3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass SpectrometryPaweł Piotr Michałowski 1, Sebastian Zlotnik 1, Iwona Jóźwik 1, Adrianna Chamryga 1, Mariusz Rudziński 1
1Łukasiewicz Research Network-Institute of Electronic Materials Technology
The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.
