Name: design and characterization methodology for efficient wide range tunable mems filters
Uploaded: 2018-02-04T13:00:00
Description: Watch this Scientific Journal Video about Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters at JoVE.com

这项工作得到了美国陆军研究实验室的支持, 阿德尔菲, 马里兰州, 美国, 根据赠款 W91ZLK-12-P-0447。共振测量是在迈克尔. 斯通和安东尼. 布洛克的帮助下进行的。热摄相机的测量是在科诺菲尔的帮助下进行的乔治华盛顿大学。

1. 优选结构的选择与设计
<ol><li>选择用于宽范围频率调谐的固定固定光束 (与其他候选者相比, 它在加热时可以进行宽范围调谐, 因为其温度系数大 (TCF) 和可忽略的热膨胀常数)。</li>
	<li>设计一个更长的光束, 如果目的是调整效率的改善。设计一个较短的光束, 如果目的是跳频或信号跟踪应用。</li>
</ol>2. 互补金属氧化物半导体 (CMOS) 的建模和制造
<ol><li>设计并制作了基于有限元...

<ol>
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建立 MEMS 滤波器的关键步骤之一是设计基于应用领域的设备。为了更好的调谐效率 (ppm/兆瓦), 光束应该更长或更薄, 但对于跳频或信号跟踪应用来说, 更短或更薄。同样地, 通过 LDV 的清晰信号检测是设备测试的关键, 这就是为什么最好设计至少3-4 µm 厚度的光束。否则, 信号将是嘈杂的, 即使是100X 镜头, 它需要多点测试与噪声消除 (嵌入在 LDV 软件), 以达到最佳的检测。由于其大型 TCF, 固定固定梁, ?...

由于其可靠性高、功耗低、设计紧凑、质量因数高、成本低等特点, 对 MEMS 滤波器的需求越来越大。它们在无线通信中被广泛用作传感器和核心部件。温度传感器1、生物传感器2、3、气体传感器4、过滤器5、6、7和振荡器是最受欢迎的应用领域。最流行的静电 MEMS 滤波器有固定固定光束5,8, 悬臂式2, 音叉6, 自由光束6,7, 弯曲磁盘设计7,方形形状设计9。
在实现 MEMS 滤波器时, 有许多关键步骤, 如设计方法 (基于应用的结构优化、宽范围频率调谐范围、避免故障) 和特性 (快速原型, 避免寄生电容, 并检测更高的模式)。由于制造公差或环境温度变化引起的频率变化, 需要频率调谐能力来补偿。在文献中报告了不同的技术10、11、12 , 以满足此要求;但是, 它们有一些缺点, 如频率调谐能力有限、中心频率低、附加的后处理要求和外置加热器10、11。
在本研究中, 我们提出的宽范围频率调谐的焦耳加热法5,13在有限的频率调谐范围内通过弹性模数变化12 (增加直流偏置电压之间的两个相邻的光束) 和材料相变方法10,11。并在 Göktaş和 Zaghloul13中总结了优化结构选择和基于应用的设计。在这里, 我们展示了如何调整固定固定梁的谐振频率, 增加直流电压应用于嵌入式加热器的帮助下, LDV。为了使调谐机构可视化, 有限元分析 (FEM) 模拟与同一帧中的 LDV 测量同步。这包括在整个光束的焦耳加热和弯曲剖面。
我们还介绍了可能的故障 (烧毁设备和迟滞) 及其建议的解决方案。焦耳加热法与固定固定梁的高热应力相结合, 提供了宽范围的频率调谐, 但同时也能在一定的温度水平上产生烧损装置。这归因于不同材料之间的高热应力14。解决办法是增加两个相邻光束之间的直流电压, 从而增加调谐范围 (32%), 并消除对高温的需求。此 "调优范围" 方法首先在 Göktaş和 Zaghloul5中演示, 在 Göktaş和 Zaghloul13中进行了更详细的说明, 并在这里重新介绍。迟滞, 另一方面, 可以发生在制造过程或共振操作。有许多技术提出解决这个问题, 如应用表面涂层, 以减少附着力的能量15,16, 增加表面粗糙度17, 以及激光修复过程18。相比之下, 我们提出了一个简单的技术, 在两个连接光束之间应用了低频方波信号, 并成功地用 LDV 记录了分离。这种方法可以消除额外的成本, 降低设计的复杂性。
另一个关键的步骤, 在建设一个国家的艺术 MEMS 过滤器的特性和验证。用网络分析仪进行表征是最常用和最广泛的方法之一;然而, 它有一些缺点。即使是小的寄生电容也会杀死信号, 所以这通常需要放大电路3,6,8以消除噪声, 并且它只能检测到第一模共振。另一方面, 与 LDV 的表征是无寄生电容问题, 并能检测到更小的位移。这使得快速原型, 同时消除了对放大器设计的需要。此外, LDV 可以检测 MEMS 滤波器的高模态共振。这一特性非常有前景, 特别是在高度敏感的生物传感器领域。较高的悬臂模式可以提供更高的灵敏度19。给出了 LDV 固定梁的高模态测量方法, 并将其应用于有限元模拟测量。有限元模拟的过早结果与固定固定梁的第一模式相比, 灵敏度提高了46倍。

