この研究は、プロジェクトマネージャーとして博士J.スコットロジャースとの統合フォトニクス工学研究（暗号）プログラムにおけるセンターのもとで、米国国防総省の国防高等研究計画庁（DARPA）が主催しています。このレポートに記載されている情報は必ずしも位置または米国政府の政策を反映していないと公式承認を推論するべきではありません。

1。 PDMSのマイクロスフェア製剤（スフィアI） <ol><li>ポリジメチルシロキサン（PDMS）をベースと硬化剤を60:1の体積比で混合されています。 </li><li>石英光ファイバのストランドは、約2cm長く、第一光学ストリッパーを使用して、そのプラスチッククラッドを剥奪されています。 </li><li>ファイバの一端を加熱し、先端に直径約25から50μmであるステムエンドを提供するために張られている。 </li><li>繊維の延伸端は約2-4 mmの長さによってPDMSの混合物に浸漬され、その後引き出される。 </li><li> PDMSの混合物の表面張力と重量はシリカファイバの先端の球の形成を可能にする。球の大きさは、長さと浸漬抽出速度によって制御されます。範囲でこれら2つのパラメータ、球体の直径を変化させることにより、100μm以下 - 1,000μm以下が得られる。 </li><li>ミクロスフェア/ステムアセンブリは、その後℃で4時間のポリ適切な硬化を可能にするために〜90℃のオーブン内に配置される。マー材料（架橋鎖を形成する）。 図1a球Iの模式図である</li></ol> 2。 PDMSベースのトリプルレイヤースフィアの調製（スフィアII） <ol><li> 60:1のPDMSマイクロスフェアは、内部コアとして使用されます。上記1に記載したのと同じ手順）は、このプロセスのために続いている。 </li><li>チタン酸バリウムの混合物（BaTiO 3の ）ナノ粒子と60:1 PDMSは中間層として使用されます。上記1.1で説明したのと同じ方法）で調製したPDMSの混合物は、チタン酸バリウムナノ粒子と混合される。 </li><li> 2.1で説明したPDMSマイクロスフェアコア）をコートしてくださいPDMS-チタン酸バリウムの混合物（〜10μmの層公称厚さを有する）に浸漬される。 </li><li>次に、二層球℃で4時間のために第2層の適切な硬化を可能にするために〜90℃のオーブン内に配置される。 </li><li> 2層の球体が硬化されると、それは再び外側のコーティング（第三層）を設けることが60:1 PDMSの混合物中に浸漬される。この最層が球状の光ガイド（〜10μmの厚さ）となっている。 図1bはスフィアIIの概略図である。 </li></ol> 3。シリカ/ PDMSマイクロスフェア製剤（スフィアⅢ） <ol><li>シリカシングルモード光ファイバの約3 cmの長部は、第1のバッファ（プラスチック）コーティングが取り除かれた後、その先端は、マイクロトーチ（一緒にクラッドとコアを持つ）を使用して溶融させる。表面張力と重力が球に溶かした先端を形作るために一緒に働く。は200〜500μmの範囲の直径を持つ球は、このプロセスで得ることができる。 </li><li>シリカ微小球は、その後〜50μmのコートでそれをカバーするために、PDMS基材（硬化剤なし）の浴中に浸漬される。この外側の層は、高粘度ビンガム（歩留まり応力）流体として留まります。 図1cは、スフィアIIIの概略図である。 </li></ol> 4。光ファイバの準備<ol><li>単一モード光ファイバのセクションは、そのプラスチックのCLA取り除かれ光学ストリッパーを使用してdding。それが溶融するまで繊維のマイクロトーチストライプセクションを使用すること（クラッドとファイバコアの両方）が加熱される。 </li><li>中間部が溶融している間、光ファイバの一端が約1cmの長さで、ファイバのテーパ部を形成するために、その軸に沿って引っ張られる。加熱時間は、引き上げ速度と距離は、10〜20μmの範囲にあり、テーパ部の直径を決定します。 DFBレーザからの光は、光ファイバのテーパ部を介して球に結合される。 図2球ファイバ結合を示しています。 </li></ol> 5。オプトセットアップ<ol><li> 図3に示すように、波長可変DFBレーザの出力は、一方の端に、単一モード光ファイバに結合され、他端には高速フォトダイオードで終端されます。 </li><li>フォトダイオードの出力は、アナログ - デジタル変換器（A / D）を用いてデジタル化し、パーソナルコンピュータ（PC）に保存されます。 </li><li&gt;マイクロ·トランスレーションステージを使用したマイクロスフェア（タイプI、IIまたはIII）は、2つの要素間の光結合を提供するために、光ファイバのテーパ部（ 図2及び図3）に接触させる。 </li><li> DFBレーザは、レーザコントローラによって調整されています。今度はレーザーコントローラは、のこぎり電圧入力を提供する関数発生器によって駆動されます。 </li></ol> 6。電界発生<ol><li> 1mmの厚さを持つ2つの正方形の真鍮板（2×2cm）に均一な電場を生成するために使用されます。プレートは、電圧源に接続されていると球センサーは2プレート（ 図4）との間の隙間に配置されます。 </li><li>測定感度を高めるために、球は最初の2時間、1 MV / mの電界で分極されています。 </li></ol>

