This work was funded by Startup funding from the University of Illinois at Urbana-Champaign, DARPA ORCHID program through a grant from AFOSR, the National Science Foundation through grant CMMI-1265164, and the National Science Foundation Graduate Research Fellowship program. We acknowledge enlightening discussions with Prof. Jack Harris, Prof. Pierre Meystre, Dr. Matt Eichenfield, Prof. Taher Saif, and Prof. Rashid Bashir.

1，制作超高Q值微流控谐振器的<ol><li>毛细血管制造安装准备<ol><li>制造微流体光学机械谐振器以如下方式-加热的玻璃毛细管预制棒具有约10的CO 2激光辐射W在10.6微米波长，并抽出加热的毛细管使用线性电动平移台图1示出的线性平移的布置阶段，激光器，以及毛细管预制棒拉过程之前的位置。 </li><li>方案适合自动化软件同时控制2个CO 2激光器（加热）和两个线性阶段。两个线性阶段进行冲压工艺，激光加热毛细管。 </li><li>一个线性阶段必须为线性拉拔过程要快（ 例如 5毫米/秒）。在更多的材料喂到加热区与第二，慢线性阶段（ 例如，达到0.5mm /秒）由于毛细管预制件材料被在提拉过程耗尽。 </li><li>对齐上沿垂直和水平轴的直线运动平台的样品架。 </li><li>小心地将两者的CO 2激光束，使得他们的目标（之间的样本持有人）的相同点空间。一块卡片纸或热敏纸是这个过程是有用的。不要忘了使用保护眼睛的激光安全。不要降低眼表的水平。使用合适的光模块，排烟和防火。 </li><li>选择用于拉丝工艺参数合理。例如，下面的参数可靠地产生良好的毛细管尺寸 - 10毫米/秒的拉伸速度为0.5mm /秒的进给速度，3秒的预热时间，4.5 W预热两个激光器功率和5瓦的加热功率为激光器。 </li><li>激光功率的过程中拉动调制可用于在绘图过程中亲纵向控制毛细管半径塞斯，形成了"瓶"谐振器。一个例子示于图2d中 。选择合适的调制参数:3赫兹频率，6周和3周对激光功率，并且占空比为50％。 </li></ol></li><li>微流控光学机械谐振器的​​制造<ol><li>切有足够长的石英毛细管，使得它可以达到附着到线性平移阶段的两个夹持器的段（大约2-4厘米）。 </li><li>装入毛细管样品上的样品架，使得激光目标区大约是在毛细管的中间。如果需要调整的CO 2激光准直。 </li><li>使用该参数在1.1.6所列拉毛细管。第一预热毛细管几秒钟（ 图2a），然后根据需要有或没有激光调制（在1.1.7参数）拉出。 </li><li>从样品架取下吸入毛细管（ 图2b）。带手套处理样品在两个仅厚结束后，为了不污染干净的谐振器表面。 </li><li>改变拉动参数制作与毛细血管直径不同。通常外径变化从30到200微米取决于牵引条件。 </li></ol></li><li>安装制造设备进行测试<ol><li>准备一个E形玻璃夹（ 图2c）。切三组1厘米×0.5厘米至1台3厘米×0.5厘米玻璃碎片从载玻片上。将它们组装成用玻璃胶或强力胶一个E形。 </li><li>微流体切毛细管的长度出来的样本绘制的。这个长度应该比在E形支架两个相邻的玻璃分支机构之间的距离更长。 </li><li>胶微细管设备上使用光学胶，同时确保保持部分对E形支架的两个分支之间挂未被污染的持有人。固化光学胶采用了LED UV固化光源，持续10秒。 图2c和2d示出成品。 </li><li>小心地插入安装谐振器的两端为两个略大的塑 ​​料管（ 例如 200微米的内径）。胶和紫外线固化两端的塑料管与光学粘合剂。 </li><li>从第三（免费）玻璃枝钳在E形结构，以用于测试的夹紧固定装置。最后的微谐振器的光学质量的因素取决于其功率水平如何以及制造激光器进行比对，以及如何稳定者。 </li></ol></li></ol> 2，对于光机检测实验装置<ol><li>锥形光纤的制造<ol><li>准备所需长度（ 例如几英尺）的单模电信波段光纤。纤维段应足够长，既安装在所述锥形区域和连接到所述装置（ 图4）。逐渐变细的方法，这里介绍的是类似什么是Suggested并展示了在22。 </li><li>所制备的纤维片段连接到实验装置使用任何方便的光纤接续方法的其余部分。 </li><li>安装拼接光纤段上彼此面对的两个线性车夫。 </li><li>剥离光纤护套中所安装的光纤片段的中心以露出包层区域。这是锥度将制成。清洁用甲醇汽提区。 </li><li>打开的可调谐激光器，看看在示波器上的实时传输。请一定要设置衰减器，使探测器不被损坏。 </li><li>将一个窄喷嘴氢气燃烧器立即下方纤维的unjacketed部。加压易燃气体，如氢气时，请遵守所有建议的安全程序。火焰或陶瓷加热器其他"清洁燃烧"的来源也可以使用。 </li><li>之前，照亮了气，检查流速，使火焰不会太大（1-2厘米高的火焰是足够的）。需要注意的是火焰大多是无形的，但可能会被看作是一个微弱的橙色光芒在黑暗的房间。氢气流速应设置为一个点，点燃火焰，会充分软化的玻璃纤维。 </li><li>点燃了火焰。一旦火焰上，开始使用机动阶段拉纤。合适的拉伸速度取决于氢气的流量和火焰的附近。注:通过光纤传输将开始显示时间的振荡行为，拉动还在继续。这表明多模式操作。 </li><li>当振荡行为停止，并显示一个不变的信号，随着时间的推移，停止拉动和关断的火焰立刻。这是获得单模锥度时。检查变速器。如果传输是太低了，从2.1.1重复该过程。与改性气体流量，火焰的大小，和火焰的位置。有时，低传输可能是由于在步骤2.1.3不良对齐。或由于铅污染离子暴露的包层。 </li><li>如果通过锥度产生的发送是令人满意的，等待几分钟以冷却锥度。 </li><li>检查在显微镜下的锥形。对于1550纳米的操作波长，单模锥形的典型直径在1-2微米的顺序。 </li></ol></li><li>锥耦合到改革工作组和搜索电子信号指示的振动<ol><li>设置实验中， 如图3所示的结构。机械振动可以通过两者的SBS和RP通过相同的实验配置来生成。为了清楚地探测背散射信号，在向后SBS 4,21的情况下，使用锥形和可调谐激光器之间的循环。 </li><li>在打开的可调谐红外激光，请务必使光电探测器不被损坏的地方设置衰减器。 </li><li>打开和稳定的可调谐红外激光。函数发生器是用来扫红外输入的频率激光。 </li><li>安装谐振器支架上的纳米定位阶段。小心地使谐振器靠近锥形光纤，以获得倏逝波耦合。作为激光频率扫描，光学谐振会出现骤降在传输中的示波器，如在22的图2b。 </li><li>光电检测器的输出连接到电源频谱分析仪（ESA），其中输入激光光和散射光之间的时间干扰（ 即差拍）可以观察到。发生在机械振荡频率这个时间的干扰。频谱分析仪上的"峰值保持"功能是非常有用的机械振动的初始搜索。 </li><li>使用更高的输入功率，而执行对机械振动的初始搜索，尤其是当液体存在设备内部。注意:通常情况下，在100μW的给设备的命令的输入功率是足以激发mechaniCal的震动。 </li><li>如果机械振荡观察，试图通过关闭激光频率扫描和控制在CW模式中的激光的波长锁定到相关的光学模式。在这里，无论示波器和频谱分析仪是在串联有用。周期信号在示波器上显示时的机械模式存在时，如在图5和1,6所示。 </li></ol></li></ol> 3，测量光机械振动<ol><li>辐射压力（RP）模式的光学和电子签名<ol><li>如2.2所述，机械振荡将观察时的锥度和设备已正确耦合，该装置的光学和机械模式具有足够的Q-因子和足够的输入光功率被设置。如果在10 MHz范围内振荡 - 1 GHz的不遵守，试图改变极化，研究了不同共振，或从可调谐激光器提高输入功率以克服了最小阈值振荡。当增加输入功率，时时小心不饱和的光电探测器。此外，如在8描述的，耦合距离是用于激励不同的反相模式的一个关键因素。 </li><li>如果机械模式仍然没有观察到，尝试测量光学质量的因素。用于微流控光学机械谐振器，结果表明，10 6的光学质量的因素是足以激发参数振荡13。 注意:通常，反相模式将表现为电子的振荡频谱分析仪上伴随着它们的谐波， 如图5所示，代表性的结果将在第4节中讨论。 </li><li>使用扫描法布里 - 珀罗干涉仪或高分辨率光学频谱分析仪来检测所产生由于幅度和相位调制，而这又是诱导空腔周期性形变的光学侧带。一个例子测量可能是SEEN中的1 图3小时 。 </li></ol></li><li>的回音壁声学模式的光学和电子签名<ol><li>向后的SBS对石英玻璃中的声波频率约为11千兆赫时，1.5微米的泵浦激光器用于4,23。使用一个环行器，它监视的背散射光与一些少量的瑞利散射泵，观察电子信号，这些振动模式。使用高分辨率光学频谱分析仪来解决的散射光。一个例子的测量中示出的4 如图2所示 。 </li><li>用跳动的音符前向散射光与泵浦激光之间的观察频率较低（低于1 GHz）回音壁声学模式。 </li><li>由于较低的机械刚性的呼吸方向，从SBS的信号有时比从RP模式的信号弱。再次，扫激光慢速，并使用"峰值保持"上的SPECT朗姆酒分析仪在寻找SBS的信号帮助。 </li><li>请注意，与RP-兴奋呼吸模式，SBS激回音壁声学模式不具有在光学和电子光谱的谐波（除非级联激发发生4,24）。而不是只有一个斯托克斯边带出现的SBS模式。 </li></ol></li></ol>

