Name: automated delivery of microfabricated targets for intense laser irradiation experiments
Uploaded: 2021-01-28T13:00:00
Description: Watch this Scientific Journal Video about Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments at JoVE.com

这项工作得到了以色列科学基金会、第1135/15号赠款和以色列ZzckermanSTEM领导方案的支持，这些方案得到感谢。我们还感谢帕齐基金会、以色列赠款和#27707241-BSF赠款01025495的支持。作者们向特拉维夫大学纳米科学和纳米技术中心表示亲切的感谢。

1. 目标制造
注：图2和图3说明了独立金箔的制造过程。
<ol><li>背面<ol>
<li>在 <100> 晶体形成中使用 250 μm 厚、100 mm 直径、高应力硅晶圆，两侧涂有氮化硅。</li>
		<li>使用丙酮清洁晶圆，然后用异丙醇清洁晶圆，然后用氮气干燥。 然后按照表1中概述的步骤旋转涂层一层HMDS，形成 粘合层。</li>
		<li>按照表2中概述的步骤?...

<ol>
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H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-peak-power+surface+high-harmonic+generation+at+extreme+ultra-violet+wavelengths+from+a+tape.">High-peak-power surface high-harmonic generation at extreme ultra-violet wavelengths from a tape.</a> Journal of Applied Physics. 114 (4), 43106 (2013).</li><li>Fill, E., Bayerl, J., Tommasini, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+novel+tape+target+for+use+with+repetitively+pulsed+lasers.">A novel tape target for use with repetitively pulsed lasers.</a> Review of Scientific Instruments. 73 (5), 2190-2192 (2002).</li><li>Morrison, J. T., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=MeV+proton+acceleration+at+kHz+repetition+rate+from+ultra-intense+laser+liquid+interaction.">MeV proton acceleration at kHz repetition rate from ultra-intense laser liquid interaction.</a> New Journal of Physics. 20 (2), 22001 (2018).</li><li>Margarone, D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Proton+Acceleration+Driven+by+a+Nanosecond+Laser+from+a+Cryogenic+Thin+Solid-Hydrogen+Ribbon.">Proton Acceleration Driven by a Nanosecond Laser from a Cryogenic Thin Solid-Hydrogen Ribbon.</a> Physical Review X. 6, 041030 (2016).</li><li>Prencipe, I., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Targets+for+high+repetition+rate+laser+facilities:+needs,+challenges+and+perspectives.">Targets for high repetition rate laser facilities: needs, challenges and perspectives.</a> High Power Laser Science and Engineering. 5, 17 (2017).</li><li>Porat, E., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Towards+direct-laser-production+of+relativistic+surface+harmonics.">Towards direct-laser-production of relativistic surface harmonics.</a> Proceedings Volume 11036, Relativistic Plasma Waves and Particle Beams as Coherent and Incoherent Radiation Sources III. , 110360 (2019).</li><li>Gershuni, Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+gatling-gun+target+delivery+system+for+high-intensity+laser+irradiation+experiments.">A gatling-gun target delivery system for high-intensity laser irradiation experiments.</a> Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 934, 58-62 (2019).</li><li>Jung, D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Development+of+a+high+resolution+and+high+dispersion+Thomson+parabola.">Development of a high resolution and high dispersion Thomson parabola.</a> Review of Scientific Instruments. 82 (1), 13306 (2011).</li><li>Cobble, J. A., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-resolution+Thomson+parabola+for+ion+analysis.">High-resolution Thomson parabola for ion analysis.</a> Review of Scientific Instruments. 82 (11), 113504 (2011).</li><li>Man&#269;i&#263;, A., Fuchs, J., Antici, P., Gaillard, S. A., Audebert, P. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Absolute+calibration+of+photostimulable+image+plate+detectors+used+as+high-energy+proton+detectors.">Absolute calibration of photostimulable image plate detectors used as high-energy proton detectors.</a> Review of Scientific Instruments. 79, 73301 (2008).</li><li>Mattox, D. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Processing. Handbook of Physical Vapor Deposition (PVD) Processing. , (2007).</li><li>Astrom, K. J., Murray, R. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Feedback Systems: An Introduction for Scientists and Engineers. , (2006).</li><li>Passoni, M., Bertagna, L., Zani, A. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Target+normal+sheath+acceleration:+Theory,+comparison+with+experiments+and+future+perspectives.">Target normal sheath acceleration: Theory, comparison with experiments and future perspectives.</a> New Journal of Physics. 12, 045012 (2010).</li><li>Roth, M., Schollmeier, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ion+Acceleration:+TNSA.">Ion Acceleration: TNSA.</a> Laser-Plasma Interactions and Applications. , 303-350 (2013).</li><li>Zaffino, R., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Efficient+proton+acceleration+from+a+3+TW+table-top+laser+interacting+with+submicrometric+mass-produced+solid+targets.">Efficient proton acceleration from a 3 TW table-top laser interacting with submicrometric mass-produced solid targets.</a> Journal of Physics Communications. 2 (4), 41001 (2018).</li><li>Harres, K., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Development+and+calibration+of+a+Thomson+parabola+with+microchannel+plate+for+the+detection+of+laser-accelerated+MeV+ions.">Development and calibration of a Thomson parabola with microchannel plate for the detection of laser-accelerated MeV ions.</a> Review of Scientific Instruments. 79 (9), 93306 (2008).</li><li>Robinson, A. P. L., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Spectral+modification+of+laser-accelerated+proton+beams+by+self-generated+magnetic+fields+Related+content+New+Journal+of+Physics+Spectral+modification+of+laser-accelerated+proton+beams+by+self-generated+magnetic+fields.">Spectral modification of laser-accelerated proton beams by self-generated magnetic fields Related content New Journal of Physics Spectral modification of laser-accelerated proton beams by self-generated magnetic fields.</a> New Journal of Physics. 11 (15), 83018 (2009).</li><li>Treffert, F., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Design+and+implementation+of+a+Thomson+parabola+for+fluence+dependent+energy-loss+measurements+at+the+Neutralized+Drift+Compression+experiment.">Design and implementation of a Thomson parabola for fluence dependent energy-loss measurements at the Neutralized Drift Compression experiment.</a> Review of Scientific Instruments. 89 (10), 103302 (2018).</li><li>Pappalardo, A., Cosentino, L., Finocchiaro, P. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=An+imaging+technique+for+detection+and+absolute+calibration+of+scintillation+light.">An imaging technique for detection and absolute calibration of scintillation light.</a> Review of Scientific Instruments. 81 (3), 33308 (2010).</li></ol>

