Name: fabrication of nanoheight channels incorporating surface acoustic wave actuation via lithium niobate for acoustic nanofluidics
Uploaded: 2020-02-05T13:30:00
Description: Watch this Scientific Journal Video about Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics at JoVE.com

作者感谢加州大学和加州大学圣地亚哥分校的NANO3设施为支持这项工作提供了资金和设施。这项工作部分在UCSD的圣地亚哥纳米技术基础设施（SDNI）进行，该基础设施是国家纳米技术协调基础设施的成员，得到了国家科学基金会（Grant ECCS_1542148）的支持。这里介绍的工作得到了W.M.Keck基金会的研究资助。作者还感谢海军研究办公室（通过格兰特12368098）对这项工作的支持。

1. 纳米高通道掩膜制备
<ol><li>光刻：使用描述纳米高度通道所需形状的图案（图1B），使用正常的光刻和提升程序在LN晶圆中产生纳米高度凹陷。这些凹陷在晶圆粘接后将成为纳米高度通道。 注：本协议中纳米级凹陷的横向尺寸为微尺度。电子束或He/Ne孔束光刻可用于制造具有纳米级横向尺寸的通道;基于Ga+的电束光刻导致膨胀和不均匀的基板型材<sup ...

<ol>
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室温粘接是制造SAW集成纳米照明器件的关键。需要考虑五个方面，以确保成功的粘接和足够的粘接强度。
等离子表面激活的时间和功率 增加等离子体功率将有助于增加表面能量，从而增加粘合强度。但是，在等离子体表面激活过程中增加功率的缺点是表面粗糙度的增加，这可能会对纳米光的制造和流体输送性能产生不利影响。已经表明，等离子体表面的激活?...

纳米通道中可控制的纳米级流体传输 —纳米流体1– 与大多数生物大分子在相同的长度尺度上发生，在生物分析和传感、医疗诊断和材料加工方面很有前景。在过去的十五年里，纳米流体学中已经开发出各种设计和模拟技术，以操纵流体和粒子悬浮液，这些流体和粒子悬浮液基于温度梯度2、库仑拖曳3、表面波4、静态电场5、6、7和热泳8。最近，SAW 被证明能产生纳米级流体泵送和排水，具有足够的声压，以克服表面和粘性力的支配性，否则会阻碍纳米通道中有效的流体输送。声学流的主要优点是能够驱动纳米结构中的有用流量，而不必担心流体或颗粒悬浮液的化学细节，使得利用该技术的设备立即在生物分析、传感和其他物理化学应用中有用。
SAW 集成纳米流体器件的制造需要在压电基板上制造电极（数字间传感器（IDT）），以方便产生 SAW。反应性子蚀刻 （RIE） 用于在单独的 LN 片中形成纳米级凹陷，两块的 LN-LN 粘合产生有用的纳米通道。SAW器件的制造工艺已在许多出版物中介绍，无论是使用正常或升空的紫外线光刻，同时使用金属溅射或蒸发沉积11。对于LN RIE工艺蚀刻特定形状的通道，研究了蚀刻速率和通道最终表面粗糙度对选择不同LN方向、掩膜材料、气体流量和等离子功率的影响。等离子体表面活化已被用来显著增加表面能量，从而提高在氧化物，如LN17，18，19，20粘合的强度。同样，通过两步等离子体活性粘接方法21，也可以异构地将LN与其他氧化物（如SiO2（玻璃）结合。特别是室温LN-LN粘合，已使用不同的清洗和表面活化处理22进行调查。
在这里，我们详细介绍了制造40兆赫SAW集成100纳米高度纳米通道（通常称为纳米通道）的过程（图1A）。通过SAW驱动进行有效的流体毛细管填充和流体排空证明了纳米光制造和SAW性能在这种纳米级通道中的有效性。我们的方法提供了一个纳米-细胞流体系统，能够调查各种物理问题和生物应用。

