Name: soft lithographic procedure for producing plastic microfluidic devices with view-ports transparent to visible and infrared light
Uploaded: 2017-08-17T13:00:00
Description: Watch this Scientific Journal Video about Soft Lithographic Procedure for Producing Plastic Microfluidic Devices with View-ports Transparent to Visible and Infrared Light at JoVE.com

作者非常感谢 MBI 的财政支持。

1.硅主要模具制备 注： 光掩膜是主要模具准备所需。光掩模可以从独立的供应商购买或制作内部通过标准光学掩模制作程序。明亮的领域极性光掩膜用在这种情况下 ( 图 2 )。
<ol><li>模式定义 <ol><li>自旋大衣与苏 8 3010 负性光刻 2,300 rpm，30 4 英寸硅片 s.</li>
		<li>软烤 2 分钟 65 ° C，然后在 8 分钟 95 ° C 的热板上光致抗蚀剂</li>
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<ol>
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Y. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Microfluidic+approaches+to+synchrotron+radiation-based+Fourier+transform+infrared+(SR-FTIR)+spectral+microscopy+of+living+biosystems.">Microfluidic approaches to synchrotron radiation-based Fourier transform infrared (SR-FTIR) spectral microscopy of living biosystems.</a> Protein Pept Lett. 23 (3), 273-282 (2016).</li><li>Dousseau, F., Therrien, M., P&#233;zolet, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=On+the+Spectral+Subtraction+of+Water+from+the+FT-IR+Spectra+of+Aqueous+Solutions+of+Proteins.">On the Spectral Subtraction of Water from the FT-IR Spectra of Aqueous Solutions of Proteins.</a> Appl Spectrosc. 43 (3), 538-542 (1989).</li><li>Tobin, M. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=FTIR+spectroscopy+of+single+live+cells+in+aqueous+media+by+synchrotron+IR+microscopy+using+microfabricated+sample+holders.">FTIR spectroscopy of single live cells in aqueous media by synchrotron IR microscopy using microfabricated sample holders.</a> Vibrational Spectroscopy. 53 (1), 34-38 (2010).</li><li>Birarda, G., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Infrared+microspectroscopy+of+biochemical+response+of+living+cells+in+microfabricated+devices.">Infrared microspectroscopy of biochemical response of living cells in microfabricated devices.</a> Vibrational Spectroscopy. 53 (1), 6-11 (2010).</li><li>Vaccari, L., Birarda, G., Businaro, L., Pacor, S., Grenci, G. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Infrared+microspectroscopy+of+live+cells+in+microfluidic+devices+(MD-IRMS):+toward+a+powerful+label-free+cell-based+assay.">Infrared microspectroscopy of live cells in microfluidic devices (MD-IRMS): toward a powerful label-free cell-based assay.</a> Anal Chem. 84 (11), 4768-4775 (2012).</li><li>Mitri, E., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=SU-8+bonding+protocol+for+the+fabrication+of+microfluidic+devices+dedicated+to+FTIR+microspectroscopy+of+live+cells.">SU-8 bonding protocol for the fabrication of microfluidic devices dedicated to FTIR microspectroscopy of live cells.</a> Lab Chip. 14 (1), 210-218 (2014).</li><li>Birarda, G., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=IR-Live:+fabrication+of+a+low-cost+plastic+microfluidic+device+for+infrared+spectromicroscopy+of+living+cells.">IR-Live: fabrication of a low-cost plastic microfluidic device for infrared spectromicroscopy of living cells.</a> Lab Chip. 16 (9), 1644-1651 (2016).</li><li>Wehbe, K., Filik, J., Frogley, M. 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为了评估和优化制造协议，我们使用一个简单的布局，为微流控模式与大型矩形室 （5 毫米 x 2.5 毫米大小） 的中心，两个小矩形分庭 （5.5 毫米 x 0.75 毫米大小） 分开的主电路上上部和下部的边和 300 微米宽的-让/出-自然渠道。中央墓室用于播种和细胞，而两个分离小分庭用于测量大气的背景在红外光谱中观察实验作为参考室，如以前的出版物13所述。在让和外让中央室连接到?...