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We have nothing to disclose.

我们已经制作并测试通过采用高Q值的光学共振激发（和查询）机械振动腔光学机械和微流体之间的桥梁的新设备。令人惊讶的是多重激励机制，可在同样的设备，它有多种生成速率跨越2 MHz至11,300 MHz的机械振动模式。离心式辐射压力支持酒杯模式和呼吸模式在2-200 MHz跨度，正向受激布里渊散射允许在50-1,500 MHz范围内的机械回音壁模式，最后，落后的受激布里渊散射激发机械回音壁模式近11,000 MHz?...

腔光学机械研究声子模式和光子模式之间的微谐振器的辐射压力（RP）1-3手段的参数耦合和受激布里渊散射（SBS）4-6。 SBS和RP的机制已被证实在许多不同的光学系统中，如纤维7，微球4,6,8，磁环1,9和结晶谐振器5,10。通过这个光子-声子耦合，既冷却11和机械模的激发6,10已被证实。然而，几乎所有报告的光学机械实验与物质的固相。这是因为，光机械设备的结果大大增加了辐射声损耗，因为液体的高阻抗的直接液浸比较针对气。另外，在某些情况下，在液体中的耗散损失的机制可能会超出辐射声损耗。 Řecently，具有微细几何形状的新型中空光机械振荡器被引入12-15，并且其由设计配备用于微流体实验。该毛细管的直径沿其长度的调制，以形成多个"瓶谐振器"，能同时局限于光学回音壁共振16以及机械谐振模式17。机械共振模式的多个家庭参加，包括呼吸模式，酒杯模式和回音壁声学模式。酒玻璃（驻波）和回音壁声学（行波）时，与声波长的整数倍时的振动发生装置圆周共振形成的。光渐逝耦合到这些&#39;瓶子&#39;由锥形光纤18的方式的光学回音壁模式。禁闭里面19,20毛细管谐振器中的液体，如相对于外面，使高机械和光学质量的因素同时，它允许机械模式的光​​激发双方的RP和SBS的手段。如已经显示出，这些机械激励能够渗透入流体的装置12,13内，形成了一个共享固液共振模式，从而使光电机械接口内的流体环境。 在本文中，我们描述了制造，RP和SBS的驱动，和有代表性的测量结果这种新颖的光学机械系统。还提供特定的材料和工具清单。

