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Focused Ion Beam Lithography to Etch Nano-architectures into Microelectrodes

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13:49 min

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January 19th, 2020

DOI :

10.3791/60004-v

January 19th, 2020

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6,590 Views

Shreya Mahajan¹, Jonah A. Sharkins²^,⁴, Allen H. Hunter⁵, Amir Avishai⁶, Evon S. Ereifej²^,³^,⁴

¹Department of Electrical Engineering and Computer Science, University of Michigan, ²Veteran Affairs Ann Arbor Healthcare System, ³Department of Neurology, School of Medicine, University of Michigan, ⁴Department of Biomedical Engineering, University of Michigan, ⁵Michigan Center for Materials Characterization, University of Michigan, ⁶Carl Zeiss SMT, Inc.

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Focused Ion Beam Lithography

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