Tuning Oxide Properties by Oxygen Vacancy Control During Growth and AnnealingTristan Steegemans *1, Shinhee Yun *1, Carlos N. Lobato 1, Eric Brand 1, Yunzhong Chen 2, Felix Trier 1, Dennis V. Christensen 1
1Department of Energy Conversion and Storage, Technical University of Denmark, 2Beijing National Laboratory for Condensed Matter Physics and Institute of Physics, Chinese Academy of Sciences
Oxide materials show many exotic properties that can be controlled by tuning the oxygen content. Here, we demonstrate the tuning of oxygen content in oxides by varying the pulsed laser deposition parameters and by performing postannealing. As an example, electronic properties of SrTiO3-based heterostructures are tuned by growth modifications and annealing.
