Name: fabrication of 3d carbon microelectromechanical systems (c-mems)
Uploaded: 2017-06-17T13:00:00.000+00:00
Duration: 8 min 1 s
Description: Watch this Scientific Journal Video about Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS at JoVE.com

Bu çalışma, Technologico de Monterrey ve California Üniversitesi tarafından Irvine tarafından desteklendi.

1. 3D İnsan Saçından Türemiş Karbon Yapısı İmalatı NOT: Kişisel koruyucu ekipman kullanın. Aletleri kullanmak ve laboratuvarın içinde çalışmak için laboratuar talimatlarını izleyin. <ol><li> Toplanan insan saçlarını DI su ile yıkayıp N 2 gazı ile kurutarak hazırlayın. </li><li> Kılları paralel teller, çaprazlar, birbirine sarılmış iki tüy vb. Gibi istenen şekilde düzenleyin . </li><li> Tüyleri SU8 kullanarak bir silikon altlığa yapıştırın veya doğrudan seramik bir teknede saklayın. </li><li> Saça-takılmış silikon alt tabakayı veya tekneyi fırına yerleştirin. </li><li> Fırını açın ve bir inert gaz (N 2 ) deposunun valfını açın. NOT: En uygun gaz akışı fırın tüpünün hacmine bağlıdır. 6 L&#39;lik bir tüp hacmi için 6 L / dak&#39;lık bir akış hızı uygulanmıştır. Fırın tüpünde tamamen atıl bir çevre oluşturmak için, optimum gaz f&#39;nin 1.5 kat daha yüksek bir gaz akış hızıİlk 15 dakika boyunca düşük hız uygulandı. </li><li> Maksimum piroliz sıcaklığı, sıcaklık rampası hızı ve atıl gaz akış hızı da dahil olmak üzere parametreleri ayarlayın ve fırını çalıştırın. <ol><li> Örneğin, sıcaklık 5 ° C / dak&#39;lık bir rampa hızında oda sıcaklığından 300 ° C&#39;ye yükseltilir. Stabilizasyon için 1 saat boyunca 300 ° C&#39;de tutun. Ayrıca sıcaklığı 900 ° C&#39;ye çıkarın ve 1 saat daha karbonizasyon için koruyun. </li><li> 300 ° C&#39;den sonra kontrollü soğutma gerekli olmadığından fırını 10 ° C / dak. Oranında 300 ° C&#39;ye soğutun ve fırının ısıtıcısını kapatın. Sıcaklık sadece oda sıcaklığına N 2 akışı ulaşıncaya kadar örnekleri fırında bırakın. </li></ol></li><li> Piroliz işleminin tamamlanması üzerine fırını ve gaz akışını kapatın. </li><li> Örnekleri fırından çıkarın. </li></ol> 2. 3D Polimer Yapısı İmalatı: Fotolitografi <ol><li> desUygun bir yazılım paketi kullanarak istenilen 3B fotoviristiğin 2D düzenini çizmeyin ve basılı maskeyi hazırlayın ( örn. Bir polietilen fotovilm maskesi). NOT: Tasarımın basılması için ticari bir hizmet kullanılmıştır. Maskenin boyutu genellikle tasarıma bağlıdır. </li><li> Temiz bir laboratuar tesisinde, iki sıcak tablayı açın ve sıcaklığı sırasıyla 65 ° C ve 95 ° C&#39;ye ayarlayın. </li><li> Bir spin kaplayıcı ve bir vakum pompası açın. Vakum pompasının bir tüp vasıtasıyla devir kafasına bağlı olduğundan emin olun. </li><li> Eğirme hızı, rampa ve süre gibi iki adımlı döngü parametrelerini ayarlayın. İlk adım için eğirme hızını 500 rpm, rampa 100 rpm / s ve eğirme döngüsünü başlatmak için 10 sn&#39;ye ayarlayın. Bir sonraki adım için eğirme hızını 1.000 rpm, rampa 100 rpm / s ve eğirme süresi 30 saniye olarak ayarlanarak foto rezistansı eşit şekilde yayılır. </li><li> Bir alt tabaka yerleştirin ( yani, 4 inç x 4 inç ve 5501, m ± 25 um kalınlığında Si gofret, 1 um kalınlığında Si02 tabakası ile birlikte) tutucunun merkezinde. </li><li> Duyarlı polimer (örn., SU8 fotoresisti) doğrudan alt tabakanın merkezine yerleştirin. Yüzeyi kaplayacak kadar kullanın. </li><li> Tabakayı tutmak için &quot;vakum&quot; düğmesine basın. </li><li> Subdeyi SU8 ile kaplamak ve 250 μm&#39;lik bir son kalınlığı elde etmek için &quot;çalıştır&quot; düğmesine basın. </li><li> Eğirme işleminin tamamlanmasından sonra, kaplanmış altlığı tutacaktan serbest bırakmak için &quot;vakum&quot; düğmesine tekrar basın. </li><li> Yüzeyi pürüzsüz ve temiz tutmak için kaplamalı alt tabakayı dikkatlice cımbızla tutun. Zemini doğrudan 65 ° C sıcaklıkta 6 dakika boyunca sıcak plakaya aktarın ve daha sonra 95 ° C sıcaklıktaki sıcak plakaya 40 dakika boyunca (yumuşak fırında pişirin). NOT: Çözücünün yavaş yavaş buharlaşmasını sağlamak için 65 ° C&#39;de fırında pişirme sağlanarak daha iyi kaplama ve daha iyi yapışma sağlanır tO Yüzey, 95 ° C&#39;de pişirilirken SU8 yoğunlaşır. </li><li> Bu arada, UV pozlama sistemini açmak ve sistemdeki ayar düğmesini kullanarak maruz kalma süresini &quot;12 s&quot; olarak ayarlamak için anahtara basın. NOT: 250 μm kalınlığındaki bir SU8 tabakası için pozlama enerjisi 360 mJ / cm2 olmalıdır. </li><li> Fırınlama adımı (adım 2.10) tamamlandıktan sonra, alt tabakayı UV ışınlarına maruz bırakma sistemine yerleştirin ve bir foto maskesinin basılı tarafını (adım 2.1&#39;den itibaren) üzerine yerleştirin. Kaplanmış altlığı örtmek için tüm maske alanını kullanın ve maske ile altlık arasında boşluk olmadığından emin olmak için yavaşça basın. </li><li> Önceden tanımlanmış UV ayarlarını kullanarak fotomask aracılığıyla SU8 kaplı alt tabakayı UV ışınına maruz bırakın. </li><li> Yüzeyi tekrar doğrudan 65 ° C&#39;de 5 dakika ısıtma plakası üzerine yerleştirin ve sonra pozlamalı fırında pişirme (PEB) için 95 ° C&#39;de 14 dakika ısıtın. NOT: PEB, UV&#39;ye maruz kalmış alanlardaki çapraz bağlamanın derecesini arttırır veGeliştirme aşamasında solventlere karşı daha dirençli kaplama. </li><li> Maruz kalmayı 20 dk süreyle, bir behere yerleştirilen özel geliştirici çözeltiye daldırarak, maruz kalmayan fotorezit bölgelerini çıkarın. Pozlanmamış direnç alanlarının tamamen çıkarılmasını sağlamak için çözümü (dikkatlice) çalkalayın. </li><li> Geliştirilmiş yapıları alt tabaka tutarak ve azot veya basınçlı hava üfleyerek kurutun. </li><li> Fotoreziste aktarılan desenleri istenen desenlerle karşılaştırmak için gofreti mikroskop altında 50X büyütme ile inceleyin. </li></ol> 3. 3D Karbon Yapısı İmalatı: Piroliz <ol><li> Preslenmiş, açık uçlu boru fırınına fotolitografi (adım 2.1-2.17) kullanılarak hazırlanan örnekleri yerleştirin. </li><li> Fırını açın ve yukarıda 1. adımda belirtildiği gibi pirolizi için parametreleri ayarlayın. Adım 1.6-1.8&#39;deki işlemi tekrarlayın. </li><li> Numuneleri cımbızla dikkatli tutun ve karakterize etmeye devam edintirme. </li></ol>