<table border="0" cellpadding="0" cellspacing="0" width="573">
	<tbody>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Laser Doppler Vibrometer</td>
			<td style="width:71px;">Polytec</td>
			<td style="width:119px;">Polytec MSA-500</td>
			<td style="width:167px;"></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Scanning Electron Microscope</td>
			<td style="width:71px;">Zeiss</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Thermal Camera</td>
			<td style="width:71px;">X</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Power Supply&#160;</td>
			<td style="width:71px;">Egilent</td>
			<td style="width:119px;">(E3631A)</td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Microscope</td>
			<td style="width:71px;">X</td>
			<td style="width:119px;"></td>
			<td></td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Coventor</td>
			<td style="width:71px;">Coventor</td>
			<td style="width:119px;"></td>
			<td>Simulation Tool</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Cadence Virtuoso</td>
			<td style="width:71px;">Cadence</td>
			<td style="width:119px;"></td>
			<td>Simulation Tool</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Multisim</td>
			<td style="width:71px;">Multisim</td>
			<td style="width:119px;"></td>
			<td>Simulation Tool</td>
		</tr>
	</tbody>
</table>

design and characterization methodology for efficient wide range tunable mems filters

在这里, 我们展示了激光多普勒测 (LDV) 优于传统技术 (网络分析仪) 的优势, 以及创建基于应用的机械系统 (MEMS) 过滤器的技术, 以及如何有效地使用它 (即, 调优功能并避免故障和迟滞。LDV 使网络分析仪无法进行关键的测量, 如高模式检测 (高度灵敏的生物传感器应用) 和非常小设备 (快速原型) 的共振测量。因此, LDV 被用来表征的频率调谐范围和谐振频率在不同模式的 MEMS 滤波器为本研究所建立。这种宽范围频率调谐机构是基于从嵌入式加热器的焦耳加热和相对较高的热应力就固定固定梁的温度。然而, 我们证明, 这种方法的另一个限制是产生高的热应力, 它可以燃烧的设备。在这项研究中首次取得了进一步的改进, 并显示了在两个相邻光束之间增加了外加直流偏置电压 (25 伏至35伏), 从而使调谐能力增加了32%。这个重要的发现消除了额外的焦耳加热在更广泛的频率调谐范围的需要。另一个可能的失败是通过迟滞和结构优化的要求: 我们提出了一种简单易行的低频方波信号应用技术, 它能够成功地分离光束, 消除了需要在文献中给出的复杂的方法。上述发现需要设计方法, 因此我们也提供了基于应用程序的设计。

采用低频方波信号, 避免了迟滞, 使用 LDV (图 1) 验证了这一点。在显微镜下 (图 2) 验证了在将相对较高的偏置直流电压应用于嵌入式加热器时, 由于高热应力14可能导致的故障。该有限元程序用于推导光束的更高模式 (图 3)。通过改变两个相邻光束之间的直流偏置电压 (25 v 到 35 v) 来改变调...

Watch this Scientific Journal Video about Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters at JoVE.com

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

高效宽量程可调谐 MEMS 滤波器的设计与表征方法

本文提出了一种利用激光多普勒测 (LDV) 进行固定波束设计的协议, 包括频率调谐的测量、调谐能力的修正以及设备故障和迟滞的避免。LDV 方法在网络分析仪上的优越性是由于其较高的模态能力而表现出来的。

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...

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Design and Implementation of a Bespoke Robotic Manipulator for Extra-corporeal Ultrasound

一种用于体外超声的自定义机器人机械手的设计与实现

With the potential for high precision, dexterity, and repeatability, a self-tracked robotic system can be employed to assist the acquisition of real-time ...