<table border="1" fo:keep-together.within-page="1" fo:keep-with-next.within-page="always">
	<tbody>
		<tr>
			<td>Absorber</td>
			<td>Dragon Skin, Smooth-On, Inc., Macungie, PA, USA</td>
			<td>Dragon Skin 10 MEDIUM</td>
			<td></td>
		</tr>
		<tr>
			<td>Amplifier</td>
			<td>Mini-Circuits, Brooklyn, NY, USA</td>
			<td>ZHL&#8211;1&#8211;2W&#8211;S+</td>
			<td></td>
		</tr>
		<tr>
			<td>Camera</td>
			<td>Nikon, Minato, Tokyo, Japan</td>
			<td>D5300</td>
			<td></td>
		</tr>
		<tr>
			<td>Developer</td>
			<td>Futurrex, NJ, USA</td>
			<td>RD6</td>
			<td></td>
		</tr>
		<tr>
			<td>Diamond tip engraving pen</td>
			<td>Malco, Memphis, TN, USA</td>
			<td>Malco A50 USA Made Carbide Tipped Scribe</td>
			<td></td>
		</tr>
		<tr>
			<td>Dicing saw</td>
			<td>Disco, Tokyo, Japan</td>
			<td>Disco Automatic Dicing Saw 3220</td>
			<td></td>
		</tr>
		<tr>
			<td>Heating oven</td>
			<td>Carbolite, Hope Valley, UK</td>
			<td>HTCR 6/28</td>
			<td>High Temperature Clean Room Oven - HTCR</td>
		</tr>
		<tr>
			<td>Hole driller</td>
			<td>Dremel, Mount Prospect, Illinois</td>
			<td>Model #4000</td>
			<td>4000 High Performance Variable Speed Rotary</td>
		</tr>
		<tr>
			<td>Inverted microscope</td>
			<td>Amscope, Irvine, CA, USA</td>
			<td>IN480TC-FL-MF603</td>
			<td></td>
		</tr>
		<tr>
			<td>Lithium niobate substrate</td>
			<td>PMOptics, Burlington, MA, USA</td>
			<td>PWLN-431232</td>
			<td>4&#34; double-side polished 0.5 mm thick 128&#176; Y-rotated cut lithium niobate</td>
		</tr>
		<tr>
			<td>Mask aligner</td>
			<td>Heidelberg Instruments, Heidelberg, Germany</td>
			<td>MLA150</td>
			<td></td>
		</tr>
		<tr>
			<td>Nano3 cleanroom facility</td>
			<td>UCSD, La Jolla, CA, USA</td>
			<td></td>
			<td>Fabrication process is performed in it.</td>
		</tr>
		<tr>
			<td>Negative photoresist</td>
			<td>Futurrex, NJ, USA</td>
			<td>NR9-1500PY</td>
			<td></td>
		</tr>
		<tr>
			<td>Oscilloscope</td>
			<td>Keysight Technologies, Santa Rosa, CA, USA</td>
			<td>InfiniiVision 2000 X-Series</td>
			<td></td>
		</tr>
		<tr>
			<td>Plasma surface activation</td>
			<td>PVA TePla, Corona, CA, USA</td>
			<td>PS100</td>
			<td>Tepla Asher</td>
		</tr>
		<tr>
			<td>Polarizer sheet</td>
			<td>Edmund Optics, Barrington, NJ, USA</td>
			<td>#86-182</td>
			<td></td>
		</tr>
		<tr>
			<td>RIE etcher</td>
			<td>Oxford Instruments, Abingdon, UK</td>
			<td>Plasmalab 100</td>
			<td></td>
		</tr>
		<tr>
			<td>Signal generator</td>
			<td>NF Corporation, Yokohama, Japan</td>
			<td>WF1967 multifunction generator</td>
			<td></td>
		</tr>
		<tr>
			<td>Sputter deposition</td>
			<td>Denton Vacuum, NJ, USA</td>
			<td>Denton 18</td>
			<td>Denton Discovery 18 Sputter System</td>
		</tr>
		<tr>
			<td>Teflon wafer dipper</td>
			<td>ShapeMaster, Ogden, IL, USA</td>
			<td>SM4WD1</td>
			<td>Wafer Dipper 4&#34;</td>
		</tr>
	</tbody>
</table>

fabrication of nanoheight channels incorporating surface acoustic wave actuation via lithium niobate for acoustic nanofluidics

由于表面和粘性力的支配，流体的受控纳米级操作异常困难。兆赫级表面声波（SAW）装置在其表面产生巨大的加速度，高达108米/s2，反过来负责许多观测到的效应，这些效应已经定义了声流和声辐射力。这些效应已用于微尺度上的粒子、细胞和流体操作，尽管最近SAW已经用于通过一套完全不同的机制在纳米尺度上产生类似的现象。可控纳米级流体操作为超快流体泵送和生物大分子动力学提供了广泛的机会，可用于物理和生物应用。在这里，我们演示通过与 SAW 器件集成的室温锂牛醇（LN）粘合进行纳米级高通道制造。我们描述了整个实验过程，包括通过干蚀刻进行纳米高通道制造、在尼奥布妥锂上进行等离子激活粘接、后续成像的适当光学设置以及 SAW 驱动。在SAW诱导的纳米级通道中，我们展示了流体毛细管填充和流体排泄的代表性结果。本程序为纳米级通道的制造和与SAW器件的集成提供了实用的协议，对于未来的纳米流体应用非常有用。

在成功制造和粘接SAW集成纳米流体器件后，我们在纳米高度LN分片中进行流体毛细管归档和SAW诱导流体排空。表面声波由IDT在IDTs的谐振频率为40 MHz时由放大的正弦信号驱动产生，SAW通过压电LN基板传播到纳米光。可以用倒置显微镜观察与SAW相互作用的纳米光中流体的行为。
我们演示液体毛细管填充在100纳米高通道的不同宽度。图 2显示了超纯 DI 水的毛细...