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Yazarların açıklayacak bir şeyi yok.

Bu yazıda, doğal prekürsör materyallerin veya foto desenli polimer yapıların pirolizine dayalı çeşitli karbon mikroyapılarının imalatı için yöntemler bildirilmiştir. Hem geleneksel hem de geleneksel olmayan C-MEMS / C-NEMS proseslerinden çıkan karbon materyalleri tipik olarak camsı karbonlar olarak bulunurlar. Camsı karbon, elektrokimya ve yüksek sıcaklık uygulamaları için yaygın olarak kullanılan bir elektrot malzemesidir. Camsı karbonun mikro yapısı, hem kristalin hem de amorf bölgelerde...

Karbon nanotüpleri (CNT&#39;ler), grafit, elmas, amorf karbon, lonsdaleit, buckminsterfulleren (C 60 ), fullerit (C 540 ), fulleren (C56), karbonlu nanotüpler C 70 ) ve camsı karbon 1 , 2 , 3 , 4 . Camsı karbon, yüksek izotropi dahil olmak üzere fiziksel özellikleri nedeniyle en yaygın olarak kullanılan allotroplardan biridir. Aynı zamanda aşağıdaki özelliklere de sahiptir: iyi elektrik iletkenliği, düşük termal genleşme katsayısı ve gaz geçirimsizlik. Karbon yapıları elde etmek için karbon açısından zengin öncü maddeler aranmaktadır. Bu öncüler, belirli şekillerde mevcut olan ve hatta atık ürünleri de içeren insan yapımı veya doğal ürünler olabilir. Çok çeşitli micr<html> O / nanoyapılar, doğada biyolojik veya çevresel süreçler vasıtasıyla oluşturulur ve geleneksel üretim araçlarını kullanarak yaratılması oldukça zor olan benzersiz özelliklere neden olur. Bu durumda desenlendirme doğal olarak gerçekleştiği için, doğal ve atık hidrokarbon öncülleri kullanarak nanomalzemelerin sentezi, piroliz 5 olarak adlandırılan atıl veya vakumlu bir atmosferde, kolay, tek aşamalı bir termal ayrışma işlemi kullanılarak gerçekleştirilebilir. Yüksek kaliteli grafen, tek duvarlı CNT&#39;ler, çok duvarlı CNT&#39;ler ve karbon noktaları, terebentin yağı, susam yağı gibi tohumlar, lifler ve yağlar dahil olmak üzere bitki kaynaklı öncüllerin ve atıkların termal bozunumu veya piroliziyle üretilmiştir , Neem yağı ( Azadirachta indica ), okaliptüs yağı, hurma yağı ve jatrofa yağı. Ayrıca, kafur ürünleri, çay-yaprak özleri, atık yiyecekler, böcekler, tarımsal atıklar ve gıda ürünleri 6 , 7 ,Son zamanlarda, araştırmacılar gözenekli karbon mikrofiberlerini hazırlamak için ipek kozalarını bile bir ön madde olarak kullandı bile 10 . Genellikle atık madde olarak düşünülen insan saçları, yakın bir zamanda bu ekip tarafından kullanılmıştır. % 50&#39;den fazla karbon içeren yaklaşık% 91 polipeptitten oluşur; Geri kalan kısım oksijen, hidrojen, azot ve kükürt gibi elementlerdir 11 . Saç aynı zamanda çok yavaş bozunum, yüksek gerilme mukavemeti, yüksek ısı yalıtımı ve yüksek elastik geri kazanım gibi çeşitli ilginç özellikler ile birlikte gelir. Son zamanlarda, süper kondansatörler 12&#39;de kullanılan karbon pullarını hazırlamak ve elektrokimyasal algılama için oyuk karbon mikrofiberleri oluşturmak için kullanılmıştır13. Üç boyutlu (3D) yapıları imal etmek için dökme karbon maddesinin işlenmesi, malzeme çok kırılgan olduğu için zor bir görevdir. Odaklanmış iyonAm 14 , 15 veya reaktif iyon izi 16 bu bağlamda faydalı olabilir, ancak pahalı ve zaman alan süreçlerdir. Desenli polimerik yapıların pirolizine dayanan karbon mikroelektromekanik sistem (C-MEMS) teknolojisi çok yönlü bir alternatifi temsil eder. Son yirmi yılda C-MEMS ve karbon nanotelelektromekanik sistemler (C-NEMS), basit ve ucuz üretim adımları nedeniyle çok dikkat çekti. Geleneksel C-MEMS imalat prosesi iki aşamada gerçekleştirilir: (i) bir polimer öncüsünün ( örneğin bir fotorezistir) fotolitografiyle ve (ii) desenli yapıların piroliziyle desenlendirilmesi. SU8 fotoresistleri gibi ultraviyole (UV) -kurevlenebilir polimer ön maddeleri, fotolitografiye dayalı yapıları modellemek için sıklıkla kullanılır. Genel olarak, fotolitografi işlemi spin kaplama, yumuşak pişirme, UV maruziyeti, sonrası pişirme ve deve için adımları içerirlopment. C-MEMS durumunda; silikon; silikon dioksit; Silisyum nitrid; kuvars; Ve son zamanlarda safir alt tabakalar olarak kullanılmıştır. Foto desenli polimer yapılar oksijensiz ortamda yüksek sıcaklıkta (800-1,100 ° C) karbonlaştırılır. Vakum veya atıl bir atmosferdeki yüksek sıcaklıklarda, karbon içermeyen elementlerin hepsi çıkarılır ve sadece karbon kalır. Bu teknik, elektrokimyasal algılama 17 , enerji depolaması 18 , triboelektrik nanojenerasyon 19 ve elektrokinetik parçacık manipülasyonu 20 dahil olmak üzere birçok uygulama için çok yararlı olan yüksek kaliteli, camsı karbon yapılarının elde edilmesine olanak tanır. Ayrıca, 3D mikroyapıların Yüksek en-boy oranları C-MEMS kullanılarak nispeten kolay hale geldi ve çok çeşitli karbon elektrot uygulamaları 18 , 21 , </sup&gt; 22 , 23 , çoğunlukla soy metal elektrotların yerini alıyor. Bu çalışmada, konvansiyonel olmayan C-MEMS teknolojisi 13 kullanılarak insan saçından oyuk karbon mikrofiberlerin imalatı için basit ve maliyet-etkin bir yolun yakın zamanda geliştirilmesi tanıtıldı. Geleneksel SU8 polimer esaslı C-MEMS süreci de burada açıklanmaktadır. Spesifik olarak, yüksek en-boy oranlı katılar ve oyuk SU8 yapıları için üretim prosedürü 24 açıklanmıştır .

<table><tbody><tr><td>SU8-2100</td><td>Microchem</td><td>Product number-Y1110750500L</td><td></td></tr><tr><td>Spinner</td><td>Laurell Technologies Corporation</td><td>Model-WS650HZB-23NPP/UD3</td><td></td></tr><tr><td>Hotplate</td><td>Torrey Pines Scientific</td><td>HS61</td><td></td></tr><tr><td>UV-exposer</td><td>Mercury Lamp, SYLVANIA</td><td>H44GS-100M, P/N-34-0054-01</td><td></td></tr><tr><td>Photomask</td><td>CAD/Art</td><td></td><td>No number</td></tr><tr><td>Developer&amp;nbsp;</td><td>Microchem</td><td>Y020100 4000L&amp;nbsp;</td><td></td></tr><tr><td>DI water system</td><td>Milli Q</td><td>ZOOQOVOTO</td><td></td></tr><tr><td>IPA</td><td>CTR Sientific</td><td>CTR 01244</td><td></td></tr><tr><td>N&lt;sub&gt;2&lt;/sub&gt; gas</td><td>AOC Mexico</td><td></td><td>No number</td></tr><tr><td>Furnace</td><td>PEO 601, ATV Technologie GMBH</td><td>Model-PEO 601, Serial no.-195</td><td></td></tr><tr><td>Si/SiO&lt;sub&gt;2&lt;/sub&gt;</td><td>Noel Technologies</td><td></td><td></td></tr></tbody></table>

fabrication of 3d carbon microelectromechanical systems (c-mems)