<ol>
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我々は、開示することは何もない。

球は最初は直流高電圧電源に電極を接続することにより、分極されています。ポーリング期間の終わりには、電極のリード線は、直流電圧電源から切断され、 図4に示すように、ファンクション·ジェネレータに接続されています。結果は、正と負の電界が（分極方向に対して）は、それぞれ、球の伸びと圧縮につながることを示して8〜図5に示した。球単層60:1 PDMSで...

<table border="1"><tbody><tr><td></td><td> 会社 </td><td> カタログ番号 </td><td> コメント（オプション） </td></tr><tr><td> PDMS </td><td>ダウコーニング</td><td>シルガード184 </td><td></td></tr><tr><td>石英ファイバー</td><td>繊維楽器販売</td><td> E-37AP15-FIS </td><td></td></tr><tr><td>チタン酸バリウム（BaTiO 3）ナノ粒子</td><td>シグマアルドリッチ</td><td> 467634-100G </td><td></td></tr><tr><td>レーザーコントローラ</td><td> ILX Lightwave社</td><td> LDC-3724B </td><td></td></tr><tr><td> DFBレーザ</td><td> Agere社</td><td> Agere社2300 </td><td> 1.310μmの中心波長</td></tr><tr><td>フォトダイオード</td><td> Thorlabs </td><td> PDA10CS </td><td></td></tr><tr><td> A / Dカード</td><td>ナショナルインスツルメンツ</td><td> PXI 6115 </td><td></td>
 </tr>
 </tbody>
</table>

development of whispering gallery mode polymeric micro-optical electric field sensors

誘電マイクロキャビティの光学モードは、幅広いアプリケーションで自分の可能性のために、近年、大きな注目を受けています。光学モードは頻繁に &quot;ウィスパリングギャラリーモード&quot;（WGM）または &quot;形態依存共鳴&quot;（MDR）と呼ばれ、高い光学的品質係数を発揮しています。マイクロキャビティ光共振器のいくつかの提案されたアプリケーションは、分光1、マイクロキャビティレーザー技術2、光通信3から6までと同様にセンサー技術にあります。 WGMベースのセンサ·アプリケーションでは生物学7、微量ガス検出8、9、液体中の不純物検出のものが含まれています。微小球共振に基づいて、機械的なセンサは、力10,11、圧力12、加速13、壁せん断応力14を含め、提案されている。現在では、我々の前ストゥディ上に構築WGMベース電界センサを実証ES 15,16。このセンサーの候補アプリケーションは、神経活動電位の検出である。 電界センサは、高分子多層誘電体微小球をに基づいています。外部電場が弾性変形につながる球（電歪効果）の面と身体の力を誘導する。球体の形態におけるこの変化は、WGMの変化につながる。電界誘起WGMシフトは、レーザー光による球の刺激的な光学モードによって尋問されています。分布帰還型（DFB）からの光は、レーザー（〜1.3μmの公称波長）は、シングルモード光ファイバのテーパ部を使用してマイクロスフェアにサイド結合されている。球体の基材としては、ポリジメチルシロキサン（PDMS）である。三マイクロスフェアジオメトリは使用されています：ベース·硬化剤混合物の60:1の体積比は、（1）のPDMS球、60:1 PDMSコアと（2）多層球を、目の誘電率を増加させるために、eの球、チタン酸バリウムの量を変え（2体積％〜10％）と60:1 PDMSの外層と薄層で被覆された（3）固体シリカ球と混合される60:1 PDMSの中間層未硬化のPDMSベースの。センサーの種類ごとに、テーパファイバからのレーザ光 ​​は光学的に高品質要因WGM（Q〜10 6）を提供しています最外層に結合される。ミクロスフェアは、電界に対する感受性を高めるために〜1 MV / mの電界で数時間的に分極されています。

