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Paul Chekhonin

Institut für Strukturphysik

Technische Universität Dresden

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INSTITUTIONS

Technische Universität Dresden

JOVE ARTICLES

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Ellen Hieckmann¹,

Markus Nacke¹,

Matthias Allardt¹,

Yury Bodrov¹,

Paul Chekhonin²,

Werner Skrotzki²,

Jörg Weber¹

¹Institute of Applied Physics, Semiconductor Physics, Technische Universität Dresden,

²Institut für Strukturphysik, Technische Universität Dresden

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