<table border="0" cellpadding="0" cellspacing="0" style="width:647px;" width="647">
	<tbody>
		<tr>
			<td>Tunable IR laser</td>
			<td>Newfocus</td>
			<td>TLB-6328</td>
			<td></td>
		</tr>
		<tr>
			<td>Photodetectors</td>
			<td>Newfocus</td>
			<td>1811-FC (Low speed 125MHz) / 1611-FC-AC (High speed 1GHz)</td>
			<td></td>
		</tr>
		<tr>
			<td>Optical fiber</td>
			<td>Corning</td>
			<td>SMF28</td>
			<td></td>
		</tr>
		<tr>
			<td>Silica capillary</td>
			<td>PolyMicro</td>
			<td>TSP700850</td>
			<td></td>
		</tr>
		<tr>
			<td>10.6 um wavelength CO2 laser</td>
			<td>Synrad</td>
			<td>48-1KWM and 48-2KWM</td>
			<td></td>
		</tr>
		<tr>
			<td>UV-curing optical adhesive</td>
			<td>Thorlabs</td>
			<td>NOA81</td>
			<td></td>
		</tr>
		<tr>
			<td>Tubing</td>
			<td>Tygon</td>
			<td>EW-06418-01</td>
			<td></td>
		</tr>
		<tr>
			<td>Syringes</td>
			<td>B-D</td>
			<td>YO-07940-12</td>
			<td></td>
		</tr>
		<tr>
			<td>Needles</td>
			<td>Weller</td>
			<td>KDS201P</td>
			<td></td>
		</tr>
		<tr>
			<td>Electrical spectrum analyzer</td>
			<td>Agilent Technologies</td>
			<td>N9010A (EXA Signal Analyzer)</td>
			<td></td>
		</tr>
		<tr>
		</tr>
		<tr>
			<td>Tektronix</td>
			<td>6114A (RSA, Real-time spectrum analyzer)</td>
			<td></td>
		</tr>
		<tr>
			<td>Optical spectrum analyzer</td>
			<td>Advantest</td>
			<td>Q8384</td>
			<td></td>
		</tr>
		<tr>
			<td>Oscilloscope</td>
			<td>Tektronix</td>
			<td>DPO 4104B-L</td>
			<td></td>
		</tr>
		<tr>
			<td>Gold mirrors</td>
			<td>II-VI Infrared</td>
			<td>836627</td>
			<td></td>
		</tr>
		<tr>
			<td>Linear stage (slow)</td>
			<td>DryLin</td>
			<td>H1W1150</td>
			<td></td>
		</tr>
		<tr>
			<td>Linear stage (fast)</td>
			<td>PBC Linear</td>
			<td>MTB055D-0902-14F12</td>
			<td></td>
		</tr>
		<tr>
			<td>Fabry Perot optical spectrum analyser</td>
			<td>Thorlabs</td>
			<td>SA 200-14A (FSR: 1.5 GHz)</td>
			<td></td>
		</tr>
	</tbody>
</table>

fabrication and testing of microfluidic optomechanical oscillators

腔光学​​机械的参夫妇的声子模式和光子方式已在各种光学系统包括微谐振器的实验研究。因为在光机械设备的直接液浸的增加声辐射损失然而，几乎所有出版的光学机械实验在固相被执行。本文讨论了一种新近推出的空心微流控光学机械谐振器。详细方法是提供给制造这些超高Q值微谐振器，光学机械进行测试，并测量辐射压驱动的呼吸模式和SBS驱动的回音壁模式的参数振动。通过限制毛细管谐振器内的液体，高的机械和光学质量的因素，同时维持。

用这种方法生产的毛细管是薄（30微米和200微米之间），清楚，并且非常灵活，但足够坚固，可直接处理。它以防止灰尘和水（湿气）的毛细管装置的外表面，以保持高光学品质因数（Q）是重要的。通过浸渍在水中的毛细管的一端，并通过毛细管由注射器装置吹入空气，它可以验证所述毛细管是否通过或在制造过程中是否被封锁了由于过热。 可调谐激光器可用于通过锥形光?...

Watch this Scientific Journal Video about Fabrication and Testing of Microfluidic Optomechanical Oscillators at JoVE.com

Fabrication and Testing of Microfluidic Optomechanical Oscillators

Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations.