Doğada, çeşitli mikro / nano-yapı konfigürasyonlarına sahip çok çeşitli karbon kaynakları mevcuttur. Burada, insan tüylerinden türetilen uzun ve içi boş camsı karbon mikrofiberlerin imalatı için yeni bir teknik tanıtıldı. Uzun ve oyuk karbon yapıları, insan saçının 900 ° C&#39;de bir N2 atmosferi altında pirolizi ile yapıldı. Doğal ve pirolize insan kıllarının morfolojisi ve kimyasal bileşimi, pirolizden kaynaklanan fiziksel ve kimyasal değişiklikleri tahmin etmek için taramalı elektron mikroskobu (SEM) ve elektron-dağılmalı X-ışını spektroskopisi (EDX) kullanılarak araştırılmıştır. Raman spektroskopisi, karbon mikroyapılarının camsı doğasını teyit etmek için kullanılmıştır. Pirolize edilmiş saç karbonu, ekran baskılı karbon elektrodlarını değiştirmek için piyasaya sürüldü; Modifiye elektrotlar daha sonra dopamin ve askorbik asidin elektrokimyasal algılamalarına uygulandı. Modifiye sensörlerin algılama performansı unmodi&#39;ye kıyasla geliştirildiFied sensörler. İstenen karbon yapısı tasarımını elde etmek için karbon mikro / nano elektromekanik sistem (C-MEMS / C-NEMS) teknolojisi geliştirildi. En yaygın C-MEMS / C-NEMS imalat süreci iki aşamadan oluşur: (i) fotolitografi kullanarak bir ışığa duyarlı polimer gibi karbon açısından zengin bir ana materyalin desenlendirilmesi; Ve (ii) desenli polimerin oksijensiz bir ortamda pirolizi yoluyla karbonlaştırılması. C-MEMS / NEMS prosesi, mikro piller, supercapacitors, glikoz sensörleri, gaz sensörleri, yakıt hücreleri ve triboelektrik nanogeneratörler de dahil olmak üzere çeşitli uygulamalar için mikroelektronik cihazlar geliştirmek için yaygın bir şekilde kullanılmaktadır. Burada SU8 fotoresistleri ile yüksek en-boy oranlı katı ve içi boş karbon mikroyapılarının son gelişmeleri tartışıldı. Piroliz sırasında yapısal çekme, konfokal mikroskopi ve SEM kullanılarak araştırıldı. Raman spektroskopisi, yapının kristalinitesini teyit etmek için kullanıldı ve elementlerin atomik yüzdesiPiroliz öncesi ve sonrasında malzemede nt EDX kullanılarak ölçüldü.

İnsandan elde edilen içi boş karbon mikroelyafları için imalat sürecinin şematik bir şekli Şekil 1&#39;de gösterilmektedir. Büzülmeyi tahmin etmek için karbonlaştırılmış insan saçları SEM kullanılarak karakterize edildi. Saçın çapı, piroliz nedeniyle 82.88 ± 0.003 μm&#39;den 31.42 ± 0.003 μm&#39;ye küçüldü. Saçtan türetilen karbon mikrofiberlerini kullanarak yapılan çeşitli desenlerin taramalı elektron mikroskobik (SEM)...

Watch this Scientific Journal Video about Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS at JoVE.com

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Uzun ve içi boş camsı karbon mikroelyafları, doğal bir ürünün, insan saçının pirolizine dayalı olarak imal edilmiştir. Karbon mikroelektromekanik ve karbon nano elektromekanik sistemlerin veya C-MEMS ve C-NEMS&#39;nin iki üretim aşaması şunlardır: (i) karbon açısından zengin bir polimer öncüsünün fotolitografisi ve (ii) desenli polimer öncüsünün pirolizi.

3D Karbon Mikroelektromekanik Sistemlerin (C-MEMS) İmalatı

A wide range of carbon sources are available in nature, with a variety of micro-/nanostructure configurations. Here, a novel technique to fabricate long ...

fabrication-of-3d-carbon-microelectromechanical-systems-c-mems

Research

JoVE Journal

Engineering

Fabrication of 3D Carbon Microelectromechanical Systems (C-MEMS)

12.0K Görüntüleme.  Tecnologico de Monterrey.  Uzun ve içi boş camsı karbon mikroelyafları, doğal bir ürünün, insan saçının pirolizine dayalı olarak imal edilmiştir. Karbon mikroelektromekanik ve karbon nano elektromekanik sistemlerin veya C-MEMS ve C-NEMS'nin iki üretim aşaması şunlardır: (i) karbon açısından zengin bir polimer öncüsünün fotolitografisi ve (ii) desenli polimer öncüsünün pirolizi. 

Video: Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS

Fabrication, Densification, and Replica Molding of 3D Carbon Nanotube Microstructures

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip devices, and their applications. In particular, capabilities for cost-effective fabrication of polymer microstructures were transformed by the advent of soft lithography and other micromolding techniques 1, 2, and this led a revolution in applications of microfabrication to biomedical engineering and biology. Nevertheless, it remains challenging to fabricate microstructures with well-defined nanoscale surface textures, and to fabricate arbitrary 3D shapes at the micro-scale. Robustness of master molds and maintenance of shape integrity is especially important to achieve high fidelity replication of complex structures and preserving their nanoscale surface texture. The combination of hierarchical textures, and heterogeneous shapes, is a profound challenge to existing microfabrication methods that largely rely upon top-down etching using fixed mask templates. On the other hand, the bottom-up synthesis of nanostructures such as nanotubes and nanowires can offer new capabilities to microfabrication, in particular by taking advantage of the collective self-organization of nanostructures, and local control of their growth behavior with respect to microfabricated patterns. 
Our goal is to introduce vertically aligned carbon nanotubes (CNTs), which we refer to as CNT "forests", as a new microfabrication material. We present details of a suite of related methods recently developed by our group: fabrication of CNT forest microstructures by thermal CVD from lithographically patterned catalyst thin films; self-directed elastocapillary densification of CNT microstructures; and replica molding of polymer microstructures using CNT composite master molds. In particular, our work shows that self-directed capillary densification ("capillary forming"), which is performed by condensation of a solvent onto the substrate with CNT microstructures, significantly increases the packing density of CNTs. This process enables directed transformation of vertical CNT microstructures into straight, inclined, and twisted shapes, which have robust mechanical properties exceeding those of typical microfabrication polymers. This in turn enables formation of nanocomposite CNT master molds by capillary-driven infiltration of polymers. The replica structures exhibit the anisotropic nanoscale texture of the aligned CNTs, and can have walls with sub-micron thickness and aspect ratios exceeding 50:1. Integration of CNT microstructures in fabrication offers further opportunity to exploit the electrical and thermal properties of CNTs, and diverse capabilities for chemical and biochemical functionalization 3.