光が移動した光路長は、レーザー波長の整数倍であるとき、球の光学モード（WGM）は、レーザ光により励起される。 図3に示す構成では、光路の長さは n と r はそれぞれ、球の屈折率と半径アール2πrnです。幾何光学近似を用いて、WGM条件が満たされた場合に2πrn=lλlは整数であり、λはレーザーの波長である。DFBレーザには小さな波?...

Watch this Scientific Journal Video about Development of Whispering Gallery Mode Polymeric Micro-optical Electric Field Sensors at JoVE.com

Development of Whispering Gallery Mode Polymeric Micro-optical Electric Field Sensors

高感度フォトニックマイクロセンサは、電界検出用に開発されました。センサーは誘電体球の光学モードを利用している。その光学モードの変化につながる外部電場摂動球形態の変化。電界強度は、これらの光学シフトをモニターすることによって測定されます。

ギャラリーモード高分子マイクロ光電界センサを囁くの開発

Optical modes of dielectric micro-cavities have received significant attention in recent years for their potential in a broad range of applications. The ...

development-whispering-gallery-mode-polymeric-micro-optical-electric

Research

JoVE Journal

Engineering

13.0K ビュー.  Southern Methodist University. 高感度フォトニックマイクロセンサは、電界検出用に開発されました。センサーは誘電体球の光学モードを利用している。その光学モードの変化につながる外部電場摂動球形態の変化。電界強度は、これらの光学シフトをモニターすることによって測定されます。

ビデオ: Development of Whispering Gallery Mode Polymeric Micro-optical Electric Field Sensors

Microwave Photonics Systems Based on Whispering-gallery-mode Resonators

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various areas of technology and applied science, such as aerospace and communication engineering, sensing, metrology, nonlinear photonics, and quantum optics. In this article, we present the principal techniques used in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators. First detailed in this article is the protocol for resonator polishing, which is based on a grind-and-polish technique close to the ones used to polish optical components such as lenses or telescope mirrors. Then, a white light interferometric profilometer measures surface roughness, which is a key parameter to characterize the quality of the polishing. In order to launch light in the resonator, a tapered silica fiber with diameter in the micrometer range is used. To reach such small diameters, we adopt the "flame-brushing" technique, using simultaneously computer-controlled motors to pull the fiber apart, and a blowtorch to heat the fiber area to be tapered. The resonator and the tapered fiber are later approached to one another to visualize the resonance signal of the whispering gallery modes using a wavelength-scanning laser. By increasing the optical power in the resonator, nonlinear phenomena are triggered until the formation of a Kerr optical frequency comb is observed with a spectrum made of equidistant spectral lines. These Kerr comb spectra have exceptional characteristics that are suitable for several applications in science and technology. We consider the application related to ultra-stable microwave frequency synthesis and demonstrate the generation of a Kerr comb with GHz intermodal frequency.

The customized techniques developed in our lab to build microwave photonics systems based on ultra-high Q whispering gallery mode resonators are presented. The protocols to obtain and characterize these resonators are detailed, and an explanation of some of their applications in microwave photonics is given.

ウィスパリングギャラリーモード共振器に基づいたマイクロ波フォトニクスシステム

Microwave photonics systems rely fundamentally on the interaction between microwave and optical signals. These systems are extremely promising for various ...

工学

Real-Time DC-dynamic Biasing Method for Switching Time Improvement in Severely Underdamped Fringing-field Electrostatic MEMS Actuators

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input bias voltage. However, the tradeoff for the improved switching performance is a relatively long settling time to reach each gap height in response to various applied voltages. Transient applied bias waveforms are employed to facilitate reduced switching times for electrostatic fringing-field MEMS actuators with high mechanical quality factors. Removing the underlying substrate of the fringing-field actuator creates the low mechanical damping environment necessary to effectively test the concept. The removal of the underlying substrate also a has substantial improvement on the reliability performance of the device in regards to failure due to stiction. Although DC-dynamic biasing is useful in improving settling time, the required slew rates for typical MEMS devices may place aggressive requirements on the charge pumps for fully-integrated on-chip designs. Additionally, there may be challenges integrating the substrate removal step into the back-end-of-line commercial CMOS processing steps. Experimental validation of fabricated actuators demonstrates an improvement of 50x in switching time when compared to conventional step biasing results. Compared to theoretical calculations, the experimental results are in good agreement.

