Name: fabrication of ti3c2 mxene microelectrode arrays for in vivo neural recording
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这项工作得到了国家卫生研究院的支持（赠款号为No.R21-NS106434），公民癫痫研究联合组织飞行奖，米罗夫斯基家庭基金会和尼尔和芭芭拉·斯密特（F.V.）;国家科学基金会研究生研究奖学金计划（赠款号DGE-1845298 到 N.D. 和 B.M.;陆军研究办公室（合作协议号W911NF-18-2-0026至K.M.）;由美国陆军通过埃奇伍德化学生物中心的表面科学倡议计划（PE 0601102A项目VR9到Y.G.和K.M.）。这项工作部分在辛格纳米技术中心进行，该中心得到国家科学基金会国家纳米技术协调基础设施项目（NNCI-1542153）的支持。

所有体内程序均符合美国国家卫生研究院（NIH）《实验室动物护理和使用指南》，并经宾夕法尼亚大学动物护理和使用委员会（IACUC）批准。
1. Ti3C2 MXene 合成
注：本节中描述的反应程序适用于化学烟气罩内。本步骤中包含的清洗步骤旨在与平衡的离心管一起使用。所有产生的废物均被视为危险废物，应按照大学准则适当丢弃。
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本议定书中描述的MXene合成和脱毛程序（HF/HCl/LiCl）采用MILD蚀刻方法，采用LiF/HCl（原位HF）蚀刻介质26。MILD 方法允许一旦达到 pH +5+6 即可在洗涤过程中自发地解压大 Ti3C2片（横向大小为几 μm）。与仅使用高频蚀刻相比，这会产生更高质量的材料，提高材料性能，如电子导电性和化学稳定性。HF/HCl/LiCl 方法利用 MILD 合成改进，同时额外分离每个步骤（蚀刻、间接?...

