笔者想感谢Picometrix提供LT-GaAs衬底，并衷心感谢密歇根空间格兰特联盟的财政支持，DARPA的青年教师奖由约翰·阿尔布雷希特博士（合同编号N66001-10-1-4027），美国国家科学基金会职业管理管理萨米尔·El-Ghazaly的博士（合同编号N00014-11-1-0096），ONR青年研究者奖管理博士保罗希（合同编号N00014-12-1-0947），和ARO青年研究者奖管理奖开发帕尔默博士（合同＃W911NF-12-1-0253）。

1。电浆光电发射器制造<ol><li>制造电浆光栅。 <ol><li>清洁半导体晶片浸渍在丙酮中（2分钟），然后用异丙醇（2分钟），并用去离子水漂洗（10秒）。 </li><li>用氮气干燥样品，在加热板上加热在115℃下进行90秒，以去除任何剩余的水。 </li><li>自旋950K PMMA微化A4在样品上，在4,000 rpm的转速下持续45秒。预烘3分钟，在180℃的加热板上对抗蚀剂。 </li><li>将样品放入电子束光刻工具（JEOL JBX-6300-FS）。等离子体光栅图案暴露在基地周围剂量650μC/厘米2，采用100千伏的加速电压。 </li><li>开发PMMA将样品浸在MIBK:IPA 1:3的混合物，持续90秒。立即将样品纯异丙醇中的溶液中，持续60秒。 </li><li>用去离子水冲洗样品，持续10秒，然后用氮气干燥样品。 </li><li>将样品成等离子剥离（YES-CV200RFS）。 Descum样品使用30瓦的射频功率在30°C的100 SCCM O 2流量为10秒。 </li><li>通过浸渍在盐酸去除表面的氧化物:H 2 O，持续30秒的3:10混合物。立即将样品转移到一个级联的去离子水冲洗干净，持续4分钟。 </li><li>将样品转移到烧杯中的去离子水，以尽量减少金属沉积前暴露于大气中的氧气。 </li><li>含有样品在去离子水中的金属蒸发器（Denton的SJ-20）的烧杯中。发泄室，然后取出，晾干，然后装入样品室（这些步骤应遵循不中断，以防止样品的表面氧化形成）。 </li><li>泵腔压力低于2×10 -6托。存款钛/金（50/450）。 </li><li>发泄室，取出样品。 </li><li>为了解除熔敷金属，将样品放在聚四氟乙烯持有人在丙酮的烧杯中，盖上，并留下过夜。揭开烧杯中，放置在超声波搅拌器，并等待，直到去除所有有害金属（通常为30秒）。 </li></ol></li><li>存款的SiO 2钝化。 <ol><li>步骤1.1.1 - 1.1.2清洁样品。 </li><li>装入样品的等离子增强化学气相沉积工具（GSI PECVD法）。存款1500的SiO 2在200℃下</li></ol></li><li>通过SIO 2，打开接触孔。 <ol><li>步骤1.1.1 - 1.1.2清洁样品。 </li><li>自旋HMDS在4000转，持续30秒。旋转在Megaposit SPR 220-3.0光刻胶，在4,000转每分钟为30秒。预烘焙的抗蚀剂在加热板上，在115℃下持续90秒。 </li><li>装入样品和掩膜板到步进投影光刻（GCA自动步进200）。对准样品和揭露。 </li><li>烘烤后曝光的光致抗蚀剂在加热板上，在115℃下持续90秒。 </li><li> 6，开发抵御AZ 300 MIF开发0秒。 </li><li>立即将样品级联4分钟，用去离子水冲洗。用氮气干燥样品。 </li><li>将样品放入反应离子刻蚀机（林9400）。使用TCP RF功率为500 W的蚀刻的SiO 2，偏置为100 W的RF功率，以15sccm的SF6气体，50sccm的C 4 F 8，他为50sccm，50sccm的氩气，持续80秒。 </li><li>通过将样品在丙酮（5分钟），然后用异丙醇（2分钟），除去大部分的光致抗蚀剂。在去离子水中冲洗（10秒）。干燥氮气。 </li><li>去除残留的光刻胶装载样品在等离子体汽提塔（YES-CV200RFS）。取下光致抗蚀剂，使用800瓦的射频功率在30°C的100 SCCM O 2流量为5分钟。 </li></ol></li><li>编造天线和偏置线。 <ol><li>重复步骤1.3.1 - 1.3.6模式天线和斜交线。 </li><li>重复步骤1.1.8 - 1.1.9，以去除表面氧化。 </li><li>含有样品的烧杯中，并的金属蒸发器（Denton的SJ-20）的去离子水。 </li><li>发泄室，然后迅速取出，晾干，装入样品室。 </li><li>泵腔压力低于2×10 -6托。存款钛/金（10/4，000）。 </li><li>发泄室，取出样品。 </li><li>重复步骤1.1.13升空熔敷金属。 </li></ol></li><li>包装样品。 <ol><li>胶直径为12mm的超半球状的硅镜头一个2英寸的铝垫圈与8毫米的孔的边缘。 </li><li>胶的PCB板与金属痕迹，人们可以很容易焊料，铝垫圈。 </li><li>安装制造电浆光导太赫兹发射器使用环氧树脂薄的硅透镜的原型。 </li><li>焊线设备接触片相同的铝垫圈粘在一块PCB板上。 </li><li>电线焊接在PCB板上的金属的痕迹。 </li><li>连接设备接触片的参数分析仪（惠普装ARD 4155A）线焊接到相应的垫的PCB板，用于测试目的。 </li></ol></li></ol> 2。电浆光电发射特性<ol><li>设备对齐。 <ol><li>将铝垫圈旋转支架上携带电浆光导太赫兹发射器原型，并紧紧围绕光泵钛:蓝宝石锁模激光器（MIRA 900D V10 XW OPT 110V）每个设备上的活动区域。 </li><li>调整旋转装载的光泵，电场的方向有效地激发表面等离子体激元波（正常的电浆光栅）。 </li><li>使用参数分析仪同时应用到每个设备的偏置电压，并测量在每个设备中的感应电流。下测试每个设备的最大的光电流，确定最佳的光泵浦取向和极化调整。 </li></ol></li><li>输出功率尺寸给予的帮助。 <ol><li>调制从锁模泵激光入射在每个设备上的光泵，使用一个光学斩波器（Thorlabs公司的MC2000）。 </li><li>测量电浆光导太赫兹发射器原型，采用热释电探测器（频谱检测器，SPI-A-65赫兹）的输出功率。 </li><li>热释电探测器的输出连接锁在光学斩波器的参考频率数据恢复太赫兹功率低噪音放大器（斯坦福研究系统SR830）。 </li></ol></li><li>辐射光谱表征。 <ol><li>开始的Ti:蓝宝石锁模激光器，并使用分束器分裂成一个泵浦光束和探测光束的锁模激光输出。 </li><li>使用的电光调制器（Thorlabs公司的EO-AM-NR-C 2）调制的光束在泵的路径。泵浦光束聚焦到根据测试，以产生太赫兹辐射的光导发射器的有源区。 </li><li>照准使用第一聚乙烯球面镜片产生太赫兹光束。使用第二聚乙烯球面镜片对焦准直太赫兹光束。 </li><li>太赫兹光束的焦点之前，结合太赫兹光束的准直光束与探针使用的ITO镀膜玻璃过滤器。 </li><li>将1毫米厚，&lt;110&gt;碲化锌晶体安装在上面的组合的光学和太赫兹光束的焦点的旋转阶段。 </li><li>插入一个可控的光延迟线中的光学探针路径使用的机动线性阶段（Thorlabs公司NRT100）的不同内部750-850晶体相互作用的光学和太赫兹脉冲之间的时间延迟。 </li><li>在探头内的路径中，使用一个半波片的光学探头，在一个45°角相对于太赫兹波的偏振方向的偏振方向旋转。 </li><li>碲化锌晶体使用的四分之一波片后，光束偏振转换成圆偏振光。 </li><li>分割circul的阿尔利沃拉斯顿棱镜偏振光束分成两个分支。测量在每个分支机构连接到锁相放大器使用两个平衡探测器的光束功率。 </li><li>电动延迟线连接到计算机和锁定放大器。写一个Matlab脚本电动延迟线，暂停的位置来回移动，读锁放大器信号幅度。 </li><li>台位置转换到时域中，通过将总的光由光的速度的延迟的长度，其次是一个不显眼的傅立叶变换（使用Matlab）取得的频域数据。 </li></ol></li></ol>

