Name: fabrication of ultra-thin color films with highly absorbing media using oblique angle deposition
Uploaded: 2017-08-29T15:00:00
Description: Watch this Scientific Journal Video about Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition at JoVE.com

这项研究得到了无人驾驶车辆先进的核心技术研究和开发方案的支持, 这是由科学、信通技术和未来规划部资助的无人驾驶车辆高级研究中心 (UVARC), 大韩民国 (2016M1B3A1A01937575)

警告: 在本协议中使用的某些化学品 (如 、缓冲氧化物蚀刻、异丙醇、 等) 可能对健康有害。在进行任何样品准备之前, 请查阅所有相关的材料安全数据表。在处理蚀刻和溶剂时, 使用适当的个人防护设备 ( 例如 、实验室大衣、安全眼镜、手套、 等 ) 和工程控制 (如 、湿站、油烟罩等). 
 1. 制备 Si 衬底 <ol> <li> 使用金刚石刀具, 将4英寸硅片切成 2 cm x 2 厘米大小的正?...

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在常规的着色薄膜涂层中,3、4、5、6, 可以通过改变不同的材质和调整厚度来控制颜色。材料的选择以不同的折射率是有限的调整各种各样的颜色。为了放宽这一限制, 我们利用斜角沉积法对薄膜色层进行了处理。根据沉积角度的不同, Ge 层的孔隙率由原子阴影11改变, 如<strong class="xfig...

一般而言, 薄膜光学涂层的性能是基于它们产生的光干涉的类型, 如高反射或透射。在介质薄膜中, 光干扰可以通过满足条件, 如四分之一波厚度 (λ/4 n) 得到。干涉原理早已被用于各种光学应用, 如法布里-珀罗干涉仪和分布式布拉格反射器1,2。近年来, 使用高吸水性材料如金属和半导体的薄膜结构得到了广泛的研究3,4,5,6。薄膜涂层上的吸收性半导体材料可以获得强光干扰, 在反射波中产生不平凡的相变。这种类型的结构允许超薄涂层比介质薄膜涂层更薄。
最近, 我们研究了利用孔隙率7提高高吸水性薄膜的色调谐和色纯度的方法。通过控制沉积膜的孔隙率, 可以改变薄膜介质的有效折射率8。这种有效折射率的变化使得光学特性得以改善。在此基础上, 利用严格耦合波分析 (RCWA)9, 设计了不同厚度和孔隙的超薄型彩色薄膜。我们的设计在每个孔隙度7中呈现不同胶片厚度的颜色。
采用了一种简单的斜角沉积方法来控制高吸水性薄膜涂层的孔隙率。斜角沉积技术基本上结合了一个典型的沉积系统, 如电子束蒸发器或热蒸发器, 与倾斜的基板10。入射通量的倾斜角产生原子阴影, 从而产生蒸汽通量无法直接到达11的区域。斜角沉积技术在各种薄膜涂层应用中得到了广泛使用12,13,14。
在这项工作中, 我们详细介绍了利用电子束蒸发器的斜淀积制备超薄彩色薄膜的工艺。另外, 还分别介绍了大面积加工的其他方法。除了工艺步骤外, 还详细说明了在制作过程中应注意的一些问题。
我们还回顾了测量加工样品的反射率并将它们转换成颜色信息进行分析的过程, 这样它们就可以用 CIE 的颜色坐标和 RGB 值15来表示。此外, 还讨论了超薄彩色薄膜制作过程中应考虑的一些问题。

<table border="0" cellpadding="0" cellspacing="0" width="757">
	<tbody>
		<tr height="23">
			<td height="23" style="height:23px;width:216px;">&#160;KVE-2004L</td>
			<td style="width:185px;">Korea Vacuum Tech. Ltd.</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">E-beam evaporator system</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Cary 500</td>
			<td style="width:185px;">Varian, USA</td>
			<td style="width:129px;"></td>
			<td>UV-Vis-NIR spectrophotometer</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">T1-H-10</td>
			<td style="width:185px;">Elma</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">Ultrasonic bath</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">HSD150-03P</td>
			<td style="width:185px;">Misung Scientific Co., Ltd</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">Hot plate</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Isopropyl Alcohol (IPA)</td>
			<td style="width:185px;">OCI Company Ltd.</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">Isopropyl Alcohol (IPA)</td>
		</tr>
		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Buffered Oxide Etch 6:1</td>
			<td style="width:185px;">Avantor</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">Buffered Oxide Etch 6:1</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">Acetone</td>
			<td style="width:185px;">OCI Company Ltd.</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">Acetone</td>
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		<tr height="63">
			<td height="63" style="height:63px;width:216px;">4inch Silicon Wafer</td>
			<td style="width:185px;">Hi-Solar Co., Ltd.</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">4inch Silicon Wafer (P-100, 1-20 ohm.cm, Single side polished, Thickness: 440&#177;20&#956;m)</td>
		</tr>
		<tr height="63">
			<td height="63" style="height:63px;width:216px;">2inch Silicon Wafer</td>
			<td style="width:185px;">Hi-Solar Co., Ltd.</td>
			<td style="width:129px;"></td>
			<td style="width:227px;">2inch Silicon Wafer (P-100, 1-20 ohm.cm, Single side polished, Thickness: 440&#177;20&#956;m)</td>
		</tr>
	</tbody>
</table>

fabrication of ultra-thin color films with highly absorbing media using oblique angle deposition

超薄薄膜结构已被广泛应用于光学涂层, 但性能和制造方面的挑战依然存在。 提出了一种改进的超薄型彩色薄膜的制备方法。建议的过程涉及几个制造问题, 包括大面积处理。具体地说, 该协议描述了使用电子束蒸发器在硅 (Si) 衬底上的锗 (Ge) 和金 (Au) 的斜角沉积制备超薄彩色胶片的过程。 由斜角沉积产生的薄膜孔隙率导致超薄薄膜的颜色变化。颜色变化程度取决于沉积角度和膜厚等因素。超薄彩色薄膜的制备样品显示出改进的颜色调谐和颜色纯度。此外, 将所测样品的反射率转化为色值, 并根据颜色进行分析。我们的超薄薄膜制作方法可望用于各种超薄薄膜应用, 如柔性色电极、薄膜太阳能电池和光学滤光片等。此外, 在这里开发的过程中分析的颜色, 制作样品是广泛的有用的研究各种颜色结构。

图 2a显示了 2 cm x 2 cm 制作样品的图像。样品被制作了, 以便影片有不同的厚度 (即, 10 毫微米, 15 毫微米, 20 毫微米和25毫微米) 并且被存放了在不同的角度 (即, 0 °, 30 °, 45 °和 70)。沉积薄膜的颜色随样品厚度和沉积角度的不同而变化。颜色的变化是由于薄膜孔隙度的变化引起的。根据沉积角度, 在基板上创建单个纳米柱的倾斜阵列, 如图 2?...

Watch this Scientific Journal Video about Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition at JoVE.com

Fabrication of Ultra-thin Color Films with Highly Absorbing Media Using Oblique Angle Deposition

用斜角沉积法制备高吸收介质的超薄彩色薄膜

本文介绍了一种改进的光学涂层超薄型彩色薄膜的制备方法。采用电子束蒸发器的斜角沉积技术可提高色调谐和纯度。利用反射测量和颜色信息转换, 分析了锗和 Au 在 Si 衬底上的制备膜。

Ultra-thin film structures have been studied extensively for use as optical coatings, but performance and fabrication challenges remain.&#160; We present ...

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