Name: fabrication of flexible image sensor based on lateral nipin phototransistors
Uploaded: 2018-06-23T14:00:00
Description: Watch this Scientific Journal Video about Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors at JoVE.com

Denne forskning blev støttet af den kreative materialer Discovery Program gennem National Research Foundation af Korea (NRF) finansieret af Ministeriet for videnskab og IKT (NRF-2017M3D1A1039288). Også blev denne forskning støttet af Institut for informations- og kommunikations teknologi fremme (IITP) tilskud finansieret af Korea regering (MSIP) (No.2017000709, integrerede strategier for fysisk unclonable kryptografiske primitiver ved hjælp af tilfældige lasere og optoelektronik).

Forsigtig: Nogle kemikalier (dvs., flussyre, buffered oxid TIPkan, isopropylalkohol, osv.) anvendes i denne protokol kan være sundhedsfarlige. Kontakt venligst alle relevante leverandørbrugsanvisninger, før nogen prøveforberedelse finder sted. Bruge relevante personlige værnemidler (fx., lab frakker, sikkerhedsbriller, handsker) og teknisk kontrol (fx., våd station, fume hood) ved håndtering af produktet og opløsningsmidler.
1. Si Doping og Isolation</...

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Den fabrikation teknologi beskrevet her bidrager væsentligt til udvikling af avanceret elektronik og bærbare enheder. De grundlæggende begreber i denne fremgangsmåde bruger en tynd Si membran og metal samkøringslinjer i stand til at strække. Selvom Si er en skør og hårde materiale, der kan nemt være brækket, kan et meget tyndt Si opnå en fleksibilitet26,27. I tilfælde af metal samkøringslinjen tilbyder den bølgede form strækbarhed og fleksibilitet<...

Bio-inspirerede Billeddannende systemer kan give mange fordele i forhold til de konventionelle imaging systems1,2,3,4,5. Nethinden eller halvkugleformet ommatidia er en væsentlig komponent i biologisk visuelle system1,2,6. En buet billedsensor, der efterligner det kritiske element i dyrenes øjne, kan give en kompakt og enkel konfiguration af optiske systemer med lav aberrationer7. Forskellige uddybelser fabrication teknikker og materialer, for eksempel, brug af uløseligt bløde materialer som økologisk/nanomaterialer8,9,10,11, 12 og indførelsen af deformerbare strukturer til halvledere herunder silicium (Si) og germanium (Ge)1,2,3,13,14, 15,16,17, realisere de buede billedsensorer. Blandt dem giver Si-baserede tilgange iboende fordele såsom en overflod af materiale, modne teknologi, stabilitet og optisk/elektrisk overlegenhed. Af denne grund, selvom Si har iboende stivhed og sprødhed, er Si-baserede fleksible elektronik blevet bredt undersøgt for forskellige anvendelser, såsom fleksibel Optoelektronik18,19,20 herunder buede billede sensorer1,2,3, og endda wearable healthcare enheder21,22.
I en nylig undersøgelse, vi analyseret og forbedret den elektriske udførelse af en tynd Si fotodetektor array23. I denne undersøgelse er den optimale enkelte enhed celle i matrixen buede fotodetektor typen phototransistor (PTR), der består af en fotodiode og blokerende diode. Base junction gevinst forstærker en genereret photocurrent, og dermed det udstiller en rute for at forbedre en elektrisk ydeevne med en tynd film struktur. Ud over en enkelt celle er tynd film velegnet til at undertrykke en mørk strøm, der betragtes som støj i fotodetektor. Med hensyn til doping koncentration er en koncentration, der er større end 1015 cm-3 tilstrækkelig til at opnå en enestående ydeevne, diode karakteristika kan opretholdes med en let intensitet over 10-3 W/cm2 23 . Derudover PTR enkelt celle har en lav kolonne støj og optisk/elektrisk stabilt egenskaber sammenlignet med en fotodiode. Baseret på disse designregler, opdigtet vi en fleksibel fotodetektor array, der består af tynde Si PTRs ved hjælp af en silicium-på-insulator (SOI) wafer. Generelt er et vigtigt design regel af fleksible billedsensorer begrebet neutral mekaniske fly, som definerer position gennem tykkelsen af strukturen hvor stammer er nul for et vilkårligt lille r24. Et andet afgørende punkt er en serpentine geometri af elektroden fordi en bølget form giver fuldt reversibel strækbarhed til elektrode. På grund af disse to vigtige designkoncepter, kan fotodetektor array være smidig og elastisk. Det letter 3D deformationen af matrixen fotodetektor i en halvkugleformet figuren eller en buet som nethinden af dyrs øjne2.
I dette arbejde, vi detalje processer til fremstilling af den buede PTR array ved hjælp af halvleder fabrication processer (f.eks., doping, ætsning og deposition) og overførsel udskrivning. Også, vi karakterisere en enkelt PTR i form af en-V kurve. Ud over de fabrication metode og individuelle celle analyse, er det elektriske element i matrixen PTR analyseres i deforme stater.

