Łukasiewicz Research Network-Institute of Electronic Materials Technology

1 ARTICLES PUBLISHED IN JoVE

Chemistry

3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry

Paweł Piotr Michałowski¹, Sebastian Zlotnik¹, Iwona Jóźwik¹, Adrianna Chamryga¹, Mariusz Rudziński¹

¹Łukasiewicz Research Network-Institute of Electronic Materials Technology

The presented method describes how to identify and solve measurement artifacts related to secondary ion mass spectrometry as well as obtain realistic 3D distributions of impurities/dopants in solid state materials.