Name: fabrication of 3d carbon microelectromechanical systems (c-mems)
Uploaded: 2017-06-17T13:00:00
Description: Watch this Scientific Journal Video about Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS at JoVE.com

这项工作得到了蒙特雷工艺学院和加州大学尔湾分校的支持。

3D人造毛发碳结构制作注意：使用个人防护装备。按照实验室指导使用仪器并在实验室内工作。 <ol><li>通过用DI水洗涤并用N 2气体干燥来准备收集的人发。 </li><li>根据需要排列毛发，例如平行的股线，交叉，两根毛发缠绕在一起等。 </li><li>使用SU8将毛发连接到硅基板上，或将它们直接保留在陶瓷舟皿中。 </li><li>将头发附着的硅衬底或舟子放入炉中。 </li><li>?...

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K., Hwang, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=3D+carbon+electrode+based+triboelectric+nanogenerator.">3D carbon electrode based triboelectric nanogenerator.</a> Adv Mater Technol. 1 (8), 1-7 (2016).</li><li>Duarte, R. M., Gorkin, R. A., Samra, K. B., Madou, M. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=The+integration+of+3D+carbon-electrode+dielectrophoresis+on+a+CD-like+centrifugal+microfluidic+platform.">The integration of 3D carbon-electrode dielectrophoresis on a CD-like centrifugal microfluidic platform.</a> Lab Chip. 10 (8), 1030-1043 (2010).</li><li>Mund, K., Richter, G., Weidlich, E., Fahlstrom, U. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrochemical+properties+of+platinum,+glassy+carbon,+and+pyrographite+as+stimulating+electrodes.">Electrochemical properties of platinum, glassy carbon, and pyrographite as stimulating electrodes.</a> Pacing Clin Electrophysiol. 9 (6), 1225-1229 (1986).</li><li>Xua, H., Malladi, K., Wang, C., Kulinsky, L., Song, M., Madou, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Carbon+post-microarrays+for+glucose+sensors.">Carbon post-microarrays for glucose sensors.</a> Biosens Bioelectron. 23 (11), 1637-1644 (2008).</li><li>Sharma, S., Madou, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Micro+and+nano+patterning+of+carbon+electrodes+for+bioMEMS.">Micro and nano patterning of carbon electrodes for bioMEMS.</a> Bioinspir Biomim Nanobiomat. 1, 252-265 (2012).</li><li>Pramanick, B., Martinez-Chapa, S. 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在本文中，报道了基于天然前体材料或光致图案化聚合物结构的热解制备各种碳微结构的方法。由传统的和非常规的C-MEMS / C-NEMS工艺产生的碳材料通常被发现是玻璃碳。玻璃碳是广泛使用的电化学电极材料，也适用于高温应用。玻璃碳的微结构由结晶和非晶区组成。玻璃碳具有高导电性，耐高温性，低密度，低电阻，以及较高的硬度和高耐化学腐蚀性。 我们提出了一种简单?...