We present methods for fabrication of patterned microstructures of vertically aligned carbon nanotubes (CNTs), and their use as master molds for production of polymer microstructures with organized nanoscale surface texture. The CNT forests are densified by condensation of solvent onto the substrate, which significantly increases their packing density and enables self-directed formation of 3D shapes.

3D Karbon Nanotube mikroyapılar, Üretimi, Yoğunlaştırma ve Replica Kalıp

The introduction of new materials and processes to microfabrication has, in large part, enabled many important advances in microsystems, lab-on-a-chip ...

Mühendislik

Microfabricated Platforms for Mechanically Dynamic Cell Culture

The ability to systematically probe in vitro cellular response to combinations of mechanobiological stimuli for tissue engineering, drug discovery or fundamental cell biology studies is limited by current bioreactor technologies, which cannot simultaneously apply a variety of mechanical stimuli to cultured cells. In order to address this issue, we have developed a series of microfabricated platforms designed to screen for the effects of mechanical stimuli in a high-throughput format. In this protocol, we demonstrate the fabrication of a microactuator array of vertically displaced posts on which the technology is based, and further demonstrate how this base technology can be modified to conduct high-throughput mechanically dynamic cell culture in both two-dimensional and three-dimensional culture paradigms.

In this protocol, we demonstrate the fabrication of a microactuator array of vertically displaced posts on which the technology is based, and how this base technology can be modified to conduct high-throughput mechanically dynamic cell culture in both two-dimensional and three-dimensional culture paradigms.

Mekanik Dinamik Hücre Kültürü için Microfabricated platformlar

The ability to systematically probe in vitro cellular response to combinations of mechanobiological stimuli for tissue engineering, drug discovery or ...

Biyomühendislik

Micro-masonry for 3D Additive Micromanufacturing

Transfer printing is a method to transfer solid micro/nanoscale materials (herein called &#8216;inks&#8217;) from a substrate where they are generated to a different substrate by utilizing elastomeric stamps. Transfer printing enables the integration of heterogeneous materials to fabricate unexampled structures or functional systems that are found in recent advanced devices such as flexible and stretchable solar cells and LED arrays. While transfer printing exhibits unique features in material assembly capability, the use of adhesive layers or the surface modification such as deposition of self-assembled monolayer (SAM) on substrates for enhancing printing processes hinders its wide adaptation in microassembly of microelectromechanical system (MEMS) structures and devices. To overcome this shortcoming, we developed an advanced mode of transfer printing which deterministically assembles individual microscale objects solely through controlling surface contact area without any surface alteration. The absence of an adhesive layer or other modification and the subsequent material bonding processes ensure not only mechanical bonding, but also thermal and electrical connection between assembled materials, which further opens various applications in adaptation in building unusual MEMS devices.

This paper introduces a 3D additive micromanufacturing strategy (termed &#8216;micro-masonry&#8217;) for the flexible fabrication of microelectromechanical system (MEMS) structures and devices. This approach involves transfer printing-based assembly of micro/nanoscale materials in conjunction with rapid thermal annealing-enabled material bonding techniques.

3D Katkı Micromanufacturing için Micro-duvar

Transfer printing is a method to transfer solid micro/nanoscale materials (herein called &#8216;inks&#8217;) from a substrate where they are generated to ...

