1:12
Substrate Selection, Preparation, and Floating Gates (FG): Titanium Deposition
2:11
FG Patterning and Gate Dielectric Deposition
3:55
Opening of the Sensing Areas of the OCMFET for Electrical Activity Recording and Formation of the Vias to Access the Back of the FGs
4:46
Self-Alignment of Source and Drain with the FG
5:15
Gold Deposition, Channel Formation, and Patterning of the Sources, Drains, and Control Gates
6:50
Deposition and Activation of the Parylene C for pH Sensing
7:57
Semiconductor Deposition, Culturing Chamber Placing, and Final Cut-Out of the Device from the PET
8:22
Results: Cellular Electrical and Metabolic Activity Recordings with Micro OCMFET Arrays (MOA)