了解神经回路的基本机制，以及它们在疾病或损伤中如何改变其动力学，是开发针对各种神经和神经肌肉疾病的有效疗法的关键目标。微电极技术已广泛用于阐明精细空间和时间尺度上的神经动力学。然而，从微尺度电极获得高信噪比（SNR）的稳定记录已证明特别具有挑战性。随着电极尺寸减小到接近蜂窝规模，电极阻抗的相应增加会降低信号质量1。此外，许多研究表明，由传统硅和金属电子材料组成的硬电极在神经组织中产生严重的损伤和炎症，这限制了它们对长期记录2、3、4、5的有用性。鉴于这些事实，人们一直对开发具有新材料的微电极非常感兴趣，这种材料可以减少电极组织界面阻抗，并可以融入软和灵活的外形中。
减少电极组织接口阻抗的一个常用方法是增加细胞外流体中的离子物种与电极相互作用的面积，或电极的"有效表面积"。这可以通过纳米图案6，表面粗加工7，或电镀与多孔添加剂8，9。纳米材料在这一领域得到了很大的关注，因为它们提供了内在高的特异性面积和独特的有利的电气和机械特性组合10。例如，碳纳米管已被用作涂层，以显著减少电极阻抗11，12，13，氧化石墨烯氧化物已加工成柔软，灵活的独立探头电极14，和激光热解多孔石墨烯已用于柔性，低阻抗微电化学（微-ECoG）电极15。尽管它们有希望，但缺乏可扩展的装配方法限制了纳米材料在神经接口电极中的广泛应用。碳基纳米材料尤其具有疏水性，因此需要使用表面活性剂16、超酸17或表面功能化18，形成用于溶液加工制造方法的水分散体，而化学气相沉积（CVD）等替代制造方法通常需要与许多聚合物基材19、20、21不相容的高温， 22.
最近，一类二维（2D）纳米材料，称为MXenes，已被描述，它提供了高导电性，灵活性，体积电容和固有的亲水性的特殊组合，使其成为一个有前途的一类纳米材料的神经接口电极23。MXenes 是一个 2D 过渡金属碳化物和硝化物系列，最常见的是选择性地从分层前体蚀刻 A 元素。这些通常是 MAX 相位与一般公式 Mn_1AXn，其中 M 是早期过渡金属，A 是周期表的组 12-16 元素，X 是碳和/或氮，n = 1、2 或 324。二维 MXene 片具有表面终止功能组，可包括羟基 （+OH）、氧 （+O） 或氟 （+F）。这些功能组使 MXenes 具有固有的亲水性，并实现灵活的表面改性或功能化。在大类MXenes中，Ti3C2的研究范围最广，特征为25、26、27。Ti3C2显示的体积电容 （1，500 F/cm3）28比活性石墨烯 （+60+100 F/cm3）29，硬质合金衍生碳素 （180 F/cm3）30，和石墨烯凝胶薄膜 （+260 F/cm3）31。此外，Ti3C2表现出极高的电子电导率 （+10，000 S/cm）32，其生物相容性已在若干研究中证明33、34、35、36。Ti3C2薄膜的高容积电容有利于生物传感和刺激应用，因为具有电容电荷转移的电极可以避免潜在的有害水解反应。
我们小组最近展示了灵活的薄膜Ti3C2微电极阵列，使用溶液处理方法制备，能够记录微电图（微-ECoG）和皮内神经尖峰活性，体内SNR36。与尺寸匹配的金 （Au） 电极相比，这些 MXene 电极的阻抗显著减少，这可归因于 MXene 的高导电性和电极的高表面积。在该协议中，我们描述了在柔性丙烯-C基板上制造Ti3C2 MXene的平面微电极阵列并将其用于术中微ECoG记录的关键步骤。此方法利用了 MXene 的亲水性，这使得可以使用简单且可扩展的解决方案处理方法，同时无需使用表面活性剂或超酸剂来实现稳定的水悬浮液。这种易于加工性可使 MXene 生物传感器在工业规模上具有成本效益，这是广泛采用基于其他碳纳米材料的设备的主要限制。电极制造的关键创新在于使用牺牲性聚合物层对自旋涂层后的MXene进行微模式，该方法根据溶液加工的聚（3，4-乙烯二氧硫磷）:p丙（苯乙烯磺酸）（PEDOT：PSS）微电极37进行了文献改编，但之前没有为MXene的图案描述。Ti3C2具有卓越的电气特性，加上其可加工性和二维形态学，使其成为神经接口非常有前途的材料。特别是，Ti3C2为克服电极几何面积和电化学接口阻抗之间的基本权衡提供了一条途径，电化学接口阻抗是微尺度电极性能的主要限制因素。此外，该协议中描述的制造过程可以调整以生产不同尺寸和几何形状的 MXene 电极阵列，以适应不同的记录模式，并且还可以轻松地进行调整，以合并除 MXene 之外的其他导电油墨。

