Universiti Kebangsaan Malaysia

1 ARTICLES PUBLISHED IN JoVE

Engineering

Fabrication of Bi₂Te₃ and Sb₂Te₃ Thermoelectric Thin Films using Radio Frequency Magnetron Sputtering Technique

Nurfarhana Ahmad Musri¹, Yoganash Putthisigamany¹, Puvaneswaran Chelvanathan¹, Norasikin Ahmad Ludin¹, Nadhrah Md Yatim², Ubaidah Syafiq¹

¹Solar Energy Research Institute (SERI), Universiti Kebangsaan Malaysia, ²Faculty of Science and Technology, Universiti Sains Islam Malaysia

The manuscript describes a protocol for radio frequency magnetron sputtering of Bi₂Te₃ and Sb₂Te₃ thermoelectric thin films on glass substrates, which represents a reliable deposition method that provides a wide range of applications with the potential for further development.