Name: preparation of silicon nanowire field-effect transistor for chemical and biosensing applications
Uploaded: 2016-04-21T15:00:00
Description: Watch this Scientific Journal Video about Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications at JoVE.com

This research was financially supported by Ministry of Science and Technology, Taiwan (104-2514-S-009 -001, 104-2627-M-009-001 and 102-2311-B-009-004-MY3). We thank the National Nano Device Laboratories (NDL) for its valuable assistance during device fabrication and analysis.

1. Fabrication and Preservation of pSNWFET Devices
<ol>
	<li>Device Fabrication 
	Note: The pSNWFET was fabricated using a sidewall spacer technique as previously reported23,24.
	<ol>
		<li>Prepare the gate dielectric layer.
		<ol>
			<li>Cap a 100-nm-thick thermal oxide (SiO2) layer on a Si substrate by using the wet oxidation process25 (O2 and H2 process gas at 980 &#176;C for 4 hr).</li>
			<li>Deposit a 50-nm-thick nitride (Si3N...

<ol>
	<li>Lin, C. H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Surface+composition+and+interactions+of+mobile+charges+with+immobilized+molecules+on+polycrystalline+silicon+nanowires.">Surface composition and interactions of mobile charges with immobilized molecules on polycrystalline silicon nanowires.</a> Sensor Actuat B-Chem 211. 211, 7-16 (2015).</li><li>Patolsky, F., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrical+detection+of+single+viruses.">Electrical detection of single viruses.</a> P Natl Acad Sci USA. 101, 14017-14022 (2004).</li><li>Wang, W. U., Chen, C., Lin, K. H., Fang, Y., Lieber, C. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Label-free+detection+of+small-molecule-protein+interactions+by+using+nanowire+nanosensors.">Label-free detection of small-molecule-protein interactions by using nanowire nanosensors.</a> P Natl Acad Sci USA. 102, 3208-3212 (2005).</li><li>Patolsky, F., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Detection,+stimulation,+and+inhibition+of+neuronal+signals+with+high-density+nanowire+transistor+arrays.">Detection, stimulation, and inhibition of neuronal signals with high-density nanowire transistor arrays.</a> Science. 313, 1100-1104 (2006).</li><li>Bi, X., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Development+of+electrochemical+calcium+sensors+by+using+silicon+nanowires+modified+with+phosphotyrosine.">Development of electrochemical calcium sensors by using silicon nanowires modified with phosphotyrosine.</a> Biosens Bioelectron. 23, 1442-1448 (2008).</li><li>Lin, T. W., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Label-free+detection+of+protein-protein+interactions+using+a+calmodulin-modified+nanowire+transistor.">Label-free detection of protein-protein interactions using a calmodulin-modified nanowire transistor.</a> P Natl Acad Sci USA. 107, 1047-1052 (2010).</li><li>Mishra, N. N., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultra-sensitive+detection+of+bacterial+toxin+with+silicon+nanowire+transistor.">Ultra-sensitive detection of bacterial toxin with silicon nanowire transistor.</a> Lab on a chip. 8, 868-871 (2008).</li><li>Lin, C. H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Ultrasensitive+detection+of+dopamine+using+a+polysilicon+nanowire+field-effect+transistor.">Ultrasensitive detection of dopamine using a polysilicon nanowire field-effect transistor.</a> Chem Commun. , 5749-5751 (2008).</li><li>Hahm, J., Lieber, C. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Direct+ultrasensitive+electrical+detection+of+DNA+and+DNA+sequence+variations+using+nanowire+nanosensors.">Direct ultrasensitive electrical detection of DNA and DNA sequence variations using nanowire nanosensors.</a> Nano Lett. 4, 51-54 (2004).</li><li>Lin, C. H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Poly-silicon+nanowire+field-effect+transistor+for+ultrasensitive+and+label-free+detection+of+pathogenic+avian+influenza+DNA.">Poly-silicon nanowire field-effect transistor for ultrasensitive and label-free detection of pathogenic avian influenza DNA.</a> Biosens Bioelectron. 24, 3019-3024 (2009).</li><li>Wu, C. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Label-free+biosensing+of+a+gene+mutation+using+a+silicon+nanowire+field-effect+transistor.">Label-free biosensing of a gene mutation using a silicon nanowire field-effect transistor.