<table border="1" fo:keep-together.within-page="1" fo:keep-with-next.within-page="always">
	<tbody>
		<tr>
			<td>00-90 screw</td>
			<td>McMaster-Carr</td>
			<td>90910A630</td>
			<td>Skull screw around which ground wire is wrapped</td>
		</tr>
		<tr>
			<td>128ch stimulation/recording controller</td>
			<td>Intan Technologies</td>
			<td></td>
			<td>A component of the neural recording system.</td>
		</tr>
		<tr>
			<td>175 mL polypropylene (PP) conical centrifuge tubes</td>
			<td>Falcon</td>
			<td>REF: 352076</td>
			<td>Used for washing</td>
		</tr>
		<tr>
			<td>18 position 0.5 mm pitch ZIF connector</td>
			<td>Molex</td>
			<td>505110-1892</td>
			<td>Used to interface the flexible Parylene microelectrode array with the PCB adapter board.</td>
		</tr>
		<tr>
			<td>18 position dual row male nano-miniature (.025&#34;/.64mm) connector</td>
			<td>Omnetics Connector Corporation</td>
			<td>A79008-001</td>
			<td>Used to interface the PCB adapter board to the recording headstage.</td>
		</tr>
		<tr>
			<td>3ML Disposable Plastic Set Transfer Graduated Pipettes</td>
			<td>Rienar</td>
			<td>Rienar-3ML-20PCS</td>
			<td>Used for transferring etchant or MXene solutions</td>
		</tr>
		<tr>
			<td>50 mL polyproylene (PP) concial centrifuge tube</td>
			<td>Falcon</td>
			<td>REF: 352070</td>
			<td>Used for washing and size selection</td>
		</tr>
		<tr>
			<td>Al etchant Type A</td>
			<td>Transene</td>
			<td>060-0026000-QT</td>
			<td>For removing Al etch mask layer after final Parylene-C etch.</td>
		</tr>
		<tr>
			<td>Aluminum Powder, -325 Mesh, 99.5% (metals basis), particle size &#60; 44 &#181;m</td>
			<td>Alfa Aesar</td>
			<td>CAS: 7429-90-5</td>
			<td>Used for MAX synthesis</td>
		</tr>
		<tr>
			<td>AutoCAD software</td>
			<td>Autodesk Inc.</td>
			<td></td>
			<td>Design software for drawing photomasks. Free alternatives include DraftSight and LayoutEditor.</td>
		</tr>
		<tr>
			<td>Buffered Oxide Etchant 6:1</td>
			<td>JT Baker</td>
			<td>1178-03</td>
			<td>For removing SiO2 layer to expose MXene electrode contacts at the end of the fabrication procedure.</td>
		</tr>
		<tr>
			<td>Buprenorphine SR</td>
			<td>Wildlife Pharmaceuticals</td>
			<td></td>
			<td>Analgesia for rat surgery</td>
		</tr>
		<tr>
			<td>Centrifuge</td>
			<td>Hermle</td>
			<td>Benchmark Z 446</td>
			<td>Used for washing and size selection</td>
		</tr>
		<tr>
			<td>Dexdomitor</td>
			<td>Midwest Veterinary Supply</td>
			<td>193.13250.3</td>
			<td>Anesthesia for rat surgery</td>
		</tr>
		<tr>
			<td>Drill burr</td>
			<td>Fine Science Tools</td>
			<td>19007-07</td>
			<td>Burrs for drill</td>
		</tr>
		<tr>
			<td>Electric drill</td>
			<td>Foredom</td>
			<td>K.1070</td>
			<td>Micromotor drill for craniotomies</td>
		</tr>
		<tr>
			<td>Electron beam evaporator</td>
			<td>Kurt J. Lesker Company</td>
			<td></td>
			<td>Used to evaporate Ti, Au, and SiO2 during fabrication. Most university clean rooms have this or a similar tool.</td>
		</tr>
		<tr>
			<td>Ground wire</td>
			<td>A-M Systems</td>
			<td>781500</td>
			<td>Bare silver wire</td>
		</tr>
		<tr>
			<td>Headspace Vial, glass</td>
			<td>Supelco</td>
			<td>REF: 27298</td>
			<td>Used for storing MXene solutions</td>
		</tr>
		<tr>
			<td>Hydrochloric acid (12.1N)</td>
			<td>Fisher Scientific</td>
			<td>CAS: 7647-01-0</td>
			<td>Corrosive; etchant material</td>
		</tr>
		<tr>
			<td>Hydrofluoric Acid, (48-51% solution in H2O)</td>
			<td>Acros</td>
			<td>CAS: 7664-39-3</td>
			<td>Etchant material</td>
		</tr>
		<tr>
			<td>Jupiter II RIE system</td>
			<td>March Plasma Systems Inc.</td>
			<td></td>
			<td>Planar RIE etching system used to etch the Parylene-C using O2 plasma. Most university clean rooms have a comparable planar RIE etching system.</td>
		</tr>
		<tr>
			<td>Kapton standard polyimide tape, 1/4&#34;</td>
			<td>DuPont</td>
			<td></td>
			<td>Used to add thickness to the Au bonding pad region of the flexible Parylene microelectrode array for insertion into the ZIF connector.</td>
		</tr>
		<tr>
			<td>Ketamine</td>
			<td>Hospital of the Univ. of Penn.</td>
			<td></td>
			<td>Anesthesia for rat surgery</td>
		</tr>
		<tr>
			<td>KLA P-7 Stylus Profilometer</td>
			<td>KLA Corporation</td>
			<td></td>
			<td>Used the measure 2D profiles to confirm complete etching through the sacrificial parylene-C layer in step 2.4.2. Most university clean rooms have this or a comparable stylus profilometer tool.</td>
		</tr>
		<tr>
			<td>Lithium chloride, 99% for analysis, anhydrous</td>
			<td>Acros</td>