The robust device design of fringing-field electrostatic MEMS actuators results in inherently low squeeze-film damping conditions and long settling times when performing switching operations using conventional step biasing. Real-time switching time improvement with DC-dynamic waveforms reduces the settling time of fringing-field MEMS actuators when transitioning between up-to-down and down-to-up states.

重度不足減衰フリンジフィールド静電MEMSアクチュエータに時間改善スイッチング用リアルタイムDC-ダイナミックバイアス方式

Mechanically underdamped electrostatic fringing-field MEMS actuators are well known for their fast switching operation in response to a unit step input ...

Characterization of Anisotropic Leaky Mode Modulators for Holovideo

Holovideo displays are based on light-bending spatial light modulators. One such spatial light modulator is the anisotropic leaky mode modulator. This modulator is particularly well suited for holographic video experimentation as it is relatively simple and inexpensive to fabricate1-3. Some additional advantages of leaky mode devices include: large aggregate bandwidth, polarization separation of signal light from noise, large angular deflection and frequency control of color1. In order to realize these advantages, it is necessary to be able to adequately characterize these devices as their operation is strongly dependent on waveguide and transducer parameters4. To characterize the modulators, the authors use a commercial prism coupler as well as a custom characterization apparatus to identify guided modes, calculate waveguide thickness and finally to map the device's frequency input and angular output of leaky mode modulators. This work gives a detailed description of the measurement and characterization of leaky mode modulators suitable for full-color holographic video.

This work describes fabrication and characterization of anisotropic leaky mode modulators for holographic video.

Holovideoための異方性漏洩モードモジュレーターのキャラクタリゼーション

Holovideo displays are based on light-bending spatial light modulators.  One such spatial light modulator is the anisotropic leaky mode modulator.  This ...

Stimulated Stokes and Antistokes Raman Scattering in Microspherical Whispering Gallery Mode Resonators

Dielectric microspheres can confine light and sound for a length of time through high quality factor whispering gallery modes (WGM). Glass microspheres can be thought as a store of energy with a huge variety of applications: compact laser sources, highly sensitive biochemical sensors and nonlinear phenomena. A protocol for the fabrication of both the microspheres and coupling system is given. The couplers described here are tapered fibers. Efficient generation of nonlinear phenomena related to third order optical non-linear susceptibility &#935;(3) interactions in triply resonant silica microspheres is presented in this paper. The interactions here reported are: Stimulated Raman Scattering (SRS), and four wave mixing processes comprising Stimulated Anti-stokes Raman Scattering (SARS). A proof of the cavity-enhanced phenomenon is given by the lack of correlation among the pump, signal and idler: a resonant mode has to exist in order to obtain the pair of signal and idler. In the case of hyperparametric oscillations (four wave mixing and stimulated anti-stokes Raman scattering), the modes must fulfill the energy and momentum conservation and, last but not least, have a good spatial overlap.

Efficient generation of nonlinear phenomena related to third order optical non-linear susceptibility &#935;(3) interactions in triply resonant silica microspheres is presented in this paper. The interactions here reported are: Stimulated Raman Scattering (SRS), and four wave mixing processes comprising Stimulated Anti-stokes Raman Scattering (SARS).

微小球ウィスパリングギャラリーモード共振器で刺激ストークスとAntistokesラマン散乱

Dielectric microspheres can confine light and sound for a length of time through high quality factor whispering gallery modes (WGM). Glass microspheres ...

