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Fraunhofer Institute for Ceramic Technologies and Systems
Technische Universität Dresden
Zhongquan Liao1,2,
Martin Gall1,
Kong Boon Yeap1,3,
Christoph Sander1,
André Clausner1,
Uwe Mühle1,
Jürgen Gluch1,
Yvonne Standke1,
Oliver Aubel4,
Armand Beyer4,
Meike Hauschildt4,
Ehrenfried Zschech1,2
1, Fraunhofer Institute for Ceramic Technologies and Systems,
2Dresden Center for Nanoanalysis, Technische Universität Dresden,
3, Globalfoundries Fab 8,
4, Globalfoundries Fab 1
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