			<td>CAS: 7447-41-8</td>
			<td>Hygroscopic; delamination material</td>
		</tr>
		<tr>
			<td>MA6 mask aligner</td>
			<td>Karl Suss Microtec AG</td>
			<td></td>
			<td>Used to align each photomask to the pattern on the wafer and expose the wafer to UV light. Most university clean rooms have this or a similar tool.</td>
		</tr>
		<tr>
			<td>Micro-90 cleaning solution</td>
			<td>International Products Corporation</td>
			<td>M-9050-12</td>
			<td>Used as the anti-adhesive layer to enable removal of the sacrificial Parylene-C layer to pattern the MXene</td>
		</tr>
		<tr>
			<td>NR71-3000p photoresist</td>
			<td>Futurrex Inc.</td>
			<td>NR71-3000p</td>
			<td>Negative photoresist used to define Ti/Au traces and MXene patterns in the devices.</td>
		</tr>
		<tr>
			<td>Ophthalmic ointment</td>
			<td>Midwest Veterinary Supply</td>
			<td>193.63200.3</td>
			<td>To prevent corneal drying during surgery</td>
		</tr>
		<tr>
			<td>Parylene deposition system</td>
			<td>Specialty Coating Systems</td>
			<td></td>
			<td>Used to evaporate thin conformal films of Parylene-C</td>
		</tr>
		<tr>
			<td>Parylene-C dimer</td>
			<td>Specialty Coating Systems</td>
			<td>980130-c-01lbe</td>
			<td>Flexible polymer used as bottom and top passivating layers for the flexible MXene devices</td>
		</tr>
		<tr>
			<td>Photomasks (chrome on soda lime glass)</td>
			<td>University of Pennsylvania</td>
			<td></td>
			<td>Our photomasks were produced in the University clean room using a Heidelberg DWL66+ laser writer system, however several vendors manufacture photomasks from provided design files.</td>
		</tr>
		<tr>
			<td>Povidone-iodine solution</td>
			<td>Medline</td>
			<td>MDS093901</td>
			<td>To help prevent infection around scalp incision</td>
		</tr>
		<tr>
			<td>Printed Circuit Board (PCB)</td>
			<td>Advanced Circuits</td>
			<td></td>
			<td>Used to interface between the MXene electrode array and the measurement electronics such as the potentiostat and the Intan recording system. Advanced Circuits and other vendors manufacture and assemble PCBs based on the provided design files.</td>
		</tr>
		<tr>
			<td>RD6 Developer</td>
			<td>Futurrex Inc.</td>
			<td>RD6 Developer</td>
			<td>Used to develop NR71-3000p negative photoresist following UV exposure</td>
		</tr>
		<tr>
			<td>Reference 600 potentiostat</td>
			<td>Gamry Instruments</td>
			<td></td>
			<td>Used to measure the electrodes&#39; impedance to assess quality of the devices</td>
		</tr>
		<tr>
			<td>Remover PG</td>
			<td>MicroChem Corp.</td>
			<td>G050200</td>
			<td>Used to remove NR71-3000p following metal deposition to perform lift-off patterning</td>
		</tr>
		<tr>
			<td>RHS2000 Stim SPI interface cable</td>
			<td>Intan Technologies</td>
			<td></td>
			<td>A component of the neural recording system.</td>
		</tr>
		<tr>
			<td>RHS2116 amplifier board</td>
			<td>Intan Technologies</td>
			<td></td>
			<td>A component of the neural recording system.</td>
		</tr>
		<tr>
			<td>Si wafers</td>
			<td>Wafer World</td>
			<td>2885</td>
			<td>Substrate for fabrication</td>
		</tr>
		<tr>
			<td>Spin Coater</td>
			<td>Cost Effective Equipment</td>
			<td></td>
			<td>For coating wafers with resists and applying the Micro-90 and MXene layers. Most university clean rooms have spin coaters.</td>
		</tr>
		<tr>
			<td>Stereotaxic frame</td>
			<td>Kopf Instruments</td>
			<td>Model 902</td>
			<td>For positioning the rat for neurosurgery</td>
		</tr>
		<tr>
			<td>Teflon-coated magnetic stir bar</td>
			<td>Corning</td>
			<td>REF: 1233W95</td>
			<td>Used to stir during etching and intercalation</td>
		</tr>
		<tr>
			<td>Titanium carbide, 99.5% (metals basis), particle size ~2 &#181;m</td>
			<td>Alfa Aesar</td>
			<td>CAS: 12070-08-5</td>
			<td>Used for MAX synthesis</td>
		</tr>
		<tr>
			<td>Titanium powder, -325 mesh, 99% (metals basis), particle size &#60; 44&#181;m</td>
			<td>Alfa Aesar</td>
			<td>CAS: 7440-32-6</td>
			<td>Used for MAX synthesis</td>
		</tr>
		<tr>
			<td>Ultrasonic bath sonicator</td>
			<td>Reynolds Tech</td>
			<td></td>
			<td>For removing metal and photoresist particles during lift-off processes to pattern metals.</td>
		</tr>
		<tr>
			<td>UV vis spectrophotometer</td>
			<td>ThermoScientific</td>
			<td>Evolution 201</td>
			<td>Used to determine concentration and observe absorption peak</td>
		</tr>
		<tr>
			<td>Zetasizer, Particle Size Analysis</td>
			<td>Malvern Panalytical</td>
			<td>Nano ZS</td>
			<td>Used to determine particle lateral size distibution</td>
		</tr>
	</tbody>
</table>