制造和微流控光机振荡器测试

Cavity optomechanics experiments that parametrically couple the phonon modes and photon modes have been investigated in various optical systems including ...

fabrication-and-testing-of-microfluidic-optomechanical-oscillators

Research

Education

JoVE Journal

JoVE Core

Physics

Engineering

Unit 1

Oscillations

SCIENTISTS IN ACTION

12.1K 次观看.  University of Illinois at Urbana-Champaign. Parametric optomechanical excitations have recently been experimentally demonstrated in microfluidic optomechanical resonators by means of optical radiation pressure and stimulated Brillouin scattering. This paper describes the fabrication of these microfluidic resonators along with methodologies for generating and verifying optomechanical oscillations. 

视频: Fabrication and Testing of Microfluidic Optomechanical Oscillators

Fabrication And Characterization Of Photonic Crystal Slow Light Waveguides And Cavities

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view and for its considerable potential for practical applications. Slow light photonic crystal waveguides, in particular, have played a major part and have been successfully employed for delaying optical signals1-4 and the enhancement of both linear5-7 and nonlinear devices.8-11
Photonic crystal cavities achieve similar effects to that of slow light waveguides, but over a reduced band-width. These cavities offer high Q-factor/volume ratio, for the realization of optically12 and electrically13 pumped ultra-low threshold lasers and the enhancement of nonlinear effects.14-16 Furthermore, passive filters17 and modulators18-19 have been demonstrated, exhibiting ultra-narrow line-width, high free-spectral range and record values of low energy consumption.
To attain these exciting results, a robust repeatable fabrication protocol must be developed. In this paper we take an in-depth look at our fabrication protocol which employs electron-beam lithography for the definition of photonic crystal patterns and uses wet and dry etching techniques. Our optimised fabrication recipe results in photonic crystals that do not suffer from vertical asymmetry and exhibit very good edge-wall roughness. We discuss the results of varying the etching parameters and the detrimental effects that they can have on a device, leading to a diagnostic route that can be taken to identify and eliminate similar issues.
The key to evaluating slow light waveguides is the passive characterization of transmission and group index spectra. Various methods have been reported, most notably resolving the Fabry-Perot fringes of the transmission spectrum20-21 and interferometric techniques.22-25 Here, we describe a direct, broadband measurement technique combining spectral interferometry with Fourier transform analysis.26 Our method stands out for its simplicity and power, as we can characterise a bare photonic crystal with access waveguides, without need for on-chip interference components, and the setup only consists of a Mach-Zehnder interferometer, with no need for moving parts and delay scans.
When characterising photonic crystal cavities, techniques involving internal sources21 or external waveguides directly coupled to the cavity27 impact on the performance of the cavity itself, thereby distorting the measurement. Here, we describe a novel and non-intrusive technique that makes use of a cross-polarised probe beam and is known as resonant scattering (RS), where the probe is coupled out-of plane into the cavity through an objective. The technique was first demonstrated by McCutcheon et al.28 and further developed by Galli et al.29

Use of photonic crystal slow light waveguides and cavities has been widely adopted by the photonics community in many differing applications. Therefore fabrication and characterization of these devices are of great interest. This paper outlines our fabrication technique and two optical characterization methods, namely: interferometric (waveguides) and resonant scattering (cavities).

光子晶体慢光波导和腔体的制备与表征

Slow light has been one of the hot topics in the photonics community in the past decade, generating great interest both from a fundamental point of view ...

科研

工程学

Fabrication of VB2/Air Cells for Electrochemical Testing

A technique to investigate the properties and performance of new multi-electron metal/air battery systems is proposed and presented. A method for synthesizing nanoscopic VB2 is presented as well as step-by-step procedure for applying a zirconium oxide coating to the VB2 particles for stabilization upon discharge. The process for disassembling existing zinc/air cells is shown, in addition construction of the new working electrode to replace the conventional zinc/air cell anode with a the nanoscopic VB2 anode. Finally, discharge of the completed VB2/air battery is reported. We show that using the zinc/air cell as a test bed is useful to provide a consistent configuration to study the performance of the high-energy high capacity nanoscopic VB2 anode.

