Name: fabrication of flexible image sensor based on lateral nipin phototransistors
Uploaded: 2018-06-23T14:00:00
Description: Watch this Scientific Journal Video about Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors at JoVE.com

Denne forskningen ble støttet av den kreative funn programmet gjennom National Research Foundation av Korea (NRF) finansiert av departementet for vitenskap og IKT (NRF-2017M3D1A1039288). Også ble denne forskningen støttet av Institutt for informasjon og kommunikasjon teknologi forfremmelse (IITP) gi finansiert av Korea regjeringen (MSIP) (No.2017000709, integrert tilnærming av fysisk unclonable kryptografiske primitiv bruker tilfeldig lasere og optoelectronics).

Advarsel: Noen kjemikalier (dvs., flussyre bufrede oksid etsematerialer isopropyl alkohol, osv.) i denne protokollen kan være farlig for helsen. Ta kontakt med alle relevante sikkerhetsdatablader før noen eksempel forberedelser finner sted. Bruke riktig personlig verneutstyr (f.eks., labfrakker, vernebriller, hansker) og tekniske kontroller (f.eks., våt stasjon, fume hette) når du håndterer saltoppløsninger og løsemidler.
1. Si Doping og isolasjon
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<ol>
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Fabrikasjon teknologien beskrevet her bidrar betydelig til utviklingen av Avansert elektronikk og bærbare enheter. De grunnleggende begrepene for denne tilnærmingen bruker en tynn Si membran og metall interconnectors i stand til å strekke. Selv om Si er en sprø og hard materiale som kan lett bli brukket, kan et meget tynt Si lag få en fleksibilitet26,27. I tilfelle av metall interconnector tilbyr bølgete figuren stretchability og fleksibilitet<sup class="xr...

Bio-inspirert imaging-systemer kan tilby mange fordeler i forhold til konvensjonelle imaging systems1,2,3,4,5. Netthinnen eller hemisfæriske ommatidia er en vesentlig komponent av biologiske visuelle systemet1,2,6. En buet bildesensor, som etterligner det kritiske elementet dyr øyne, kan gi en kompakt og enkel konfigurasjon av optiske systemer med lite avvik7. Mangfoldig fremskritt av fabrikasjon teknikker og materialer, for eksempel bruk av egentlig myke materialer som organisk/nanomaterialer8,9,10,11, 12 og innføring av deformerbare strukturer til halvledere inkludert silikon (Si) og germanium (Ge)1,2,3,13,14, 15,16,17, innser de buede bildesensorer. Blant dem gi Si tilnærminger iboende fordeler som en overflod av materiale, moden teknologi, stabilitet og optisk/elektrisk overlegenhet. Derfor tross Si har iboende stivhet og skjørhet, har Si-baserte fleksibel elektronikk blitt mye studert for ulike applikasjoner, som fleksibel optoelectronics18,19,20 inkludert buet bilde sensorer1,2,3og selv bærbar helsetjenester enheter21,22.
I en fersk studie, vi analysert og bedre elektrisk ytelsen til en tynn Si photodetector matrise23. I denne studien er optimal enkeltenhet cellen i buede photodetector matrisen en phototransistor (PTR) som består av en photodiode og blokkerer diode. Basen krysset gevinst forsterker en generert photocurrent, og dermed det utstillinger en rute en elektrisk ytelsen med en tynn film. I tillegg til en enkelt celle er tynnfilm strukturen egnet til å undertrykke en mørk strøm, som regnes som støy i photodetector. Om doping konsentrasjon er en konsentrasjon som er større enn 1015 cm-3 tilstrekkelig for å oppnå en eksepsjonell ytelse som diode egenskapene kan opprettholdes med lav intensitet over 10-3 W/cm2 23 . Videre PTR enkelt celle har en lav kolonnen støy og optisk/elektrisk stabil egenskaper sammenlignet med photodiode. Basert på disse regler, laget vi en fleksibel photodetector matrise som består av tynne Si PTR bruker en silisium-på-isolator (SOI) wafer. Generelt, er en viktig design rettssikkerhet fleksibel bildesensorer nøytral mekanisk flyet konseptet som definerer plasseringen gjennom tykkelsen av strukturen der stammer er null for en vilkårlig liten r24. En annen avgjørende punktet er en serpentin geometri av elektroden fordi en bølget figur gir fullt reversibel stretchability til elektroden. På grunn av disse to viktige design konsepter, kan photodetector matrisen være fleksibel og elastisk. Den letter 3D deformasjon av photodetector matrisen i en hemisfæriske figur eller en buet som netthinnen av dyr øyne2.
I dette arbeidet vi detalj prosessene for fabrikasjon av buet PTR matrisen med halvleder metallbearbeiding prosesser (f.eks, doping, etsning og deponering) og overføring utskrift. Også karakterisere vi en enkelt PTR i en IV kurve. I tillegg til fabrikasjon metoden og personlige celle analyse, er elektriske funksjonen av PTR matrisen analysert i deformert stater.