由于存在一些变化，本协议中描述的目标制造过程很常见（例如，Zaffino等人.在这里，对自动定位操作至关重要的一个独特步骤是，在晶圆背面的环形区域添加纳米刻度粗加工（步骤 1.2.3）。此步骤的目的是增加这些区域晶圆上的光射点漫散散射。测距传感器在晶圆上照射低功率激光束，收集散射光，通过三角测量确定其位移。
上述数据以每 5 s 一次的速率?...

An erratum was issued for:&#160;<a href="https://www.jove.com/t/61056">Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments</a>. The author list was updated.
The author list was updated from:
Yonatan Gershuni1,2, Michal Elkind1,2, Itamar Cohen1,2, Aviad Tsabary1,2, Deep Sarkar1,2, Ishay Pomerantz1,2 
1The School of Physics and Astronomy, Tel Aviv University, 
2Tel Aviv University Center for Light-Matter Interaction
to:
Yonatan Gershuni1,2, Michal Elkind1,2, Dolev Roitman1,2, Itamar Cohen1,2, Aviad Tsabary1,2, Deep Sarkar1,2, Ishay Pomerantz1,2 
1The School of Physics and Astronomy, Tel Aviv University, 
2Tel Aviv University Center for Light-Matter Interaction

An erratum was issued for:&#160;<a href="https://www.jove.com/t/61056">Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments</a>. The author list was updated.

Erratum: Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments

固体目标的高强度激光照射会产生多种形式的辐射。其中之一是能量在巨型电子伏特（MeV）1级的电能离子的发射。MeV离子的紧凑源具有许多应用的潜力，如质子快速点火2、质子放射成像3、离子放射治疗4和中子第5代。
使激光离子加速度实用是能够以高速率将微米尺度目标精确定位在激光聚焦范围内。几乎没有开发目标交付技术来应对这一挑战。最常见的是基于微米厚磁带的目标系统。这些目标易于补充，并且可以很容易地放置在激光的焦点内。磁带目标已使用VHS6，铜7，Mylar和Kapton8磁带。磁带驱动系统通常由两个用于缠绕和展开的电动线轴和两个垂直销组成，用于将磁带置于位置 9。定位磁带表面的精度通常低于对焦光束的雷利范围。另一种类型的可补充激光靶是液体片10。这些目标迅速交付给相互作用区域，并引入的碎片量非常低。该系统包括一个高压注射器泵，连续提供来自储液罐的液体。最近，新型低温氢喷流11被建立，作为提供超薄、低碎片、可补充目标的手段。
所有这些可补充目标系统的主要缺点是目标材料和几何形状的选择有限，这些材料和几何形状由强度、粘度和熔化温度等机械要求决定。
这里介绍了一个能够以0.2 Hz速率将微机械目标聚焦到高强度激光聚焦的系统。微加工在多功能几何12中提供了多种目标材料。目标定位由商用排量传感器和电动操纵器之间的闭环反馈执行。
目标交付系统测试使用高对比度的20TW激光系统，该系统提供25个长激光脉冲，目标为500mJ。在波拉特等人13中对激光系统的体系结构进行综述，在Gershuni等人第14条中对目标系统进行技术描述。本文提出了一种制作和使用这种系统的详细方法，并展示了超薄金箔靶点激光离子加速度的代表性结果。
图1所示的汤姆森帕拉博拉离子光谱仪（TPIS）15、16用于记录发射离子的能量光谱。在 TPIS 中，加速离子通过平行电场和磁场，从而将它们放在焦点平面的抛物线轨迹上。抛物线曲率取决于离子的电荷质量比，轨迹沿线的位置由离子的能量设置。
位于 TPIS 焦平面的 BAS-TR 成像板 （IP）17 记录冲击离子。IP 连接到机械馈通，以便每次拍摄前可转换到新区域。

