Name: sensitivity enhancement of soft capacitive pressure sensors using a solvent evaporation-based porosity control technique
Uploaded: 2023-03-24T14:40:00
Description: Watch this Scientific Journal Video about Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique at JoVE.com

这项工作得到了中国国家自然科学基金资助62273304。

1. 多孔PDMS介电层软电容式压力传感器的制备
<ol><li>多孔PDMS介电层的制造<ol><li>按照以下步骤准备糖/赤藓糖醇多孔模板。<ol><li>用孔径为270μm和500μm的样品筛过滤糖。选择粒径在270-500μm范围内的糖。 注意：只要均匀性在公差范围内，更大或更小的糖粒径也是可以接受的。糖颗粒的直径将影响后续步骤中制造的多孔PDMS层的孔径，但不会完全确定孔径。</li>
			<li>将赤藓糖醇（见 <stron...

<ol>
	<li>Ozioko, O., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=SensAct:+The+soft+and+squishy+tactile+Sensor+with+integrated+flexible+actuator.">SensAct: The soft and squishy tactile Sensor with integrated flexible actuator.</a> Advanced Intelligent Systems. 3 (3), 1900145 (2021).</li><li>Qiu, Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+biomimetic+drosera+capensis+with+adaptive+decision-predation+behavior+based+on+multifunctional+sensing+and+fast+actuating+capability.">A biomimetic drosera capensis with adaptive decision-predation behavior based on multifunctional sensing and fast actuating capability.</a> Advanced Functional Materials. 32 (13), 2110296 (2021).</li><li>Ntagios, M., Nassar, H., Pullanchiyodan, A., Navaraj, W. T., Dahiya, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Robotic+hands+with+intrinsic+tactile+sensing+via+3D+printed+soft+pressure+sensors.">Robotic hands with intrinsic tactile sensing via 3D printed soft pressure sensors.</a> Advanced Intelligent Systems. 2 (6), 1900080 (2019).</li><li>Tang, Z., Jia, S., Zhou, C., Li, B. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=3D+Printing+of+highly+sensitive+and+large-measurement-range+flexible+pressure+sensors+with+a+positive+piezoresistive+effect.">3D Printing of highly sensitive and large-measurement-range flexible pressure sensors with a positive piezoresistive effect.</a> ACS Applied Materials &amp; Interfaces. 12 (25), 28669-28680 (2020).</li><li>Dai, Y., Chen, J., Tian, W., Xu, L., Gao, S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+PVDF/Au/PEN+multifunctional+flexible+human-machine+interface+for+multidimensional+sensing+and+energy+harvesting+for+the+internet+of+things.">A PVDF/Au/PEN multifunctional flexible human-machine interface for multidimensional sensing and energy harvesting for the internet of things.</a> IEEE Sensors Journal. 20 (14), 7556-7568 (2020).</li><li>Yang, Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Flexible+piezoelectric+pressure+sensor+based+on+polydopamine-modified+BaTiO3/PVDF+composite+film+for+human+motion+monitoring.">Flexible piezoelectric pressure sensor based on polydopamine-modified BaTiO3/PVDF composite film for human motion monitoring.</a> Sensors and Actuators A: Physical. 301, 111789 (2020).</li><li>Gao, Y. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Wearable+microfluidic+diaphragm+pressure+sensor+for+health+and+tactile+touch+monitoring.">Wearable microfluidic diaphragm pressure sensor for health and tactile touch monitoring.</a> Advanced Materials. 29 (39), 1701985 (2017).</li><li>Meng, K., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Flexible+weaving+constructed+self-powered+pressure+sensor+enabling+continuous+diagnosis+of+cardiovascular+disease+and+measurement+of+cuffless+blood+pressure.">Flexible weaving constructed self-powered pressure sensor enabling continuous diagnosis of cardiovascular disease and measurement of cuffless blood pressure.</a> Advanced Functional Materials. 29 (5), 180688 (2019).</li><li>Yang, J. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Microstructured+porous+pyramid-based+ultrahigh+sensitive+pressure+sensor+insensitive+to+strain+and+temperature.">Microstructured porous pyramid-based ultrahigh sensitive pressure sensor insensitive to strain and temperature.</a> ACS Applied Materials &amp; Interfaces. 11 (21), 19472-19480 (2019).</li><li>Chen, S., Zhuo, B., Guo, X. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Large+area+one-step+facile+processing+of+microstructured+elastomeric+dielectric+film+for+high+sensitivity+and+durable+sensing+over+wide+pressure+range.">Large area one-step facile processing of microstructured elastomeric dielectric film for high sensitivity and durable sensing over wide pressure range.</a> ACS Applied Materials &amp; Interfaces. 8 (31), 20364-20370 (2016).</li><li>Ding, H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Influence+of+the+pore+size+on+the+sensitivity+of+flexible+and+wearable+pressure+sensors+based+on+porous+Ecoflex+dielectric+layers.">Influence of the pore size on the sensitivity of flexible and wearable pressure sensors based on porous Ecoflex dielectric layers.</a> Materials Research Express. 6 (6), 066304 (2019).</li><li>Yoon, J. I., Choi, K. S., Chang, S. P. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+novel+means+of+fabricating+microporous+structures+for+the+dielectric+layers+of+capacitive+pressure+sensor.">A novel means of fabricating microporous structures for the dielectric layers of capacitive pressure sensor.</a> Microelectronic Engineering. 179, 60-66 (2017).</li><li>Wang, J., Li, L., Zhang, L., Zhang, P., Pu, X. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Flexible+capacitive+pressure+sensors+with+micro-patterned+porous+dielectric+layer+for+wearable+electronics.">Flexible capacitive pressure sensors with micro-patterned porous dielectric layer for wearable electronics.</a> Journal of Micromechanics and Microengineering. 32 (3), 034003 (2022).</li><li>Mannsfeld, S. C. B., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Highly+sensitive+flexible+pressure+sensors+with+microstructured+rubber+dielectric+layers.">Highly sensitive flexible pressure sensors with microstructured rubber dielectric layers.</a> Nature Materials. 9 (10), 859-864 (2010).</li><li>Wan, Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+highly+sensitive+flexible+capacitive+tactile+sensor+with+sparse+and+high-aspect-ratio+microstructures.">A highly sensitive flexible capacitive tactile sensor with sparse and high-aspect-ratio microstructures.</a> Advanced Electronic Materials. 4 (4), 1700586 (2018).</li><li>Kwon, D., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Highly+sensitive,+flexible,+and+wearable+pressure+sensor+based+on+a+giant+piezocapacitive+effect+of+three-dimensional+microporous+elastomeric+dielectric+layer.">Highly sensitive, flexible, and wearable pressure sensor based on a giant piezocapacitive effect of three-dimensional microporous elastomeric dielectric layer.</a> ACS Applied Materials &amp; Interfaces. 8 (26), 16922-16931 (2016).</li><li>Li, W., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+porous+and+air+gap+elastomeric+dielectric+layer+for+wearable+capacitive+pressure+sensor+with+high+sensitivity+and+a+wide+detection+range.">A porous and air gap elastomeric dielectric layer for wearable capacitive pressure sensor with high sensitivity and a wide detection range.</a> Journal of Materials Chemistry C. 8 (33), 11468-11476 (2020).</li><li>Kim, J. O., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Highly+ordered+3D+microstructure-based+electronic+skin+capable+of+differentiating+pressure,+temperature,+and+proximity.">Highly ordered 3D microstructure-based electronic skin capable of differentiating pressure, temperature, and proximity.</a> ACS Applied Materials &amp; Interfaces. 11 (1), 1503-1511 (2019).</li><li>Lo, L. W., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+soft+sponge+sensor+for+multimodal+sensing+and+distinguishing+of+pressure,+strain,+and+temperature.">A soft sponge sensor for multimodal sensing and distinguishing of pressure, strain, and temperature.</a> ACS Applied Materials &amp; Interfaces. 14 (7), 9570-9578 (2022).</li><li>Hwang, J., Kim, Y., Yang, H., Oh, J. H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fabrication+of+hierarchically+porous+structured+PDMS+composites+and+their+application+as+a+flexible+capacitive+pressure+sensor.">Fabrication of hierarchically porous structured PDMS composites and their application as a flexible capacitive pressure sensor.</a> Composites Part B: Engineering. 211, 108607 (2021).</li><li>Jung, Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Linearly+sensitive+pressure+sensor+based+on+a+porous+multistacked+composite+structure+with+controlled+mechanical+and+electrical+properties.">Linearly sensitive pressure sensor based on a porous multistacked composite structure with controlled mechanical and electrical properties.</a> ACS Applied Materials &amp; Interfaces. 13 (24), 28975-28984 (2021).</li><li>Choi, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Synergetic+effect+of+porous+elastomer+and+percolation+of+carbon+nanotube+filler+toward+high+performance+capacitive+pressure+sensors.">Synergetic effect of porous elastomer and percolation of carbon nanotube filler toward high performance capacitive pressure sensors.</a> ACS Applied Materials &amp; Interfaces. 12 (1), 1698-1706 (2020).</li><li>Choi, S. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+polydimethylsiloxane+(PDMS)+sponge+for+the+selective+absorption+of+oil+from+water.">A polydimethylsiloxane (PDMS) sponge for the selective absorption of oil from water.</a> ACS Applied Materials &amp; Interfaces. 3 (12), 4552-4556 (2011).</li><li>Rinaldi, A., Tamburrano, A., Fortunato, M., Sarto, M. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+flexible+and+highly+sensitive+pressure+sensor+based+on+a+PDMS+foam+coated+with+graphene+nanoplatelets.">A flexible and highly sensitive pressure sensor based on a PDMS foam coated with graphene nanoplatelets.</a> Sensors. 16 (12), 2148 (2016).</li></ol>

