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DOI :
10.3791/59415-v
May 11th, 2019
Chapters
0:00
Title
0:57
MgO Substrate Preparation
1:50
Operation of VG V80 MBE
2:13
Substrate Loading
4:04
Metal Flux Measurements
5:59
Nitrogen Plasma
6:51
In-situ Laser Light Scattering
8:35
Growth Rate Determination
9:13
Results
10:46
Conclusion
이 문서는 질소 소스 및 광학 성장 모니터링으로 N2 가스와 플라즈마 보조 분자 빔 에피택시에 의해 MgO 기판에 Mg3N2 및 Zn3N2의 에피택시 필름의 성장을 설명합니다.
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