저자는 LT-갈륨 비소 기판을 제공하는 Picometrix 감사를 좋아하고 고맙게 미시간 공간 부여 컨소시엄, 닥터 존 알브레히트 (계약 # N66001-10-1-4027), NSF 경력에 의해 관리 DARPA 젊은 교수 상으로부터 재정 지원을 인정 것이다 상 박사 사미르 엘 Ghazaly (계약 # N00014-11-1-0096), 폴 박사 마키 (계약 # N00014-12-1-0947)에 의해 관리 ONR 젊은 탐정 상에 의해 관리 ARO 젊은 탐정 수상에 의해 관리 박사 데브 파머 (계약 # W911NF-12-1-0253).

1. 플라즈몬 광전 이미 터 제작 <ol><li> 플라즈몬 격자를 제조. <ol><li> 이소프로판올 (2 분) 다음에 아세톤 (2 분)에 침지하고, 탈 이온수 (10 초)로 세척하여 반도체 웨이퍼를 청소합니다. </li><li> 질소 샘플을 건조 ° C 90 초 동안 남아있는 물을 제거하기 위해 115에서 열판에 가열한다. </li><li> 45 초 동안 4,000 rpm에서 샘플을 스핀 MicroChem 950K PMMA의 A4. 전 빵은 3 분 동안 180 ° C에서 열판에 저항한다. </li><li> 전자 빔 리소그래피 도구 (JEOL JBX-6300-FS)에 샘플을로드합니다. 100 kV의 가속 전압을 사용하여, 650 μC / cm 2 정도 기본 용량으로 플라즈몬 격자 패턴을 노출합니다. </li><li> MIBK에서 샘플을 담가 PMMA 개발 : 90 초 동안 IPA 1시 3분 혼합. 바로 60 초 순수 이소프로판올 용액에 샘플을 전송합니다. </li><li> 10 초 동안 탈 이온수로 샘플을 세척 한 후 질소로 샘플을 건조. </li><li> 플라즈마 스트리퍼 (YES-CV200RFS)에 샘플을로드합니다. 디스 컴 10 초 100 sccm으로 O 2 유량 30 ° C에서 30 W RF 전력을 사용하여 샘플. </li><li> 염산에 침지하여 표면의 산화물을 제거 30 초 H 2 0 3시 10분 혼합. 즉시 4 분의 탈 이온수 헹굼 폭포에 샘플을 전송합니다. </li><li> 금속 증착하기 전에 공기 중의 산소에 대한 노출을 최소화하기 위해 증류수 비커에 샘플을 전송합니다. </li><li> 금속 증발기 (덴튼 SJ-20)에 탈 이온수에서 샘플을 포함하는 비커를 가져 가라. 챔버를 배출하고 제거 건조하고, 챔버 (이 단계는 샘플 표면의 산화물 형성을 방지하기 위해 중단없이 따라야한다)에 샘플을로드합니다. </li><li> 2 × 10 -6 Torr의 아래에 압력 챔버 펌프. 보증금 티 / AU (4백50분의 50 Å). </li><li> 챔버 환기 및 샘플을 제거합니다. </li><li> 용착 금속을 이륙하기 위해,에 테플론 홀더에 샘플을 배치아세톤 비커 커버, 하룻밤 둡니다. 비커를 발견, 초음파 교반기에 배치하고, 모든 원치 않는 금속이 (일반적으로 30 초)이 제거 될 때까지 기다립니다. </li></ol></li><li> 보증금 그런가 2 패시베이션. <ol><li> 1.1.2 - 1.1.1 단계에서와 같이 시료를 청소합니다. </li><li> 플라즈마 화학 기상 증착 도구 (GSI PECVD)에서 샘플을로드합니다. 200 ° C.에 그런가 2의 보증금 1,500 Å </li></ol></li><li> 그런가 2를 통해 문의 비아를 엽니 다. <ol><li> 1.1.2 - 1.1.1 단계에서와 같이 시료를 청소합니다. </li><li> 30 초 동안 4,000 rpm으로 HMDS에 스핀. 30 초 동안 4,000 rpm에서 Megaposit SPR 220-3.0 포토 레지스트에 스핀. 전 빵은 90 초 동안 115 ° C에서 열판에 저항한다. </li><li> 프로젝션 리소그래피 스테퍼 (GCA AutoStep 200)에 샘플 마스크 플레이트를 넣습니다. 샘플을 맞추고 노출합니다. </li><li> 90 초 동안 115 ° C에서 열판에 노출 된 포토 레지스트 후 굽는다. </li><li> 6에 대한 AZ 300 MIF 개발자에 저항 개발0 초. </li><li> 즉시 계단식으로 샘플을 이동 4 분 증류수 헹구십시오. 질소 샘플을 건조시킵니다. </li><li> 반응성 이온 식각 (LAM 9400)에 샘플을로드합니다. 500 W의 TCP RF 전력을 사용하여 에칭 그런가 2, 100 W의 바이어스 RF 전력의 15 SCCM SF6-, C 4 F 8, 그는 50 SCCM 50 SCCM, 80 초 아르의 50 SCCM. </li><li> 이소프로판올 (2 분) 다음에 아세톤 (5 분)에서 샘플을 배치하여 포토 레지스트의 대부분을 제거합니다. 탈 이온수 (10 초)에 씻어. 질소로 건조. </li><li> 플라즈마 스트리퍼 (YES-CV200RFS)에서 샘플을로드하여 잔류 포토 레지스트를 제거합니다. 