本工作提出了一种基于溶剂蒸发的简单方法控制孔隙率，一系列实验结果证明了其可行性。虽然多孔结构已广泛应用于柔性电容式压力传感器，但孔隙率控制仍需进一步优化。与改变PFA 11，12，13，18，19的粒径和聚合物底物与PFA 17，20的比例的现有方法不同</sup...

近年来，柔性压力传感器因其在软机器人1，2，3，“人机”触觉界面4，5和健康监测6，7，8中不可或缺的应用而受到关注。通常，压力传感的机制包括压阻式 1，4，7、压电式 2，6、电容式 2、3，9、10、11、12、13 和摩擦电8传感器。其中，电容式压力传感器因其高灵敏度、低检测限（LOD）等特点，成为触觉传感中最有前途的方法之一。
为了获得更好的传感性能，柔性电容式压力传感器引入了微金字塔2，9，14，微柱15和微孔9，10，11，12，13，16，17等各种微结构，并优化了制造方法以进一步提高传感水平这种结构的性能。然而，这些结构中的大多数都需要复杂的微细加工设施，这大大增加了制造成本和操作难度。例如，微金字塔作为软压力传感器中最常用的微观结构，依靠光刻定义和湿蚀硅片作为成型模板，这需要精密设备和严格的洁净室环境9，14。因此，可以通过简单的制造工艺和低成本原材料制造，同时保持高传感性能的微孔结构（多孔结构）最近引起了越来越多的关注9，10，11，12，13，16，17.这将讨论，以及改变PFA及其量的缺点，作为使用我们的分数控制方法的动机。
本文提出了一种基于溶剂蒸发技术的简单、低成本的方法来制备孔隙率可控的多孔柔性电容式压力传感器。完整的制造过程包括多孔PDMS介电层的制造，电极的刮擦涂层以及三个功能层的粘合。具体而言，本工作创新性地利用一定质量比的PDMS/甲苯混合溶液，基于糖/赤藓糖醇混合物模板制备了多孔PDMS介电层。同时，均匀的PFA粒径确保了均匀的孔形貌和分布;因此，可以通过改变PDMS/甲苯质量比来控制孔隙率。实验结果表明，通过将PDMS/甲苯质量比从1：8提高到1：1，可以将所提出的压力传感器的灵敏度提高两倍以上。光学显微镜图像也证实了由于不同的PDMS/甲苯质量比而导致的微孔壁厚的变化。优化后的软电容式压力传感器具有较高的传感性能，灵敏度和响应时间分别为3.47% kPa−1 和0.2 s。该方法实现了快速、低成本且易于操作的多孔介电层的制造，具有可控的孔隙率。