碳具有许多同素异形体，并且根据具体应用，可以选择以下同素异形体之一：碳纳米管（CNT），石墨，金刚石，无定形碳，代斯尼石，勃姆斯特富勒烯（C 60 ），充铁矿（C 540 ），富勒烯C 70 ）和玻璃碳1,2,3,4 。玻璃碳是最广泛使用的同素异形体之一，因为它的物理性质，包括高各向同性。它还具有以下性能：良好的导电性，低热膨胀系数和气体不渗透性。 已经不断地寻找富含碳的前体材料来获得碳结构。这些前体可以是具有特定形状的人造材料或天然产物，甚至包括废物。各种微型<html> o /纳米结构本质上是通过生物或环境过程形成的，产生了使用常规制造工具极难创造的独特特征。由于在这种情况下自然发生了图案化，使用天然和废碳氢化合物前体的纳米材料的合成可以在惰性或真空气氛中使用简单的一步热分解方法进行，称为热解5 。已经通过热分解或植物来源的前体和废物（包括种子，纤维和油类）的热分解产生了高质量的石墨烯，单壁CNT，多壁碳纳米管和碳点，例如松节油，芝麻油，楝树油（ Azadirachta indica ），桉树油，棕榈油和麻疯树油。此外，茉莉花产品，茶树提取物，废物食品，昆虫，农业废物和食品已被利用6，7 ，最近，研究人员甚至使用丝茧作为前体材料来制备多孔碳微纤维10 。这个团队最近使用人造毛，通常被认为是废料。它由约91％的多肽组成，含多于50％的碳;其余的元素如氧，氢，氮和硫11 。头发还具有许多有趣的性质，例如非常缓慢的降解，高抗拉强度，高绝热性和高弹性恢复性。最近，它已经被用于制备超级电容器12中使用的碳薄片，并且为电化学传感13创建中空碳微纤维13 。 用于制造三维（3D）结构的散装碳材料的加工是一项困难的任务，因为该材料非常脆弱。聚焦离子在这种情况下，am 14,15或反应离子蚀刻16可能是有用的，但是它们是昂贵和耗时的过程。基于图案化聚合物结构的热解的碳微机电系统（C-MEMS）技术代表了多功能的替代方案。在过去二十年中，C-MEMS和碳纳米机电系统（C-NEMS）由于涉及简单且廉价的制造步骤而受到很多关注。传统的C-MEMS制造工艺分两个步骤进行：（i）通过光刻图案化聚合物前体（ 例如，光致抗蚀剂）和（ii）图案化结构的热解。通常使用紫外（UV）可固化的聚合物前体，例如SU8光致抗蚀剂，以基于光刻法来图案化结构。通常，光刻工艺包括旋涂，软烘烤，紫外线曝光，后烘烤和烘烤的步骤lopment。在C-MEMS的情况下;硅;二氧化硅;氮化硅;石英;并且最近，蓝宝石已被用作底物。在无氧环境中，光图案化聚合物结构在高温（800-1100℃）下碳化。在真空或惰性气氛中的这些高温下，除去所有非碳元素，仅留下碳。这种技术允许实现高质量的玻璃碳结构，其对于许多应用非常有用，包括电化学传感17 ，能量存储18 ，摩擦电纳米发生19和电动粒子操作20.此外，制造具有使用C-MEMS的高纵横比变得相对容易，并且已经导致各种各样的碳电极应用18,21 ， </sup&gt; 22,23 ，经常代替贵金属电极。 在这项工作中，引入了使用非常规C-MEMS技术13从人发制造中空碳微纤维的简单和成本有效的方法的最新发展。这里也描述了常规的基于SU8聚合物的C-MEMS工艺。具体来说，高纵横比固体和中空SU8结构的制造程序描述24。

<table border="0" cellpadding="0" cellspacing="0" width="690">
	<tbody>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">SU8-2100</td>
			<td style="width:141px;">Microchem</td>
			<td style="width:167px;">Product number-Y1110750500L</td>
			<td style="width:167px;"></td>
		</tr>
		<tr height="63">
			<td height="63" style="height:63px;width:216px;">Spinner</td>
			<td style="width:141px;">Laurell Technologies Corporation</td>
			<td style="width:167px;">Model-WS650HZB-23NPP/UD3</td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">Hotplate</td>
			<td style="width:141px;">Torrey Pines Scientific</td>
			<td style="width:167px;">HS61</td>
			<td></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">UV-exposer</td>
			<td style="width:141px;">Mercury Lamp, SYLVANIA</td>
			<td style="width:167px;">H44GS-100M, P/N-34-0054-01</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Photomask</td>
			<td style="width:141px;">CAD/Art</td>
			<td style="width:167px;"></td>
			<td>No number</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Developer&#160;</td>
			<td style="width:141px;">Microchem</td>
			<td style="width:167px;">Y020100 4000L&#160;</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">DI water system</td>
			<td style="width:141px;">Milli Q</td>
			<td style="width:167px;">ZOOQOVOTO</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">IPA</td>
			<td style="width:141px;">CTR Sientific</td>
			<td style="width:167px;">CTR 01244</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">N2 gas</td>
			<td style="width:141px;">AOC Mexico</td>
			<td style="width:167px;"></td>
			<td>No number</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:216px;">Furnace</td>
			<td style="width:141px;">PEO 601, ATV Technologie GMBH</td>
			<td style="width:167px;">Model-PEO 601, Serial no.-195</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Si/SiO2</td>
			<td style="width:141px;">Noel Technologies</td>
			<td style="width:167px;"></td>
			<td></td>
		</tr>
	</tbody>
</table>

fabrication of 3d carbon microelectromechanical systems (c-mems)

大量的碳源可用于各种微/纳米结构配置。这里引入了一种制造从人类毛发衍生的长而中空的玻璃碳微纤维的新技术。长和中空的碳结构通过人造毛发在900℃在N 2气氛中的热解制备。使用扫描电子显微镜（SEM）和电子分散X射线光谱（EDX）分别研究天然和热解的人毛的形态和化学成分，以估计热解引起的物理和化学变化。拉曼光谱法用于证实碳微观结构的玻璃性质。引入热解的毛发碳以修饰丝网印刷的碳电极;然后将修饰的电极应用于多巴胺和抗坏血酸的电化学感测。与unmodi相比，改进的传感器的感测性能得到改善传感器。为了获得所需的碳结构设计，开发了碳微/纳米机电系统（C-MEMS / C-NEMS）技术。最常见的C-MEMS / C-NEMS制造方法包括两个步骤：（i）使用光刻法富集富含碳的基底材料，例如光敏聚合物;和（ii）在无氧环境中通过图案化聚合物的热解进行碳化。 C-MEMS / NEMS工艺已经广泛用于开发微电子器件，包括微电池，超级电容器，葡萄糖传感器，气体传感器，燃料电池和摩擦电纳米发生器等各种应用。在这里，讨论了具有SU8光致抗蚀剂的高纵横比固体和中空碳微观结构的近期发展。使用共焦显微镜和SEM研究了热解过程中的结构收缩。拉曼光谱法用于证实结构的结晶度，元素的原子百分比使用EDX测量热解前后的材料中的nt。