</a> Biosens Bioelectron. 25, 820-825 (2009).</li><li>Zhang, G. -. J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Silicon+nanowire+biosensor+for+highly+sensitive+and+rapid+detection+of+Dengue+virus.">Silicon nanowire biosensor for highly sensitive and rapid detection of Dengue virus.</a> Sensor Actuat B-Chem. 146, 138-144 (2010).</li><li>Lu, N., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=CMOS-compatible+silicon+nanowire+field-effect+transistors+for+ultrasensitive+and+label-free+microRNAs+sensing.">CMOS-compatible silicon nanowire field-effect transistors for ultrasensitive and label-free microRNAs sensing.</a> Small. 10, 2022-2028 (2014).</li><li>Zheng, G., Patolsky, F., Cui, Y., Wang, W. U., Lieber, C. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Multiplexed+electrical+detection+of+cancer+markers+with+nanowire+sensor+arrays.">Multiplexed electrical detection of cancer markers with nanowire sensor arrays.</a> Nat Biotechnol. 23, 1294-1301 (2005).</li><li>Choi, J. H., Kim, H., Choi, J. H., Choi, J. W., Oh, B. K. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Signal+enhancement+of+silicon+nanowire-based+biosensor+for+detection+of+matrix+metalloproteinase-2+using+DNA-Au+nanoparticle+complexes.">Signal enhancement of silicon nanowire-based biosensor for detection of matrix metalloproteinase-2 using DNA-Au nanoparticle complexes.</a> ACS Appl Mater Interfaces. 5, 12023-12028 (2013).</li><li>Lin, T. Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Improved+silicon+nanowire+field-effect+transistors+for+fast+protein-protein+interaction+screening.">Improved silicon nanowire field-effect transistors for fast protein-protein interaction screening.</a> Lab Chip. 13, 676-684 (2013).</li><li>Chen, H. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+sensitive+and+selective+magnetic+graphene+composite-modified+polycrystalline-silicon+nanowire+field-effect+transistor+for+bladder+cancer+diagnosis.">A sensitive and selective magnetic graphene composite-modified polycrystalline-silicon nanowire field-effect transistor for bladder cancer diagnosis.</a> Biosens Bioelectron. 66, 198-207 (2015).</li><li>Lee, H. S., Kim, K. S., Kim, C. J., Hahn, S. K., Jo, M. H. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Electrical+detection+of+VEGFs+for+cancer+diagnoses+using+anti-vascular+endotherial+growth+factor+aptamer-modified+Si+nanowire+FETs.">Electrical detection of VEGFs for cancer diagnoses using anti-vascular endotherial growth factor aptamer-modified Si nanowire FETs.</a> Biosens Bioelectron. 24, 1801-1805 (2009).</li><li>Chua, J. H., Chee, R. E., Agarwal, A., Wong, S. M., Zhang, G. J. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Label-free+electrical+detection+of+cardiac+biomarker+with+complementary+metal-oxide+semiconductor-compatible+silicon+nanowire+sensor+arrays.">Label-free electrical detection of cardiac biomarker with complementary metal-oxide semiconductor-compatible silicon nanowire sensor arrays.</a> Anal Chem. 81, 6266-6271 (2009).</li><li>Lu, N., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Label-free+and+rapid+electrical+detection+of+hTSH+with+CMOS-compatible+silicon+nanowire+transistor+arrays.">Label-free and rapid electrical detection of hTSH with CMOS-compatible silicon nanowire transistor arrays.</a> ACS Appl Mater Interfaces. 6, 20378-20384 (2014).</li><li>Chen, H. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Magnetic-composite-modified+polycrystalline+silicon+nanowire+field-effect+transistor+for+vascular+endothelial+growth+factor+detection+and+cancer+diagnosis.">Magnetic-composite-modified polycrystalline silicon nanowire field-effect transistor for vascular endothelial growth factor detection and cancer diagnosis.</a> Anal Chem. 86, 9443-9450 (2014).</li><li>Zhang, Y. L., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Silicon+Nanowire+Biosensor+for+Highly+Sensitive+and+Multiplexed+Detection+of+Oral+Squamous+Cell+Carcinoma+Biomarkers+in+Saliva.">Silicon Nanowire Biosensor for Highly Sensitive and Multiplexed Detection of Oral Squamous Cell Carcinoma Biomarkers in Saliva.</a> Anal Sci. 31, 73-78 (2015).</li><li>Lin, H. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=A+simple+and+low-cost+method+to+fabricate+TFTs+with+poly-Si+nanowire+channel.">A simple and low-cost method to fabricate TFTs with poly-Si nanowire channel.