<ol>
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R., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Plasmonic+photoconductive+detectors+for+enhanced+terahertz+detection+sensitivity.">Plasmonic photoconductive detectors for enhanced terahertz detection sensitivity.</a> Optics Express. , (2013).</li><li>Hsieh, B. -. Y., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Analysis+of+periodic+metallic+nano-slits+for+efficient+interaction+of+terahertz+and+optical+waves+at+nano-scale+dimensions.">Analysis of periodic metallic nano-slits for efficient interaction of terahertz and optical waves at nano-scale dimensions.</a> J. Appl. Phys. 109, 084326 (2011).</li><li>Hsieh, B. -. Y., Wang, N., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Toward+Ultrafast+Pump-Probe+Measurements+at+the+Nanoscale.+Special+Issue+of+"Optics+in+2011.">Toward Ultrafast Pump-Probe Measurements at the Nanoscale. Special Issue of "Optics in 2011.</a> Optics &amp; Photonics News. 22, (2011).</li><li>Hsieh, B. -. Y., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Simultaneous+focusing+of+terahertz+and+optical+waves+into+nano-scale.">Simultaneous focusing of terahertz and optical waves into nano-scale.</a> Proc. Int. Conf. Infrared, Millimeter, and Terahertz Waves. , 1-2 (2011).</li><li>Jackson, A. W., Ibbetson, J. P., Gossard, A. C., Mishra, U. K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Reduced+thermal+conductivity+in+low-temperature+grown+GaAs.">Reduced thermal conductivity in low-temperature grown GaAs.</a> Appl. Phys. Lett. 74, 2325-2327 (1999).</li></ol>

没有利益冲突的声明。

在这个视频文章中，我们提出了一种新型的光电导开关产生太赫兹波的技术，它使用一电浆接触电极配置，以提高光到太赫兹波的转换效率提高两个数量级。提出电浆光导发射的太赫兹辐射的功率显着增加，为未来的高灵​​敏度的太赫兹成像光谱仪和分析系统，用于先进的化学识别，医学成像，生物传感，天文学，大气遥感，安检，是非常有价值的材料特性。 这个视频文?...

我们提出了一个新颖的光电导太赫兹采用了表面等离子体激元的接触电极配置的发射器，其由两个数量级，以提高转换效率的光 - 太赫兹。我们的技术解决了最重要的局限性，传统的光导太赫兹发射器，即输出功率和低功率效率不佳，这源于固有的高量子效率和超快操作常规感光鼓之间的权衡。 在我们的设计中，导致此越级性能改进的关键新奇设计的接触电极配置，积累了大量的光生载流子在靠近接触电极，使得它们可以被收集于一个子皮秒时间尺度。换句话说，感光鼓的超快的操作和高的量子效率之间的权衡是缓解了空间操纵光属TED运营。电浆接触电极提供这种独特的能力（1）允许光限制到电浆电极（超越衍射极限），（2）非寻常光增强在金属接触和光吸收半导体界面10，11纳米器件之间的活跃的地区。我们的解决方案的另一个重要属性是它可容纳大感光活跃的领域太赫兹辐射天线寄生负载不大量增加。利用大的感光体有源区启用减轻载流子屏蔽效应和热击穿，这是最终从传统的光导发射器的最大发射功率的限制。此视频文章都集中在我们提出的解决方案的独特属性描述理事物理，数值模拟和实验验证。我们的实验证明高出50倍太赫兹权力从电浆辐透在一个类似的比较，与非等离激元的接触电极的光导发射器的发射极oconductive。

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 <td>Coherent</td>
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 <td>Thorlabs</td>
 <td>EO-AM-NR-C2</td>
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 <td>Motorized Linear Stage</td>
 <td>Thorlabs</td>
 <td>NRT100</td>
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 </tbody>
</table>

design, fabrication, and experimental characterization of plasmonic photoconductive terahertz emitters

