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Synthesis and Characterization of High c-axis ZnO Thin Film by Plasma Enhanced Chemical Vapor Deposition System and its UV Photodetector Application

DOI :

10.3791/53097-v

October 3rd, 2015

October 3rd, 2015

14,910 Views

1Institute of Manufacturing Technology and Department of Mechanical Engineering, National Taipei University of Technology (TAIPEI TECH)

We offered a method to directly synthesize high c-axis (0002) ZnO thin film by plasma enhanced chemical vapor deposition. The as-synthesized ZnO thin film combined with Pt interdigitated electrode was used as sensing layer for ultraviolet photodetector, showing a high performance through a combination of its good responsivity and reliability.

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