11.0K Views
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13:07 min
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December 1st, 2014
DOI :
December 1st, 2014
•0:05
Title
2:21
Preparation of the Polisher and Slurry
6:20
Preparation of the Workpiece
8:29
Convergent Polishing
10:22
Metrology and Inspection
11:04
Results: A Convergent Polishing Protocol Produced Square with Peak-to-Valley Flatness of ~330 nm
12:07
Conclusion
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