人头发衍生的中空碳微纤维的制造方法的示意图如图1所示 。使用SEM来表征碳化的人发，以估计收缩。由于热解，毛发直径从82.88±0.003μm缩小到31.42±0.003μm。使用毛发衍生的碳微纤维制成的各种图案的扫描电子显微镜（SEM）图像示于图2中 。在热解之前和之后毛发中存在的元素的原子百分比示于表1中 。本研究中使?...

Watch this Scientific Journal Video about Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS at JoVE.com

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

基于天然产物，人发的热解制造长而中空的玻璃碳微纤维。碳微机电和碳纳米机电系统或C-MEMS和C-NEMS的两个制造步骤是：（i）富碳聚合物前体的光刻和（ii）图案化聚合物前体的热解。

3D碳微机电系统（C-MEMS）的制造

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long ...

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Engineering

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures

制备，致密，副本三维碳纳米管微结构成型

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip ...

科研

工程学

High-resolution, High-speed, Three-dimensional Video Imaging with Digital Fringe Projection Techniques

Digital fringe projection (DFP) techniques provide dense 3D measurements of dynamically changing surfaces.&#160;Like the human eyes and brain, DFP uses ...

Fabrication of Low Temperature Carbon Nanotube Vertical Interconnects Compatible with Semiconductor Technology

低温碳纳米管垂直互连的制作兼容半导体技术

We demonstrate a method for the low temperature growth (350 &#176;C) of vertically-aligned carbon nanotubes (CNT) bundles on electrically conductive ...

Fabrication and Characterization of Superconducting Resonators

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Two-way Valorization of Blast Furnace Slag: Synthesis of Precipitated Calcium Carbonate and Zeolitic Heavy Metal Adsorbent

高炉矿渣的双向稳定物价：沉淀碳酸钙和沸石重金属吸附剂的合成

The aim of this work is to present a zero-waste process for storing CO2 in a stable and benign mineral form while producing zeolitic minerals with ...

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia (YSZ) Scaffolds by In Situ Carbon Templating Xerogels

High Temperature Fabrication of Nanostructured Yttria-Stabilized-Zirconia YSZ Scaffolds by In Situ Carbon Templating Xerogels

通过纳米氧化钇稳定的二氧化锆（YSZ）的支架的高温加工<em&gt;原位</em&gt;碳模板干凝胶

We demonstrate a method for the high temperature fabrication of porous, nanostructured yttria-stabilized-zirconia (YSZ, 8 mol% yttria - 92 mol% zirconia) ...

Production and Characterization of Vacuum Deposited Organic Light Emitting Diodes

真空沉积有机发光二极管的生产与表征

A method for producing simple and efficient thermally-activated delayed fluorescence organic light-emitting diodes (OLEDs) based on guest-host or exciplex ...

Atmospheric Pressure Fabrication of Large-Sized Single-Layer Rectangular SnSe Flakes

大型单层矩形 SnSe 片的常压制备

Tin selenide (SnSe) belongs to the family of layered metal chalcogenide materials with a buckled structure like phosphorene, and has shown potential for ...

Multi-material Ceramic-Based Components &#8211; Additive Manufacturing of Black-and-white Zirconia Components by Thermoplastic 3D-Printing (CerAM - T3DP)

Multi-material Ceramic-Based Components ÃƒÆ’Ã‚Â¢ÃƒÂ¢Ã¢â‚¬Å¡Ã‚Â¬ÃƒÂ¢Ã¢â€šÂ¬Ã…â€œ Additive Manufacturing of Black-and-white Zirconia Components by Thermoplastic 3D-Printing CerAM - T3DP

多材料陶瓷基元器件--用热塑性3d 印刷 (ceram-t3dp) 制备黑白氧化锆部件的添加剂

To combine the benefits of Additive Manufacturing (AM) with the benefits of Functionally Graded Materials (FGM) to ceramic-based 4D components (three ...

Fused Filament Fabrication (FFF) of Metal-Ceramic Components

Fused Filament Fabrication FFF of Metal-Ceramic Components

金属陶瓷元件的熔融长丝制造 (fff)

Technical ceramics are widely used for industrial and research applications, as well as for consumer goods. Today, the demand for complex geometries with ...