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Quantification of Hydrogen Concentrations in Surface and Interface Layers and Bulk Materials through Depth Profiling with Nuclear Reaction Analysis

DOI :

10.3791/53452-v

March 29th, 2016

March 29th, 2016

25,115 Views

1Institute of Industrial Science, The University of Tokyo, 2Micro Analysis Laboratory, Tandem accelerator, The University Museum, The University of Tokyo

We illustrate the application of 1H(15N,αγ)12C resonant nuclear reaction analysis (NRA) to quantitatively evaluate the density of hydrogen atoms on the surface, in the volume, and at an interfacial layer of solid materials. The near-surface hydrogen depth profiling of a Pd(110) single crystal and of SiO2/Si(100) stacks is described.

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