Using Micro-Electro-Mechanical Systems (MEMS) to Develop Diagnostic Tools

Using Micro-Electro-Mechanical Systems MEMS to Develop Diagnostic Tools

I'm U De Mercy, I'm the principal investigator of Bio Stick MAMs in Medicine Labs. I did my PhD at Stanford University in electrical engineering. I did a postdoc at Harvard Medical School at MGH working on bio acoustic MAMs or mostly bio MAs.And now I'm continuing as a faculty at Harvard Medical School at Harvard MIT Health Sciences and Technology. And continuing with my research that I enjoy very much. The work that I did during my PhD was very much related to droplets and using acoustics to generate precise size droplets and control their location and position to deposit very sensitive polymers.Now we apply similar technologies to encapsulate cells in droplets and then position them on the surfaces for various applications in tissue engineering to print cells on the surfaces to pattern cells. Also, there are applications where you want to see that you can encapsulate few cells or a single cell or from the same population and to see the differences between the same population from one cell to another there being able to encapsulate cells in droplets at high throughput rates like 10, 000 cells per second kind of rates becomes very important and very useful to understand biological problems. So my research currently has two legs, I would say.One is this cell encapsulation work that I just talked about. How do we pack a cell in a droplet that's, and how can we do this repeatedly and reliably and without harming the cells? So after the cell is ejected or encapsulated in the droplet, we should be able to precisely located on a surface the cell should be functional and alive and viable.It shouldn't be harmed by the effects of ejection and so forth. So currently we have a system where we use acoustic drop focused waves to generate these droplets from open pools where we can encapsulate down to single cells in these really small droplets that are comparable to the cell size. That's very exciting in terms of applying this to cell printing and tissue engineering.The other side of my research is again using these MAMs micro electromechanical system technologies to develop low cost diagnostic tools. Mostly this research uses microfluidic approaches where we can introduce whole blood, very small volumes such as blood from a prick finger prick, less than 10 microliters that you can introduce to a chip. And from that blood we can encapsulate or you can capture certain sub-cellular populations from whole blood.Why is this important? Why should this be cheap for global health applications On top of the mountain in Africa, you want to be able to tell for a HIV patient, for instance, how many CD four T lymphocytes this patient has. Because World Health Organization says that below 200 CD four cells per microliter, you have to start treating the patients In the developed world, you use hundreds of thousands dollars of vert flow cytometers to be able to get this data.And it takes of course time to use and skill of course to be able to use these like huge table size machines. Our small chip can be introduced this small finger brick 10 microliters of whole blood and it'll capture the CD four cells using the surface protein affinities. And then you can rapidly count these cells that are captured because you know that there are CD four cells which are attached to CD four proteins antibodies on the surface of the chip.By controlling the flow rates and shear, you can make sure that the specificity and efficiency for these cell types are optimized. And there's of course always non specific binding, but by our sheer approaches we minimize these effects and make sure that between plus minus 10%errors, which is sufficient to make a diagnostic or prognostic decision on top mountain in Africa. So this has interesting applications for global health as well as these low cost techniques that are disposable can impact the developed world because now these fast blood tests which are really low cost can impact the tests that we use in the developed world.If they're optimized to higher levels of efficiency and specificity, which our initial data shows that they can be, then it'll definitely impact our lives. When I first finished my PhD, I knew more about microfluidics and that in MAMs more than anything else I could see, especially with the droplet application, I could see that if I could print cells and encapsulate cells or manipulate the few cells, single cells, that it'll have great applications in biotechnology area. And I was very interested in working on things that will actually impact people's lives.I used to apply these technologies to semiconductor industry, but then I wanted to to be useful directly to people. So I, that's what directed me towards problems in healthcare. And then that's why I made a big shift and came to a hospital, mass general hospital to the postdoc.And there, you know, I got exposed more and more to problems and it seems, and it's all clear that one of the biggest problems of the world today is global health and there comes illnesses like tuberculosis, HIV that kills thousands of people per day. And these people die not because the drugs are not there, but because there aren't enough diagnostic tools which is much more expensive than the existing drugs. So I know the technology side of the things very well.I get, I got exposed to the biological problems and the more I learned about them, the more I could see that I could make an impact. And that's how it all grew from there. And it's still continuing now.Like I seen biotechnology and in medicine there are like so many problems that actually directly cause our result into loss of people's lives and the technologies, the technology aspect of it and being able to apply it to real world medical problems is a great, I think path to follow. This is like how this whole biotechnology area I think is kind of growing and it's becoming very impactful. If you think about it, HIV cancer, those are big killers in the world.And current micro technologies, current approaches could maybe benefit from early detection of cancer by capturing these cells from blood or making it really cheap, which will make it available to masses. So