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Materials Science and Engineering
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Exploring the limits of N-type ultra-shallow junction formation.
ACS nano Jun, 2013 | Pubmed ID: 23721101
University of North Texas
Josh B. Ballard1,
Don D. Dick2,
Stephen J. McDonnell3,
Maia Bischof4,
Joseph Fu5,
James H. G. Owen1,
William R. Owen1,
Justin D. Alexander1,
David L. Jaeger4,
Pradeep Namboodiri5,
Ehud Fuchs1,
Yves J. Chabal3,
Robert M. Wallace3,
Richard Reidy4,
Richard M. Silver5,
John N. Randall1,
James Von Ehr1
1, Zyvex Labs,
2Department of Physics, University of Texas at Dallas,
3Department of Materials Science and Engineering, University of Texas at Dallas,
4Materials Science and Engineering, University of North Texas,
5, National Institute of Standards and Technology
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