Name: flow-assisted dielectrophoresis: a low cost method for the fabrication of high performance solution-processable nanowire devices
Uploaded: 2017-12-07T14:00:00
Description: Watch this Scientific Journal Video about Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices at JoVE.com

作者想感谢 ESPRC 和 BAE 系统的财政支持, 和 Prof. 布莱恩 a. Korgel 和他的小组供应的 SFLS 生长硅纳米线用于这项工作。

警告: 除非另有规定, 所有的程序都要在干净的房间环境中进行, 并进行风险评估, 以确保纳米线和化学品处理过程中的安全。纳米材料可能有许多健康方面的影响, 这是未知的, 所以应该处理适当的照顾21。
注: 该过程从基板的制备开始, 然后是第一个光刻和金属沉积步骤来定义 DEP 接触。然后通过 DEP 组装纳米线, 再选择一个可选的光刻和金属沉积步骤, 将顶端...

<ol>
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K., Zhou, W., Peng, N., Zhang, Q. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High+sensitivity+SnO2+single-nanorod+sensors+for+the+detection+of+H2+gas+at+low+temperature.">High sensitivity SnO2 single-nanorod sensors for the detection of H2 gas at low temperature.</a> Nanotech. 20 (11), 115501 (2009).</li><li>Rutherglen, C., Jain, D., Burke, P. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanotube+electronics+for+radiofrequency+applications.">Nanotube electronics for radiofrequency applications.</a> Nat. nanotech. 4 (12), 811-819 (2009).</li><li>Kang, M. G., Hwang, D. H., Kim, B. S., Whang, D., Hwang, S. 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器件的成功制造和性能取决于几个关键因素。这些包括纳米线的密度和在配方中的分布, 溶剂的选择, DEP 的频率, 以及对器件电极上存在的纳米导线数量的控制1。
实现可重复工作装置的关键步骤之一是制备无簇或块状的纳米线配方。该配方可声前, 以减少团簇数量和保持纳米线分散。一个溶液的密度一旦被制造, 也很难控制, 特别是如果纳米线可能凝固, 这可?...

纳米粒子在预先定义的基底位置的可控性和可再生性组装是利用半导体或导电纳米粒子的解决方案处理的电子和光子器件的主要挑战之一。对于高性能器件来说, 能够选择具有优先尺寸的纳米粒子, 以及特殊的电子特性, 包括高导电性和低密度的表面陷阱状态, 也是非常有益的。尽管纳米线和纳米管材料的发展有了很大的进展, 但纳米粒子的某些特性始终存在, 选择步骤可以显著改善纳米粒子的性能1 ,2。
在这项工作中演示的流辅助 DEP 方法的目的是通过向高性能纳米线场效应晶体管显示可控的半导体纳米导线组装到金属触点上来解决上述挑战。dep 解决了纳米线器件制造中的几个问题, 包括纳米导线的定位、纳米线的对准/定位、以及所需性能的纳米线的选择via dep 信号频率选择1。DEP 已用于许多其他设备, 从气体传感器3, 晶体管1, 和 RF 开关4,5, 到细菌的定位分析7。
DEP 是通过非均匀电场的应用来操纵极化粒子, 从而使纳米线在电极上的自组装成为8。该方法最初是为操作细菌而开发的9,10 , 但此后已扩展到对纳米线和纳米材料的操作。
纳米粒子的 DEP 解决方案使半导体器件的制造与传统的基于多 photomasking、离子注入、高温14、退火和蚀刻的顶向下技术截然不同。步骤.由于 DEP 操作已经合成的纳米粒子, 所以它是一种低温、自下而上的制作技术11。这种方法允许大型纳米线器件在几乎任何基板上组装, 包括温度敏感、柔性塑料衬底6、12、13。
在这项工作中, 使用流辅助 DEP 制作高性能 p 型硅纳米线场效应晶体管, 并进行 FET 电流电压特性表征。这项工作中使用的硅纳米线是通过超级流体固体 (SFLS) 方法15,16来发展的。纳米线被有意掺杂, 直径约 10-50 µm, 长度为 30-40 nm。SFLS 的生长方法是非常诱人的, 因为它可以提供行业可伸缩的数量的纳米线材料15。所提出的纳米线组装方法直接适用于其他半导体纳米线材料, 如 InAs13、诺23和 GaN18。该技术还可以扩展到对齐导电纳米线19 , 并将纳米粒子置于电极间隙位置20。

<table border="1" fo:keep-together.within-page="1" fo:keep-with-next.within-page="always">
	<tbody>
		<tr>
			<td>Silicon/silicon dioxide wafer, CZ method growth, 100mm diameter,&#160; 300 nm oxide thermal growth,&#160; n-doped phosphorus</td>
			<td>Si-Mat (Silicon materials)</td>
			<td>-</td>
			<td>http://si-mat.com/</td>
		</tr>
		<tr>
			<td>Acetone (200ml)</td>
			<td>Sigma Aldrich</td>
			<td>W332615</td>
			<td>-</td>
		</tr>
		<tr>
			<td>Isopropanol (200ml)</td>
			<td>Sigma Aldrich</td>
			<td>W292907</td>
			<td>-</td>
		</tr>
		<tr>
			<td>Deionised water (150ml)</td>
			<td>On site supply</td>
			<td>-</td>
			<td>-</td>
		</tr>
		<tr>
			<td>Photoresist (A) SF6 PMGI under etch photoresit (approx 1 ml per sample)</td>
			<td>Microchem&#160;</td>
			<td>-</td>
			<td>http://microchem.com/pdf/PMGI-Resists-data-sheetV-rhcedit-102206.pdf</td>
		</tr>
		<tr>
			<td>Photoresist (B) S1805 photoresit) (approx 1 ml per sample)</td>
			<td>Microchem&#160;</td>
			<td>-</td>
			<td>http://www.microchem.com/PDFs_Dow/S1800.pdf</td>
		</tr>
		<tr>
			<td>Photoresist developer (A) Microposit&#160; MF319&#160; (100ml)</td>
			<td>Microchem&#160;</td>
			<td>-</td>
			<td>http://microchem.com/products/images/uploads/MF_319_Data_Sheet.pdf</td>
		</tr>
		<tr>
			<td>Photoresist remover (A) Microposit remover 1165 (300ml (2 baths 150 each))</td>
			<td>Microchem&#160;</td>
			<td>-</td>
			<td>http://micromaterialstech.com/wp-content/dow_electronic_materials/datasheets/1165_Remover.pdf</td>
		</tr>
	</tbody>
</table>