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			<td>Sigma-Aldrich</td>
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			<td style="width:227px;">Poly(pyromellitic dianhydride-co-4,4&#8242;-oxydianiline), amic acid solution</td>
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			<td height="63" style="height:63px;width:216px;">SOI (silicon on insulator) wafer, 8inch</td>
			<td style="width:185px;">Soitec</td>
			<td style="width:129px;">SOI (silicon on insulator) wafer, 8inch</td>
			<td style="width:227px;">8inch SOI Wafer (silicon Thickness: 1.25&#956;m)</td>
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			<td height="42" style="height:42px;width:216px;">Acetone</td>
			<td style="width:185px;">Duksan Pure Chemicals Co., Ltd.</td>
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			<td style="width:227px;">Acetone</td>
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			<td height="42" style="height:42px;width:216px;">Isopropyl Alcohol (IPA)</td>
			<td style="width:185px;">Duksan Pure Chemicals Co., Ltd.</td>
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			<td height="21" style="height:21px;width:216px;">Buffered Oxide Etch 6:1</td>
			<td style="width:185px;">Avantor</td>
			<td style="width:129px;">1278</td>
			<td style="width:227px;">Buffered Oxide Etch 6:1</td>
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			<td height="21" style="height:21px;width:216px;">HSD150-03P</td>
			<td style="width:185px;">Misung Scientific Co., Ltd</td>
			<td style="width:129px;">HSD150-03P</td>
			<td style="width:227px;">Hot plate</td>
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			<td height="21" style="height:21px;">AZ5214</td>
			<td style="width:185px;">Microchemical</td>
			<td style="width:129px;">AZ5214</td>
			<td>Photoresist</td>
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			<td height="21" style="height:21px;">MIF300</td>
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			<td style="width:129px;">MIF300</td>
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			<td height="21" style="height:21px;width:216px;">SYLGARD184</td>
			<td style="width:185px;">Dow Corning</td>
			<td style="width:129px;">SYLGARD184</td>
			<td>Polydimethylsiloxane elastomer</td>
		</tr>
		<tr height="42">
			<td height="42" style="height:42px;">Hydrofluoric Acid&#160;</td>
			<td style="width:185px;">Duksan Pure Chemicals Co., Ltd.</td>
			<td style="width:129px;">2919</td>
			<td>Hydrofluoric Acid&#160;</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">CR-7</td>
			<td style="width:185px;">KMG Chemicals, Inc</td>
			<td style="width:129px;">210023</td>
			<td>Chrome mask etchant</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">MFCD07370792</td>
			<td>Sigma-Aldrich</td>
			<td style="width:129px;">651842</td>
			<td>Gold etchant</td>
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fabrication of flexible image sensor based on lateral nipin phototransistors