Fabrication of VB2/Air Cells for Electrochemical Testing

A protocol is presented to study multi-electron metal/air battery systems by using previous technology developed for the zinc/air cell. Electrochemical testing is then performed on fabricated batteries to evaluate performance.

VB制作<sub&gt; 2</sub&gt; /空气电池电化学测试

A technique to investigate the properties and performance of new multi-electron metal/air battery systems is proposed and presented. A method for ...

Quantum State Engineering of Light with Continuous-wave Optical Parametric Oscillators

Engineering non-classical states of the electromagnetic field is a central quest for quantum optics1,2. Beyond their fundamental significance, such states are indeed the resources for implementing various protocols, ranging from enhanced metrology to quantum communication and computing. A variety of devices can be used to generate non-classical states, such as single emitters, light-matter interfaces or non-linear systems3. We focus here on the use of a continuous-wave optical parametric oscillator3,4. This system is based on a non-linear &#967;2 crystal inserted inside an optical cavity and it is now well-known as a very efficient source of non-classical light, such as single-mode or two-mode squeezed vacuum depending on the crystal phase matching. 
Squeezed vacuum is a Gaussian state as its quadrature distributions follow a Gaussian statistics. However, it has been shown that number of protocols require non-Gaussian states5. Generating directly such states is a difficult task and would require strong &#967;3 non-linearities. Another procedure, probabilistic but heralded, consists in using a measurement-induced non-linearity via a conditional preparation technique operated on Gaussian states. Here, we detail this generation protocol for two non-Gaussian states, the single-photon state and a superposition of coherent states, using two differently phase-matched parametric oscillators as primary resources. This technique enables achievement of a high fidelity with the targeted state and generation of the state in a well-controlled spatiotemporal mode.

We describe the reliable generation of non-Gaussian states of traveling optical fields, including single-photon states and coherent state superpositions, using a conditional preparation method operated on the non-classical light emitted by optical parametric oscillators. Type-I and type-II phase-matched oscillators are considered and common procedures, such as the required frequency filtering or the high-efficiency quantum state characterization by homodyning, are detailed.

光与连续波光学参量振荡器的量子态工程

Engineering non-classical states of the electromagnetic field is a central quest for quantum optics1,2. Beyond their fundamental significance, such states ...

Patterning via Optical Saturable Transitions - Fabrication and Characterization

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical Saturable Transitions (POST). In this technique the chemical properties of organic photochromic molecules that undergo single-photon reactions are exploited, enabling rapid top-down nanopatterning over large areas at low light intensities, thereby, allowing for the circumvention of the far-field diffraction barrier.4 Simple, cost-effective, high throughput and resolution alternatives to nanopatterning are being explored, such as, two-photon polymerization5,6, beam pen lithography (BPL)7, scanning electron beam lithography (SEBL), and focused ion beam (FIB) patterning. However, multi-photon approaches require high light intensities, which limit their potential for high throughput and offer low image contrast. Although, electron and ion beam lithographic processes offer increased resolution, the serial nature of the process is limited to slow writing speeds, which also prevents patterning of features over large areas. Beam-pen lithography is an approach towards parallel near-field optical lithography. However, the gap between the source of the beam and the surface of the photoresist needs to be controlled extremely precisely for good pattern uniformity and this is very challenging to accomplish for large arrays of beams. Patterning via Optical Saturable Transitions (POST) is an alternative optical nanopatterning technique for patterning sub-wavelength features1-3. Since this technique uses single photons instead of electrons, it is extremely fast and does not require high light intensities1-3, opening the door to massive parallelization.

We report that the diffraction limit of conventional optical lithography can be overcome by exploiting the transitions of organic photochromic derivatives induced by their photoisomerization at low light intensities.1-3 This paper outlines our fabrication technique and two locking mechanisms, namely: dissolution of one photoisomer and electrochemical oxidation.

通过光学吸收跃迁图案 - 制备与表征

This protocol describes the fabrication and characterization of nanostructures using a novel nanolithographic technique called Patterning via Optical ...