flow-assisted dielectrophoresis: a low cost method for the fabrication of high performance solution-processable nanowire devices

流辅助介 (DEP) 是一种高效的自组装方法, 可用于纳米线的可控、可重复定位、对准和选择。DEP 用于纳米线的分析、表征以及基于溶液的半导体器件的制造。该方法的工作原理是在金属电极之间应用交流电场。纳米线的配方, 然后下降到电极上, 在一个倾斜的表面, 以创造一个流动的配方使用重力。然后, 纳米线沿着电场的梯度和液体流动的方向排列。该场的频率可以调整, 以选择具有优越的导电率和较低的陷阱密度纳米线。
在这项工作中, 流辅助 DEP 用于创建纳米线场效应晶体管。流动辅助 DEP 有几个优点: 它允许选择纳米线的电学性质;纳米线长度的控制;纳米线在特定区域的放置;纳米线定向的控制;和控制纳米线密度的装置。
该技术可以扩展到许多其他应用, 如气体传感器和微波开关。该技术效率高、速度快、重现性好, 使用了少量的稀溶液, 使其适合于新型纳米材料的测试。纳米线器件的晶片规模组装也可以使用这种技术实现, 允许大量的样品用于测试和大面积电子应用。

双层光刻结果在清洁尖锐定义的电极。在示例 (图 1A) 中, digitated 的手指结构使用了10µm 的通道长度。当应用 DEP 力时, 这些结构允许大面积的纳米线的最大数目聚集。图 1B显示了底部栅纳米线 FET 装置的示意图。
不正确的纳米线分散浓度, 以及不足的超声可能导致质量较差的分散体, ...

Watch this Scientific Journal Video about Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices at JoVE.com

Flow-assisted Dielectrophoresis: A Low Cost Method for the Fabrication of High Performance Solution-processable Nanowire Devices

本文对纳米线器件的自组装进行了流动辅助介。以硅纳米线场效应晶体管的制备为例。

流动辅助介: 一种低成本的制备高性能溶液可纳米线器件的方法

Flow-assisted dielectrophoresis (DEP) is an efficient self-assembly method for the controllable and reproducible positioning, alignment, and selection of ...

Research

JoVE Journal

Engineering

Analysis of Contact Interfaces for Single GaN Nanowire Devices

单氮化镓纳米线设备分析接触界面

Single GaN nanowire (NW) devices fabricated on SiO2 can exhibit  a strong degradation after annealing due to the  occurrence of void formation at the ...

科研

工程学

Solvent Bonding for Fabrication of PMMA and COP Microfluidic Devices

溶剂粘接的PMMA的制备和COP微流体装置

Thermoplastic microfluidic devices offer many advantages over those made from silicone elastomers, but bonding procedures must be developed for each ...

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

具有嵌入式金属网的高性能，灵活，透明电极的可扩展解决方案处理制造策略

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

Detecting the Water-soluble Chloride Distribution of Cement Paste in a High-precision Way

高精度水泥浆水溶氯分布的检测

To improve the accuracy of the chloride distribution along the depth of cement paste under cyclic wet-dry conditions, a new method is proposed to obtain a ...

Method for Recording Broadband High Resolution Emission Spectra of Laboratory Lightning Arcs

记录实验室闪电弧宽带高分辨率发射光谱的方法

Lightning is one of the most common and destructive forces in nature and has long been studied using spectroscopic techniques, first with traditional ...

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

基于范德华 Heteroepitaxy 的柔性铁电元件制备及测量方法

Flexible non-volatile memories have received much attention as they are applicable for portable smart electronic device in the future, relying on ...

Fabrication of Refractive-index-matched Devices for Biomedical Microfluidics

生物医学微流体折射率匹配器件的研制

The use of microfluidic devices has emerged as a defining tool for biomedical applications. When combined with modern microscopy techniques, these devices ...

Low-cost Custom Fabrication and Mode-locked Operation of an All-normal-dispersion Femtosecond Fiber Laser for Multiphoton Microscopy

用于多光子显微镜的全正常分散飞秒光纤激光器的低成本定制制造和模式锁定操作

A protocol is presented to build a custom low-cost yet high-performance femtosecond (fs) fiber laser. This all-normal-dispersion (ANDi) ytterbium-doped ...

Determination of Aggregate Surface Morphology at the Interfacial Transition Zone (ITZ)

Determination of Aggregate Surface Morphology at the Interfacial Transition Zone ITZ

在界面过渡区（ITZ）的聚合曲面形态测定

Here, we present a comprehensive method to illustrate the uneven distribution of the interfacial transition zone (ITZ) around the aggregate and the effect ...

Fabrication and Design of Wood-Based High-Performance Composites

基于木材的高性能复合材料的制造与设计

Delignified densified wood is a new promising and sustainable material that possesses the potential to replace synthetic materials, such as glass fiber ...