Fleksibel fotodetektor er blevet intenst undersøgt for brug af buede billedsensorer, som er en afgørende komponent i bio-inspirerede Billeddannende systemer, men flere udfordrende punkter forbliver som en lav absorptionsevnen på grund af en tynd aktive lag og lav fleksibilitet. Vi præsenterer en avanceret metode for at fremstille en fleksibel phototransistor array med en forbedret elektriske ydeevne. Den fremragende elektriske ydeevne er drevet af en mørk svagstrøm på grund af dyb urenhed doping. Stretchable og fleksibel metal samkøringslinjer tilbyde samtidig elektrisk og mekanisk stabilitet i en stærkt deforme tilstand. Protokollen beskriver udtrykkeligt fabrikationsproces af phototransistor ved hjælp af en tynd silicium membran. Ved at måle-V egenskaber af de færdige enhed i deforme stater, vise vi, at denne strategi forbedrer de mekaniske og elektriske stabilitet af phototransistor array. Vi forventer, at denne tilgang til en fleksibel phototransistor kan være almindeligt anvendt for anvendelser af næste generations Billeddannende systemer/Optoelektronik, men også bærbare enheder som taktile/tryk/temperatur sensorer og sundhed skærme.

Figur 3a og 3b Vis NIPIN PTR overvejer tidligere undersøgelser2,23designede og fremstillede struktur. Indsatser i figur 3a udstiller en grundlæggende I-V, der kendetegner PTR. PTR detaljerede strukturelle parametre er vist i figur 3b. Doping processen for et Si lag på en SOI wafer blev gennemført ved hjælp af Ionimplante...

Watch this Scientific Journal Video about Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors at JoVE.com

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

Fabrikation af fleksible billedsensor baseret på Lateral RAFNS Phototransistors

Vi præsenterer en detaljeret metode til at fabrikere en deformerbare laterale RAFNS phototransistor array for buede billedsensorer. Phototransistor array med en åben mesh form, som er sammensat af tynde silicium øer og elastisk metal samkøringslinjer, giver fleksibilitet og strækbarhed. Parameter analyzer karakteriserer den opdigtede phototransistor elektriske ejendom.

Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, ...

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This contribution demonstrates the fabrication process of dielectric elastomer transducers (DETs). DETs are stretchable capacitors consisting of an ...

Effect of Bending on the Electrical Characteristics of Flexible Organic Single Crystal-based Field-effect Transistors

Effekt af bøjning på Elektriske Karakteristik af Flexible Økologisk Single Crystal-baserede felteffekttransistorer

The charge transport in an organic semiconductor depends highly on the molecular packing in the crystal, which influences the electronic coupling ...

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

Scalable Solution-Processed Fabrication Strategi for High Performance, Fleksibel, Transparent Elektroder med Embedded Metal Mesh

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

En fabrikation og målemetode for en fleksibel Ferroelectric Element baseret på Van Der Waals Heteroepitaxy

Flexible non-volatile memories have received much attention as they are applicable for portable smart electronic device in the future, relying on ...

Fabrication and Design of Wood-Based High-Performance Composites

Fabrikation og design af træbaserede højtydende kompositter

Delignified densified wood is a new promising and sustainable material that possesses the potential to replace synthetic materials, such as glass fiber ...

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Fremstilling af akustiske bølgeenheder til overfladen på lithium-niobate

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order ...

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

In Situ Transmission Electron Mikroskopi med biasing og fremstilling af asymmetriske overliggere baseret på blandet faset en-VOx

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different ...

Fabrication of a Fabry-P&#233;rot Etalon for Application in Trace-Gas Spectroscopy

Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-P&#233;rot Etalon

Fremstilling af en billig, fiberkoblet og luftfordelt Fabry-Pérot Etalon

Fabry-P&#233;rot etalons (FPE) have found their way into many applications. In fields such as spectroscopy, telecommunications, and astronomy, FPEs are ...

Microfluidic Channel-Based Soft Electrodes for Capacitive Pressure Sensing

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing (Video) | JoVE 

Mikrofluidiske kanalbaserede bløde elektroder og deres anvendelse i kapacitiv trykføler;

Flexible and stretchable electrodes are essential components in soft artificial sensory systems. Despite recent advances in flexible electronics, most ...

Revolutionizing Stroke Rehabilitation with Enhanced Grasping and Finger Recovery

A Flexible Wearable Supernumerary Robotic Limb for Chronic Stroke Patients

Enhancing Grasping Abilities for Hemiplegic Patients with Flexible Robotic Limbs (Video) | JoVE

Et fleksibelt bærbart overtalligt robotlem til patienter med kronisk slagtilfælde

In this study, we present a flexible wearable supernumerary robotic limb that helps chronic stroke patients with finger rehabilitation and grasping ...