Atomically Traceable Nanostructure Fabrication

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process being used in order to maintain exquisite control over both feature size and feature density. Here, we demonstrate a method for tracking atomically resolved and controlled structures from initial template definition through final nanostructure metrology, opening up a pathway for top-down atomic control over nanofabrication. Hydrogen depassivation lithography is the first step of the nanoscale fabrication process followed by selective atomic layer deposition of up to 2.8 nm of titania to make a nanoscale etch mask. Contrast with the background is shown, indicating different mechanisms for growth on the desired patterns and on the H passivated background. The patterns are then transferred into the bulk using reactive ion etching to form 20 nm tall nanostructures with linewidths down to ~6 nm. To illustrate the limitations of this process, arrays of holes and lines are fabricated. The various nanofabrication process steps are performed at disparate locations, so process integration is discussed. Related issues are discussed including using fiducial marks for finding nanostructures on a macroscopic sample and protecting the chemically reactive patterned Si(100)-H surface against degradation due to atmospheric exposure.

We report a protocol for combining the atomic metrology of the Scanning Tunneling Microscope for surface patterning with selective Atomic Layer Deposition and Reactive Ion Etching. Using a robust process involving numerous atmospheric exposures and transport, 3D nanostructures with atomic metrology are fabricated.

原子纳米结构可追溯制造

Reducing the scale of etched nanostructures below the 10 nm range eventually will require an atomic scale understanding of the entire fabrication process ...

Fabrication and Characterization of Superconducting Resonators

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors (MKIDs) for the detection of faint astrophysical signatures, as well as for quantum computing applications and materials characterization. In this paper, procedures are presented for the fabrication and characterization of thin-film superconducting microwave resonators. The fabrication methodology allows for the realization of superconducting transmission-line resonators with features on both sides of an atomically smooth single-crystal silicon dielectric. This work describes the procedure for the installation of resonator devices into a cryogenic microwave testbed and for cool-down below the superconducting transition temperature. The set-up of the cryogenic microwave testbed allows one to do careful measurements of the complex microwave transmission of these resonator devices, enabling the extraction of the properties of the superconducting lines and dielectric substrate (e.g., internal quality factors, loss and kinetic inductance fractions), which are important for device design and performance.

Superconducting microwave resonators are of interest for detection of light, quantum computing applications and materials characterization. This work presents a detailed procedure for fabrication and characterization of superconducting microwave resonator scattering parameters.

制备与表征超导谐振器的

Superconducting microwave resonators are of interest for a wide range of applications, including for their use as microwave kinetic inductance detectors ...

Solvent Bonding for Fabrication of PMMA and COP Microfluidic Devices

Thermoplastic microfluidic devices offer many advantages over those made from silicone elastomers, but bonding procedures must be developed for each thermoplastic of interest. Solvent bonding is a simple and versatile method that can be used to fabricate devices from a variety of plastics. An appropriate solvent is added between two device layers to be bonded, and heat and pressure are applied to the device to facilitate the bonding. By using an appropriate combination of solvent, plastic, heat, and pressure, the device can be sealed with a high quality bond, characterized as having high bond coverage, bond strength, optical clarity, durability over time, and low deformation or damage to microfeature geometry. We describe the procedure for bonding devices made from two popular thermoplastics, poly(methyl-methacrylate) (PMMA), and cyclo-olefin polymer (COP), as well as a variety of methods to characterize the quality of the resulting bonds, and strategies to troubleshoot low quality bonds. These methods can be used to develop new solvent bonding protocols for other plastic-solvent systems.

Solvent bonding is a simple and versatile method for fabricating thermoplastic microfluidic devices with high quality bonds. We describe a protocol to achieve strong, optically clear bonds in PMMA and COP microfluidic devices that preserve microfeature details, by a judicious combination of pressure, temperature, an appropriate solvent, and device geometry.

溶剂粘接的PMMA的制备和COP微流体装置

Thermoplastic microfluidic devices offer many advantages over those made from silicone elastomers, but bonding procedures must be developed for each ...

