5:57Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station8.2K views•2020•EngineeringNicola A. Tyler1, Sylvain Guerber1, Daivid Fowler1, Stephane Malhouitre1, Stephanie Garcia1, Philippe Grosse1, Bertrand Szelag1Nicola A. Tyler1Sylvain Guerber1Daivid Fowler1Stephane Malhouitre1Stephanie Garcia1Philippe Grosse1Bertrand Szelag11University Grenoble Alpes and CEA, LETI, Minatec CampusUniversity Grenoble Alpes and CEA, LETI, Minatec Campus