all these things coming together, I think this whole microtechnology applications in healthcare in medicine could impact the future of human beings. So that's how all these things kind of come together I guess.And being in the Harvard MIT health sciences and technology where on one end you have the technology and on the other end you direct aspect, direct access to patients, direct access to doctors in Brigham and Women's Hospital where I work is a great environment. cause every person that you talk to have their problems and you could maybe it's coming from a different background, provide interesting solutions to those existing real world problems. So this is, I think how I see the whole perspective of how these medical problems meet the technology side.And we try to impact people's lives in a positive way. In single cell cap encapsulation or in cell encapsulation, the major challenge is to be able to encapsulate reliably and repeatably single cells. So you're ejecting 10, 000 hundred thousand cells per second.And how do you make sure that each droplet that you eject has a single cell? This statistics where you are changing the droplet size and minimizing the, optimizing the cell size over the droplet size, which goes into the old problem of packing spheres in a volume and what is the most efficient way to do it. So that's the biggest challenge in the cell printing area for from the technological side.The other aspect of it is now you can say print and precisely locate these cells. How can you generate these three dimensional tissues and how can you keep them alive and how can you transplant them? There comes in the biological end of the problems where you want to now exactly mimic the tissue.We have current approaches to be able to print an eyelet, a pancreas eyelet, and to be able to print using smooth muscle cells, a bladder tissue, directly mimicking what is in human or red bladder so that then we can make this tissue and test how well it performs compared to the real world existing native tissues. So that's the major challenge I guess by taking these novel technologies, how can you make this the ideal tissue that can be replaced, that can be transplanted, that's the, you know, biggest problem from the beginning because the control on single cell gives you the capability to precisely locate them. And then how do you kind of grow it from there?So it's something transplantable there where the impact of human life comes. So that's on that end, what the challenges are in the tissue engineering side of the things in southern encapsulation and in diagnostics using microfluidics, the challenge is to be able to capture a cell out of billions of cells. It's like you have a sugar particle in a salt can and you're trying to pull out that sugar particle and that's like one in a billion.So you, you're processing microliters to milliliters of whole blood and you want to be able to specifically and efficiently without any technological problems like clogging or any biological problems like non-specific binding, you want to be able to isolate at one cell out of billion cells in one microliter of whole blood, you have a few millions of cells. And for the CD four T lymphocyte case in that one microliter, we are after about thousand cells per microliter. So it's like one cell in a thousand kind of a problem where we have shown that it's doable.But when you want to go after circulating tumor cells for cancer, then the challenge becomes one in a billion. So to some summarize it, the challenge is how do we capture this one cell out of billions of other cells around it? And what is the technological aspects?What are the flow rates? What is the device design? What, what are the flow rates?What, what are the volumes of blood that has to be processed and how do you make sure that the cells you capture are the ones that you actually wanted to capture? All these aspects kind formed the whole challenge that can be summarized in one sentence, which is how do you capture this one rare cell out of billion others? So it's really a needle in a haystack kind of problem, which is exciting.And I think this is moving the technologies forward to address these problems is the current technological challenge. Being able to bring them to a level where they do the job that they're supposed to do is one thing. And then taking it to the clinic and making it a product has all different expertise such as being able to start a company, being able to patent these things and all those other aspects come into the picture.And I think we as scientists primarily don't have all of those skills that takes the products from desktop to products. So there comes in again, the importance of collaborations with people who have different backgrounds. And there are many technologies out there that I think could be very impactful and useful.They sometimes don't make it to the clinic or to the use of humankind either because it just didn't happen, wasn't the right time or other effects came into the picture that I just talked about. Or sometimes there isn't a direct link that you couldn't see that the technology could actually solve that problem. And the person who deals with the problem, or let's say the biologists or people in medicine are used to doing it one way for many years.And the people on the technology side mostly if you're not having a biotechnology focus, are not aware of the problems in medicine. So bringing these two sides together is a serious interdisciplinary research. And I think in the past years, the whole emphasis both at NIH level and that we see in research labs and universities is to generate interdisciplinary research.So people end up getting PhDs where they have to know multiple fields. For instance, for my PhD, I had to know acoustics, I had to know mems, I had to know microfluidics and I had to apply this for polymers. So now you see kinda very depth of knowledge in one field where you had to know actually three other fields quite well to be able to solve that problem.So I think the answer is in interdisciplinary research combined with people with business skills to make it available to use of the people, it's a whole big process and some inefficiencies that come in at certain locations. Cause that low percent of tech transfer.