Watch this Scientific Journal Video about Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics at JoVE.com

Fabrication of Nanoheight Channels Incorporating Surface Acoustic Wave Actuation via Lithium Niobate for Acoustic Nanofluidics

通过提升光刻、纳米深度反应离子蚀刻和室温等离子体，演示了纳米高通道的制造，通过提升光刻、纳米深度反应离子蚀刻和室温等离子体，将表面声波驱动装置集成在硅基硅基硅基上单晶尼欧比锂的表面激活多层粘接，这一工艺同样适用于将氮化锂与氧化物粘接。

通过用于声学纳米流体的尼奥布精锂结合表面声波驱动纳米高通道的制造

Controlled nanoscale manipulation of fluids is known to be exceptionally difficult due to the dominance of surface and viscous forces. Megahertz-order ...

我们的协议提供了一种详细的纳米高度通道制造方法，通过纳米流体锂抗氧化氢结合表面声波驱动。该技术可用于执行单晶硝酸锂的室温等离子表面活化多层粘结，该工艺同样适用于硝酸锂或二氧化硅和其他氧化物的粘合。在清洁和等离子体表面激活过程中，应清除任何碎屑和颗粒物，以防止纳米高度通道形成中的粘合失败。此方法的可视化演示可以详细捕获整个制造过程，从而为其他研究人员清楚地演示协议。要准备纳米高度通道掩膜，请将刻有在升空过程中设计为正常光刻的图案的晶圆放入溅射沉积系统中，将腔室真空度降低为负六毫器的 5 倍至 10 倍至负极六毫托器。允许砷以 2.5 毫托雷流，以 200 瓦的速度溅出铬，在 18 分钟内产生 400 纳米厚的牺牲面膜。在沉积结束时，将晶圆完全淹没在丙酮烧杯中，并在中等强度下对晶圆进行声波化10分钟。在声波化结束时，用去维化水冲洗晶圆，然后用干氮流干燥晶圆。然后使用切屑锯将晶圆分成单个芯片，每个芯片有一个纳米分纹。要制造纳米高度通道，请将晶圆放入反应离子蚀刻室。将室参数设置为在锂硝酸中产生 120 纳米深的纳米狭缝。要钻孔通道入口和插座，请使用双面胶带将小钢板连接到培养皿的底部，将蚀刻的芯片连接到板上。将盘子装满以完全浸入芯片，并在钻机上连接直径为 0.5 毫米的金刚石钻头。然后以每分钟至少 10，000 次旋转的速度进行钻孔，以加工所需的入口和出口。对于铬湿蚀刻，使用金刚石尖端雕刻笔清楚地标记钻孔锂硝酸的扁平化表面，以跟踪纳米高度通道位于哪一侧，并在铬蚀刻中对芯片进行声波化。对于芯片的溶剂清洗，放置由一个表面声波装置和一个蚀刻纳米级凹陷芯片组成的芯片对，将芯片对浸入放在声波浴的丙酮烧杯中。在丙酮中声波化两分钟后，在甲醇中对芯片进行声波化一分钟。在甲醇声波化结束时，用去维化水冲洗芯片。接下来，在通风良好的发动机罩中，以一比三的比例将过氧化氢加入硫酸中，并将所有芯片放入特氟隆支架中。小心地将支架放入食人鱼酸的烧杯中 10 分钟，然后将碎屑和支架冲洗到两个连续的脱压水浴中。第二次冲洗后，用干氮流干燥碎屑，并立即将样品放入氧气等离子体活化设备中，在处理过程中盖住它们，以避免污染。使用 120 瓦的功率，同时将芯片暴露在 120 标准立方厘米的氧气流中 150 秒，使用等离子体激活芯片表面。激活结束时，立即将样品淹没在新鲜的脱水水浴中至少两分钟。用干氮流干燥芯片后，小心地将纳米切片片放在表面声波器件芯片上，使芯片以适当的方向对齐。然后使用钳子或类似方法从中心压下样品以启动粘结，对初始凹陷后无法粘合的区域施加温和压力。接下来，将粘合样品放在弹簧夹中，以在热膨胀时安全地施加负载，并将夹紧样品放入室温烤箱中。然后将烤箱温度设置为 300 摄氏度，最高为每分钟 2 摄氏度，在自动关闭前停留时间为两小时。要观察完成的纳米狭缝中的流体运动，请将纳米切片片置于倒置显微镜下，并通过光学路径中的线性偏振滤波器旋转芯片，以适当阻断锂酸酸中双反比图像。然后向入口添加超纯除气水，并成像流体进展。对于表面声波驱动，将吸收器连接到表面声波装置的末端，以防止反射声波，并设置信号发生器上的谐振频率在 40 兆赫左右。使用放大器放大信号，并使用示波器测量施加到器件的实际电压、电流和功率。然后将正弦电场应用于数字间传感器，并在纳米狭缝内驱动期间记录流体运动。在这些图像中，显示超纯脱越水填充成一个100纳米高400微米宽的通道和一个100纳米高40微米宽的通道。毛细管力通过入口排出一滴超纯水，使整个纳米狭缝的流体填充，由于毛细管力较大，填充在较窄的通道内发生得更快。在本次实验中，100纳米高度狭缝中的水被排干，以显示水-空气界面，中间的最大长度表示表面声波装置中间的最大声能。需要一瓦左右的阈值施加功率才能迫使声压大于毛细管压力，以驱动可见的排空现象。大多数制造过程应在洁净室进行，以防止微尺度颗粒物污染，用于灌装的液体应超纯，以防止纳米缝的堵塞。我们的方法提供了一个纳米声学流体系统，用于研究纳米尺度上的各种物理问题和生物应用。

