fabrication-flexible-image-sensor-based-on-lateral-nipin

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors

Flexible photodetectors have been intensely studied for the use of curved image sensors, which are a crucial component in bio-inspired imaging systems, ...

Gwangju Institute of Science and Technology

Curved image sensors, which are a key component in bio-inspired imaging systems, have been widely studied because they can improve an imaging system in various aspects such as low optical aberrations, small-form, and simple optics configuration. Many methods and materials to realize a curvilinear imager have been proposed to address the drawbacks of conventional imaging/optical systems. However, there have been few theoretical studies in terms of electronics on the use of a lateral photodetector as a flexible image sensor. In this paper, we demonstrate the applicability of a Si-based lateral phototransistor as the pixel of a high-efficiency curved photodetector by conducting various electrical simulations with technology computer aided design (TCAD). The single phototransistor is analyzed with different device parameters: the thickness of the active cell, doping concentration, and structure geometry. This work presents a method to improve the external quantum efficiency (EQE), linear dynamic range (LDR), and mechanical stability of the phototransistor. We also evaluated the dark current in a matrix form of phototransistors to estimate the feasibility of the device as a flexible image sensor. Moreover, we fabricated and demonstrated an array of phototransistors based on our study. The theoretical study and design guidelines of a lateral phototransistor create new opportunities in flexible image sensors.

Hyun Myung Kim

School of Electrical Engineering and Computer Science

Gwangju Institute of Science and Technology

Fabrication of Flexible Image Sensor Based on Lateral NIPIN Phototransistors