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Rendering SiO2/Si Surfaces Omniphobic by Carving Gas-Entrapping Microtextures Comprising Reentrant and Doubly Reentrant Cavities or Pillars

8.9K Views

08:02 min

February 11th, 2020

DOI :

10.3791/60403-v

February 11th, 2020


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SiO2 Si Surfaces

Rozdziały w tym wideo

0:04

Introduction

1:08

Cavity Design and Wafer Cleaning

2:17

Photolithography

3:15

Silica (SiO2) and Silicon (Si) Layer Etching

4:30

Thermal Oxide Growth and Etching

6:00

Results: Representative Wetting Behaviors of Gas-Entrapping Microtextures (GEMs)

7:08

Conclusion

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