Research

JoVE Journal

Engineering

Synthesis of Phase-shift Nanoemulsions with Narrow Size Distributions for Acoustic Droplet Vaporization and Bubble-enhanced Ultrasound-mediated Ablation

相移窄粒度分布的纳米乳液的合成声波液滴蒸发和泡增强的超声介导消融

High-intensity  focused ultrasound (HIFU) is used clinically to thermally ablate tumors. To  enhance localized heating and improve thermal ablation in ...

科研

工程学

Solid-state Graft Copolymer Electrolytes for Lithium Battery Applications

接枝共聚物固态电解质的锂离子电池的应用

Battery safety has been a very important research area over the past decade. Commercially available lithium ion batteries employ low flash point (&lt;80 ...

Fabrication, Operation and Flow Visualization in Surface-acoustic-wave-driven Acoustic-counterflow Microfluidics

制造，操作和表面声波驱动声逆流微流体流动可视化

Surface acoustic waves (SAWs) can be used to drive liquids in portable microfluidic chips via the acoustic counterflow phenomenon. In this video we ...

Fabrication of Uniform Nanoscale Cavities via Silicon Direct Wafer Bonding

通过硅直接晶圆粘接制造均匀纳米级腔

Measurements of the heat capacity and superfluid fraction of confined 4He have been performed near the lambda transition using lithographically patterned ...

Patterning via Optical Saturable Transitions - Fabrication and Characterization

通过光学吸收跃迁图案 - 制备与表征

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical ...

Characterization of Full Set Material Constants and Their Temperature Dependence for Piezoelectric Materials Using Resonant Ultrasound Spectroscopy

全套材料常数表征及其温度依赖性的压电材料使用共振超声波谱

During the operation of high power electromechanical devices, a temperature rise is unavoidable due to mechanical and electrical losses, causing the ...

Emission Spectroscopic Boundary Layer Investigation during Ablative Material Testing in Plasmatron

烧蚀材料在试验过程中等离子体发生器发射光谱边界层研究

Ablative Thermal Protection Systems (TPS) allowed the first humans to safely return to Earth from the moon and are still considered as the only solution ...

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale

Free-form Light Actuators ÃƒÂ¢Ã¢â€šÂ¬Ã¢â‚¬Â Fabrication and Control of Actuation in Microscopic Scale

自由形式的光驱动器 - 制作和开动控制在微观尺度

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted ...

Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles

制造和Acoustofluidic设备的运营支撑体声波驻波的聚焦鞘颗粒

Acoustophoresis refers to the displacement of suspended objects in response to directional forces from sound energy. Given that the suspended objects must ...

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

基于 LiPON 的固态锂离子 Nanobatteries 的聚焦离子束制备方法在原位测试中的研究

Solid-state electrolytes are a promising replacement for current organic liquid electrolytes, enabling higher energy densities and improved safety of ...