料表征。在本文中，程序呈现为薄膜超导微波谐振器的制造和表征。的制造方法允许为实现超导传输线谐振器与一个原子级平滑的单晶硅电介质的两面特征的。这个工作描述了安装谐振器装置的送入低温微波测试平台和用于下面的超导转变温度降温的过程。低温微波测试平台的设定最多允许一个做这些谐振器装置的复杂微波传输的仔细的测量，使公关的提取超导线和电介质基板（ 例如 ，内部质量的因素，损失和动能电感分数），这对于装置的设计和性能的重要的operties。

在0.45微米的单晶硅电介质制成的半波的Mo 2 N谐振器（ 图5）的响应与这种方法进行了验证。在这种情况下，耦合到铌共面波导（CPW）的馈线用于读出经由电容耦合通过溅射沉积的 SiO 2电介质实现的，在为“H”形区域在共振器的敞开端部之一（见协议第1.6节）。在其他情况下，电容性耦合至馈线通过在铌接地平面除去区域来实现的。在<...

Watch this Scientific Journal Video about Fabrication and Characterization of Superconducting Resonators at JoVE.com

Fabrication and Characterization of Superconducting Resonators

超导微波谐振器是检测的光，量子计算的应用和材料表征的兴趣。这项工作提出了制造和超导微波谐振器散射参数特性的详细过程。

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Research

Education

JoVE Core

JoVE Journal

Physics

Engineering

Unit 1

Inductance

SCIENTISTS IN ACTION

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

模拟，太赫兹超材料吸收器的制备与表征

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

科研

工程学

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

光子晶体慢光波导和腔体的制备与表征

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view ...

Microwave Photonics Systems Based on Whispering-gallery-mode Resonators

基于微波光子系统回音壁模式谐振器

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various ...

Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters

电浆光电导太赫兹发射器的设计，制造和实验表征

In this video article we present a detailed demonstration of a highly efficient method for generating terahertz waves. Our technique is based on ...

Fabrication and Characterization of Disordered Polymer Optical Fibers for Transverse Anderson Localization of Light

无序横向安德森本地化光聚合物光纤的制备和表征

We develop and characterize a disordered polymer optical fiber that uses transverse Anderson localization as a novel waveguiding mechanism. The developed ...

Fabrication and Testing of Microfluidic Optomechanical Oscillators

制造和微流控光机振荡器测试

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

Patterning via Optical Saturable Transitions - Fabrication and Characterization

通过光学吸收跃迁图案 - 制备与表征

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical ...

Ohmic Contact Fabrication Using a Focused-ion Beam Technique and Electrical Characterization for Layer Semiconductor Nanostructures

欧姆接触制造用聚焦离子束技术和电气特性的半导体层的纳米结构

Layer semiconductors with easily processed two-dimensional (2D) structures exhibit indirect-to-direct bandgap transitions and superior transistor ...

Printing Fabrication of Bulk Heterojunction Solar Cells and In Situ Morphology Characterization

Printing Fabrication of Bulk Heterojunction Solar Cells and In Situ Morphology Characterization

散装异质结太阳能电池的印刷和制作<em&gt;原位</em&gt;形态特征

Polymer-based materials hold promise as low-cost, flexible efficient photovoltaic devices. Most laboratory efforts to achieve high performance devices ...

Stimulated Stokes and Antistokes Raman Scattering in Microspherical Whispering Gallery Mode Resonators

刺激斯托克斯和反斯托克斯拉曼散射在微球形回音壁模式谐振器

Dielectric microspheres can confine light and sound for a length of time through high quality factor whispering gallery modes (WGM). Glass microspheres ...