Name: fabrication of periodic gold nanocup arrays using colloidal lithography
Uploaded: 2017-09-02T13:00:00
Description: Watch this Scientific Journal Video about Fabrication of Periodic Gold Nanocup Arrays Using Colloidal Lithography at JoVE.com

这项研究是在太平洋西北国家实验室 (4500亿) 进行的, 这是由能源部巴特尔纪念研究所根据合同 No. 管理的。DE-AC05-76RL01830作者衷心感谢美国国务院通过机构间协议 SIAA15AVCVPO10 的关键核查资产基金 (V 基金) 的支持。

1. 材料准备 <ol> <li> 将数 2 in. 硅晶片放入石英载体中, 用于清洗并将硅片放入等离子蚀刻系统中。抽真空室直到它达到至少 75 mTorr。这可能需要几分钟的时间. </li>
	<li> 开始流的 O 2 (30 sccm) 气体, 并允许压力稳定。将蚀刻时间设置为15分钟。一旦室压力已稳定启动射频 (RF) 13.56 兆赫 250 W 等离子体. 
	注: 这一步清洗任何有机污染物的硅片和 functionalizes 表面与羟基 (-OH) 基从而确保亲水?...

<ol>
	<li>Fang, Y., Sun, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanoplasmonic+waveguides:+towards+applications+in+integrated+nanophotonic+circuits.">Nanoplasmonic waveguides: towards applications in integrated nanophotonic circuits.</a> Light Sci Appl. 4, e294 (2015).</li><li>Li, J. F., Anema, J. R., Wandlowski, T., Tian, Z. Q. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Dielectric+shell+isolated+and+graphene+shell+isolated+nanoparticle+enhanced+Raman+spectroscopies+and+their+applications.">Dielectric shell isolated and graphene shell isolated nanoparticle enhanced Raman spectroscopies and their applications.</a> Chemical Society Reviews. 44 (23), 8399-8409 (2015).</li><li>Wang, L., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Large+Area+Plasmonic+Color+Palettes+with+Expanded+Gamut+Using+Colloidal+Self-Assembly.">Large Area Plasmonic Color Palettes with Expanded Gamut Using Colloidal Self-Assembly.</a> ACS Photonics. , (2016).</li><li>Taylor, A. B., Michaux, P., Mohsin, A. S. M., Chon, J. W. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electron-beam+lithography+of+plasmonic+nanorod+arrays+for+multilayered+optical+storage.">Electron-beam lithography of plasmonic nanorod arrays for multilayered optical storage.</a> Optics Express. 22 (11), 13234-13243 (2014).</li><li>Endo, H., Mochizuki, Y., Tamura, M., Kawai, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fabrication+and+Functionalization+of+Periodically+Aligned+Metallic+Nanocup+Arrays+Using+Colloidal+Lithography+with+a+Sinusoidally+Wrinkled+Substrate.">Fabrication and Functionalization of Periodically Aligned Metallic Nanocup Arrays Using Colloidal Lithography with a Sinusoidally Wrinkled Substrate.</a> Langmuir. 29 (48), 15058-15064 (2013).</li><li>Wang, H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Symmetry+breaking+in+individual+plasmonic+nanoparticles.">Symmetry breaking in individual plasmonic nanoparticles.</a> Proceedings of the National Academy of Sciences. 103 (29), 10856-10860 (2006).</li><li>Wollet, L., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Plasmon+hybridization+in+stacked+metallic+nanocups.">Plasmon hybridization in stacked metallic nanocups.</a> Optical Materials Express. 2 (10), 1384-1390 (2012).</li><li>Duempelmann, L., Casari, D., Luu-Dinh, A., Gallinet, B., Novotny, L. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Color+Rendering+Plasmonic+Aluminum+Substrates+with+Angular+Symmetry+Breaking.">Color Rendering Plasmonic Aluminum Substrates with Angular Symmetry Breaking.</a> ACS Nano. 9 (12), 12383-12391 (2015).</li><li>King, N. S., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Angle-+and+Spectral-Dependent+Light+Scattering+from+Plasmonic+Nanocups.">Angle- and Spectral-Dependent Light Scattering from Plasmonic Nanocups.</a> ACS Nano. 5 (9), 7254-7262 (2011).</li><li>Mirin, N. A., Halas, N. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Light-Bending+Nanoparticles.">Light-Bending Nanoparticles.</a> Nano Letters. 9 (3), 1255-1259 (2009).</li><li>Eggleston, M. S., Messer, K., Zhang, L., Yablonovitch, E., Wu, M. C. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Optical+antenna+enhanced+spontaneous+emission.">Optical antenna enhanced spontaneous emission.</a> Proceedings of the National Academy of Sciences. 112 (6), 1704-1709 (2015).</li><li>Bora, M., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Plasmonic+black+metals+in+resonant+nanocavities.">Plasmonic black metals in resonant nanocavities.</a> Applied Physics Letters. 102 (25), 251105 (2013).</li><li>Akselrod, G. M., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Efficient+Nanosecond+Photoluminescence+from+Infrared+PbS+Quantum+Dots+Coupled+to+Plasmonic+Nanoantennas.">Efficient Nanosecond Photoluminescence from Infrared PbS Quantum Dots Coupled to Plasmonic Nanoantennas.</a> ACS Photonics. , (2016).</li></ol>

