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Gain-compensation Methodology for a Sinusoidal Scan of a Galvanometer Mirror in Proportional-Integral-Differential Control Using Pre-emphasis Techniques

Tomohiko Hayakawa¹, Takanoshin Watanabe², Taku Senoo¹, Masatoshi Ishikawa¹

¹Department of Creative Informatics, University of Tokyo, ²Hitachi Industry & Control Solutions, Ltd.

We propose a method to extend the corresponding frequency by using a pre-emphasis technique. This method compensates for the gain reduction of a galvanometer mirror in sine-wave path tracking using proportional-integral-differential control.