在这个视频文章中，我们提出了一个详细的演示了一种高效的方法产生太赫兹波。我们的技术的基础上，这一直是光电导开关产生太赫兹波1-8的最常用的技术之一。开关产生太赫兹波的光导发射器是通过用脉冲或外差激光照明抽超快光电导体。引起的光电流，如下泵浦激光器的包络线，被路由到连接到光电导体的接触电极，以产生太赫兹辐射的太赫兹辐射天线。的光导发射器的量子效率虽然理论上可以达到100％时，相对长的光生载流子的输送路径的长度，以传统的感光鼓接触的电极的严重限制了它们的量子效率。此外，严格限制的载流子屏蔽效应和热击穿的最大输出P奥尔传统的光电导太赫兹光源。为了解决传统的光导太赫兹发射器的量子效率的限制，我们已经开发出一种新的光电发射器的概念，它采用了等离子体接触电极配置，同时提供高量子效率和超快操作。通过使用纳米尺度的表面等离子体激元的接触电极，显着地降低平均光生载流子传输路径与感光鼓接触的电极相比，传统的感光鼓9。我们的方法也可以增加感光面积不大量增加的容性负载天线活跃，拉动了最大的太赫兹辐射的功率防止高光泵权力载体筛选效应和热击穿。通过将等离子体接触电极，我们证明提高光 - 太赫兹的电源转换效率的传统的光电TErahertz发射器50 10的一个因素。

为了证明电浆电极太赫兹功率增强的潜力，我们两个太赫兹发射器:传统（ 图1a）和电浆（ 图1b）光电发射器将电浆降低载流子输运次接触电极的接触电极。这两种设计包括超快的感光鼓与20微米之间的间隙的阳极和阴极接触，与最大和最小宽度分别为100微米和30微米，60微米长的领结天线连接到相同的LT-GaAs衬底上制作的。电浆光电发射器集成了两个纳米电浆接触光栅成的?...

Watch this Scientific Journal Video about Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters at JoVE.com

Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters

我们描述电浆光电发射器，它提供了两个数量级更高的太赫兹功率水平相比传统的光电发射器的设计，制造，实验表征方法。

电浆光电导太赫兹发射器的设计，制造和实验表征

In this video article we present a detailed demonstration of a highly efficient method for generating terahertz waves. Our technique is based on ...

design-fabrication-experimental-characterization-plasmonic

Research

Education

JoVE Core

JoVE Journal

Electrical Engineering

Engineering

Unit 1

System Protection

SCIENTISTS IN ACTION

14.8K 次观看.  University of Michigan. 我们描述电浆光电发射器，它提供了两个数量级更高的太赫兹功率水平相比传统的光电发射器的设计，制造，实验表征方法。

视频: Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic samples with a wide range of possible sensor designs such as interferometers and resonators 1,2. Most of the existing RI sensing applications focus on biological materials in aqueous solutions in visible and IR frequencies, such as DNA hybridization and genome sequencing. At terahertz frequencies, applications include quality control, monitoring of industrial processes and sensing and detection applications involving nonpolar materials.
Several potential designs for refractive index sensors in the terahertz regime exist, including photonic crystal waveguides 3, asymmetric split-ring resonators 4, and photonic band gap structures integrated into parallel-plate waveguides 5. Many of these designs are based on optical resonators such as rings or cavities. The resonant frequencies of these structures are dependent on the refractive index of the material in or around the resonator. By monitoring the shifts in resonant frequency the refractive index of a sample can be accurately measured and this in turn can be used to identify a material, monitor contamination or dilution, etc.
The sensor design we use here is based on a simple parallel-plate waveguide 6,7. A rectangular groove machined into one face acts as a resonant cavity (Figures 1 and 2). When terahertz radiation is coupled into the waveguide and propagates in the lowest-order transverse-electric (TE1) mode, the result is a single strong resonant feature with a tunable resonant frequency that is dependent on the geometry of the groove 6,8. This groove can be filled with nonpolar liquid microfluidic samples which cause a shift in the observed resonant frequency that depends on the amount of liquid in the groove and its refractive index 9.
Our technique has an advantage over other terahertz techniques in its simplicity, both in fabrication and implementation, since the procedure can be accomplished with standard laboratory equipment without the need for a clean room or any special fabrication or experimental techniques. It can also be easily expanded to multichannel operation by the incorporation of multiple grooves 10. In this video we will describe our complete experimental procedure, from the design of the sensor to the data analysis and determination of the sample refractive index.

The procedure for implementing a refractive index sensor for terahertz frequencies based on a grooved parallel-plate waveguide geometry is described here. The method yields a measurement of the refractive index of a small volume of liquid through monitoring of the shift in the resonant frequency of the waveguide structure

太赫兹微流控测量中的一个平行板波导传感器

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic ...