傅里叶变换红外分光显微镜 (FTIR) 已被广泛用作标签免费和非侵入性的成像技术，提供详细的化学信息的样本。这使提取的生化信息学习化学的生物样品，用最少的准备因为吸收谱的标本进行的内在指纹图谱及其化学成分1,2.最近，FTIR 已越来越多地应用于活的生物样品，例如，单元格3的研究。然而，水，这是在大多数情况下活细胞中，在中红外区域显示了较强的吸收。即使作为一个薄层，它的存在能够完全战胜标本的重要结构信息。
多年来，常用的方法是固定或干燥样品，完全排除水吸收信号的频谱。然而，这种方法允许不为活细胞的实时测量的研究是十分必要的化学成分及其细胞过程随时间变化。从活的生物样品，获得可靠的吸收谱的一种方法是限制到小于 10 µ m4红外梁在介质中的光学路径总长度。
在生活中的既定方法细胞实验一直到目前为止，减毒总反射 (ATR)-红外光谱成像，使测量的样品厚度，让细胞持续在水介质中厚层独立。然而，倏逝波的小深度限制样品测量从表面的 ATR 水晶5只第一的几个微米。
另外，水吸收限制已被规避与各种微流控系统，通常可以分为两大组的出现： 打开的通道 （在流体表面之一暴露在大气之中），并关闭通道 （其中两个红外透明窗口以进行分隔间隔定义的厚度）。
Loutherback等人开发开放通道膜装置，使活细胞达 7 天6长期限连续红外的测量。该方法需要高湿度的环境，以防止介质从细胞表面蒸发。该系统最适合与自然生长在气-液界面，如皮肤、 肺和眼睛或微生物的生物膜7上皮组织的细胞。
关闭通道配置旨在创建一个统一、 薄层之间两个平行的红外透明窗口，而将细胞保持其水介质中。这腔厚度是这样水吸收信号低于饱和。然后可以减去水背景以获取正确的样品光谱。大部分的封闭通道方法利用塑料间隔分离这两个窗口，形成一个可拆卸的液体室3，8，9。此方法的一个优点是它不需要微细加工;然而，比自然出渠道测量室更复杂的结构都是极难实现的薄垫片。也是由于其依赖对机械夹紧的红外测量之间的路径长度的重现性问题。为了实现更可靠的光谱采集的间距更精确的控制，光刻方法，已实施模式光致抗蚀剂在红外衬底来定义间隔9，10,11,12.尽管这使得更复杂的结构，在间隔中定义，该方法需要对微细加工工厂生产模式在每一个衬底上的访问。
在本文，我们提出一种红外兼容微流控装置，简单的制作技术与目标，降低制造成本和访问微细加工设施的要求。提出的方法在这里 （请参见图 1） 使用既定的过程称为软光刻技术。在这种情况下，两个模具是必需的。主要的模具是由 4 英寸硅片，使用标准的 UV 光刻工艺。二级模具是由聚二甲基硅氧烷，这在硅主要模具有极性的模式，并作为后续设备制造的模具师傅其副本。
该装置具有两个单独的图层： 第一层与微流控布局 （在介绍案件和组成的微流控通道，在-/ 出放开，CaF2视口观察室） 和一个平坦的表面 （第二层其中包括只 CaF2视区）。
在这里 UV 固化的光学胶，诺兰光学粘接 73 (NOA73，简称 NOA 从此)，用于塑料体主要的设备。有使用此光学胶粘剂的几个优点： 低制造成本、 易用性与外部系统、 光学透明度好、 低粘度和最重要的是，生物相容性13的连接。CaF2作为其生物相容性和优良的红外透明14视区是一个合适的选择。
这种新的方法，对微细加工设施的访问是严格要求只为主要模具制造。塑料微流控装置随后制备工艺可以在任何实验室配有 UV 光源进行。