</a> Ieee Electr Device L. 26, 643-645 (2005).</li><li>Lin, H. C., Lee, M. H., Su, C. J., Shen, S. W. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Fabrication+and+characterization+of+nanowire+transistors+with+solid-phase+crystallized+poly-Si+channels.">Fabrication and characterization of nanowire transistors with solid-phase crystallized poly-Si channels.</a> Ieee T Electron Dev. 53, 2471-2477 (2006).</li><li>Doering, R., Nishi, Y. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=.">.</a> Handbook of semiconductor manufacturing technology. , (2008).</li><li>Lu, M. P., Hsiao, C. Y., Lai, W. T., Yang, Y. S. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Probing+the+sensitivity+of+nanowire-based+biosensors+using+liquid-gating.">Probing the sensitivity of nanowire-based biosensors using liquid-gating.</a> Nanotechnology. 21 (425505), (2010).</li><li>Gaspar, J., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Digital+lock+in+amplifier:+study,+design+and+development+with+a+digital+signal+processor.">Digital lock in amplifier: study, design and development with a digital signal processor.</a> Microprocess Microsy. 28, 157-162 (2004).</li><li>Vezenov, D. V., Noy, A., Rozsnyai, L. F., Lieber, C. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Force+titrations+and+ionization+state+sensitive+imaging+of+functional+groups+in+aqueous+solutions+by+chemical+force+microscopy.">Force titrations and ionization state sensitive imaging of functional groups in aqueous solutions by chemical force microscopy.</a> J Am Chem Soc. 119, 2006-2015 (1997).</li><li>Townsend, M. B., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Experimental+evaluation+of+the+FluChip+diagnostic+microarray+for+influenza+virus+surveillance.">Experimental evaluation of the FluChip diagnostic microarray for influenza virus surveillance.</a> J Clin Microbiol. 44, 2863-2871 (2006).</li><li>Wang, L. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Simultaneous+detection+and+differentiation+of+Newcastle+disease+and+avian+influenza+viruses+using+oligonucleotide+microarrays.">Simultaneous detection and differentiation of Newcastle disease and avian influenza viruses using oligonucleotide microarrays.</a> Vet Microbiol. 127, 217-226 (2008).</li><li>Lin, C. -. H., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Recovery+Based+Nanowire+Field-Effect+Transistor+Detection+of+Pathogenic+Avian+Influenza+DNA.">Recovery Based Nanowire Field-Effect Transistor Detection of Pathogenic Avian Influenza DNA.</a> Jpn J Appl Phys. 51 (02BL02), (2012).</li><li>Lee, K. N., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Well+controlled+assembly+of+silicon+nanowires+by+nanowire+transfer+method.">Well controlled assembly of silicon nanowires by nanowire transfer method.</a> Nanotechnology. 18 (445302), (2007).</li><li>Li, Z., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Sequence-specific+label-free+DNA+sensors+based+on+silicon+nanowires.">Sequence-specific label-free DNA sensors based on silicon nanowires.</a> Nano Lett. 4, 245-247 (2004).</li><li>McAlpine, M. C., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=High-performance+nanowire+electronics+and+photonics+on+glass+and+plastic+substrates.">High-performance nanowire electronics and photonics on glass and plastic substrates.</a> Nano Lett. 3, 1531-1535 (2003).</li><li>Cui, Y., Wei, Q., Park, H., Lieber, C. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanowire+nanosensors+for+highly+sensitive+and+selective+detection+of+biological+and+chemical+species.">Nanowire nanosensors for highly sensitive and selective detection of biological and chemical species.</a> Science. 293, 1289-1292 (2001).</li><li>Patolsky, F., Zheng, G., Lieber, C. M. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Nanowire-based+biosensors.">Nanowire-based biosensors.</a> Anal Chem. 78, 4260-4269 (2006).</li><li>Hsiao, C. Y., et al. <a target="_blank" href="http://www.ncbi.nlm.nih.gov/entrez/query.fcgi?db=PubMed&cmd=Search&doptcmdl=Citation&defaultField=Title+Word&term=Novel+poly-silicon+nanowire+field+effect+transistor+for+biosensing+application.">Novel poly-silicon nanowire field effect transistor for biosensing application.</a> Biosens Bioelectron. 24, 1223-1229 (2009).</li></ol>