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			<td height="21" style="height:21px;width:216px;">&#160;SF-100ND</td>
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			<td>Sigma-Aldrich</td>
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			<td style="width:227px;">Poly(pyromellitic dianhydride-co-4,4&#8242;-oxydianiline), amic acid solution</td>
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			<td height="63" style="height:63px;width:216px;">SOI (silicon on insulator) wafer, 8inch</td>
			<td style="width:185px;">Soitec</td>
			<td style="width:129px;">SOI (silicon on insulator) wafer, 8inch</td>
			<td style="width:227px;">8inch SOI Wafer (silicon Thickness: 1.25&#956;m)</td>
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			<td height="42" style="height:42px;width:216px;">Acetone</td>
			<td style="width:185px;">Duksan Pure Chemicals Co., Ltd.</td>
			<td style="width:129px;">3051</td>
			<td style="width:227px;">Acetone</td>
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			<td height="42" style="height:42px;width:216px;">Isopropyl Alcohol (IPA)</td>
			<td style="width:185px;">Duksan Pure Chemicals Co., Ltd.</td>
			<td style="width:129px;">4614</td>
			<td style="width:227px;">Isopropyl Alcohol (IPA)</td>
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			<td height="21" style="height:21px;width:216px;">Buffered Oxide Etch 6:1</td>
			<td style="width:185px;">Avantor</td>
			<td style="width:129px;">1278</td>
			<td style="width:227px;">Buffered Oxide Etch 6:1</td>
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			<td height="21" style="height:21px;width:216px;">HSD150-03P</td>
			<td style="width:185px;">Misung Scientific Co., Ltd</td>
			<td style="width:129px;">HSD150-03P</td>
			<td style="width:227px;">Hot plate</td>
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			<td height="21" style="height:21px;">AZ5214</td>
			<td style="width:185px;">Microchemical</td>
			<td style="width:129px;">AZ5214</td>
			<td>Photoresist</td>
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			<td height="21" style="height:21px;">MIF300</td>
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			<td>Developer</td>
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			<td height="21" style="height:21px;width:216px;">SYLGARD184</td>
			<td style="width:185px;">Dow Corning</td>
			<td style="width:129px;">SYLGARD184</td>
			<td>Polydimethylsiloxane elastomer</td>
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			<td height="42" style="height:42px;">Hydrofluoric Acid&#160;</td>
			<td style="width:185px;">Duksan Pure Chemicals Co., Ltd.</td>
			<td style="width:129px;">2919</td>
			<td>Hydrofluoric Acid&#160;</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">CR-7</td>
			<td style="width:185px;">KMG Chemicals, Inc</td>
			<td style="width:129px;">210023</td>
			<td>Chrome mask etchant</td>
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		<tr height="21">
			<td height="21" style="height:21px;width:216px;">MFCD07370792</td>
			<td>Sigma-Aldrich</td>
			<td style="width:129px;">651842</td>
			<td>Gold etchant</td>
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fabrication of flexible image sensor based on lateral nipin phototransistors

Fleksibel photodetectors har vært intenst undersøkt for bruk av buet bildesensorer, som er en viktig komponent i bio-inspirert imaging-systemer, men flere utfordrende steder fortsatt, som en lav absorpsjon effektivitet aktive løsmasse og lav fleksibilitet. Vi presenterer en avansert metode å utvikle en fleksibel phototransistor matrise med en forbedret elektriske ytelse. En utmerket elektriske ytelse er drevet av en lav mørke strøm på grunn av dyp urenhet doping. Elastisk og fleksibel metal interconnectors tilby samtidig elektrisk og mekanisk stabilitet i en svært deformert tilstand. Protokollen beskriver eksplisitt fabrikasjon prosessen med phototransistor med en tynn silikon membran. Ved å måle IV kjennetegner fullført enheten i deformert stater, viser vi at denne tilnærmingen forbedrer de mekaniske og elektriske stabilitet av phototransistor array. Vi forventer at denne tilnærmingen til en fleksibel phototransistor kan bli mye brukt for programmer ikke bare neste generasjon tenkelig systemer/Optoelektronikk, men også bærbar enheter som taktil/press/temperatur sensorer og helse skjermer.