<table border="1" fo:keep-together.within-page="1" fo:keep-with-next.within-page="always">
	<tbody>
		<tr>
			<td>3D printer</td>
			<td>Zhejiang Qidi Technology Co., Ltd</td>
			<td>X-MAX</td>
			<td></td>
		</tr>
		<tr>
			<td>3D printing metarials</td>
			<td>Zhejiang Qidi Technology Co., Ltd</td>
			<td>3D Printing Filament PLA 1.75 mm</td>
			<td></td>
		</tr>
		<tr>
			<td>Carbon nanotubes (CNTs)</td>
			<td>XFNANO</td>
			<td>XFM13</td>
			<td></td>
		</tr>
		<tr>
			<td>Data acquisition (DAQ)</td>
			<td>National Instruments</td>
			<td>USB6002</td>
			<td></td>
		</tr>
		<tr>
			<td>Double side tape</td>
			<td>Minnesota Mining and Manufacturing (3M)</td>
			<td>3M VHB 4910</td>
			<td>1 mm thick</td>
		</tr>
		<tr>
			<td>Electrode metal mold</td>
			<td>Guangdong Shunde Molarobot Co., Ltd</td>
			<td></td>
			<td>This metal mold is a round metal plate with a flat bottom round groove and an embossed electrode pattern of 0.2 mm thick in the middle of the groove.</td>
		</tr>
		<tr>
			<td>Erythritol</td>
			<td>Shandong Sanyuan Biotechnology Co.,Ltd.</td>
			<td></td>
			<td></td>
		</tr>
		<tr>
			<td>Isopropyl Alcohol (IPA)</td>
			<td>Sinopharm chemical reagent Co., Ltd</td>
			<td>80109218</td>
			<td></td>
		</tr>
		<tr>
			<td>LabVIEW</td>
			<td>National Instruments</td>
			<td>LabVIEW 2019</td>
			<td></td>
		</tr>
		<tr>
			<td>LCR meter</td>
			<td>Keysight</td>
			<td>EA4980AL</td>
			<td></td>
		</tr>
		<tr>
			<td>Metal wire</td>
			<td>Hangzhou Hongtong WIRE&#38;CABLE Co., Ltd.</td>
			<td>2UEW/155</td>
			<td></td>
		</tr>
		<tr>
			<td>Microscope</td>
			<td>Aosvi</td>
			<td>T2-3M180</td>
			<td></td>
		</tr>
		<tr>
			<td>Numerical modeling software</td>
			<td>COMSOL</td>
			<td>COMSOL Multiphysics 5.6</td>
			<td></td>
		</tr>
		<tr>
			<td>Polydimethylsiloxane (PDMS)</td>
			<td>Dow Chemical Company</td>
			<td>SYLGAR 184 Silicone Elastomer Kit</td>
			<td>Two parts (base and curing agent)</td>
		</tr>
		<tr>
			<td>Sealing film</td>
			<td>Corning</td>
			<td>PM-996</td>
			<td>parafilm</td>
		</tr>
		<tr>
			<td>Si wafer</td>
			<td>Suzhou Crystal Silicon Electronic &#38; Technology Co.,Ltd</td>
			<td>ZK20220416-03</td>
			<td>Diameter (mm): 50.8 +/- 0.3 
			Type/Orientation: P/100 
			Thickness (&#181;m): 525 +/- 25</td>
		</tr>
		<tr>
			<td>Silver conductive paint</td>
			<td>Electron Microscopy Sciences</td>
			<td>12686-15</td>
			<td></td>
		</tr>
		<tr>
			<td>Stepping motor</td>
			<td>BEIJING HAI JIE JIA CHUANG Technology Co., Ltd</td>
			<td>57H B56L4-30DB</td>
			<td></td>
		</tr>
		<tr>
			<td>Sugar/erythritol template metal mold</td>
			<td>Guangdong Shunde Molarobot Co., Ltd</td>
			<td></td>
			<td>This metal mold is a 5 mm thick square metal plate with a flat bottom square groove of 2.5 mm deep.</td>
		</tr>
		<tr>
			<td>Toluene</td>
			<td>Sinopharm chemical reagent Co., Ltd</td>
			<td>10022819</td>
			<td></td>
		</tr>
	</tbody>
</table>