5 분 100 sccm으로 O 2 유량 30 ° C에서 800 W의 RF 전력을 사용하여 포토 레지스트를 제거합니다. </li></ol></li><li> 안테나 및 바이어스 라인을 제작. <ol><li> 패턴 안테나와 바이어스 라인 1.3.6 - 1.3.1 단계를 반복합니다. </li><li> 1.1.9 표면의 산화물을 제거하는 단계 - 1.1.8를 반복합니다. </li><li> 샘플을 포함하는 비커를 타고금속 증발기 (덴튼 SJ-20)에 물을 탈 이온화. </li><li> 챔버를 배출하고 신속하게 제거 건조하고, 챔버에 샘플을로드합니다. </li><li> 2 × 10 -6 Torr의 아래에 압력 챔버 펌프. 보증금 티 / AU (10 / 4, 000). </li><li> 챔버 환기 및 샘플을 제거합니다. </li><li> 에 리프트 오프 용착 금속 단계 1.1.13를 반복합니다. </li></ol></li><li> 샘플을 포장한다. <ol><li> 접착제 8mm 구멍 2 인치 알루미늄 와셔에 12 mm 직경 하이퍼 반구형 실리콘 렌즈의 가장자리를. </li><li> 접착제 금속 흔적을 가진 PCB 보드에있는 하나의 알루미늄 와셔하려면 쉽게 납땜 할 수 있습니다. </li><li> 얇은 에폭시를 사용하여 실리콘 렌즈 제작 플라즈몬 광전 테라 헤르츠 터 프로토 타입을 장착합니다. </li><li> 같은 알루미늄 세탁기에 붙어 PCB 보드에 와이어 본드 장치 접촉 패드. </li><li> PCB 기판의 금속 트레이스 솔더 와이어. </li><li> 파라 메트릭 분석기 (휴렛 팩에 장치 접촉 패드를 연결테스트 목적으로 PCB 보드의 해당 패드에 납땜 와이어를 사용하여 ARD 4155A). </li></ol></li></ol> 2. 플라즈몬 광전 이미 터 특성 <ol><li> 장치 정렬. <ol><li> 회전 마운트에 플라즈몬 광전 테라 헤르츠 터 프로토 타입을 들고 알루미늄 와셔를 삽입하고 단단히 티에서 광학 펌프 초점 : 사파이어는 각 장치의 활성 영역에 레이저 (MIRA 900D V10 XW OPT 110V)을 모드하시오. </li><li> 광 펌프의 전기장 표면 플라즈몬 파 (플라즈몬 격자에 수직)을 효율적으로 여기에 대한 방향이되도록 회전 마운트를 조정합니다. </li><li> 동시에 각 장치에 바이어스 전압을 적용하고 각 장치에 유도 전류를 측정하는 파라미터 분석기를 사용합니다. 테스트중인 각 장치의 광전류를 극대화하여 최적의 광학 펌프 정렬 및 편광 조정을 확인합니다. </li></ol></li><li> 출력 전력 측정urement : 기털. <ol><li> 각 장치의 모드 잠금 펌프 레이저 사건에서 광학 펌프를 조절하는 광 단속기 (THORLABS MC2000)를 사용합니다. </li><li> 초전 검출기 (스펙트럼 검출기, 주식 회사 SPI-A-65 헤르츠)를 사용하여 플라즈몬 광전 테라 헤르츠 터 프로토 타입의 출력 전력을 측정합니다. </li><li> 에 잠금 낮은 소음 수준에서 테라 헤르츠 전력 데이터를 복구하려면 광학 헬기의 기준 주파수 증폭기 (스탠포드 연구 시스템 SR830). 초전 검출기의 출력에 연결 </li></ol></li><li> 방사선 스펙트럼 특성. <ol><li> 사파이어 모드 잠금 레이저 및 펌프 빔과 프로브 빔 모드 잠금 레이저의 출력을 분할 빔 스플리터를 사용 티와 함께​​ 시작합니다. </li><li> 펌프 경로의 광 빔을 변조 electrooptic 변조기 (THORLABS EO-AM-NR-C2)를 사용합니다. 테라 헤르츠 방사선을 생성하는 시험 광전 터의 활성 영역에 펌프 빔을 초점을 맞 춥니 다. </li><li> 시준첫 번째 폴리에틸렌 구형 렌즈를 사용하여 생성 된 테라 헤르츠 빔. 두 번째 폴리에틸렌 구형 렌즈를 사용하여 평행 테라 헤르츠 빔을 초점을 맞 춥니 다. </li><li> 테라 헤르츠 빔의 초점 전에, ITO 코팅 유리 필터를 사용하여 프로브 광 빔을 평행 테라 헤르츠 빔을 결합한다. </li><li> 두께 1 mm의 배치, &lt;110&gt; ZnTe 결정 광학 및 테라 헤르츠 빔의 결합 초점에서 회전 스테이지에 장착. </li><li> ZnTe 결정 내에서의 상호 작용 광학 및 테라 헤르츠 펄스 사이의 시간 지연을 변경하는 전동 리니어 스테이지 (THORLABS NRT100)를 사용하여 광학 프로브 경로 제어 광 지연 선을 삽입합니다. </li><li> 프로브 경로에 반 waveplate을 사용하여 테라 헤르츠 편광 방향에 45 ° 각도 관계에있을 광학 프로브의 편광을 회전합니다. </li><li> ZnTe 결정 후 내무반 waveplate을 사용하여, 원형 편광에 광 빔 편광 변환합니다. </li><li> circul 분할울러 프리즘에 의해 두 가지로 흘리 편광 광 빔. 잠금 앰프에 연결된 두 개의 균형 검출기를 사용하여 각 분기의 광 빔 전력을 측정한다. </li><li> 컴퓨터에 동력 지연 라인 및 잠금 앰프를 연결합니다. 반복적 동력 지연 라인, 일시 정지의 위치를​​ 이동에서 신호 크기 잠금 앰프를 읽을 매트랩 스크립트를 작성합니다. </li><li> 빛의 속도로 총 광 지연 길이를 분할을 통해 시간 영역에 무대 위치를 변환, 주파수 도메인 데이터를 얻기 위해 신중 푸리에 변환 (Matlab을 사용하여) 다음에. </li></ol></li></ol>