Commercializing the top-down and bottom-up fabrication approaches for sSNWFETs is considered difficult because of its cost32,33, SNW position control34,35, and its low production scale36. By contrast, fabricating pSNWFETs is simple and low cost37. Through the top-down approach and combination with the sidewall spacer formation technique (Figure 1), the size of the SNW can be controlled by adjusting the duration of reactive plasma etching. The procedures for pre...

Silicon nanowire field-effect transistors (SNWFETs) have the advantages of ultra-high sensitivity and direct electrical responses to environmental charge variation. In n-type SNWFETs for example, when a negatively (or positively) charged molecule approaches the silicon nanowire (SNW), the carriers in the SNW are depleted (or accumulate). Consequently, the conductivity of the SNWFET decreases (or increases)1. Therefore, any charged molecule near the SNW surface of the SNWFET device can be detected. Vital biomolecules including enzymes, proteins, nucleotides, and many molecules on the cell surface are charge carriers and can be monitored using SNWFETs. With suitable modifications, particularly immobilizing a biomolecular probe on the SNW, a SNWFET can be developed into a label-free biosensor.
Surveillance using biomarkers is critical for diagnosing diseases. As shown in Table 1, several studies have used NWFET-based biosensors for label-free, ultra-high-sensitivity, and real-time detection of various biological targets, including a single virus2, adenosine triphosphate and kinase binding3, neuronal signals4, metal ions5,6, bacterial toxins7, dopamine8, DNA9-11, RNA12,13, enzyme and cancer biomarkers14-19, human hormones20, and cytokines21,22. These studies have demonstrated that NWFET-based biosensors represent a powerful detection platform for a broad range of biological and chemical species in a solution.
In SNWFET-based biosensors, the probe immobilized on the SNW surface of the device recognizes a specific biotarget. Immobilizing a bioprobe usually involves a series of steps, and it is critical that every step is properly performed to ensure the proper functioning of the biosensor. Various techniques have been developed for analyzing the surface composition, including X-ray photoelectron spectroscopy (XPS), ellipsometry, contact angle measurement, atomic force microscopy (AFM), and scanning electron microscopy (SEM). Methods such as AFM and SEM provide direct evidence of bioprobe immobilization on the nanowire device, whereas methods such as XPS, ellipsometry, and contact angle measurement are dependent on parallel experiments performed on other similar materials. In this report, we describe the confirmation of each modification step by using two independent methods. XPS is used to examine the concentrations of specific atoms on polysilicon wafers, and variations in the electric properties of the device are measured directly to confirm the charge variation on the SNW surface. We employ DNA biosensing by using polycrystalline SNWFETs (pSNWFETs) as an example to illustrate this protocol. Immobilizing a DNA probe on the SNW surface involves three steps: amine group modification on the native hydroxyl surface of the SNW, aldehyde group modification, and 5&#39;-aminomodified DNA probe immobilization. At each modification step, the device can directly detect the variation in the charge of the functional group immobilized on the SNW surface, because the surface charges cause local interfacial potential changes over the gate dielectric that alter the channel current and conductance1. Charges surrounding the SNW surface can electrically modulate the electric properties of the pSNWFET device; therefore, the surface properties of the SNW play a crucial role in determining the electrical characteristics of pSNWFET devices. In the reported procedures, the immobilization of a bioprobe on the SNW surface can be directly determined and confirmed through electric measurement, and the device is prepared for biosensing applications.

<table border="0" cellpadding="0" cellspacing="0" width="862">
	<tbody>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Acetone</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">AH-3102</td>
			<td style="width:167px;"></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">(3-Amonopropyl)triethoxysilane (APTES), &#8805;98%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">A3648</td>
			<td>Danger</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ethanol, anhydrous, 99.5%</td>
			<td style="width:191px;">ECHO</td>
			<td style="width:179px;">484000203108A-72EC</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Glutaraldehyde solution (GA), 50%</td>
			<td style="width:191px;">Sigma-Aldrich</td>
			<td style="width:179px;">G7651</td>
			<td>Avoid light</td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Sodium cyanoborohydride, &#8805;95.0%&#160;</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">71435</td>
			<td>Danger and deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Sodium phosphate tribasic dodecahydrate, &#8805;98%</td>
			<td style="width:191px;">Sigma</td>
			<td style="width:179px;">04277</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Phosphoric acid, &#8805;99.0%</td>
			<td style="width:191px;">Fluka</td>
			<td style="width:179px;">79622</td>
			<td>Deliquescent</td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;">Photoresist (iP3650)</td>
			<td style="width:191px;">Tokyo Ohka Kogyo Co., LTD</td>
			<td style="width:179px;">THMR-iP3650 HP</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Synthetic oligonucleotides, HPLC purified</td>
			<td style="width:191px;">Protech Technology</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">Tris(hydroxymethyl)aminomethane (Tris), &#8805;99.8%</td>
			<td style="width:191px;">USB</td>
			<td style="width:179px;">75825</td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Keithley 2636 System SourceMeter</td>
			<td style="width:191px;">Keithley</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR830 DSP Lock-In Amplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="40">
			<td height="40" style="height:40px;width:327px;">SR570 Low-noise Current Preamplifier</td>
			<td style="width:191px;">Stanford Research Systems</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
		<tr height="20">
			<td height="20" style="height:20px;width:327px;">Ni PXI Express</td>
			<td style="width:191px;">National Instruments</td>
			<td style="width:179px;"></td>
			<td></td>
		</tr>
	</tbody>
</table>

preparation of silicon nanowire field-effect transistor for chemical and biosensing applications