sensitivity enhancement of soft capacitive pressure sensors using a solvent evaporation-based porosity control technique

软压力传感器在软机器人和触觉界面中发展“人机”触觉方面发挥着重要作用。具体而言，具有微结构聚合物基质的电容式传感器因其高灵敏度、宽线性范围和快速响应时间而进行了相当大的努力探索。然而，传感性能的提高通常依赖于介电层的结构设计，这需要复杂的微细加工设施。本文介绍了一种简单且低成本的方法来制造多孔电容式压力传感器，该方法使用基于溶剂蒸发的方法调节孔隙率，从而提高了灵敏度。该传感器由多孔聚二甲基硅氧烷 （PDMS） 介电层组成，该介电层与由弹性导电聚合物复合材料 （ECPC） 制成的顶部和底部电极粘合。通过将碳纳米管（CNTs）掺杂的PDMS导电浆料刮涂成模具图案的PDMS薄膜来制备电极。为了优化介电层的孔隙率以增强传感性能，PDMS溶液用不同质量分数的甲苯稀释，而不是过滤或研磨成不同尺寸的糖孔形成剂（PFA）。甲苯溶剂的蒸发允许快速制造具有可控孔隙率的多孔介电层。结果表明，当甲苯与PDMS的比例从1：8提高到1：1时，灵敏度可以提高两倍。这项工作中提出的研究提供了一种低成本的方法来制造具有可调传感器参数的软感觉机械感受器的完全集成的仿生软机器人抓手。

集总糖/赤藓糖醇多孔模板的照片如图3A所示。 图3B显示了具有刮擦涂层ECPC图案的柔性电极层。图3C显示了用所提出的方法制造的带有多孔介电层的软电容式压力传感器。基于PDMS/甲苯溶液制备了4个多孔PDMS介电层，质量比分别为1：1、3：1、5：1和8：1。显示不同结构的孔形貌的光学显微镜图像如图3D</stro...

Watch this Scientific Journal Video about Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique at JoVE.com

Sensitivity Enhancement of Soft Capacitive Pressure Sensors Using a Solvent Evaporation-Based Porosity Control Technique

提出了一种基于溶剂蒸发技术的简单且具有成本效益的制造方法，以优化软电容式压力传感器的性能，该方法通过使用不同质量比的模塑PDMS/甲苯溶液在介电层中的孔隙率控制来实现。

基于溶剂蒸发的孔隙率控制技术提高软电容式压力传感器的灵敏度

Soft pressure sensors play a significant role in developing &#34;man-machine&#34; tactile sensation in soft robotics and haptic interfaces. Specifically, ...