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W., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Principles+of+impedance+matching+in+photoconductive+antennas.">Principles of impedance matching in photoconductive antennas.</a> Journal of Infrared, Millimeter and Terahertz. , (2012).</li><li>Ralph, S. E., Grischkowsky, D. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Trap-enhanced+electric+fields+in+semi-insulators:+The+role+of+electrical+and+optical+carrier+injection.">Trap-enhanced electric fields in semi-insulators: The role of electrical and optical carrier injection.</a> Appl. Phys. Lett. 59, 1972 (1991).</li><li>Upadhya, P. C., Fan, W., Burnett, A., Cunningham, J., Davies, A. G., Linfield, E. H., Lloyd-Hughes, J., Castro-Camus, E., Johnston, M. B., Beere, H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Excitation-density-dependent+generation+of+broadband+terahertz+radiation+in+an+asymmetrically+excited+photoconductive+antenna.">Excitation-density-dependent generation of broadband terahertz radiation in an asymmetrically excited photoconductive antenna.</a> Opt. Lett. 32, 2297-2299 (2007).</li><li>Taylor, Z. D., Brown, E. R., Bjarnason, J. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Resonant-optical-cavity+photoconductive+switch+with+0.5+%+conversion+efficiency+and+1.0W+peak+power.">Resonant-optical-cavity photoconductive switch with 0.5 % conversion efficiency and 1.0W peak power.</a> Opt. Lett. 31, 1729-1731 (2006).</li><li>Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Terahertz+radiation-band+engineering+through+spatial+beam-shaping.">Terahertz radiation-band engineering through spatial beam-shaping.</a> Photonic Technology Letters. 21, 2019620 (2009).</li><li>Jarrahi, M., Lee, T. H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High+power+tunable+terahertz+generation+based+on+photoconductive+antenna+arrays.">High power tunable terahertz generation based on photoconductive antenna arrays.</a> Proc. IEEE International Microwave Symposium. , 391-394 (2008).</li><li>Beck, M., Schafer, H., Klatt, G., Demsar, J., Winnerl, S., Helm, M., Dekorsy, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Impulsive+terahertz+radiation+with+high+electric+fields+from+an+amplifier-driven+large-area+photoconductive+antenna.">Impulsive terahertz radiation with high electric fields from an amplifier-driven large-area photoconductive antenna.</a> Opt. Express. 18, 9251-9257 (2010).</li><li>Hattori, T., Egawa, K., Ookuma, S. I., Itatani, T. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Intense+terahertz+pulses+from+large-aperture+antenna+with+interdigitated+electrodes.">Intense terahertz pulses from large-aperture antenna with interdigitated electrodes.</a> Jpn. J. Appl. Phys. 45, L422-L424 (2006).</li><li>Kim, J. H., Polley, A., Ralph, S. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Efficient+photoconductive+terahertz+source+using+line+excitation.">Efficient photoconductive terahertz source using line excitation.</a> Opt. Lett. 30, 2490-2492 (2005).</li><li>Dreyhaupt, A., Winnerl, S., Dekorsy, T., Helm, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-intensity+terahertz+radiation+from+a+microstructured+large-area+photoconductor.">High-intensity terahertz radiation from a microstructured large-area photoconductor.</a> Appl. Phys. Lett. 86, 121114 (2005).</li><li>Brown, E. R., Lee, A. W. M., Navi, B. S., Bjarnason, J. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Characterization+of+a+planar+self-complementary+square-spiral+antenna+in+the+THz+region.">Characterization of a planar self-complementary square-spiral antenna in the THz region.</a> Microwave Opt. Technol. Lett. 48, 524-529 (2006).</li><li>Huo, Y., Taylor, G. W., Bansal, R. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Planar+log-periodic+antennas+on+extended+hemishperical+silicon+lenses+for+millimeter/submillimeter+wave+detection+applications.">Planar log-periodic antennas on extended hemishperical silicon lenses for millimeter/submillimeter wave detection applications.</a> Int. J. Infrared and Millimeter Waves. 23, 819 (2002).</li><li>Heshmat, B., Pahlevaninezhad, H., Pang, Y., Masnadi-Shirazi, M., Lewis, R. B., Tiedje, T., Gordon, R., Darcie, T. E. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Nanoplasmonic Terahertz Photoconductive Switch on GaAs. Nano Lett. 12, 6255-6259 (2012).</li><li>Berry, C. W., Hashemi, M. R., Unlu, M., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Significant+Performance+Enhancement+in+Photoconductive+Terahertz+Optoelectronics+by+Incorporating+Plasmonic+Contact+Electrodes.">Significant Performance Enhancement in Photoconductive Terahertz Optoelectronics by Incorporating Plasmonic Contact Electrodes.</a> Nature Communications. 4, 1622 (2013).</li><li>Wang, N., Berry, C. W., Hashemi, M. R., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Plasmonic+photoconductive+detectors+for+enhanced+terahertz+detection+sensitivity.">Plasmonic photoconductive detectors for enhanced terahertz detection sensitivity.</a> Optics Express. , (2013).</li><li>Hsieh, B. -. Y., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Analysis+of+periodic+metallic+nano-slits+for+efficient+interaction+of+terahertz+and+optical+waves+at+nano-scale+dimensions.">Analysis of periodic metallic nano-slits for efficient interaction of terahertz and optical waves at nano-scale dimensions.</a> J. Appl. Phys. 109, 084326 (2011).</li><li>Hsieh, B. -. Y., Wang, N., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Toward+Ultrafast+Pump-Probe+Measurements+at+the+Nanoscale.+Special+Issue+of+"Optics+in+2011.">Toward Ultrafast Pump-Probe Measurements at the Nanoscale. Special Issue of "Optics in 2011.</a> Optics &amp; Photonics News. 22, (2011).</li><li>Hsieh, B. -. Y., Jarrahi, M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Simultaneous+focusing+of+terahertz+and+optical+waves+into+nano-scale.">Simultaneous focusing of terahertz and optical waves into nano-scale.</a> Proc. Int. Conf. Infrared, Millimeter, and Terahertz Waves. , 1-2 (2011).</li><li>Jackson, A. W., Ibbetson, J. P., Gossard, A. C., Mishra, U. K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Reduced+thermal+conductivity+in+low-temperature+grown+GaAs.">Reduced thermal conductivity in low-temperature grown GaAs.</a> Appl. Phys. Lett. 74, 2325-2327 (1999).</li></ol>