科研

工程学

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

Metamaterials (MM), artificial materials engineered to have properties that may not be found in nature, have been widely explored since the first theoretical1 and experimental demonstration2 of their unique properties. MMs can provide a highly controllable electromagnetic response, and to date have been demonstrated in every technologically relevant spectral range including the optical3, near IR4, mid IR5 , THz6 , mm-wave7 , microwave8 and radio9 bands. Applications include perfect lenses10, sensors11, telecommunications12, invisibility cloaks13 and filters14,15. We have recently developed single band16, dual band17 and broadband18 THz metamaterial absorber devices capable of greater than 80% absorption at the resonance peak. The concept of a MM absorber is especially important at THz frequencies where it is difficult to find strong frequency selective THz absorbers19. In our MM absorber the THz radiation is absorbed in a thickness of ~ &lambda;/20, overcoming the thickness limitation of traditional quarter wavelength absorbers. MM absorbers naturally lend themselves to THz detection applications, such as thermal sensors, and if integrated with suitable THz sources (e.g. QCLs), could lead to compact, highly sensitive, low cost, real time THz imaging systems.

This protocol outlines the simulation, fabrication and characterization of THz metamaterial absorbers. Such absorbers, when coupled with an appropriate sensor, have applications in THz imaging and spectroscopy.

模拟，太赫兹超材料吸收器的制备与表征

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view and for its considerable potential for practical applications. Slow light photonic crystal waveguides, in particular, have played a major part and have been successfully employed for delaying optical signals1-4 and the enhancement of both linear5-7 and nonlinear devices.8-11
Photonic crystal cavities achieve similar effects to that of slow light waveguides, but over a reduced band-width. These cavities offer high Q-factor/volume ratio, for the realization of optically12 and electrically13 pumped ultra-low threshold lasers and the enhancement of nonlinear effects.14-16 Furthermore, passive filters17 and modulators18-19 have been demonstrated, exhibiting ultra-narrow line-width, high free-spectral range and record values of low energy consumption.
To attain these exciting results, a robust repeatable fabrication protocol must be developed. In this paper we take an in-depth look at our fabrication protocol which employs electron-beam lithography for the definition of photonic crystal patterns and uses wet and dry etching techniques. Our optimised fabrication recipe results in photonic crystals that do not suffer from vertical asymmetry and exhibit very good edge-wall roughness. We discuss the results of varying the etching parameters and the detrimental effects that they can have on a device, leading to a diagnostic route that can be taken to identify and eliminate similar issues.
The key to evaluating slow light waveguides is the passive characterization of transmission and group index spectra. Various methods have been reported, most notably resolving the Fabry-Perot fringes of the transmission spectrum20-21 and interferometric techniques.22-25 Here, we describe a direct, broadband measurement technique combining spectral interferometry with Fourier transform analysis.26 Our method stands out for its simplicity and power, as we can characterise a bare photonic crystal with access waveguides, without need for on-chip interference components, and the setup only consists of a Mach-Zehnder interferometer, with no need for moving parts and delay scans.
When characterising photonic crystal cavities, techniques involving internal sources21 or external waveguides directly coupled to the cavity27 impact on the performance of the cavity itself, thereby distorting the measurement. Here, we describe a novel and non-intrusive technique that makes use of a cross-polarised probe beam and is known as resonant scattering (RS), where the probe is coupled out-of plane into the cavity through an objective. The technique was first demonstrated by McCutcheon et al.28 and further developed by Galli et al.29

Use of photonic crystal slow light waveguides and cavities has been widely adopted by the photonics community in many differing applications. Therefore fabrication and characterization of these devices are of great interest. This paper outlines our fabrication technique and two optical characterization methods, namely: interferometric (waveguides) and resonant scattering (cavities).

光子晶体慢光波导和腔体的制备与表征

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view ...