fabrication of ti3c2 mxene microelectrode arrays for in vivo neural recording

植入式微电极技术已广泛用于阐明微尺度的神经动力学，从而更深入地了解脑病和损伤的神经基础。由于电极与单个电池的尺度小型化，接口阻抗的相应上升会限制记录信号的质量。此外，传统的电极材料是僵硬的，导致电极和周围脑组织之间的机械不匹配，导致炎症反应，最终导致设备性能下降。为了应对这些挑战，我们开发了一种基于 Ti3C2 MXene 的柔性微电极的制造工艺，这是一种最近发现的纳米材料，具有非常高的体积电容、导电性、表面功能和水分散物的可加工性。Ti3C2 MXene 微电极的柔性阵列具有极低的阻抗，因为 Ti3C2 MXene 薄膜的电导率高，特异性表面积高，并且已证明它们对记录神经元活动非常敏感。在该协议中，我们描述了一种将Ti3C2 MXene微阵列微阵列微阵列到柔性聚合物基板上的新方法，并概述了它们用于体内微电理学记录。该方法可轻松扩展，以创建任意尺寸或几何形状的 MXene 电极阵列，用于生物电子领域的一系列其他应用，并且除 Ti3C2 MXene 外，还可与其他导电油墨一起使用。该协议支持从基于解决方案的导电油墨中简单和可扩展地制造微电极，并特别允许利用亲水性 Ti3C2 MXene 的独特特性来克服长期以来阻碍高保真神经微电极广泛采用碳基纳米材料的许多障碍。

在MXene微电极阵列上记录的微ECoG数据样本如图5所示。在将电极阵列应用于皮层后，清晰的生理信号立即在记录电极上显现出来，所有 MXene 电极上都出现了大约 1 mV 振幅 ECoG 信号。这些信号的功率谱证实了在氯胺酮-脱模素麻醉下大鼠中常见的两种大脑节律的存在：1⁄2 Hz缓慢振荡和40-70 Hz的β振荡。 此外，在慢振荡的"下降"状态下，观察到一个特征宽带功率衰减，在慢振荡的"...