관심 없음 충돌 선언하지 않습니다.

이 비디오 문서에서는, 우리는 두 자릿수로 광학 - 투 - 테라 헤르츠 변환 효율을 향상시키기 위해 플라즈몬 접촉 전극 구성을 사용하는 새로운 광전 테라 헤르츠 생성 기법을 제시한다. 제시 플라즈몬 광전 방출에서 테라 헤르츠 방사선 힘의 상당한 증가는 미래의 고감도 테라 헤르츠 이미징, 분광 분석계 시스템의 고급 화학 물질 식별에 사용되는 의료 영상, 생물 감지, 천문학, 대기 감지, 보안 ?...

우리는 두 자릿수로 광학 - 투 - 테라 헤르츠 변환 효율을 향상시키기 위해 플라즈몬 접촉 전극 구성을 사용하는 새로운 광전 테라 헤르츠 방출을 제시한다. 우리의 기술은 높은 양자 효율 및 기존 컨덕터의 초고속 동작 사이의 고유 트레이드 오프에서 발생한 기존의 광전 테라 헤르츠 방출, 즉 낮은 출력 전력과 빈약 한 전력 효율성의 가장 중요한 한계를 해결합니다. 이 도약의 성능 향상을 주도 우리 디자인의 핵심 못하던 중 하나는 접촉 전극에 근접의 사진에서 생성 된 캐리어의 큰 숫자를 축적 접촉 전극 구성을 설계하는 것입니다 그들은 내에서 수집 할 수 있도록 하위 피코 척도. 즉, 현상기 초고속 동작과 높은 양자 효율 사이의 절충은 사진 속의 공간 조작에 의해 완화됩니다테드 항공사. 플라즈몬 접촉 전극 (1) 플라즈몬 전극 (회절 한계 이상), 금속 접촉에서 (2) 특별한 빛의 향상 및 반도체 인터페이스 10, 11 사진 흡수 사이의 나노 장치의 활성 영역으로 빛을 구속함으로써이 독특한 기능을 제공합니다. 우리의 솔루션의 또 다른 중요한 특성은 테라 헤르츠 방사 안테나 기생 로딩에 상당한 증가없이 큰 컨덕터 활동 영역을 수용한다는 것입니다. 활용하여 대형 현상기 활동 영역은 기존의 광전 방출에서 최대 방사 전력에 대한 궁극적 인 제한 사항 캐리어 검진 효과 및 열 분해를 완화 수 있습니다. 이 비디오 문서는 지배 물리학, 수치 모델링 및 실험 검증을 설명하여 우리 제시된 솔루션의 고유 한 속성에 집중되어있다. 우리는 실험적 플라즈몬 phot 50 배 이상 높은 테라 헤르츠 능력을 보여비 플라즈몬 접촉 전극과 유사한 광전 이미 터와 비교 oconductive 터.