<table>
	<tbody>
		<tr>
			<td>76.2 x 127mm EFL 90&#176; Protected Gold 100&#197; Off-Axis Parabolic Mirror</td>
			<td>Edmund optics</td>
			<td>35-535</td>
			<td></td>
		</tr>
		<tr>
			<td>MicroTrak 3 LTS 120-20</td>
			<td>MTI Instruments</td>
			<td></td>
			<td></td>
		</tr>
		<tr>
			<td>Ultrafast high power dielectric mirrors for 800 nm</td>
			<td>Thorlabs</td>
			<td></td>
			<td></td>
		</tr>
	</tbody>
</table>

automated delivery of microfabricated targets for intense laser irradiation experiments

所述是一种实验程序，能够对微润滑目标进行大功率激光照射。目标通过在目标操纵器和测距传感器之间运行的闭合反馈回路带到激光聚焦。详细介绍了目标制造过程。以0.2 Hz的速度照射600纳米厚金箔产生的M等级质子束具有代表性的结果。该方法与其他可补充目标系统进行比较，讨论了将拍摄速率提高至10赫兹以上的前景。

此目标输送系统用于加速离子从 600 nm 厚金箔的背面。当用 0 =5.6 的规范化激光强度照射时，这些离子被目标正常护套加速度 （TNSA） 机制21 加速。在 TNSA 中，主激光脉冲之前的低强度光使目标箔的前表面电离。主激光脉冲施加的思考力驱动热电子穿过大体积物质。这些电子22诱导的背表面电荷分离，产生了一个极端的静电梯度，加速了离子污染物在目?...

Watch this Scientific Journal Video about Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments at JoVE.com

Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments

提出了一种用高强度激光脉冲对薄金箔进行自动照射的协议。该协议包括微加工目标制造过程的分步描述，以及如何以 0.2 Hz 速率将目标带到激光聚焦的详细指南。

用于密集激光辐照实验的微制造目标的自动交付

Described is an experimental procedure that enables high-power laser irradiation of microfabricated targets. Targets are brought to the laser focus by a ...