我们提出了一种制造性能可控的柔性竞争压力传感器的新方法。它是通过调节溶剂质量分数来控制介电层的孔隙率来实现的。优化竞争性压力传感器是通过一种经济高效且易于操作的方法实现的，该方法避免使用复杂的微细加工设施。为了制造多孔PDMS介电层，称取质量比为20：1的过滤糖和赤藓糖醇粉末，并通过摇动将它们均匀混合。将混合物填充到商业获得的糖赤藓糖醇金属模具中，并按压表面以使填料致密。将混合物在 135 摄氏度的对流烤箱中加热两个小时。加热后，让混合物在室温下冷却，然后取出块状板糖。为了制备孔隙率可控的PDMS介电层，在离心管中称取5克甲苯，5克PDMS碱和0.5克PDMs固化剂，搅拌均匀溶液。在室温下将溶液在875G下离心30秒以除去气泡。将方形糖 - 赤藓糖醇多孔模板放入培养皿中。在四个角下方插入双面胶带作为垫片，以将模板从培养皿表面提起。将PDMS甲苯溶液倒入模板中，并稍微倾斜培养皿以填充糖颗粒之间的所有间隙。然后，将培养皿放入真空干燥器中脱气 20 分钟。脱气后，将干燥器中的培养皿转移到90摄氏度的烤箱中45分钟，以蒸发甲苯并固化液体PDMS。接下来，将嵌入多孔模板中的固化PDMS浸入去离子水中。在140摄氏度的热板上加热，直到糖模板完全溶解，然后用去离子水清洁多孔PDMS。为了制造基于ECPC的柔性电极层，首先，通过在烧杯中称取0.16克碳纳米管或CNT和4克甲苯来合成ECPC油墨。用密封膜覆盖烧杯以防止溶剂蒸发，并以 250 RPM 的磁力搅拌 90 分钟。在烧杯中称取两克PDMS基料和两克甲苯，然后以200 RPM的速度放在磁力搅拌器上一小时。制备两种溶液后，将CNTs甲苯悬浮液与PDMS基甲苯溶液混合，并用密封膜覆盖烧杯。以 250 RPM 的磁力搅拌两小时。混合后，揭开烧杯盖，在混合溶液中加入0.2克PDMS固化剂。在 75 摄氏度和 250 RPM 下磁力搅拌一小时。要刮擦电极，请在质量比为 2 至 10 比 1 的离心管中称取甲苯、PDMS 基和 PDMS 固化剂，并均匀搅拌溶液。然后，在室温下将溶液在875G下离心30秒以除去气泡。将1.3克PDMS甲苯溶液倒入具有浮雕电极图案的商业获得的电极金属模具中。将模具放入真空干燥器中脱气10分钟。然后，将模具中的PDMS在90摄氏度的热板上固化15分钟。在室温下冷却后，撕下图案化的PDMS薄膜。将PDMS薄膜的平坦面连接到硅晶圆上。将 ECPC 墨水刮涂在电极图案中。将ECPC的墨水在90摄氏度的热板上固化15分钟。对于软电容传感器的粘接和封装，请将金属线连接到电极上。在连接位置滴下银导电涂料以获得良好的导电性，然后等待银导电涂料干燥。将PDMS溶液滴到连接处，以完全密封干燥的银导电涂料。将PDMS在90摄氏度的热板上固化15分钟。固化后，重复这些步骤以连接上下电极层的电线。将PDMS薄层均匀地涂在电极膜上，作为电极和介电层之间粘合的粘合层。然后，将制造的多孔PDMS介电层放在电极层上。将PDMS胶水在95摄氏度下固化10分钟。将玻璃培养皿放在多孔PDMS上，以确保加热过程中两层之间的良好接触。将一层薄薄的PDMS均匀地涂在另一层电极上。然后，反转键合电极介电层并将其放置在另一个单电极层上。对齐两个电极后，完成多孔PDMS层与另一个电极层之间的粘合。为了测试传感性能，控制步进电机以驱动压头垂直向下移动编程距离。记录电容和标准压力数据，在每个连续的加载循环中以相同的间隔增加加载力，直到加载压力达到40牛顿。再次，控制步进电机并记录电容和标准压力数据。重复加载和卸载测试2， 500个循环，同时记录被测设备的电容作为标准压力读数的函数。控制压头快速按下并保持稳定几秒钟，然后返回到零牛顿负载。重复此过程五次，并将电容记录为时间的函数。不同PDMS甲苯质量比制备的多孔PDMS介电层的光学显微镜图像显示，随着PDMS甲苯溶液质量比的增加，孔壁厚度减小。仿真分析表明，在相同的压缩压力下，孔隙率越高，压缩应变越大，线性越好。不同PDMS质量比多孔PDMS介电层传感器的电容压力响应曲线表现出不同的灵敏度。在0-10 kPa的压力载荷范围内，1：1的PDMS甲苯质量比传感器的灵敏度比8：1的PDMS甲苯传感器高2倍。压力增加后，介电层的孔径逐渐减小，灵敏度降低，直到所有孔隙率达到相同的水平。显示了在 10 kPascal 的相同负载压力下对五次连续加载、卸载测试的电容响应。发现加载响应时间为 0.2 秒。循环测试表明，所制备的软电容传感器在2， 500次循环后具有优异的重复性。随着PDMS甲苯质量比的增加，PDMS介电层的孔隙率会降低，这将影响传感器的性能。