Subsurface Defect Localization by Structured Heating Using Laser Projected Photothermal Thermography

The presented method is used to locate subsurface defects oriented perpendicularly to the surface. To achieve this, we create destructively interfering thermal wave fields that are disturbed by the defect. This effect is measured and used to locate the defect. We form the destructively interfering wave fields by using a modified projector. The original light engine of the projector is replaced with a fiber-coupled high-power diode laser. Its beam is shaped and aligned to the projector&#39;s spatial light modulator and optimized for optimal optical throughput and homogeneous projection by first characterizing the beam profile, and, second, correcting it mechanically and numerically. A high-performance infrared (IR) camera is set up according to the tight geometrical situation (including corrections of the geometrical image distortions) and the requirement to detect weak temperature oscillations at the sample surface. Data acquisition can be performed once a synchronization between the individual thermal wave field sources, the scanning stage, and the IR camera is established by using a dedicated experimental setup which needs to be tuned to the specific material being investigated. During data post-processing, the relevant information on the presence of a defect below the surface of the sample is extracted. It is retrieved from the oscillating part of the acquired thermal radiation coming from the so-called depletion line of the sample surface. The exact location of the defect is deduced from the analysis of the spatial-temporal shape of these oscillations in a final step. The method is reference-free and very sensitive to changes within the thermal wave field. So far, the method has been tested with steel samples but is applicable to different materials as well, in particular to temperature sensitive materials.

This method aims at locating vertical subsurface defects. Here, we couple a laser with a spatial light modulator and trigger its video input to heat a sample surface deterministically with two anti-phased modulated lines while acquiring highly resolved thermal images. The defect position is retrieved from evaluating thermal wave interference minima.

使用激光投射光热法构造加热的地下缺陷定位

The presented method is used to locate subsurface defects oriented perpendicularly to the surface. To achieve this, we create destructively interfering ...

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

Solid-state electrolytes are a promising replacement for current organic liquid electrolytes, enabling higher energy densities and improved safety of lithium-ion (Li-ion) batteries. However, a number of setbacks prevent their integration into commercial devices. The main limiting factor is due to nanoscale phenomena occurring at the electrode/electrolyte interfaces, ultimately leading to degradation of battery operation. These key problems are highly challenging to observe and characterize as these batteries contain multiple buried interfaces. One approach for direct observation of interfacial phenomena in thin film batteries is through the fabrication of electrochemically active nanobatteries by a focused ion beam (FIB). As such, a reliable technique to fabricate nanobatteries was developed and demonstrated in recent work. Herein, a detailed protocol with a step-by-step process is presented to enable the reproduction of this nanobattery fabrication process. In particular, this technique was applied to a thin film battery consisting of LiCoO2/LiPON/a-Si, and has further been previously demonstrated by in situ cycling within a transmission electron microscope.

Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing

A protocol for the fabrication of electrochemically active LiPON-based solid-state lithium-ion nanobatteries using a focused ion beam is presented.

基于 LiPON 的固态锂离子 Nanobatteries 的聚焦离子束制备方法在原位测试中的研究

Solid-state electrolytes are a promising replacement for current organic liquid electrolytes, enabling higher energy densities and improved safety of ...

Scalable Stamp Printing and Fabrication of Hemiwicking Surfaces

Hemiwicking is a process where a fluid wets a patterned surface beyond its normal wetting length due to a combination of capillary action and imbibition. This wetting phenomenon is important in many technical fields ranging from physiology to aerospace engineering. Currently, several different techniques exist for fabricating hemiwicking structures. These conventional methods, however, are often time consuming and are difficult to scale-up for large areas or are difficult to customize for specific, nonhomogeneous patterning geometries. The presented protocol provides researchers with a simple, scalable, and cost-effective method for fabricating micro-patterned hemiwicking surfaces. The method fabricates wicking structures through the use of stamp printing, polydimethylsiloxane (PDMS) molding, and thin-film surface coatings. The protocol is demonstrated for hemiwicking with ethanol on PDMS micropillar arrays coated with a 70 nm thick aluminum thin-film.

A simple protocol is provided for the fabrication of hemiwicking structures of varying sizes, shapes, and materials. The protocol uses a combination of physical stamping, PDMS molding, and thin-film surface modifications via common materials deposition techniques.

可缩放邮票印刷及不堪砌面的制作

Hemiwicking is a process where a fluid wets a patterned surface beyond its normal wetting length due to a combination of capillary action and imbibition. ...