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Nanomoulding of Functional Materials, a Versatile Complementary Pattern Replication Method to Nanoimprinting

DOI :

10.3791/50177-v

January 23rd, 2013

January 23rd, 2013

11,484 Views

1Institute of Microengineering (IMT), Photovoltaics and Thin Film Electronics Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), 2Department of Electrical Engineering and Computer Sciences, University of California, Berkeley

We describe a nanomoulding technique which allows low-cost nanoscale patterning of functional materials, materials stacks and full devices. Nanomoulding can be performed on any nanoimprinting setup and can be applied to a wide range of materials and deposition processes.

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