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Abstract

Engineering

A Micro-Displacement Measurement Based on the Shadow Technique

Published: October 7th, 2022

DOI:

10.3791/64658

1State Key Laboratory of Precision Measuring Technology and Instruments, Tianjin University, 2State Key Laboratory of Tribology, Department of Mechanical Engineering, Tsinghua University

The precision measurement of micro displacement is important in scientific and industrial fields. However, it is a tough challenge due to the complex design and the high cost of measuring instruments. Inspired by the shadow formed from water striders walking on a water surface under sunlight, a micro-displacement measurement method was proposed. Water strider legs with superhydrophobic properties bend the water surface. The curved surface of the water refracts sunlight, creating a shadow with a bright edge at the bottom of the pond. The shadow size is generally larger than the indentation depth of the legs from the water surface. In the micro-displacement measurement system, the applied displacement is proportional to the change in the diameter of the shadow. The presented study proposes a micro-displacement measurement procedure based on this shadow technique. The displacement sensitivity can reach 10.0 nm/pixel in the range of 5 µm. This system is simple to construct, low cost, and has high precision with good linear performance. The method provides a convenient additional option to measure micro-displacement.

Tags

Micro displacement Measurement

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