Teşhis Araçları Geliştirmek İçin Mikro-Elektro-Mekanik Sistemler (MEMS)

Biyoloji

Microfabrication of Chip-sized Scaffolds for Three-dimensional Cell cultivation

Using microfabrication technologies is a prerequisite to create scaffolds of reproducible geometry and constant quality for three-dimensional cell cultivation. These technologies offer a wide spectrum of advantages not only for manufacturing but also for different applications. The size and shape of formed cell clusters can be influenced by the exact and reproducible architecture of the microfabricated scaffold and, therefore, the diffusion path length of nutrients and gases can be controlled.1 This is unquestionably a useful tool to prevent apoptosis and necrosis of cells due to an insufficient nutrient and gas supply or removal of cellular metabolites.
Our polymer chip, called CellChip, has the outer dimensions of 2 x 2 cm with a central microstructured area. This area is subdivided into an array of up to 1156 microcontainers with a typical dimension of 300 m edge length for the cubic design (cp- or cf-chip) or of 300 m diameter and depth for the round design (r-chip).2
So far, hot embossing or micro injection moulding (in combination with subsequent laborious machining of the parts) was used for the fabrication of the microstructured chips. Basically, micro injection moulding is one of the only polymer based replication techniques that, up to now, is capable for mass production of polymer microstructures.3 However, both techniques have certain unwanted limitations due to the processing of a viscous polymer melt with the generation of very thin walls or integrated through holes. In case of the CellChip, thin bottom layers are necessary to perforate the polymer and provide small pores of defined size to supply cells with culture medium e.g. by microfluidic perfusion of the containers.
In order to overcome these limitations and to reduce the manufacturing costs we have developed a new microtechnical approach on the basis of a down-scaled thermoforming process. For the manufacturing of highly porous and thin walled polymer chips, we use a combination of heavy ion irradiation, microthermoforming and track etching. In this so called "SMART" process (Substrate Modification And Replication by Thermoforming) thin polymer films are irradiated with energetic heavy projectiles of several hundred MeV introducing so-called "latent tracks" Subsequently, the film in a rubber elastic state is formed into three dimensional parts without modifying or annealing the tracks. After the forming process, selective chemical etching finally converts the tracks into cylindrical pores of adjustable diameter.

We present two processes for the microfabrication of porous polymer chips for three-dimensional cell cultivation. The first one is hot embossing combined with a solvent vapour welding process. The second one uses a recently developed microthermoforming process combined with ion track technology leading to a significant simplification of manufacture.

Üç boyutlu Hücre ekimi için Chip-ölçekli Yapı iskeleleri mikroimalat

Using microfabrication technologies is a prerequisite to create scaffolds of reproducible geometry and constant quality for three-dimensional cell ...

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and automotive. However, effective inspection and characterization metrology systems are needed to ensure the functional reliability of MEMS. This study presents a system based on digital holography as a tool for MEMS metrology. Digital holography has gained increasing attention in the past 20 years. With the fast development and decreasing cost of sensor arrays, resolution of such systems has increased broadening potential applications. Thus, it has attracted attention from both research and industry sides as a potential reliable tool for industrial metrology. Indeed, by recording the interference pattern between an object beam (which contains sample height information) and a reference beam on a CCD camera, one can retrieve the quantitative phase information of an object. However, most of digital holographic systems are bulky and thus not easy to implement on industry production lines. The novelty of the system presented is that it is lens-less and thus very compact. In this study, it is shown that the Compact Digital Holographic Microscope (CDHM) can be used to evaluate several characteristics typically consider as criteria in MEMS inspections. The surface profiles of MEMS in both static and dynamic conditions are presented. Comparison with AFM is investigated to validate the accuracy of the CDHM.

We present a compact reflection digital holographic system (CDHM) for inspection and characterization of MEMS devices. A lens-less design using a diverging input wave providing natural geometrical magnification is demonstrated. Both static and dynamic studies are presented.

MEMS Muayene ve Karakterizasyonu için kompakt Lens az Dijital Holografik Mikroskop

A micro-electro-mechanical-system (MEMS) is a widely used component in many industries, including energy, biotechnology, medical, communications, and ...

Fabrication of Carbon-Based Ionic Electromechanically Active Soft Actuators

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, compliant and biomimetic nature of this deformation, actuators made of the laminate have received increasing interest in soft robotics and (bio)medical applications. However, methods to easily fabricate the active material in large (even industrial) quantities and with a high batch-to-batch and within-batch repeatability are needed to transfer the knowledge from laboratory to industry. This protocol describes a simple, industrially scalable and reproducible method for the fabrication of ionic carbon-based electromechanically active capacitive laminates and the preparation of actuators made thereof. The inclusion of a passive and chemically inert (insoluble) middle layer (e.g., a textile-reinforced polymer network or microporous Teflon) distinguishes the method from others. The protocol is divided into five steps: membrane preparation, electrode preparation, current collector attachment, cutting and shaping, and actuation. Following the protocol results in an active material that can, for example, compliantly grasp and hold a randomly shaped object as demonstrated in the article.