<table border="1">
 <tbody>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Reagent</td>
 </tr>
 <tr>
 <td>Polymethyl Methacrylate (PMMA)</td>
 <td>MicroChem</td>
 <td>950K PMMA A4</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Hexamethyldisilazane (HMDS)</td>
 <td>Shin-Etsu MicroSI</td>
 <td>MicroPrime HP Primer</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Optical Photoresist</td>
 <td>Dow Chemical</td>
 <td>Megaposit SPR 220-3.0</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Photoresist Developer</td>
 <td>AZ Electronic Materials</td>
 <td>AZ 300 MIF Developer</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Methyl Iso-Butyl Keytone (MIBK)</td>
 <td>Avantor Performance Materials</td>
 <td>9322-03</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>&nbsp;</td>
 <td>Equipment</td>
 </tr>
 <tr>
 <td>Ti:Sapphire Mode-Locked Laser</td>
 <td>Coherent</td>
 <td>MIRA 900D V10 XW OPT 110V</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Pyroelectric Detector</td>
 <td>Spectrum Detector</td>
 <td>SPI-A-65 THz</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Electron-Beam Lithography Tool</td>
 <td>JEOL</td>
 <td>JBX-6300-FS</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Plasma Stripper</td>
 <td>Yield Engineering Systems</td>
 <td>YES-CV200RFS</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Metal Evaporator</td>
 <td>Denton Vacuum</td>
 <td>SJ-20</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Plasma Enhanced Chemical Vapor Deposition Tool</td>
 <td>GSI</td>
 <td>GSI PECVD System</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Projection Lithography Stepper</td>
 <td>GCA</td>
 <td>AutoStep 200</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Reactive Ion Etcher</td>
 <td>LAM Research</td>
 <td>9400</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Parameter Analyzer</td>
 <td>Hewlett Packard</td>
 <td>4155A</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Optical Chopper</td>
 <td>Thorlabs</td>
 <td>MC2000</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Lock-in Amplifier</td>
 <td>Stanford Research Systems</td>
 <td>SR830</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Electrooptic Modulator</td>
 <td>Thorlabs</td>
 <td>EO-AM-NR-C2</td>
 <td>&nbsp;</td>
 </tr>
 <tr>
 <td>Motorized Linear Stage</td>
 <td>Thorlabs</td>
 <td>NRT100</td>
 <td>&nbsp;</td>
 </tr>
 </tbody>
</table>

design, fabrication, and experimental characterization of plasmonic photoconductive terahertz emitters

이 비디오 문서에서 우리는 테라 헤르츠 파를 생성하기위한 매우 효율적인 방법에 대한 자세한 논증을 제시한다. 우리의 기술은 테라 헤르츠 발생 1-8에 가장 일반적으로 사용되는 기술 중 하나가되었습니다 photoconduction을 기반으로하고 있습니다. 광전 터의 테라 헤르츠 세대 펄스 또는 heterodyned 레이저 조명 초고속 컨덕터를 펌핑에 의해 달성된다. 펌프 레이저의 봉투를 다음에 의한 광전류는, 테라 헤르츠 방사선을 생성하는 현상기 접촉 전극에 연결되어 테라 헤르츠 방사 안테나로 라우팅됩니다. 광전 터의 양자 효율은 이론적으로 100 %에 도달 할 수 있지만, 기존 컨덕터의 접촉 전극에 사진 생성 된 캐리어의 비교적 긴 전송 경로 길이는 심각하게 자신의 양자 효율을 제한했다. 또한, 캐리어 심사 효과 및 열 분해 엄격히 최대 출력 P를 제한타워를 기존의 광전 테라 헤르츠 소스. 기존의 광전 테라 헤르츠 방출의 양자 효율의 한계를 해결하기 위해, 우리는 동시에 높은 양자 효율과 초고속 동작을 제공하는 플라즈몬 접촉 전극 구성을 통합하는 새로운 광전 에미 터 개념을 개발했습니다. 나노 스케일 플라즈몬 접촉 전극을 사용하여, 우리는 크게 기존의 포토 컨덕터의 10에 비해 현상기 접촉 전극 평균 사진 생성 된 캐리어 전송 경로를 줄일 수 있습니다. 우리의 방법은 높은 광학 펌프 파워의 캐리어 검진 효과와 열 파괴를 방지하여 최대 테라 헤르츠 방사선 힘을 증폭 안테나 용량 성 부하에 상당한 증가없이 증가 컨덕터 활성 영역을 허용합니다. 통합 플라즈몬 접촉 전극으로, 우리는 기존의 광전 테의 광학 - 투 - 테라 헤르츠 전력 변환 효율을 향상을 보여주는50 10의 요인에 의해 rahertz 이미 터.

전극을 접촉하는 캐리어 전송 시간을 줄이기 위해 플라즈몬 접촉 전극을 통합하는 기존의 (그림 1a)와 플라즈몬 (그림 1b) 광전 이미 터 : 테라 헤르츠 파워 향상을위한 플라즈몬 전극의 잠재력을 입증하기 위해, 우리는 2 테라 헤르츠 이미 터를 제작. 두 디자인은 같은 LT-갈륨 비소 기판 상에 제작 된 각각 100 μM, 30 μM, 최대 및 최소 폭이 60 μm의 긴 보우 안테나에 연결된 양?...

Watch this Scientific Journal Video about Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters at JoVE.com

Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters

우리는 디자인, 제조, 종래의 광전 에미 터에 비해 크기 높은 테라 헤르츠 파워 레벨의 두 가지 명령을 제공 플라즈몬 광전 방출의 실험 특성화하는 방법을 설명합니다.

Plasmonic의 광전 테라 헤르츠 터의 설계, 제작 및 실험 특성

In this video article we present a detailed demonstration of a highly efficient method for generating terahertz waves. Our technique is based on ...

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Unit 1

System Protection

SCIENTISTS IN ACTION

14.8K 조회수.  University of Michigan. 우리는 디자인, 제조, 종래의 광전 에미 터에 비해 크기 높은 테라 헤르츠 파워 레벨의 두 가지 명령을 제공 플라즈몬 광전 방출의 실험 특성화하는 방법을 설명합니다.