Fabrication and Characterization of Disordered Polymer Optical Fibers for Transverse Anderson Localization of Light

We develop and characterize a disordered polymer optical fiber that uses transverse Anderson localization as a novel waveguiding mechanism. The developed polymer optical fiber is composed of 80,000 strands of poly (methyl methacrylate) (PMMA) and polystyrene (PS) that are randomly mixed and drawn into a square cross section optical fiber with a side width of 250 &mu;m. Initially, each strand is 200 &mu;m in diameter and 8-inches long. During the mixing process of the original fiber strands, the fibers cross over each other; however, a large draw ratio guarantees that the refractive index profile is invariant along the length of the fiber for several tens of centimeters. The large refractive index difference of 0.1 between the disordered sites results in a small localized beam radius that is comparable to the beam radius of conventional optical fibers. The input light is launched from a standard single mode optical fiber using the butt-coupling method and the near-field output beam from the disordered fiber is imaged using a 40X objective and a CCD camera. The output beam diameter agrees well with the expected results from the numerical simulations. The disordered optical fiber presented in this work is the first device-level implementation of 2D Anderson localization, and can potentially be used for image transport and short-haul optical communication systems.

We develop and characterize a disordered polymer optical fiber that uses transverse Anderson localization as a novel waveguiding mechanism. This microstructured fiber can transport a small localized beam with a radius that is comparable to the beam radius of conventional optical fibers.

无序横向安德森本地化光聚合物光纤的制备和表征

We develop and characterize a disordered polymer optical fiber that uses transverse Anderson localization as a novel waveguiding mechanism. The developed ...

Patterning via Optical Saturable Transitions - Fabrication and Characterization

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical Saturable Transitions (POST). In this technique the chemical properties of organic photochromic molecules that undergo single-photon reactions are exploited, enabling rapid top-down nanopatterning over large areas at low light intensities, thereby, allowing for the circumvention of the far-field diffraction barrier.4 Simple, cost-effective, high throughput and resolution alternatives to nanopatterning are being explored, such as, two-photon polymerization5,6, beam pen lithography (BPL)7, scanning electron beam lithography (SEBL), and focused ion beam (FIB) patterning. However, multi-photon approaches require high light intensities, which limit their potential for high throughput and offer low image contrast. Although, electron and ion beam lithographic processes offer increased resolution, the serial nature of the process is limited to slow writing speeds, which also prevents patterning of features over large areas. Beam-pen lithography is an approach towards parallel near-field optical lithography. However, the gap between the source of the beam and the surface of the photoresist needs to be controlled extremely precisely for good pattern uniformity and this is very challenging to accomplish for large arrays of beams. Patterning via Optical Saturable Transitions (POST) is an alternative optical nanopatterning technique for patterning sub-wavelength features1-3. Since this technique uses single photons instead of electrons, it is extremely fast and does not require high light intensities1-3, opening the door to massive parallelization.

We report that the diffraction limit of conventional optical lithography can be overcome by exploiting the transitions of organic photochromic derivatives induced by their photoisomerization at low light intensities.1-3 This paper outlines our fabrication technique and two locking mechanisms, namely: dissolution of one photoisomer and electrochemical oxidation.

通过光学吸收跃迁图案 - 制备与表征

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical ...

Printing Fabrication of Bulk Heterojunction Solar Cells and In Situ Morphology Characterization

Polymer-based materials hold promise as low-cost, flexible efficient photovoltaic devices. Most laboratory efforts to achieve high performance devices have used devices prepared by spin coating, a process that is not amenable to large-scale fabrication. This mismatch in device fabrication makes it difficult to translate quantitative results obtained in the laboratory to the commercial level, making optimization difficult. Using a mini-slot die coater, this mismatch can be resolved by translating the commercial process to the laboratory and characterizing the structure formation in the active layer of the device in real time and in situ as films are coated onto a substrate. The evolution of the morphology was characterized under different conditions, allowing us to propose a mechanism by which the structures form and grow. This mini-slot die coater offers a simple, convenient, material efficient route by which the morphology in the active layer can be optimized under industrially relevant conditions. The goal of this protocol is to show experimental details of how a solar cell device is fabricated using a mini-slot die coater and technical details of running in situ structure characterization using the mini-slot die coater.

Printing Fabrication of Bulk Heterojunction Solar Cells and In Situ Morphology Characterization

Here, we present a protocol to fabricate organic thin film solar cells using a mini-slot die coater and related in-line structure characterizations using synchrotron scattering techniques.

散装异质结太阳能电池的印刷和制作<em&gt;原位</em&gt;形态特征

Polymer-based materials hold promise as low-cost, flexible efficient photovoltaic devices. Most laboratory efforts to achieve high performance devices ...