Research

JoVE Journal

Engineering

Micro 3D Printing Using a Digital Projector and its Application in the Study of Soft Materials Mechanics

微三维打印使用数字投影机和软材料力学的研究及其应用

Buckling is a classical topic in mechanics. While buckling has long been studied as one of the major structural failure modes1, it has recently drawn new ...

科研

工程学

Synthesis and Microdiffraction at Extreme Pressures and Temperatures

在极端的压力和温度的合成和Microdiffraction

High pressure compounds and polymorphs are investigated for a broad range of purposes such as determine structures and processes of deep planetary ...

Casting Protocols for the Production of Open Cell Aluminum Foams by the Replication Technique and the Effect on Porosity

Metal foams are interesting materials from both a fundamental understanding and practical applications point of view. Uses have been proposed, and in many ...

Detection and Recovery of Palladium, Gold and Cobalt Metals from the Urban Mine Using Novel Sensors/Adsorbents Designated with Nanoscale Wagon-wheel-shaped Pores

检测和钯的回收，从城市矿山黄金和钴金属使用标有纳米货车车轮形的孔隙新型传感器/吸附剂

Developing low-cost, efficient processes for recovering and recycling palladium, gold and cobalt metals from urban mine remains a significant challenge in ...

Blast Quantification Using Hopkinson Pressure Bars

高炉利用定量霍普金森杆

Near-field blast load measurement presents an issue to many sensor types as they must endure very aggressive environments and be able to measure pressures ...

The Measurement of Unsteady Surface Pressure Using a Remote Microphone Probe

非定常表面压力的使用远程麦克风探头测量

Microphones are widely applied to measure pressure fluctuations at the walls of solid bodies immersed in turbulent flows. Turbulent motions with various ...

Solvent Bonding for Fabrication of PMMA and COP Microfluidic Devices

溶剂粘接的PMMA的制备和COP微流体装置

Thermoplastic microfluidic devices offer many advantages over those made from silicone elastomers, but bonding procedures must be developed for each ...

Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques

使用预加重技术增益补偿方法论电流镜的比例 - 积分 - 微分控制正弦扫描

Galvanometer mirrors are used for optical applications such as target tracking, drawing, and scanning control because of their high speed and accuracy. ...

Study of Siphon Breaker Experiment and Simulation for a Research Reactor

研究堆虹吸断路器试验与仿真研究

Under the design conditions of a research reactor, the siphon phenomenon induced by pipe rupture can cause continuous outward flow of water. To prevent ...

Studying Large Amplitude Oscillatory Shear Response of Soft Materials

软材料大振幅振荡剪切响应的研究

We investigate the sequence of physical processes exhibited during large amplitude oscillatory shearing (LAOS) of polyethylene oxide (PEO) in dimethyl ...