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聚焦 Ion 光束平版印刷到蚀刻纳米架构到微电极

DOI :

10.3791/60004-v

January 19th, 2020

January 19th, 2020

6,517 Views

1Department of Electrical Engineering and Computer Science, University of Michigan, 2Veteran Affairs Ann Arbor Healthcare System, 3Department of Neurology, School of Medicine, University of Michigan, 4Department of Biomedical Engineering, University of Michigan, 5Michigan Center for Materials Characterization, University of Michigan, 6Carl Zeiss SMT, Inc.

我们已经表明,将纳米结构蚀刻到皮内微电极装置中可以减少炎症反应,并有可能改善电生理记录。本文描述的方法概述了将纳米架构蚀刻到非功能和功能性单柄硅皮内微电极表面的方法。

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