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			<td height="21" style="height:21px;width:291px;">Chemical</td>
			<td style="width:212px;"></td>
			<td style="width:112px;"></td>
			<td style="width:243px;"></td>
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			<td height="42" style="height:42px;width:291px;">Trichloro(1H,1H,2H,2H-perfluorooctyl)silane 97%</td>
			<td style="width:212px;">Sigma Aldrich</td>
			<td style="width:112px;">448931-10G</td>
			<td style="width:243px;"></td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;width:291px;">Sylgard 184 Silicone Elastomer Kit</td>
			<td style="width:212px;">Dow Corning</td>
			<td style="width:112px;"></td>
			<td style="width:243px;">Polydimethylsiloxane or in short, PDMS</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:291px;">Norland Optical Adhesive 73</td>
			<td style="width:212px;">Norland Products Inc.</td>
			<td style="width:112px;">7304</td>
			<td style="width:243px;"></td>
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			<td height="21" style="height:21px;width:291px;">SU8 3010 photoresist</td>
			<td style="width:212px;">MicroChem</td>
			<td style="width:112px;">Y311060</td>
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			<td height="21" style="height:21px;width:291px;">SU8 developer</td>
			<td style="width:212px;">MicroChem</td>
			<td style="width:112px;">Y020100</td>
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			<td height="21" style="height:21px;width:291px;">Material</td>
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			<td height="21" style="height:21px;width:291px;">Silicon wafer, 4 inch, prime grade</td>
			<td style="width:212px;">Bonda Technology Pte Ltd</td>
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			<td style="width:243px;"></td>
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			<td height="21" style="height:21px;width:291px;">CaF2 IR-grade windows</td>
			<td style="width:212px;">Crystran, UK</td>
			<td style="width:112px;">CAFP10-1</td>
			<td style="width:243px;">10 mm diameter, 1 mm thickness</td>
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			<td height="21" style="height:21px;width:291px;">Acrylic templates</td>
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			<td style="width:243px;">Custom made</td>
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			<td height="21" style="height:21px;width:291px;">Equipment</td>
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			<td height="21" style="height:21px;width:291px;">UV-KUB 2 (UV LED exposure system)</td>
			<td style="width:212px;">KLOE</td>
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			<td style="width:243px;">Emission spectrum 365nm &#177; 5nm</td>
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			<td height="21" style="height:21px;width:291px;">Newport UV lamp</td>
			<td style="width:212px;">Newport</td>
			<td style="width:112px;">Model 66902</td>
			<td style="width:243px;">50-500 Watt Hg arc lamp</td>
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			<td height="21" style="height:21px;width:291px;">CEE Spin coater</td>
			<td style="width:212px;">Brewer Science</td>
			<td style="width:112px;">Model 200x</td>
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			<td height="21" style="height:21px;width:291px;">MJB4 mask aligner</td>
			<td style="width:212px;">SUSS MicroTec</td>
			<td style="width:112px;"></td>
			<td style="width:243px;"></td>
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			<td height="21" style="height:21px;width:291px;">Precision digital hot plate</td>
			<td style="width:212px;">Harry Gestigkeit GmbH</td>
			<td style="width:112px;">2860SR</td>
			<td style="width:243px;"></td>
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			<td height="42" style="height:42px;width:291px;">Plasma Surface Technology</td>
			<td style="width:212px;">Diener Electronic GmbH + Co. KG</td>
			<td style="width:112px;"></td>
			<td style="width:243px;">For O2 plasma treatment</td>
		</tr>
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			<td height="23" style="height:23px;width:291px;">IDP-3 Dry Scroll Vacuum Pump</td>
			<td style="width:212px;">Agilent Technologies</td>
			<td></td>
			<td>ultimate pressure 3.3 x 10-1 mbar</td>
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			<td height="21" style="height:21px;width:291px;">Bruker IFS 66v/s FTIR Spectrometer</td>
			<td style="width:212px;">Bruker</td>
			<td></td>
			<td></td>
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soft lithographic procedure for producing plastic microfluidic devices with view-ports transparent to visible and infrared light