该协议演示了一种低成本、高效率的浆金 nanocups 周期阵列制作技术。这种技术是特别有利的, 因为它避免了串行自上而下的过程, 如电子束光刻或聚焦离子束铣削。所提出的技术表明, 商业可用的聚合物纳米可以直接自组装的方式作为一个纳米模板的进一步处理。
修改和故障排除:
如果胶片质量较差, 可能需要预纳米溶液。在这里, 我们使用了5...

电的出现与改进的纳米和合成技术一起带来了各种各样的令人兴奋的技术, 如 sub-diffraction 有限的迂回, 增强化学检测和光学传感1 ,2,3。在本协议中, 我们展示了一个可伸缩的和相对低成本的技术, 能够制造 nanopatterned 浆基板使用商业可用的聚合物纳米和蚀刻步骤后, 金属沉积。不像其他制造 nanopatterned 基板的技术, 如电子束光刻机4, 这种技术可以快速有效地扩展到300毫米的硅片, 并以最小的努力, 并使用转移步骤产生灵活和保形薄膜5。
自罗马时代以来, 我们就已经知道, 某些金属, 如金和银, 可以有灿烂的光学性能, 当他们细分化。今天, 我们了解到这些金属粒子在其尺寸接近纳米尺度时表现出一种叫做 "局部表面等离子体共振" (LSPR) 的效应。LSPR 类似于一个驻波, 在金属中发现的弱束缚电子在特定频率的光照亮金属粒子的时候, 会有连贯的振荡。各向异性纳米结构的特殊利益, 因为独特的光学共振可以出现, 由于对称打破6,7,8。
光半 (nanocup) 结构的光照可以激发电偶极子或磁偶极子等离子体模式, 这取决于金属的沉积角度、基体相对入射光的取向以及入射光的偏振度9。Nanocups 通常被认为类似于三维分裂环形谐振器, 其中谐振频率可以近似为 LC 振荡器10,11。谐振频率为聚合物纳米的大小这里使用 (170 毫微米), 沉积的金子的数量 (20 毫微米) 和蚀刻率产生共振频率横跨可见光和接近 IR。
金 nanocups 的光学性能可以通过透射或反射来测量, 这取决于用于自旋涂层的基底。在所提出的协议, 我们选择使用2在. 硅晶片作为基板和执行反射测量后, 金属沉积。测量是使用显微镜耦合的色散光谱仪与卤素光源。我们也成功地使用玻璃基板, 允许在金属沉积后立即进行透射和反射测量。此外, 该技术可以很容易地进行缩放, 并且不限于2。由于高品质单分散聚合物纳米的广泛商业可用性, 简单地从不同大小的纳米开始调整这些结构的光学特性是直接的。
在本协议中, 使用一种称为胶体光刻的方法来制造各向异性半 (或 nanocup) 金纳米结构的技术。胶体光刻采用高度单分散聚合物纳米的自组装, 以快速模式的基板, 可以进一步加工成一个浆基板后溅射涂层一薄层的黄金。同样, 通过在金属沉积过程中倾斜样品基体, 可以调节基体的各向异性。由于所形成的纳米结构的各向异性, 因此产生的构造是极化敏感的。在这里, 我们演示一个特殊的情况, 并进行光学表征和剥离, 以转移到一个透明的, 灵活的薄膜结构。