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we describe the preparation of polycrystalline silicon nanowire field-effect transistors (pSNWFETs) that serve as biosensing devices for biomarker detection. A protocol for chemical and biomolecular sensing by using pSNWFETs is presented. The pSNWFET device was demonstrated to be a promising transducer for real-time, label-free, and ultra-high-sensitivity biosensing applications. The source/drain channel conductivity of a pSNWFET is sensitive to changes in the environment around its silicon nanowire (SNW) surface. Thus, by immobilizing probes on the SNW surface, the pSNWFET can be used to detect various biotargets ranging from small molecules (dopamine) to macromolecules (DNA and proteins). Immobilizing a bioprobe on the SNW surface, which is a multistep procedure, is vital for determining the specificity of the biosensor. It is essential that every step of the immobilization procedure is correctly performed. We verified surface modifications by directly observing the shift in the electric properties of the pSNWFET following each modification step. Additionally, X-ray photoelectron spectroscopy was used to examine the surface composition following each modification. Finally, we demonstrated DNA sensing on the pSNWFET. This protocol provides step-by-step procedures for verifying bioprobe immobilization and subsequent DNA biosensing application.

Various SNWFETs have been reported to serve as transducers of biosensors (Table 1). Single-crystalline SNWFETs (sSNWFETs) and pSNWFETs show comparable electric properties as transducers in aqueous solutions, and both have been reported to have many biosensing applications. An advantageous feature of the pSNWFET device used in this study is its simple and low-cost fabrication procedure. Figure 1a shows the key steps involved in fabricating the pSNWFET. An ...

Watch this Scientific Journal Video about Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications at JoVE.com

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications

We describe key steps for biosensing by using polysilicon nanowire field-effect transistors, including the preparation of the device and the immobilization and confirmation of a DNA molecular probe on the nanowire surface, as well as conditions for DNA sensing.

Surveillance using biomarkers is critical for the early detection, rapid intervention, and reduction in the incidence of diseases. In this study, we ...

Research

JoVE Journal

Bioengineering

Soft Lithographic Functionalization and Patterning Oxide-free Silicon and Germanium

The development of hybrid electronic devices relies in large part on the integration of (bio)organic materials and inorganic semiconductors through a ...

Preparation of 3D Fibrin Scaffolds for Stem Cell Culture Applications

Stem cells are found in naturally occurring 3D microenvironments in vivo, which are often referred to as the stem cell niche 1. Culturing stem cells ...

Porous Silicon Microparticles for Delivery of siRNA Therapeutics

Small interfering RNA (siRNA) can be used to suppress gene expression, thereby providing a new avenue for the treatment of various diseases. However, the ...

The Synthesis of RGD-functionalized Hydrogels as a Tool for Therapeutic Applications

The use of polymers as biomaterials has provided significant advantages in therapeutic applications. In particular, the possibility to modify and ...

Light-mediated Formation and Patterning of Hydrogels for Cell Culture Applications

Click chemistries have been investigated for use in numerous biomaterials applications, including drug delivery, tissue engineering, and cell culture. In ...

Extraction of Plant-based Capsules for Microencapsulation Applications

Microcapsules derived from plant-based spores or pollen provide a robust platform for a diverse range of microencapsulation applications. Sporopollenin ...

Rapid Mix Preparation of Bioinspired Nanoscale Hydroxyapatite for Biomedical Applications

Hydroxyapatite (HA) has been widely used as a medical ceramic due to its good biocompatibility and osteoconductivity. Recently there has been interest ...

Rapid Fabrication of Custom Microfluidic Devices for Research and Educational Applications

Microfluidic devices allow for the manipulation of fluids, particles, cells, micro-sized organs or organisms in channels ranging from the nano to ...

Synthesis of Near-Infrared Emitting Gold Nanoclusters for Biological Applications

Over the past decade, fluorescent gold nanoclusters (AuNCs) have witnessed growing popularity in biological applications and enormous efforts have been ...

Simultaneous Quantification of Selected Kynurenines Analyzed by Liquid Chromatography-Mass Spectrometry in Medium Collected from Cancer Cell Cultures

The kynurenine pathway and the tryptophan catabolites called kynurenines have received increased attention for their involvement in immune regulation and ...