Design and Characterization Methodology for Efficient Wide Range Tunable MEMS FiltersHasan Goktas 1
1Department of Electrical and Electronic Engineering, Harran University
A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.