<table border="0" cellpadding="0" cellspacing="0" width="762">
	<tbody>
		<tr height="43">
			<td height="43" style="height:43px;width:204px;">Polystyrene microspheres</td>
			<td style="width:152px;">Bangs Laboratories, Inc.</td>
			<td style="width:209px;">PS02N</td>
			<td style="width:197px;">170 nm &#8211; 580 nm diameter</td>
		</tr>
		<tr height="43">
			<td height="43" style="height:43px;width:204px;">Silicon wafers</td>
			<td style="width:152px;">El-CAT, Inc.</td>
			<td style="width:209px;">3489</td>
			<td style="width:197px;">300 mm thick, one side polished [100]</td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Adhesive tape</td>
			<td style="width:152px;">3M</td>
			<td style="width:209px;">Scotch 600</td>
			<td style="width:197px;"></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Spin coater</td>
			<td style="width:152px;">Laurell</td>
			<td style="width:209px;">WS-650-23B</td>
			<td style="width:197px;"></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Plasma etcher</td>
			<td style="width:152px;">Nordson March&#160;</td>
			<td style="width:209px;">AP-600</td>
			<td style="width:197px;"></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Microspectrophotometer</td>
			<td style="width:152px;">CRAIC</td>
			<td style="width:209px;">380-PV</td>
			<td style="width:197px;"></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Sonicator</td>
			<td style="width:152px;">VWR</td>
			<td style="width:209px;">97043-932</td>
			<td style="width:197px;"></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Scintillation vials</td>
			<td style="width:152px;">Wheaton</td>
			<td style="width:209px;">986734</td>
			<td style="width:197px;"></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">5 um syringe filter</td>
			<td>Millex</td>
			<td>SLSV025LS</td>
			<td></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Oxygen gas</td>
			<td>Oxarc</td>
			<td>PO249&#160;</td>
			<td>Industrial Grade 99.5% purity</td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Vaccum pump</td>
			<td>Kurt J. Lesker</td>
			<td>Edwards 28</td>
			<td></td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;">Disposable syringes</td>
			<td>Air Tite Products Co.</td>
			<td>14-817-25</td>
			<td>1 mL capacity</td>
		</tr>
		<tr height="22">
			<td height="22" style="height:22px;width:204px;">Water</td>
			<td>Sigma-Aldrich</td>
			<td>W4502</td>
			<td></td>
		</tr>
	</tbody>
</table>

fabrication of periodic gold nanocup arrays using colloidal lithography

近年来, 随着研究人员展示了与化学和光学相关的令人兴奋的应用与新的纳米技术相结合, 电的领域发生了爆炸。等离子体是电荷密度振荡的量子, 它借给纳米金属, 如金和银独特的光学特性。特别是, 金和银纳米粒子表现出局部表面等离子体共振-集体电荷密度振荡的表面 nanoparticle-in 的可见光谱。在这里, 我们专注于制作的各向异性浆纳米结构的周期阵列。这些半 (或 nanocup) 结构可以表现出额外的独特的 light-bending 和偏振相关的光学性质, 简单的各向同性纳米材料不能。研究人员对 nanocups 的周期性阵列的制作有兴趣, 例如低成本光学器件、表面增强拉曼散射和篡改指示等。我们提出了一个可伸缩的技术, 基于胶体光刻, 它可以很容易地制造大周期阵列的 nanocups 使用自旋涂层和自行组装商业可用的聚合物纳米。电子显微镜和光学光谱学从可见光到近红外线 (近红外) 进行, 以确认成功的 nanocup 制造。最后, 我们演示了 nanocups 转移到一个灵活的, 保形胶膜。

用 170 nm 直径的聚苯乙烯纳米制备了金 nanocups。退火后2分钟, 在107° c 和蚀刻与 75 W, 20 sccm O2等离子体为 165s, 产生的薄膜的特点是使用 SEM (图 1)。为了评估自旋浇铸薄膜的质量, 可使用光学 microscopy-in 除目视检查外 (图 2)。高质量的电影应该基本上没有瑕疵。即使在高品质的薄膜中, 晶界通常也会被观察到, 但要仔细注意?...

Watch this Scientific Journal Video about Fabrication of Periodic Gold Nanocup Arrays Using Colloidal Lithography at JoVE.com

Fabrication of Periodic Gold Nanocup Arrays Using Colloidal Lithography

我们用胶体光刻技术演示了周期性金 nanocup 阵列的制作, 并讨论了 nanoplasmonic 薄膜的重要性。

用胶体光刻制备周期性金 Nanocup 阵列

Within recent years, the field of plasmonics has exploded as researchers have demonstrated exciting applications related to chemical and optical sensing ...

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