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DOI :
10.3791/62433-v
•
5:38 min
April 7th, 2021
Chapters
0:04
Introduction
1:02
Sample Preparation for Photolithography
1:41
Performing the Photo-Resist Patterning
2:40
Wet-etching and FIB Milling
3:34
Micro-Tensile Test
4:12
Results: Analysis of the Prepared Steel Surface
4:56
Conclusion
这里介绍的是一个通过微机械张力测试测量基本材料特性的程序。描述了微拉伸试样制造(通过结合光刻,化学蚀刻和聚焦离子束铣削,允许从块状材料体积中快速制造微试样),压头尖端改性和微机械张力测试(包括示例)的方法。
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