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted researchers&#39; attention in many fields. Most of the studies focused on macroscopic LCE structures (films, fibers) and their miniaturization is still in its infancy. Recently developed lithography techniques, e.g., mask exposure and replica molding, only allow for creating 2D structures on LCE thin films. Direct laser writing (DLW) opens access to truly 3D fabrication in the microscopic scale. However, controlling the actuation topology and dynamics at the same length scale remains a challenge.
In this paper we report on a method to control the liquid crystal (LC) molecular alignment in the LCE microstructures of arbitrary three-dimensional shape. This was made possible by a combination of direct laser writing for both the LCE structures as well as for micrograting patterns inducing local LC alignment. Several types of grating patterns were used to introduce different LC alignments, which can be subsequently patterned into the LCE structures. This protocol allows one to obtain LCE microstructures with engineered alignments able to perform multiple opto-mechanical actuation, thus being capable of multiple functionalities. Applications can be foreseen in the fields of tunable photonics, micro-robotics, lab-on-chip technology and others.

Here, we fabricate 3D polymeric micro/nano structures in which both the shape and the molecular alignment can be engineered with nanometer scale accuracy by the use of direct laser writing. Light induced deformation of several types of liquid crystalline elastomer microstructures can be controlled in the microscopic scale.

自由形式的光驱动器 - 制作和开动控制在微观尺度

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted ...

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR is not affected by environmental characteristics such as the temperature and pressure surrounding the resonator. Electromagnetic radiation in THz frequencies is biocompatible, which is a critical condition especially for the application of the biomolecular sensing. However, the quality factor (Q-factor) and frequency responses of traditional thin-film based split ring resonator (SRR) MMs are very low, which limits their sensitivities and selectivity as sensors. In this work, novel nanopillar-based SRR MMs, utilizing displacement current, are designed to enhance the Q-factor up to 450, which is around 45 times higher than that of traditional thin-film-based MMs. In addition to the enhanced Q-factor, the nanopillar-based MMs induce a larger frequency shifts (17 times compared to the shift obtained by the traditional thin-film based MMs). Because of the significantly enhanced Q-factors and frequency shifts as well as the property of biocompatible radiation, the THz nanopillar-based SRR are ideal MMs for the development of biomolecular sensors with high sensitivity and selectivity without inducing damage or distortion to biomaterials. A novel fabrication process has been demonstrated to build the nanopillar-based SRRs for displacement current mediated THz MMs. A two-step gold (Au) electroplating process and an atomic layer deposition (ALD) process are used to create sub-10 nm scale gaps between Au nanopillars. Since the ALD process is a conformal coating process, a uniform aluminum oxide (Al2O3) layer with nanometer-scale thickness can be achieved. By sequentially electroplating another Au thin film to fill the spaces between Al2O3 and Au, a close-packed Au-Al2O3-Au structure with nano-scale Al2O3 gaps can be fabricated. The size of the nano-gaps can be well defined by precisely controlling the deposition cycles of the ALD process, which has an accuracy of 0.1 nm.

A protocol for the design and fabrication of a novel nanopillar-based split ring resonator (SRR) is presented.

基于纳米柱裂环谐振器的研制为位移电流共振介导太赫兹超材料

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR ...

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and avoiding both failure and stiction). LDV enables crucial measurements that are impossible with the network analyzer, such as higher mode detection (highly sensitive biosensor application) and resonance measurement for very small devices (fast prototyping). Accordingly, LDV was used to characterize the frequency tuning range and resonance frequency at different modes of the MEMS filters built for this study. This wide range frequency tuning mechanism is based simply on Joule heating from the embedded heaters and relatively high thermal stress with respect to the temperature of a fixed-fixed beam. However, we demonstrate that another limitation of this method is the resulting high thermal stress, which can burn the devices. Further improvement was achieved and shown for the first time in this study, such that the tuning capability was increased by 32% through an increase in the applied DC bias voltage (25 V to 35 V) between the two adjacent beams. This important finding eliminates the need for the extra Joule heating at the wider frequency tuning range. Another possible failure is through stiction and requirement of structure optimization: We propose a simple and easy technique of low frequency square wave signal application that can successfully separate the beams and eliminates the need for the more sophisticated and complicated methods given in the literature. The above findings necessitate a design methodology, and so we also provide an application-based design.

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

高效宽量程可调谐 MEMS 滤波器的设计与表征方法

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...