Fiber Optic Distributed Sensors for High-resolution Temperature Field Mapping

The reliability of computational fluid dynamics (CFD) codes is checked by comparing simulations with experimental data. A typical data set consists chiefly of velocity and temperature readings, both ideally having high spatial and temporal resolution to facilitate rigorous code validation. While high resolution velocity data is readily obtained through optical measurement techniques such as particle image velocimetry, it has proven difficult to obtain temperature data with similar resolution. Traditional sensors such as thermocouples cannot fill this role, but the recent development of distributed sensing based on Rayleigh scattering and swept-wave interferometry offers resolution suitable for CFD code validation work. Thousands of temperature measurements can be generated along a single thin optical fiber at hundreds of Hertz. Sensors function over large temperature ranges and within opaque fluids where optical techniques are unsuitable. But this type of sensor is sensitive to strain and humidity as well as temperature and so accuracy is affected by handling, vibration, and shifts in relative humidity. Such behavior is quite unlike traditional sensors and so unconventional installation and operating procedures are necessary to ensure accurate measurements. This paper demonstrates implementation of a Rayleigh scattering-type distributed temperature sensor in a thermal mixing experiment involving two air jets at 25 and 45 &#176;C. We present criteria to guide selection of optical fiber for the sensor and describe installation setup for a jet mixing experiment. We illustrate sensor baselining, which links readings to an absolute temperature standard, and discuss practical issues such as errors due to flow-induced vibration. This material can aid those interested in temperature measurements having high data density and bandwidth for fluid dynamics experiments and similar applications. We highlight pitfalls specific to these sensors for consideration in experiment design and operation.

We demonstrate use of a fiber optic distributed sensor for mapping the temperature field of mixing air jets. The Rayleigh scattering-based sensor generates thousands of data points along a single fiber to provide exceptional spatial resolution that is unattainable with traditional sensors such as thermocouples.

高分解能温度フィールドマッピングのための光ファイバの分散センサ

The reliability of computational fluid dynamics (CFD) codes is checked by comparing simulations with experimental data. A typical data set consists ...

Nanostructured Ag-zeolite Composites as Luminescence-based Humidity Sensors

Small silver clusters confined inside zeolite matrices have recently emerged as a novel type of highly luminescent materials. Their emission has high external quantum efficiencies (EQE) and spans the whole visible spectrum. It has been recently reported that the UV excited luminescence of partially Li-exchanged sodium Linde type A zeolites [LTA(Na)] containing luminescent silver clusters can be controlled by adjusting the water content of the zeolite. These samples showed a dynamic change in their emission color from blue to green and yellow upon an increase of the hydration level of the zeolite, showing the great potential that these materials can have as luminescence-based humidity sensors at the macro and micro scale. Here, we describe the detailed procedure to fabricate a humidity sensor prototype using silver-exchanged zeolite composites. The sensor is produced by suspending the luminescent Ag-zeolites in an aqueous solution of polyethylenimine (PEI) to subsequently deposit a film of the material onto a quartz plate. The coated plate is subjected to several hydration/dehydration cycles to show the functionality of the sensing film.

A protocol for the synthesis of moisture-responsive luminescent Ag-zeolite composites is described in this report.

発光ベースの湿度センサなどのナノ構造のAg-ゼオライト複合

Small silver clusters confined inside zeolite matrices have recently emerged as a novel type of highly luminescent materials. Their emission has high ...

Electric-field Control of Electronic States in WS2 Nanodevices by Electrolyte Gating

A method of carrier number control by electrolyte gating is demonstrated. We have obtained WS2 thin flakes with atomically flat surface via scotch tape method or individual WS2 nanotubes by dispersing the suspension of WS2 nanotubes. The selected samples have been fabricated into devices by the use of the electron beam lithography and electrolyte is put on the devices. We have characterized the electronic properties of the devices under applying the gate voltage. In the small gate voltage region, ions in the electrolyte are accumulated on the surface of the samples which leads to the large electric potential drop and resultant electrostatic carrier doping at the interface. Ambipolar transfer curve has been observed in this electrostatic doping region. When the gate voltage is further increased, we met another drastic increase of source-drain current which implies that ions are intercalated into layers of WS2 and electrochemical carrier doping is realized. In such electrochemical doping region, superconductivity has been observed. The focused technique provides a powerful strategy for achieving the electric-filed-induced quantum phase transition.

Electric-field Control of Electronic States in WS2 Nanodevices by Electrolyte Gating

Here, we present a protocol to control the carrier number in solids by using the electrolyte.

電解質ゲートによって WS2ナノデバイスにおける電子状態の電界制御

A method of carrier number control by electrolyte gating is demonstrated. We have obtained WS2 thin flakes with atomically flat surface via scotch tape ...