비디오: Design, Fabrication, and Experimental Characterization of Plasmonic Photoconductive Terahertz Emitters

Terahertz Microfluidic Sensing Using a Parallel-plate Waveguide Sensor

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic samples with a wide range of possible sensor designs such as interferometers and resonators 1,2. Most of the existing RI sensing applications focus on biological materials in aqueous solutions in visible and IR frequencies, such as DNA hybridization and genome sequencing. At terahertz frequencies, applications include quality control, monitoring of industrial processes and sensing and detection applications involving nonpolar materials.
Several potential designs for refractive index sensors in the terahertz regime exist, including photonic crystal waveguides 3, asymmetric split-ring resonators 4, and photonic band gap structures integrated into parallel-plate waveguides 5. Many of these designs are based on optical resonators such as rings or cavities. The resonant frequencies of these structures are dependent on the refractive index of the material in or around the resonator. By monitoring the shifts in resonant frequency the refractive index of a sample can be accurately measured and this in turn can be used to identify a material, monitor contamination or dilution, etc.
The sensor design we use here is based on a simple parallel-plate waveguide 6,7. A rectangular groove machined into one face acts as a resonant cavity (Figures 1 and 2). When terahertz radiation is coupled into the waveguide and propagates in the lowest-order transverse-electric (TE1) mode, the result is a single strong resonant feature with a tunable resonant frequency that is dependent on the geometry of the groove 6,8. This groove can be filled with nonpolar liquid microfluidic samples which cause a shift in the observed resonant frequency that depends on the amount of liquid in the groove and its refractive index 9.
Our technique has an advantage over other terahertz techniques in its simplicity, both in fabrication and implementation, since the procedure can be accomplished with standard laboratory equipment without the need for a clean room or any special fabrication or experimental techniques. It can also be easily expanded to multichannel operation by the incorporation of multiple grooves 10. In this video we will describe our complete experimental procedure, from the design of the sensor to the data analysis and determination of the sample refractive index.

The procedure for implementing a refractive index sensor for terahertz frequencies based on a grooved parallel-plate waveguide geometry is described here. The method yields a measurement of the refractive index of a small volume of liquid through monitoring of the shift in the resonant frequency of the waveguide structure

병렬 판 도파관 센서를 사용하여 Terahertz 마이크로 감지

Refractive index (RI) sensing is a powerful noninvasive and label-free sensing technique for the identification, detection and monitoring of microfluidic ...

연구

공학

Simulation, Fabrication and Characterization of THz Metamaterial Absorbers

Metamaterials (MM), artificial materials engineered to have properties that may not be found in nature, have been widely explored since the first theoretical1 and experimental demonstration2 of their unique properties. MMs can provide a highly controllable electromagnetic response, and to date have been demonstrated in every technologically relevant spectral range including the optical3, near IR4, mid IR5 , THz6 , mm-wave7 , microwave8 and radio9 bands. Applications include perfect lenses10, sensors11, telecommunications12, invisibility cloaks13 and filters14,15. We have recently developed single band16, dual band17 and broadband18 THz metamaterial absorber devices capable of greater than 80% absorption at the resonance peak. The concept of a MM absorber is especially important at THz frequencies where it is difficult to find strong frequency selective THz absorbers19. In our MM absorber the THz radiation is absorbed in a thickness of ~ &lambda;/20, overcoming the thickness limitation of traditional quarter wavelength absorbers. MM absorbers naturally lend themselves to THz detection applications, such as thermal sensors, and if integrated with suitable THz sources (e.g. QCLs), could lead to compact, highly sensitive, low cost, real time THz imaging systems.

This protocol outlines the simulation, fabrication and characterization of THz metamaterial absorbers. Such absorbers, when coupled with an appropriate sensor, have applications in THz imaging and spectroscopy.

THz Metamaterial Absorbers 시뮬레이션, 제조 및 특성

Metamaterials (MM),  artificial materials engineered to have properties that may not be found in  nature, have been widely explored since the first ...

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view and for its considerable potential for practical applications. Slow light photonic crystal waveguides, in particular, have played a major part and have been successfully employed for delaying optical signals1-4 and the enhancement of both linear5-7 and nonlinear devices.8-11
Photonic crystal cavities achieve similar effects to that of slow light waveguides, but over a reduced band-width. These cavities offer high Q-factor/volume ratio, for the realization of optically12 and electrically13 pumped ultra-low threshold lasers and the enhancement of nonlinear effects.14-16 Furthermore, passive filters17 and modulators18-19 have been demonstrated, exhibiting ultra-narrow line-width, high free-spectral range and record values of low energy consumption.
To attain these exciting results, a robust repeatable fabrication protocol must be developed. In this paper we take an in-depth look at our fabrication protocol which employs electron-beam lithography for the definition of photonic crystal patterns and uses wet and dry etching techniques. Our optimised fabrication recipe results in photonic crystals that do not suffer from vertical asymmetry and exhibit very good edge-wall roughness. We discuss the results of varying the etching parameters and the detrimental effects that they can have on a device, leading to a diagnostic route that can be taken to identify and eliminate similar issues.
The key to evaluating slow light waveguides is the passive characterization of transmission and group index spectra. Various methods have been reported, most notably resolving the Fabry-Perot fringes of the transmission spectrum20-21 and interferometric techniques.22-25 Here, we describe a direct, broadband measurement technique combining spectral interferometry with Fourier transform analysis.26 Our method stands out for its simplicity and power, as we can characterise a bare photonic crystal with access waveguides, without need for on-chip interference components, and the setup only consists of a Mach-Zehnder interferometer, with no need for moving parts and delay scans.
When characterising photonic crystal cavities, techniques involving internal sources21 or external waveguides directly coupled to the cavity27 impact on the performance of the cavity itself, thereby distorting the measurement. Here, we describe a novel and non-intrusive technique that makes use of a cross-polarised probe beam and is known as resonant scattering (RS), where the probe is coupled out-of plane into the cavity through an objective. The technique was first demonstrated by McCutcheon et al.28 and further developed by Galli et al.29

Use of photonic crystal slow light waveguides and cavities has been widely adopted by the photonics community in many differing applications. Therefore fabrication and characterization of these devices are of great interest. This paper outlines our fabrication technique and two optical characterization methods, namely: interferometric (waveguides) and resonant scattering (cavities).

