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DOI :
10.3791/56127-v
•
6:39 min
September 14th, 2017
Chapters
0:05
Title
0:51
Preparation of Substrates and Set-up of Deposition Temperature
2:08
Preparation of Solution for Aerosol Generation
3:02
Chemical Vapor Deposition Process
4:00
Results: Characterization of Zinc Oxide Rods Deposited on Silicon Substrates via Chemical Vapor Deposition
5:39
Conclusion
在不使用 pre-deposited 催化剂-种子颗粒的情况下, 通过气溶胶辅助化学气相沉积法合成柱状氧化锌结构。这种方法是可伸缩和兼容的各种基板的基础上, 无论是硅, 石英或聚合物。
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