Watch this Scientific Journal Video about Fabrication of Ti3C2 MXene Microelectrode Arrays for In Vivo Neural Recording at JoVE.com

Fabrication of Ti3C2 MXene Microelectrode Arrays for In Vivo Neural Recording

在这里，我们描述了一种制造Ti3C2 MXene微电极阵列并利用它们进行体内神经记录的方法。

用于Vivo神经记录的 Ti3C2 MXene 微电极阵列的制造

Implantable microelectrode technologies have been widely used to elucidate neural dynamics at the microscale to gain a deeper understanding of the neural ...

这种合成协议生产出高质量的MXene油墨，其金属电导率达到每厘米1万以上。该技术的主要优点是，它能够精确微纹 MXene 薄膜，而不会损坏薄膜或在电极上留下有害残留物。要准备碳化钛油墨，请缓慢地将两克钛铝硬质合金前体加入含有选择性蚀刻溶液的 125 毫升反应容器中，并在每分钟 400 次旋转时，用 Teflon 磁棒搅拌溶液 24 小时，温度为 35 摄氏度。在孵化结束时，在两个175毫升离心管中加入50毫升的去化水，在管之间平均分离蚀刻反应混合物，并填充到150毫升标记。通过反复离心洗涤材料，将酸性上流液倾倒到塑料危险废物容器中，并在离心步骤之间的管中加入淡水，直到上流液溶液的 pH 值达到 pH6 以上。要将多层MXene粒子之间的分子相互交解，以削弱平面相互作用，在100毫升去离子水中加入两克氯化锂，以每分钟200次旋转搅拌溶液。当氯化锂溶解后，将氯化锂溶液的100毫升与碳化钛钛碳化铝硬质合金沉淀物混合。将溶液转回 125 毫升塑料容器，在 25 摄氏度和每分钟 200 次旋转下搅拌反应 12 小时。要将散装多层颗粒分层到单层至少数层碳化钛 MXene，请用多重离心洗涤中间解，将透明上清液蒸馏，直到观察到暗上流液。然后将暗上线离心一小时，然后稀释稀释的绿色上因。用150毫升去层水重新沉积膨胀的沉积物，将溶液平均分割成三个50毫升的离心管。将样品离离MXene上流液分离，将中超常液集中到单个容器中。然后将溶液离心一小时，以便进一步选择尺寸和优化解决方案，分离单层到几层薄片。对于碳化钛微电子阵列制造，将四微米厚的帕里烯-C底层沉积到干净的硅晶片上。要使用光刻学来定义晶圆上的金属图案，请每分钟旋转 3，000 次光刻，旋转 40 秒，然后将晶圆软烤在热板上，在 95 摄氏度下旋转 14.5 分钟。接下来，将晶圆装入晶圆，将晶圆掩码装入与晶圆定位的掩码对齐器中，使照片蒙版上的环与晶圆的所有边缘重叠。以 90 毫珠每厘米平方剂量用 365 纳米波长的眼线曝光晶圆，并在 115 摄氏度的热板上硬烤晶圆一分钟。在硬烘烤结束时，将晶圆浸入 RD6 开发器中两分钟，持续搅拌，然后用去维化水彻底冲洗，然后用氮气枪吹干。使用电子束蒸发器将 10 纳米的钛沉积，然后将 100 纳米的黄金沉积到晶圆上。然后将晶圆浸入溶剂脱模中约 10 分钟，直到光处理器溶解，多余的金属完全脱去。