d'Optron Pte Ltd

1 ARTICLES PUBLISHED IN JoVE

image

Engineering

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Thomas Bourgade 1, Sun Jianfei 1, Zhaomin Wang 1, Rosmin Elsa 2, Anand Asundi 1,2
1School of Mechanical and Aerospace Engineering, Center of Laser and Optical Engineering, Nanyang Technological University, 2d'Optron Pte Ltd

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

JoVE Logo

Исследования

Образование

О JoVE

Авторские права © 2025 MyJoVE Corporation. Все права защищены