亚微米尺度目标的密集激光辐射实验目前以慢射速进行。我们的协议通过以自动化的方式快速将这些目标置于激光的焦点，解决了这一难题。我们的目标系统能够收集数据，包括大量激光拍摄，目标参数以小增量变化，以及受益于高整体辐射剂量的应用。该协议的可视化演示将展示晶圆制造过程和目标对齐的微妙之处。演示目标制造过程的是工艺工程师尼里特·波雷茨基·沙迈和诺法尔·利夫尼。要制造背面，请使用 250 微米厚 100 毫米直径的高应力硅晶圆，在两侧涂上氮化硅的零零晶体层。用丙酮和异丙醇清洁晶圆。然后旋转涂层的晶圆与 HMDS 电阻形成粘合层。使用 AZ 1518 正光处理师旋转晶圆。在100摄氏度下烘烤晶圆一分钟。光刻仪1000由1000微米方的真空下开口，在一个四到七秒周期内将晶圆暴露在400纳米的紫外灯下，使晶圆暴露在每厘米40焦耳的荧光中。然后使用 AZ 726 开发人员来暴露氮化硅和一浴脱水水，以阻止这个过程。使用反应离子蚀刻器去除正方形位置的氮化硅。将晶圆放在 NMP 浴池中 20 分钟，以去除残余电阻和光耐光，在氮化硅层上生成掩膜的复制品。然后在淡水下清洗，让它干燥。将晶圆以 30%90 摄氏度氢氧化钾溶液中沉入，通过方形开口蚀刻硅。要制造正面，请重复前面描述的过程，使用形状为三个同心环的蒙版。使用反应离子蚀刻器去除环位于的氮化硅，然后使用 NMP 浴池去除电阻和光刻垫残留物。通过将硅片沉入硝酸中，并在0.02摩尔硝酸银和四个氟化硅氢溶液中，使硅环粗糙。在晶圆蚀刻的一侧，使用物理气相沉积机在10纳米的粘合钛、镍或铬薄膜之上溅出几百纳米的金层。在高放大显微镜下阻挡光束，将第一个目标置于视野中。将三角测量测距传感器指向离目标最近的粗糙环，并记录其位移读数。将显微镜留在位，将晶圆移开以清除光束路径。使用两个折叠镜和离轴抛物面镜将低功率光束与显微镜视野对齐。调整这三个反射镜以纠正光束中的散光。结果应该是一个几乎衍射有限的焦点。阻挡激光束，将目标带回显微镜的焦点。然后使用显微镜和测距传感器读数验证其位置。使用软件使用先前记录的位移值作为设定点，实现目标焦轴操纵器和位移传感器读数之间的闭环反馈。一旦闭环定位达到与设定点的所需容差距离，使用单个高功率激光脉冲照射目标。记录来自粒子诊断的数据，并重复软件将下一个目标引入焦点的过程。这个目标输送系统用于加速离子从600纳米厚金箔的背面。此处显示了沿焦轴的目标位移时间序列。这些值是相对于焦点位置设定点的。绿点指示目标位移何时在距离设定点一微米的容差值内，即拍摄激光时。汤姆森抛物线离子光谱仪从14个连续600纳米厚金箔目标的辐照中获得痕迹。能量谱是从这些痕迹中得出的。最大质子能量的峰峰值稳定性在10%以内，按照本程序，可以系统地对固体箔神经元生成离子和电子加速度进行调查。

Research

JoVE Journal

Engineering

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

白光干涉表面改性中的应用离子溅射，激光烧蚀，与摩擦学实验表征

In materials science and engineering it is often necessary to obtain quantitative measurements of surface topography with micrometer lateral resolution. ...

科研

工程学

Fabrication of Nano-engineered Transparent Conducting Oxides by Pulsed Laser Deposition

制备纳米设计的脉冲激光沉积透明导电氧化物

Nanosecond Pulsed  Laser Deposition (PLD) in the presence of a background gas allows the deposition  of metal oxides with tunable morphology, structure, ...

Spatial Separation of Molecular Conformers and Clusters

分子构象器和星团的空间分离

Gas-phase molecular physics and physical chemistry experiments commonly use supersonic expansions through pulsed valves for the production of cold ...

Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats &amp; Spheres

Convergent Polishing: A Simple, Rapid, Full Aperture Polishing Process of High Quality Optical Flats & Spheres

收敛抛光：高品质光学平面与球的一种简单，快速，全口径抛光工艺

Convergent Polishing is a novel polishing system and method for finishing flat and spherical glass optics in which a workpiece, independent of its initial ...

Laser-induced Forward Transfer for Flip-chip Packaging of Single Dies

激光诱导转发转移单人死于倒装芯片封装

Flip-chip (FC) packaging is a key technology for realizing high performance, ultra-miniaturized and high-density circuits in the micro-electronics ...

Selective Area Modification of Silicon Surface Wettability by Pulsed UV Laser Irradiation in Liquid Environment

硅表面润湿性的选择区域改性脉冲紫外激光照射在液体环境

The wettability of silicon (Si) is one of the important parameters in the technology of surface functionalization of this material and fabrication of ...

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

紧凑的镜头少数字全息显微镜的MEMS检测与表征

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Automation of Mode Locking in a Nonlinear Polarization Rotation Fiber Laser through Output Polarization Measurements

锁模自动化的非线性偏振旋转光纤激光器通过输出偏振测量

When a laser is mode-locked, it emits a train of ultra-short pulses at a repetition rate determined by the laser cavity length. This article outlines a ...

Fabrication of 1-D Photonic Crystal Cavity on a Nanofiber Using Femtosecond Laser-induced Ablation

1-D光子晶体空穴对纳米纤维使用飞秒激光诱导消融制造

We present a protocol for fabricating 1-D Photonic Crystal (PhC) cavities on subwavelength-diameter tapered optical fibers, optical nanofibers, using ...

Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

使用激光投射光热法构造加热的地下缺陷定位

The presented method is used to locate subsurface defects oriented perpendicularly to the surface. To achieve this, we create destructively interfering ...