使用Quattro-Parallel 悬臂阵列的主动探针原子力显微镜，用于高通量大规模样品检测
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05:04 min
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June 13th, 2023
DOI :
June 13th, 2023
•1Mechatronics Research Lab, Department of Mechanical Engineering, Massachusetts Institute of Technology, 2Mechatronics Group, Department of Mechanical Engineering, Ilmenau University of Technology, 3Production and Precision Measurement Technology Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, 4Nanoscale Systems Group, Institute of Process Measurement and Sensor Technology, Ilmenau University of Technology, 5nano analytik GmbH
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Introduction
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Instrument Calibration, Experimental Setup, and Parameter Tuning for Semiconductor Wafer Topography Imaging with AFM
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