Figur 3a og 3b viser designet og fabrikkert oppbygning NIPIN PTR vurderer tidligere studier2,23. Rammemargen i figur 3a utstillinger grunnleggende IV karakteristisk for PTR. Detaljert strukturelle parametere av PTR er vist i figur 3b. Doping prosessen for et Si lag på en SOI wafer ble utført med ion implantering av NNFC. Do...

Watch this Scientific Journal Video about Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors at JoVE.com

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

Fabrikasjon av fleksible Image Sensor basert på Lateral NIPIN Phototransistors

Vi presenterer en detaljert metode å utvikle en deformerbare lateral NIPIN phototransistor matrise for buede bildesensorer. Phototransistor matrise med en åpen mesh form, som består av tynne silisium øyer og elastisk metall interconnectors, gir fleksibilitet og stretchability. Parameteren analysatoren karakteriserer elektrisk eiendom fabrikkerte phototransistor.

Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, ...

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Effekt av Bending på elektriske egenskaper Fleksibel Organic én krystall-baserte felt-effekt transistorer

The charge transport in an organic semiconductor depends highly on the molecular packing in the crystal, which influences the electronic coupling ...

Scalable Solution-processed Fabrication Strategy for High-performance, Flexible, Transparent Electrodes with Embedded Metal Mesh

Skalerbar løsning-behandlet Fabrication Strategy for High-Performance, Fleksibel, Transparent Elektroder med innebygd Metal Mesh

Here, the authors report the embedded metal-mesh transparent electrode (EMTE), a new transparent electrode (TE) with a metal mesh completely embedded in a ...

A Fabrication and Measurement Method for a Flexible Ferroelectric Element Based on Van Der Waals Heteroepitaxy

En fabrikasjon og målemetode gir et fleksibelt Ferroelectric basert på Van Der Waals Heteroepitaxy

Flexible non-volatile memories have received much attention as they are applicable for portable smart electronic device in the future, relying on ...

Fabrication and Design of Wood-Based High-Performance Composites

Fabrikasjon og tegning av tre-basert høy-gjennomførelse kompositter

Delignified densified wood is a new promising and sustainable material that possesses the potential to replace synthetic materials, such as glass fiber ...

Fabrication of Surface Acoustic Wave Devices on Lithium Niobate

Fabrikasjon av Surface Acoustic Wave-enheter på Litium Niobate

Manipulation of fluids and particles by acoustic actuation at small scale is aiding the rapid growth of lab-on-a-chip applications. Megahertz-order ...

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

In Situ Transmission Electron Microscopy with Biasing and Fabrication of Asymmetric Crossbars Based on Mixed-Phased a-VOx

In Situ Transmission Electron Mikroskopi med biasing og fabrikasjon av asymmetriske tverrligger basert på blandet faset a-VOx

Resistive switching crossbar architecture is highly desired in the field of digital memories due to low cost and high-density benefits. Different ...

Fabrication of a Fabry-P&#233;rot Etalon for Application in Trace-Gas Spectroscopy

Fabrication of a Low-Cost, Fiber-Coupled, and Air-Spaced Fabry-P&#233;rot Etalon

Fabrikasjon av en billig, fiberkoblet og luftdistansert Fabry-Pérot Etalon

Fabry-P&#233;rot etalons (FPE) have found their way into many applications. In fields such as spectroscopy, telecommunications, and astronomy, FPEs are ...

Microfluidic Channel-Based Soft Electrodes for Capacitive Pressure Sensing

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing

Microfluidic Channel-Based Soft Electrodes and Their Application in Capacitive Pressure Sensing (Video) | JoVE 

Mikrofluidiske kanalbaserte myke elektroder og deres anvendelse i kapasitiv trykkavkjenning

Flexible and stretchable electrodes are essential components in soft artificial sensory systems. Despite recent advances in flexible electronics, most ...

Revolutionizing Stroke Rehabilitation with Enhanced Grasping and Finger Recovery

A Flexible Wearable Supernumerary Robotic Limb for Chronic Stroke Patients

Enhancing Grasping Abilities for Hemiplegic Patients with Flexible Robotic Limbs (Video) | JoVE

En fleksibel bærbar supernumerær robotlem for kroniske slagpasienter

In this study, we present a flexible wearable supernumerary robotic limb that helps chronic stroke patients with finger rehabilitation and grasping ...