升空后，将晶圆声波化 30 秒，以去除任何残留的不需要的金属痕迹，然后用新鲜的溶剂脱衣和去压水冲洗晶圆，然后用氮气枪干燥。在升空过程结束时，黄金将在所需的互连轨迹和晶圆边缘周围的环中可见。对于牺牲的Parylene-C层沉积，首先将晶圆暴露在氧等离子体中30秒，使底层的Parylene-C层具有亲水性，然后旋转涂层将清洁溶液以每分钟1000次旋转的速度稀释到晶圆上，30秒。让晶圆风干至少五分钟，然后如所证明，将三微米的帕里烯-C沉积到晶圆上。使用面膜二的第二轮光刻后，使用氧等离子体反应离子蚀刻，在光刻胶未覆盖的区域通过牺牲的 Parylene-C 层蚀刻，以定义 MXene 电极和痕迹。蚀刻应与钛金互连以及晶圆边缘周围的环部分重叠。然后使用 profilometer 测量暴露的钛和金互连层与底部帕里烯-C 层之间的轮廓，以确认牺牲的 Parylene-C 层的完整蚀刻。要旋转将 MXene 溶液涂到晶圆上，请先将溶液分配到每个所需的 MXene 图案上，然后以每分钟 1，000 次旋转的速度旋转晶圆 40 秒。在 120 摄氏度的热板上干燥晶圆 10 分钟，从 MXene 薄膜中去除任何残留水，然后使用电子束蒸发器将受保护的 50 纳米二氧化硅层沉积到晶圆上。要去除牺牲的帕里烯-C层，请将一小滴去ioned水放在晶圆的边缘，并使用钳子从晶圆外层的环中定义层边缘的位置开始剥落牺牲的Parylene-C层。接下来，用新鲜的去维水彻底冲洗晶圆，清除剩余的清洁溶液残留物，并用氮气枪将晶圆干燥。将干燥的晶圆放在 120 摄氏度的热板上一小时，以去除图案 MXene 薄膜中残留的水，然后将四微米厚的 Parylene-C 层沉积到晶圆上，如所证明的。在用面罩三执行另一轮光刻后，使用电子束蒸发器将 100 纳米铝沉积到晶圆上，将晶圆浸入溶剂脱模中 10 分钟，直到金属完全从晶圆上脱去。在声波、冲洗和干燥（如演示）之后，可以观察到铝覆盖设备，并打开电极和粘合垫。使用氧等离子体反应离子蚀刻通过帕里琳-C层包围器件，并通过覆盖MXene电极触点和金键垫的顶部帕里琳-C层蚀刻。当器件之间的晶圆上没有 Parylene-C 残留物时，在 50 摄氏度下使用铝蚀刻 A 型湿化学蚀刻 10 分钟，或直到一分钟过去了，铝的所有视觉痕迹都消失。要蚀刻覆盖 MXene 电极的氧化硅，请使用六对一缓冲氧化物蚀刻中的湿化学蚀刻 30 秒。然后在设备端放置一小滴去化水。轻轻剥开设备，因为水在设备下方是邪恶的毛细管作用，以释放设备从硅基板晶圆。此处显示了 MXene 微电极阵列上记录的微电镀图数据样本。假皮质下降状态基于一到两赫兹的缓慢振荡的低谷。将电极阵列应用到皮层后，记录电极上立即显示清晰的生理信号，所有 MXene 电极上都出现了大约 1 毫伏振幅电控成像信号。这些信号的功率光谱证实了在氯胺酮德梅多米胺麻醉下观察到的两种大脑节律的存在，一到两赫兹的慢幅振荡和伽马振荡在40至70赫兹。此外，在缓慢振荡的向下状态下，有特征宽带功率衰减，在缓慢振荡的上部状态下观察到选择性的 15 至 30 赫兹贝塔带和 40 至 120 赫兹伽马带功率放大。合成方法的优化使MXenes的使用扩展到其他应用，如光电器件、智能纺织品等。本程序涉及使用危险化学品，包括氢氟酸、铝等和光刻剂。处理这些化学品时，请务必始终使用适当的 PPE。