광자 크리스탈 느린 경 Waveguides 그리고 안의 공간의 제조 및 특성

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view ...

Fabrication and Characterization of Disordered Polymer Optical Fibers for Transverse Anderson Localization of Light

We develop and characterize a disordered polymer optical fiber that uses transverse Anderson localization as a novel waveguiding mechanism. The developed polymer optical fiber is composed of 80,000 strands of poly (methyl methacrylate) (PMMA) and polystyrene (PS) that are randomly mixed and drawn into a square cross section optical fiber with a side width of 250 &mu;m. Initially, each strand is 200 &mu;m in diameter and 8-inches long. During the mixing process of the original fiber strands, the fibers cross over each other; however, a large draw ratio guarantees that the refractive index profile is invariant along the length of the fiber for several tens of centimeters. The large refractive index difference of 0.1 between the disordered sites results in a small localized beam radius that is comparable to the beam radius of conventional optical fibers. The input light is launched from a standard single mode optical fiber using the butt-coupling method and the near-field output beam from the disordered fiber is imaged using a 40X objective and a CCD camera. The output beam diameter agrees well with the expected results from the numerical simulations. The disordered optical fiber presented in this work is the first device-level implementation of 2D Anderson localization, and can potentially be used for image transport and short-haul optical communication systems.

We develop and characterize a disordered polymer optical fiber that uses transverse Anderson localization as a novel waveguiding mechanism. This microstructured fiber can transport a small localized beam with a radius that is comparable to the beam radius of conventional optical fibers.

빛의 통과 앤더슨 현지화 무질서 폴리머 광섬유의 제조 및 특성

We develop and characterize a disordered polymer optical fiber that uses transverse Anderson localization as a novel waveguiding mechanism. The developed ...

Patterning via Optical Saturable Transitions - Fabrication and Characterization

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical Saturable Transitions (POST). In this technique the chemical properties of organic photochromic molecules that undergo single-photon reactions are exploited, enabling rapid top-down nanopatterning over large areas at low light intensities, thereby, allowing for the circumvention of the far-field diffraction barrier.4 Simple, cost-effective, high throughput and resolution alternatives to nanopatterning are being explored, such as, two-photon polymerization5,6, beam pen lithography (BPL)7, scanning electron beam lithography (SEBL), and focused ion beam (FIB) patterning. However, multi-photon approaches require high light intensities, which limit their potential for high throughput and offer low image contrast. Although, electron and ion beam lithographic processes offer increased resolution, the serial nature of the process is limited to slow writing speeds, which also prevents patterning of features over large areas. Beam-pen lithography is an approach towards parallel near-field optical lithography. However, the gap between the source of the beam and the surface of the photoresist needs to be controlled extremely precisely for good pattern uniformity and this is very challenging to accomplish for large arrays of beams. Patterning via Optical Saturable Transitions (POST) is an alternative optical nanopatterning technique for patterning sub-wavelength features1-3. Since this technique uses single photons instead of electrons, it is extremely fast and does not require high light intensities1-3, opening the door to massive parallelization.

We report that the diffraction limit of conventional optical lithography can be overcome by exploiting the transitions of organic photochromic derivatives induced by their photoisomerization at low light intensities.1-3 This paper outlines our fabrication technique and two locking mechanisms, namely: dissolution of one photoisomer and electrochemical oxidation.

광학 가포 전환을 통해 패터닝 - 제조 및 특성

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical ...

Printing Fabrication of Bulk Heterojunction Solar Cells and In Situ Morphology Characterization

Polymer-based materials hold promise as low-cost, flexible efficient photovoltaic devices. Most laboratory efforts to achieve high performance devices have used devices prepared by spin coating, a process that is not amenable to large-scale fabrication. This mismatch in device fabrication makes it difficult to translate quantitative results obtained in the laboratory to the commercial level, making optimization difficult. Using a mini-slot die coater, this mismatch can be resolved by translating the commercial process to the laboratory and characterizing the structure formation in the active layer of the device in real time and in situ as films are coated onto a substrate. The evolution of the morphology was characterized under different conditions, allowing us to propose a mechanism by which the structures form and grow. This mini-slot die coater offers a simple, convenient, material efficient route by which the morphology in the active layer can be optimized under industrially relevant conditions. The goal of this protocol is to show experimental details of how a solar cell device is fabricated using a mini-slot die coater and technical details of running in situ structure characterization using the mini-slot die coater.

Printing Fabrication of Bulk Heterojunction Solar Cells and In Situ Morphology Characterization

Here, we present a protocol to fabricate organic thin film solar cells using a mini-slot die coater and related in-line structure characterizations using synchrotron scattering techniques.

벌크 이종 접합 태양 전지의 인쇄 제작 및<em&gt; 현장에서</em&gt; 형태학 특성

Polymer-based materials hold promise as low-cost, flexible efficient photovoltaic devices. Most laboratory efforts to achieve high performance devices ...

