Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)Bidhan Pramanick 1, Sergio O. Martinez-Chapa 1, Marc Madou 1,2, Hyundoo Hwang 1,3
1School of Engineering and Sciences, Tecnologico de Monterrey, 2Department of Mechanical and Aerospace Engineering, University of California, 3BBB Inc
Long and hollow glassy carbon microfibers were fabricated based on the pyrolysis of a natural product, human hair. The two fabrication steps of carbon microelectromechanical and carbon nanoelectromechanical systems, or C-MEMS and C-NEMS, are: (i) photolithography of a carbon-rich polymer precursor and (ii) pyrolysis of the patterned polymer precursor.