This article describes a fast and simple manufacturing process of ionic electromechanically active composite materials for actuators in biomedical, biomimetic and soft robotics applications. The key fabrication steps, their importance for the actuators&#39; final properties, and some of the main characterization techniques are described in detail.

Karbon Bazlı İonik Elektromekanik Aktif Yumuşak Aktüatörlerin İmalatı

Ionic electromechanically active capacitive laminates are a type of smart material that move in response to electrical stimulation. Due to the soft, ...

Fabrication of Micro-Patterned Chip with Controlled Thickness for High-Throughput Cryogenic Electron Microscopy

A major limitation for the efficient and high-throughput structure analysis of biomolecules using cryogenic electron microscopy (cryo-EM) is the difficulty of preparing cryo-EM samples with controlled ice thickness at the nanoscale. The silicon (Si)-based chip, which has a regular array of micro-holes with graphene oxide (GO) window patterned on a thickness-controlled silicon nitride (SixNy) film, has been developed by applying microelectromechanical system (MEMS) techniques. UV photolithography, chemical vapor deposition, wet and dry etching of the thin film, and drop-casting of 2D nanosheet materials were used for mass-production of the micro-patterned chips with GO windows. The depth of the micro-holes is regulated to control the ice thickness on-demand, depending on the size of the specimen for cryo-EM analysis. The favorable affinity of GO toward biomolecules concentrates the biomolecules of interest within the micro-hole during cryo-EM sample preparation. The micro-patterned chip with GO windows enables high-throughput cryo-EM imaging of various biological molecules, as well as inorganic nanomaterials.

A newly developed micro-patterned chip with graphene oxide windows is fabricated by applying microelectromechanical system techniques, enabling efficient and high-throughput cryogenic electron microscopy imaging of various biomolecules and nanomaterials.

Yüksek Verimli Kriyojenik Elektron Mikroskobu için Kontrollü Kalınlığa Sahip Mikro Desenli Çip İmalatı

A major limitation for the efficient and high-throughput structure analysis of biomolecules using cryogenic electron microscopy (cryo-EM) is the ...

An Additive Manufacturing Technique for the Facile and Rapid Fabrication of Hydrogel-based Micromachines with Magnetically Responsive Components

Polyethylene glycol (PEG)-based hydrogels are biocompatible hydrogels that have been approved for use in humans by the FDA. Typical PEG-based hydrogels have simple monolithic architectures and often function as scaffolding materials for tissue engineering applications. More sophisticated structures typically take a long time to fabricate and do not contain moving components. This protocol describes a photolithography method that allows for facile and rapid microfabrication of PEG structures and devices. This strategy involves an in-house developed fabrication stage that allows for the rapid fabrication of 3D structures by building upwards in a layer-by-layer fashion. Independent moving components can also be aligned and assembled onto support structures to form integrated devices. These independent components are doped with superparamagnetic iron oxide nanoparticles that are sensitive to magnetic actuation. In this manner, the fabricated devices can be actuated using external magnets to yield movement of the components within. Hence, this technique allows for the fabrication of sophisticated MEMS-like devices (micromachines) that are composed entirely out of a biocompatible hydrogel, able to function without an onboard power source, and respond to a contact-less method of actuation. This manuscript describes the fabrication of both the fabrication set-up as well as the step-by-step method for the microfabrication of these hydrogels-based MEMS-like devices.

An additive manufacturing strategy for processing UV-crosslinkable hydrogels has been developed. This strategy allows for the layer-by-layer assembly of microfabricated hydrogel structures as well as the assembly of independent components, yielding integrated devices containing moving components that are responsive to magnetic actuation.

Teknik hidrojel tabanlı Micromachines manyetik olarak duyarlı bileşenleri ile Facile ve hızlı üretim için üretim bir katkı

Polyethylene glycol (PEG)-based hydrogels are biocompatible hydrogels that have been approved for use in humans by the FDA. Typical PEG-based hydrogels ...

Fabrication of a Multiplexed Artificial Cellular MicroEnvironment Array

Cellular microenvironments consist of a variety of cues, such as growth factors, extracellular matrices, and intercellular interactions. These cues are well orchestrated and are crucial in regulating cell functions in a living system. Although a number of researchers have attempted to investigate the correlation between environmental factors and desired cellular functions, much remains unknown. This is largely due to the lack of a proper methodology to mimic such environmental cues in vitro, and simultaneously test different environmental cues on cells. Here, we report an integrated platform of microfluidic channels and a nanofiber array, followed by high-content single-cell analysis, to examine stem cell phenotypes altered by distinct environmental factors. To demonstrate the application of this platform, this study focuses on the phenotypes of self-renewing human pluripotent stem cells (hPSCs). Here, we present the preparation procedures for a nanofiber array and the microfluidic structure in the fabrication of a Multiplexed Artificial Cellular MicroEnvironment (MACME) array. Moreover, overall steps of the single-cell profiling, cell staining with multiple fluorescent markers, multiple fluorescence imaging, and statistical analyses, are described.

This article describes the detailed methodology to prepare a Multiplexed Artificial Cellular MicroEnvironment (MACME) array for high-throughput manipulation of physical and chemical cues mimicking in vivo cellular microenvironments and to identify the optimal cellular environment for human pluripotent stem cells (hPSCs) with single-cell profiling.

Çoğaltılmış yapay hücresel MicroEnvironment dizi imalatı

Cellular microenvironments consist of a variety of cues, such as growth factors, extracellular matrices, and intercellular interactions. These cues are ...