Free-form Light Actuators &#8212; Fabrication and Control of Actuation in Microscopic Scale

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted researchers&#39; attention in many fields. Most of the studies focused on macroscopic LCE structures (films, fibers) and their miniaturization is still in its infancy. Recently developed lithography techniques, e.g., mask exposure and replica molding, only allow for creating 2D structures on LCE thin films. Direct laser writing (DLW) opens access to truly 3D fabrication in the microscopic scale. However, controlling the actuation topology and dynamics at the same length scale remains a challenge.
In this paper we report on a method to control the liquid crystal (LC) molecular alignment in the LCE microstructures of arbitrary three-dimensional shape. This was made possible by a combination of direct laser writing for both the LCE structures as well as for micrograting patterns inducing local LC alignment. Several types of grating patterns were used to introduce different LC alignments, which can be subsequently patterned into the LCE structures. This protocol allows one to obtain LCE microstructures with engineered alignments able to perform multiple opto-mechanical actuation, thus being capable of multiple functionalities. Applications can be foreseen in the fields of tunable photonics, micro-robotics, lab-on-chip technology and others.

Here, we fabricate 3D polymeric micro/nano structures in which both the shape and the molecular alignment can be engineered with nanometer scale accuracy by the use of direct laser writing. Light induced deformation of several types of liquid crystalline elastomer microstructures can be controlled in the microscopic scale.

자유 형식 등 엑츄에이터 - 현미경 규모의 제조 및 개폐 제어

Liquid crystalline elastomers (LCEs) are smart materials capable of reversible shape-change in response to external stimuli, and have attracted ...

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

초전도 공진기의 제조 및 특성

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Fabrication of Nanopillar-Based Split Ring Resonators for Displacement Current Mediated Resonances in Terahertz Metamaterials

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR is not affected by environmental characteristics such as the temperature and pressure surrounding the resonator. Electromagnetic radiation in THz frequencies is biocompatible, which is a critical condition especially for the application of the biomolecular sensing. However, the quality factor (Q-factor) and frequency responses of traditional thin-film based split ring resonator (SRR) MMs are very low, which limits their sensitivities and selectivity as sensors. In this work, novel nanopillar-based SRR MMs, utilizing displacement current, are designed to enhance the Q-factor up to 450, which is around 45 times higher than that of traditional thin-film-based MMs. In addition to the enhanced Q-factor, the nanopillar-based MMs induce a larger frequency shifts (17 times compared to the shift obtained by the traditional thin-film based MMs). Because of the significantly enhanced Q-factors and frequency shifts as well as the property of biocompatible radiation, the THz nanopillar-based SRR are ideal MMs for the development of biomolecular sensors with high sensitivity and selectivity without inducing damage or distortion to biomaterials. A novel fabrication process has been demonstrated to build the nanopillar-based SRRs for displacement current mediated THz MMs. A two-step gold (Au) electroplating process and an atomic layer deposition (ALD) process are used to create sub-10 nm scale gaps between Au nanopillars. Since the ALD process is a conformal coating process, a uniform aluminum oxide (Al2O3) layer with nanometer-scale thickness can be achieved. By sequentially electroplating another Au thin film to fill the spaces between Al2O3 and Au, a close-packed Au-Al2O3-Au structure with nano-scale Al2O3 gaps can be fabricated. The size of the nano-gaps can be well defined by precisely controlling the deposition cycles of the ALD process, which has an accuracy of 0.1 nm.

A protocol for the design and fabrication of a novel nanopillar-based split ring resonator (SRR) is presented.

테라 헤르츠 메타 물질의 변위 현재 중재 공명은을위한 나노 기둥 기반 분할 링 공진기의 제작

Terahertz (THz) split ring resonator (SRR) metamaterials (MMs) has been studied for gas, chemical, and biomolecular sensing applications because the SRR ...

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques to create an application-based microelectromechanical systems (MEMS) filter and how to use it efficiently (i.e., tuning the tuning-capability and avoiding both failure and stiction). LDV enables crucial measurements that are impossible with the network analyzer, such as higher mode detection (highly sensitive biosensor application) and resonance measurement for very small devices (fast prototyping). Accordingly, LDV was used to characterize the frequency tuning range and resonance frequency at different modes of the MEMS filters built for this study. This wide range frequency tuning mechanism is based simply on Joule heating from the embedded heaters and relatively high thermal stress with respect to the temperature of a fixed-fixed beam. However, we demonstrate that another limitation of this method is the resulting high thermal stress, which can burn the devices. Further improvement was achieved and shown for the first time in this study, such that the tuning capability was increased by 32% through an increase in the applied DC bias voltage (25 V to 35 V) between the two adjacent beams. This important finding eliminates the need for the extra Joule heating at the wider frequency tuning range. Another possible failure is through stiction and requirement of structure optimization: We propose a simple and easy technique of low frequency square wave signal application that can successfully separate the beams and eliminates the need for the more sophisticated and complicated methods given in the literature. The above findings necessitate a design methodology, and so we also provide an application-based design.

A protocol for a fixed-fixed beam design using a laser Doppler vibrometer (LDV), including the measurement of frequency tuning, modification of tuning capability, and avoidance of device failure and stiction, is presented. The superiority of the LDV method over the network analyzer is demonstrated due to its higher mode capability.

설계 및 효율적인 넓은 범위 가변 MEMS 필터 특성 방법론

Here, we demonstrate the advantages of the laser Doppler vibrometer (LDV) over conventional techniques (the network analyzer), as well as the techniques ...