Ultrasonic Fatigue Testing in the Tension-Compression Mode

Ultrasonic fatigue testing is one of a few methods which allow investigating fatigue properties in the ultra-high cycle region. The method is based on exposing the specimen to longitudinal vibrations on its resonance frequency close to 20 kHz. With use of this method, it is possible to significantly decrease the time required for the test, when compared to conventional testing devices usually working at frequencies under 200 Hz. It is also used to simulate loading of material during operation in high speed conditions, such as those experienced by components of jet engines or car turbo pumps. It is necessary to operate only in the high and ultra-high cycle region, due to the possibility of extremely high deformation rates, which can have a significant influence on the test results. Specimen shape and dimensions have to be carefully selected and calculated to fulfill the resonance condition of the ultrasonic system; thus, it is not possible to test the full components or specimens of arbitrary shape. Before each test, it is necessary to harmonize the specimen with the frequency of the ultrasonic system to compensate for deviations of the real shape from the ideal one. It is not possible to run a test until a total fracture of the specimen, since the test is automatically terminated after initiation and propagation of the crack to a certain length, when the stiffness of the system changes enough to shift the system out of the resonance frequency. This manuscript describes the process of evaluation of materials' fatigue properties at high-frequency ultrasonic fatigue loading with use of mechanical resonance at a frequency close to 20 kHz. The protocol includes a detailed description of all steps required for a correct test, including specimen design, stress calculation, harmonizing with the resonance frequency, performing the test, and final static fracture.

A protocol for ultrasonic fatigue testing in the high and ultra-high cycle region in axial tension-compression loading mode.

超音波疲労引張圧縮モードでのテスト

Ultrasonic fatigue testing is one of a few methods which allow investigating fatigue properties in the ultra-high cycle region. The method is based on ...

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7&#8722;&#948;/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 (STO) Single-crystal Substrates

Here, we demonstrate a method of coating ferromagnetic La0.67Sr0.33MnO3 (LSMO) nanoparticles on (001) SrTiO3 (STO) single-crystal substrates by radio frequency (RF) magnetron sputtering. LSMO nanoparticles were deposited with diameters from 10 to 20 nm and heights between 20 and 50 nm. At the same time, (Gd) Ba2Cu3O7&#8722;&#948; ((Gd) BCO) films were fabricated on both undecorated and LSMO nanoparticle decorated STO substrates using RF magnetron sputtering. This report also describes the properties of GdBa2Cu3O7&#8722;&#948;/ La0.67Sr0.33MnO3 quasi-bilayer films structures (e.g., crystalline phase, morphology, chemical composition); magnetization, magneto-transport, and superconducting transport properties were also evaluated.

Radio Frequency Magnetron Sputtering of GdBa2Cu3O7ÃƒÂ¢Ã‹â€ &#039;ÃƒÅ½ ´/ La0.67Sr0.33MnO3 Quasi-bilayer Films on SrTiO3 STO Single-crystal Substrates

Here, we present a protocol to grow LSMO nanoparticles and (Gd) BCO films on (001) SrTiO3 (STO) single-crystal substrates by radio frequency (RF)-sputtering.

高周波マグネトロンスパッタ リングによる GdBa2Cu3O7−δ/チタン酸ストロンチウム3 (STO) 単結晶基板上 La0.67Sr0.33MnO3準二層フィルム

Here, we demonstrate a method of coating ferromagnetic La0.67Sr0.33MnO3 (LSMO) nanoparticles on (001) SrTiO3 (STO) single-crystal substrates by radio ...

Hybrid Printing for the Fabrication of Smart Sensors

A method to combine additively manufactured substrates or foils and multilayer inkjet printing for the fabrication of sensor devices is presented. First, three substrates (acrylate, ceramics, and copper) are prepared. To determine the resulting material properties of these substrates, profilometer, contact angle, scanning electron microscope (SEM), and focused ion beam (FIB) measurements are done. The achievable printing resolution and suitable drop volume for each substrate are, then, found through the drop size tests. Then, layers of insulating and conductive ink are inkjet printed alternately to fabricate the target sensor structures. After each printing step, the respective layers are individually treated by photonic curing. The parameters used for the curing of each layer are adapted depending on the printed ink, as well as on the surface properties of the respective substrate. To confirm the resulting conductivity and to determine the quality of the printed surface, four-point probe and profilometer measurements are done. Finally, a measurement set-up and results achieved by such an all-printed sensor system are shown to demonstrate the achievable quality.

Here we present a protocol for the fabrication of inkjet-printed multilayer sensor structures on additively manufactured substrates and foil.

ハイブリッド スマート センサーの作製のための印刷

A method to combine additively manufactured substrates or foils and multilayer inkjet printing for the fabrication of sensor devices is presented. First, ...