红外 (IR) 分光显微镜的生活生物样品被阻碍水吸收的中红外范围内，适用于微流控设备缺乏。在这里，表现出塑料微流控器件的制备一种协议，软光刻技术用于嵌入透明氟化钙 (CaF2) 查看端口与观察理事会。该方法基于一个副本铸造方法，聚二甲基硅氧烷 (PDMS) 模具制作标准平版印刷手续，然后作为模板用于生产塑料设备。该塑料器件具有紫外/可见光和红外 (UV/Vis/IR)-透明窗口由 CaF2 ，以便直接观察可见和红外灯。该方法的优点包括： 减少对塑料的身体，灵活的设计，通过访问一个洁净室微加工设施，多个视图端口，方便和灵活的连接到外部的抽油系统的需求如，打开/关闭通道配置和添加复杂的功能，如纳米多孔膜的可能性。

图 6显示了一个全新的 CaF2窗口，图案半数的设备和完整的设备的透过率光谱。所有三种光谱展现优秀透明度中期 IR 透光率大于 80%。可见光谱中完整的器件 （图中黄色曲线） 的干涉图样被造成空气隙在 9-10 µ m 两扇窗户之间的范围。这些光谱表明，这里提出的制备方法并不改变 CaF2中期的红外光谱范围内的透明度。
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Watch this Scientific Journal Video about Soft Lithographic Procedure for Producing Plastic Microfluidic Devices with View-ports Transparent to Visible and Infrared Light at JoVE.com

Soft Lithographic Procedure for Producing Plastic Microfluidic Devices with View-ports Transparent to Visible and Infrared Light

该协议为塑料微流控器件的制备与透明查看端口的可见光和红外线光成像的描述。

生产塑料微流控装置与查看端口对可见光和红外透明软光刻过程

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Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

软平版功能化和图案无氧化硅和锗

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Layer-by-layer Collagen Deposition in Microfluidic Devices for Microtissue Stabilization

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Although microfluidics provides exquisite control of the cellular microenvironment, culturing cells within microfluidic devices can be challenging. 3D ...

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Enzyme-linked immunosorbent assay (ELISA) is a promising method to detect small amount of proteins in biological samples. The devices providing a platform ...

Rod-based Fabrication of Customizable Soft Robotic Pneumatic Gripper Devices for Delicate Tissue Manipulation

娇嫩的组织操纵定制的软机器人气动设备手爪基于杆制造

Soft compliant gripping is essential in delicate surgical manipulation for minimizing the risk of tissue grip damage caused by high stress concentrations ...

Multi-step Variable Height Photolithography for Valved Multilayer Microfluidic Devices

多级可变高度的光刻多层带瓣微流体装置

Microfluidic systems have enabled powerful new approaches to high-throughput biochemical and biological analysis. However, there remains a barrier to ...

Fabrication of Three-dimensional Paper-based Microfluidic Devices for Immunoassays

三维纸基微流体装置的制造用于免疫分析

Paper wicks fluids autonomously due to capillary action. By patterning paper with hydrophobic barriers, the transport of fluids can be controlled and ...

Microfluidic Bioprinting for Engineering Vascularized Tissues and Organoids

微流控生物工程血管化组织和细胞器解体

Engineering vascularized tissue constructs and organoids has been historically challenging. Here we describe a novel method based on microfluidic ...

Rapid Fabrication of Custom Microfluidic Devices for Research and Educational Applications

用于研究和教育应用的定制微流体器件的快速制造

Microfluidic devices allow for the manipulation of fluids, particles, cells, micro-sized organs or organisms in channels ranging from the nano to ...

Bioinspired Soft Robot with Incorporated Microelectrodes

生物灵感软机器人与合并微电极

Bioinspired soft robotic systems that mimic living organisms using engineered muscle tissue and biomaterials are revolutionizing the current biorobotics ...