Research

JoVE Journal

Bioengineering

Fabrication of Ti3C2 MXene Microelectrode Arrays for In Vivo Neural Recording

Fabrication of Micropatterned Hydrogels for Neural Culture Systems using Dynamic Mask Projection Photolithography

使用动态面膜投影光刻系统的神经文化Micropatterned水凝胶的制备

Increasingly, patterned cell culture environments are becoming a relevant technique to study cellular characteristics, and many researchers believe in the ...

科研

生物工程

Fabrication of Electrochemical-DNA Biosensors for the Reagentless Detection of Nucleic Acids, Proteins and Small Molecules

无试剂检测核酸，蛋白质和小分子的电化学DNA生物传感器的制备

As medicine is currently practiced, doctors send specimens to a central laboratory for testing and thus must wait hours or days to 
receive the results. ...

Adaptation of a Haptic Robot in a 3T fMRI

触觉机器人适应在3T功能磁共振成像

Functional magnetic resonance imaging (fMRI) provides excellent functional brain imaging via the BOLD signal 1 with advantages including non-ionizing ...

High efficiency, Site-specific Transfection of Adherent Cells with siRNA Using Microelectrode Arrays (MEA)

High efficiency, Site-specific Transfection of Adherent Cells with siRNA Using Microelectrode Arrays MEA

高效率，站点特定的贴壁细胞转染siRNA的微电极阵列（MEA）

The discovery of RNAi pathway in eukaryotes and the subsequent development of RNAi agents, such as siRNA and shRNA, have achieved a potent method for ...

Fabrication and Implantation of Miniature Dual-element Strain Gages for Measuring In Vivo Gastrointestinal Contractions in Rodents.

Fabrication and Implantation of Miniature Dual-element Strain Gages for Measuring In Vivo Gastrointestinal Contractions in Rodents.

的微型双元应变计测量加工和植入<em&gt;体内</em&gt;胃肠收缩鼠害。

Gastrointestinal dysfunction remains a major cause of morbidity and mortality. Indeed, gastrointestinal (GI) motility in health and disease remains an ...

Sealable Femtoliter Chamber Arrays for Cell-free Biology

密封飞升商会阵列的无细胞生物学

Cell-free systems provide a flexible platform for probing specific networks of biological reactions isolated from the complex resource sharing (e.g., ...

Easy and Accurate Mechano-profiling on Micropost Arrays

在Micropost阵列方便，准确机械力分析

Cell culture substrates with integrated flexible microposts enable a user to study the mechanical interactions between cells and their immediate ...

Improved 3D Hydrogel Cultures of Primary Glial Cells for In Vitro Modelling of Neuroinflammation

Improved 3D Hydrogel Cultures of Primary Glial Cells for In Vitro Modelling of Neuroinflammation

改良的3D 水凝胶培养的原发胶质细胞的体外Neuroinflammation 模型的建立

In the central nervous system, numerous acute injuries and neurodegenerative disorders, as well as implanted devices or biomaterials engineered to enhance ...

Rigid Embedding of Fixed and Stained, Whole, Millimeter-Scale Specimens for Section-free 3D Histology by Micro-Computed Tomography

用微计算机断层扫描法对无节段3D 组织学进行固定染色、全尺寸、毫米度试样的刚性嵌入

For over a hundred years, the histological study of tissues has been the gold standard for medical diagnosis because histology allows all cell types in ...

Interfacing Microfluidics with Microelectrode Arrays for Studying Neuronal Communication and Axonal Signal Propagation

微电极阵列接口微流体研究神经元通信和轴向信号传播

Microelectrode arrays (MEAs) are widely used to study neuronal function in vitro. These devices allow concurrent non-invasive recording/stimulation of ...